JPH0354064U - - Google Patents
Info
- Publication number
- JPH0354064U JPH0354064U JP11211289U JP11211289U JPH0354064U JP H0354064 U JPH0354064 U JP H0354064U JP 11211289 U JP11211289 U JP 11211289U JP 11211289 U JP11211289 U JP 11211289U JP H0354064 U JPH0354064 U JP H0354064U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- image processing
- processing device
- microscope
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Image Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例の説明図、第２図は
上記一実施例のテレビカメラが検出する映像の説
明図、第３図は上記一実施例のテレビカメラが検
出する欠陥部分の輝度の説明図、第４図は上記一
実施例の試料ステージによる被検査材料移動の説
明図、第５図は上記一実施例の表示装置により表
示された欠陥の模式図、第６図は第５図の部分
の拡大図である。
１……光学顕微鏡、２……被検査材料、３……
テレビカメラ、４……画像処理装置、５……光デ
イスク、６……試料ステージ、７……コンピユー
タ、８……欠陥。
Fig. 1 is an explanatory diagram of an embodiment of the present invention, Fig. 2 is an explanatory diagram of an image detected by the television camera of the above embodiment, and Fig. 3 is an illustration of a defective part detected by the television camera of the above embodiment. FIG. 4 is an explanatory diagram of the movement of the inspected material by the sample stage of the above embodiment, FIG. 5 is a schematic diagram of defects displayed by the display device of the above embodiment, and FIG. 5 is an enlarged view of the part shown in FIG. 5. 1... Optical microscope, 2... Material to be inspected, 3...
Television camera, 4... Image processing device, 5... Optical disk, 6... Sample stage, 7... Computer, 8... Defect.
Claims (1)
、同顕微鏡の被検査部材観察部に設けられた被検
査部材撮影装置、上記顕微鏡の被検査部材搭載部
に設けられ被検査部材を二次元的に移動可能に搭
載する試料ステージ、上記撮影装置より映像信号
を入力して被検査部材の欠陥の有無を判別する画
像処理装置、同画像処理装置が接続され上記試料
ステージへ駆動信号を出力するコンピユータ、上
記画像処理装置より被検査部材の欠陥の画像とそ
の位置を入力して記憶する記憶装置、および上記
画像処理装置に接続され被検査部材の表面組織を
映し出す表示装置を備えたことを特徴とする欠陥
検出表示装置。 A microscope that magnifies an image of the surface structure of a part to be inspected, a device to photograph the part to be inspected installed in the part to be inspected observation section of the microscope, and a device to photograph the part to be inspected installed in the part to be inspected of the above-mentioned microscope to two-dimensionally view the part to be inspected. a movably mounted sample stage; an image processing device that inputs video signals from the imaging device to determine the presence or absence of defects in the inspected member; a computer to which the image processing device is connected and outputs a drive signal to the sample stage; The present invention is characterized by comprising a storage device that inputs and stores images of defects on the inspected member and their positions from the image processing device, and a display device that is connected to the image processing device and displays the surface structure of the inspected member. Defect detection display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11211289U JPH0354064U (en) | 1989-09-27 | 1989-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11211289U JPH0354064U (en) | 1989-09-27 | 1989-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0354064U true JPH0354064U (en) | 1991-05-24 |
Family
ID=31660565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11211289U Pending JPH0354064U (en) | 1989-09-27 | 1989-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354064U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211139A (en) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | Apparatus for inspecting foreign matter |
-
1989
- 1989-09-27 JP JP11211289U patent/JPH0354064U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211139A (en) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | Apparatus for inspecting foreign matter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4742237A (en) | Surface configuration inspection apparatus with moving grating | |
| CA1158743A (en) | Defect inspection system | |
| JPH0245734A (en) | Automatic structure analytic processor | |
| JPS61256237A (en) | Defect inspection for cyclic pattern | |
| JPH0354064U (en) | ||
| CN2452023Y (en) | Digital real-time multi-direction observation recording analyzer during the whole process of crack propagation | |
| JP3489275B2 (en) | Hardness tester | |
| JPH08136464A (en) | Cylindrical inner surface inspection method and cylindrical inner surface inspection device | |
| DE3868958D1 (en) | X-RAY TELEVISION SYSTEM FOR THE SCREENING OF AN EXAMINATION OBJECT. | |
| JPH0357241A (en) | Automatic visual inspection equipment | |
| JPH06241760A (en) | Cylinder inner face state inspection camera device | |
| JP2921922B2 (en) | Tablet inspection device | |
| JPH0650941A (en) | Magnetic particle crack detection type surface flaw | |
| JPS6221666U (en) | ||
| JPH0157283B2 (en) | ||
| KR970003744A (en) | Defect Automatic Discrimination Device for Solid State Imaging Device | |
| JPH02103257U (en) | ||
| JPH0518905A (en) | Surface waviness inspection device | |
| JP2939323B2 (en) | Nonmetallic inclusion inspection method and nonmetallic inclusion inspection apparatus | |
| JP2801916B2 (en) | Defect inspection equipment | |
| JPH0611730A (en) | LCD display panel inspection device | |
| JP2001153814A (en) | Device and method for inspecting surface | |
| JPH08122482A (en) | Appearance inspection device for fuel assembly | |
| JP2972802B2 (en) | Image information processing device | |
| JPS6210996A (en) | Inspecting device for image defect of solid-state image pickup element |