JPH02102462U - - Google Patents
Info
- Publication number
- JPH02102462U JPH02102462U JP1010689U JP1010689U JPH02102462U JP H02102462 U JPH02102462 U JP H02102462U JP 1010689 U JP1010689 U JP 1010689U JP 1010689 U JP1010689 U JP 1010689U JP H02102462 U JPH02102462 U JP H02102462U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum evaporation
- power transmission
- transmission system
- rotational force
- transmits rotational
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の真空蒸着装置の一実施例の説
明図、第２図は同じく要部の拡大断面図である。
１……真空室、２……蒸発部、３……真空蒸着
用ドーム、３１……ドーム、４……支持枠、５…
…リングギヤ、６……ガイドレール、７……モー
タ、８……減速ギヤ、９……真空軸受け、９１…
…軸受けホルダ、９２……ベアリング、９３……
回転軸、９４……Ｏリング、９６……一方向回転
クラツチ、４，８，９……動力伝達系。
FIG. 1 is an explanatory diagram of an embodiment of the vacuum evaporation apparatus of the present invention, and FIG. 2 is an enlarged sectional view of the main parts. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Evaporation part, 3... Dome for vacuum evaporation, 31... Dome, 4... Support frame, 5...
...Ring gear, 6...Guide rail, 7...Motor, 8...Reduction gear, 9...Vacuum bearing, 91...
...Bearing holder, 92...Bearing, 93...
Rotating shaft, 94... O-ring, 96... One-way rotating clutch, 4, 8, 9... Power transmission system.
Claims (1)
る動力伝達系を有する真空蒸着装置において、上
記動力伝達系は一方向に回転力を伝達し反対方向
に空転する一方向回転クラツチを具備したことを
特徴とする真空蒸着装置。 In a vacuum evaporation apparatus having a power transmission system that transmits rotational force to a vacuum evaporation dome and rotates it, the power transmission system is equipped with a one-way rotating clutch that transmits rotational force in one direction and idles in the opposite direction. Features of vacuum evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1010689U JPH0730678Y2 (en) | 1989-01-31 | 1989-01-31 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1010689U JPH0730678Y2 (en) | 1989-01-31 | 1989-01-31 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02102462U true JPH02102462U (en) | 1990-08-15 |
| JPH0730678Y2 JPH0730678Y2 (en) | 1995-07-12 |
Family
ID=31217470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1010689U Expired - Lifetime JPH0730678Y2 (en) | 1989-01-31 | 1989-01-31 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730678Y2 (en) |
-
1989
- 1989-01-31 JP JP1010689U patent/JPH0730678Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0730678Y2 (en) | 1995-07-12 |