JPH0199100U - - Google Patents
Info
- Publication number
- JPH0199100U JPH0199100U JP19550387U JP19550387U JPH0199100U JP H0199100 U JPH0199100 U JP H0199100U JP 19550387 U JP19550387 U JP 19550387U JP 19550387 U JP19550387 U JP 19550387U JP H0199100 U JPH0199100 U JP H0199100U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- rotating arm
- guide rail
- shutter member
- irradiation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 4
Landscapes
- Particle Accelerators (AREA)
Description
第1図はこの考案の一実施例の閉じ状態の破断
側面図、第2図はその開き状態の側面図、第3図
は同じくその概略正面図、第4図は従来例の閉じ
状態の破断側面図、第5図はその開き状態の側面
図である。
1……真空容器、1a……走査管部、3……照
射窓、4……シヤツタ部材、5……ガイドレール
、7……ガイドローラ、13……回動アーム、1
5……駆動源、16……連結リンク。
Fig. 1 is a cutaway side view of an embodiment of this invention in the closed state, Fig. 2 is a side view of the open state, Fig. 3 is a schematic front view thereof, and Fig. 4 is a cutaway of the conventional example in the closed state. Side view, FIG. 5 is a side view of the opening state. DESCRIPTION OF SYMBOLS 1... Vacuum container, 1a... Scanning tube part, 3... Irradiation window, 4... Shutter member, 5... Guide rail, 7... Guide roller, 13... Rotating arm, 1
5... Drive source, 16... Connection link.
Claims (1)
射窓の下方に略水平に設けたガイドレールと、こ
のガイドレールの長手方向に離れた複数のガイド
ローラを有しこれらガイドローラで前記ガイドレ
ールに移動自在に載せられて前記照射窓を開閉す
るシヤツタ部材と、水平軸心回りに回動自在に支
持した回動アームと、この回動アームと前記シヤ
ツタ部材とに両端が回動自在に連結された連結リ
ンクと、前記回動アームを回動駆動する駆動源と
を備えた電子線照射装置のビームシヤツタ。 There is a guide rail provided approximately horizontally below the downward irradiation window from which the electron beam of the electron beam irradiation device is taken out, and a plurality of guide rollers spaced apart in the longitudinal direction of this guide rail, and the electron beam is moved to the guide rail by these guide rollers. a shutter member that is freely mounted and opens and closes the irradiation window; a rotating arm that is rotatably supported around a horizontal axis; both ends of the rotating arm and the shutter member are rotatably connected. A beam shutter for an electron beam irradiation device, comprising a connecting link and a drive source for rotationally driving the rotating arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550387U JPH0199100U (en) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19550387U JPH0199100U (en) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199100U true JPH0199100U (en) | 1989-07-03 |
Family
ID=31486176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19550387U Pending JPH0199100U (en) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199100U (en) |
-
1987
- 1987-12-22 JP JP19550387U patent/JPH0199100U/ja active Pending