JPH02103178U - - Google Patents
Info
- Publication number
- JPH02103178U JPH02103178U JP1325089U JP1325089U JPH02103178U JP H02103178 U JPH02103178 U JP H02103178U JP 1325089 U JP1325089 U JP 1325089U JP 1325089 U JP1325089 U JP 1325089U JP H02103178 U JPH02103178 U JP H02103178U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- conductance
- bellows
- variable
- buttful
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
高真空領域に至るまでのバツフルの断面図、第３
図は同バツフルの超高真空領域での断面図、第４
図は本考案の第２実施例の断面図である。
３……冷凍機、２……クライオパネル、１……
バツフル、４……輻射シールド、５……排気口、
ａ１，ａ２……ベロー。
Figure 1 is a sectional view of one embodiment of the present invention, Figure 2 is a sectional view of the buttful up to the high vacuum area, and Figure 3 is a sectional view of an embodiment of the present invention.
The figure is a cross-sectional view of the same Batsuful in the ultra-high vacuum region.
The figure is a sectional view of a second embodiment of the present invention. 3... Refrigerator, 2... Cryopanel, 1...
Batsuful, 4...Radiation shield, 5...Exhaust port,
a 1 , a 2 ...Bello.
Claims (1)
機を備え、極低温でガスを凝縮するクライオパネ
ルを包囲して、バツフルと熱的接触し排気口に向
かつて開口した輻射シールド、及び排気口付近に
おいて比較的高温でガスを凝縮するバツフルを有
するクライオポンプにおいて、バツフルは、一個
ないし少数個の屈曲要素から成る伸縮自在なもの
とし、上記バツフルを変形させることによつてそ
のコンダクタンスを可変とすることを取徴とする
クライオポンプ。 (2) バツフルが円形もしくは非円形ベローであ
る請求項第１項記載のクライオポンプ。 (3) バツフルは、複数個のベローをそれぞれ間
隔をもつて同心状に配置して構成した請求項第２
項記載のクライオポンプ。 (4) バツフルは、該ベローのそれぞれの両端部
を駆動機構に連結して、軸方向に伸縮させること
によつて、該バツフルのコンダクタンスを可変と
する請求項第３項記載のクライオポンプ。[Scope of Claim for Utility Model Registration] (1) Equipped with a refrigerator having first and second cooling stages, it surrounds a cryopanel that condenses gas at extremely low temperatures, and is in thermal contact with the exhaust port. In a cryopump that has a radiation shield that is open towards the air and a baffle that condenses gas at a relatively high temperature near the exhaust port, the buttful is made of one or a small number of bending elements and is expandable and retractable, and the buffle can be deformed. A cryopump is characterized by its conductance being variable by making the conductance variable. (2) The cryopump according to claim 1, wherein the buttful is a circular or non-circular bellows. (3) Batsuful is defined in Claim 2, which is constructed by concentrically arranging a plurality of bellows at intervals.
Cryopump described in section. (4) The cryopump according to claim 3, wherein the conductance of the buffle is made variable by connecting both ends of each of the bellows to a drive mechanism and expanding and contracting it in the axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325089U JPH02103178U (en) | 1989-02-06 | 1989-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325089U JPH02103178U (en) | 1989-02-06 | 1989-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02103178U true JPH02103178U (en) | 1990-08-16 |
Family
ID=31223396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1325089U Pending JPH02103178U (en) | 1989-02-06 | 1989-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02103178U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178982A (en) * | 1984-02-27 | 1985-09-12 | Toshiba Corp | Cryo-pump |
-
1989
- 1989-02-06 JP JP1325089U patent/JPH02103178U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178982A (en) * | 1984-02-27 | 1985-09-12 | Toshiba Corp | Cryo-pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |
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