JPH02103257U - - Google Patents
Info
- Publication number
- JPH02103257U JPH02103257U JP1078589U JP1078589U JPH02103257U JP H02103257 U JPH02103257 U JP H02103257U JP 1078589 U JP1078589 U JP 1078589U JP 1078589 U JP1078589 U JP 1078589U JP H02103257 U JPH02103257 U JP H02103257U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- storage device
- metallic inclusions
- image information
- analysis device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003749 cleanliness Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 239000013068 control sample Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案の一実施例における自動清浄測
定装置の構成図、第２図は本考案装置による視野
毎の取り込み方法を示す模式図、第３図は、デイ
スプレイ上に表示された、非金属介在物の分布状
況及び、縦、横各２０本の格子線をもつメツシユ
の４００倍の模式図である。
１……光学顕微鏡、２……自動焦点調整機構、
３……ギヤ及びモータ、４……Ｘ，Ｙ，Ｚ軸試料
ステージ、５……光デイスク、６……コンピユー
タ、７……テレビカメラ、８……画像処理装置、
９……デイスプレイ、１０……プリンタ。
Fig. 1 is a configuration diagram of an automatic cleanliness measurement device according to an embodiment of the present invention, Fig. 2 is a schematic diagram showing the method of capturing each field of view by the device of the present invention, and Fig. 3 is a diagram showing the non-standard image displayed on the display. It is a schematic view of the distribution of metal inclusions and a mesh having 20 vertical and horizontal grid lines, magnified 400 times. 1... Optical microscope, 2... Automatic focus adjustment mechanism,
3... Gear and motor, 4... X, Y, Z axis sample stage, 5... Optical disk, 6... Computer, 7... Television camera, 8... Image processing device,
9...Display, 10...Printer.
Claims (1)
置において、被検査材料表面の非金属介在物を測
定するための組織解析装置と、観察される画像中
の非金属介在物を輝度の差を利用して処理する画
像処理装置と、画像情報および組織解析装置に装
着されているＸＹ制御試料ステージの位置情報と
を記憶させる記憶装置と、縦、横それぞれ所定数
の格子線をもつ格子点とその形状とを記憶させる
記憶装置と、ＸＹ制御試料ステージを連続的に駆
動させる手段と、被検査材料の視野毎に測定を行
ない非金属介在物によつて占められた格子点中心
の数、視野数及び総格子点数より算出し、複数個
連続して清浄度を自動的に判定する手段とを具備
していることを特徴とする清浄度自動測定装置。 A device for measuring non-metallic inclusions in metals such as steel uses a structure analysis device to measure non-metallic inclusions on the surface of the inspected material and a difference in brightness to detect non-metallic inclusions in the observed image. an image processing device that processes the image information, a storage device that stores the image information and position information of the XY control sample stage attached to the tissue analysis device, and a storage device that stores the image information and the position information of the XY control sample stage attached to the tissue analysis device; a storage device for storing the shape; a means for continuously driving the XY-controlled sample stage; and a means for continuously driving the XY-controlled sample stage; and measuring the number of lattice point centers occupied by nonmetallic inclusions and the number of fields of view for each field of view of the material to be inspected. and a means for automatically determining the cleanliness of a plurality of consecutive points by calculating the cleanliness based on the total number of grid points.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1078589U JPH02103257U (en) | 1989-02-02 | 1989-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1078589U JPH02103257U (en) | 1989-02-02 | 1989-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02103257U true JPH02103257U (en) | 1990-08-16 |
Family
ID=31218751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1078589U Pending JPH02103257U (en) | 1989-02-02 | 1989-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02103257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03269243A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Inspecting apparatus for nonmetal enclosure |
-
1989
- 1989-02-02 JP JP1078589U patent/JPH02103257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03269243A (en) * | 1990-03-19 | 1991-11-29 | Toshiba Eng Co Ltd | Inspecting apparatus for nonmetal enclosure |
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