JPH02105111U - - Google Patents
Info
- Publication number
- JPH02105111U JPH02105111U JP11981689U JP11981689U JPH02105111U JP H02105111 U JPH02105111 U JP H02105111U JP 11981689 U JP11981689 U JP 11981689U JP 11981689 U JP11981689 U JP 11981689U JP H02105111 U JPH02105111 U JP H02105111U
- Authority
- JP
- Japan
- Prior art keywords
- head
- interference
- image signal
- head surface
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 4
- 230000036544 posture Effects 0.000 description 3
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案にかかるヘツド姿勢計測装置を
利用した磁気ヘツド自動組み立て装置の例を示す
ブロツク図、第２図は本考案に適用可能なオート
フオーカス装置の例を説明するための特性線図、
第３図は同上オートフオーカス装置の別の特性線
図、第４図は同上特性の一部のデータを０にする
ことを示す線図、第５図は上記オートフオーカス
装置の動作を示すフローチヤート、第６図は上記
磁気ヘツド自動組み立て装置の動作を示すフロー
チヤート、第７図はテレビカメラを通して得られ
るヘツド面の画像の例を示す正面図、第８図は本
考案に適用可能な顕微鏡光学系の例を示す光学配
置図、第９図は同上顕微鏡光学系を用いたヘツド
姿勢計測動作の例を示すフローチヤート、第１０
図はヘツド姿勢計測の原理を概略的に示す説明図
、第１１図はヘツドの異なる姿勢での上記計測原
理を示す説明図、第１２図は本考案の前提として
考えたヘツド姿勢計測に用いることができる顕微
鏡光学系の例を示す光学配置図である。
１，２……ヘツド、４……顕微鏡、５……テレ
ビカメラ、１７……干渉縞、４１……干渉対物レ
ンズ。
Fig. 1 is a block diagram showing an example of an automatic magnetic head assembly device using the head attitude measuring device according to the present invention, and Fig. 2 shows characteristic lines for explaining an example of an autofocus device applicable to the present invention. figure,
Fig. 3 is another characteristic diagram of the above autofocus device, Fig. 4 is a line diagram showing that some data of the above characteristics are set to 0, and Fig. 5 shows the operation of the above autofocus device. Flowchart: FIG. 6 is a flowchart showing the operation of the automatic magnetic head assembly device; FIG. 7 is a front view showing an example of an image of the head surface obtained through a television camera; FIG. FIG. 9 is an optical layout diagram showing an example of the microscope optical system; FIG. 9 is a flowchart showing an example of head attitude measurement operation using the same microscope optical system; FIG.
Figure 11 is an explanatory diagram schematically showing the principle of head posture measurement, Figure 11 is an explanatory diagram showing the above measurement principle in different head postures, and Figure 12 is used for head posture measurement, which is the premise of the present invention. FIG. 2 is an optical layout diagram showing an example of a microscope optical system that can perform the following. 1, 2...Head, 4...Microscope, 5...TV camera, 17...Interference fringes, 41...Interference objective lens.
Claims (1)
号を得るテレビカメラを用い、上記干渉対物レン
ズの光軸上にあるヘツド面の画像信号と上記干渉
対物レンズによりヘツド面に発生した干渉縞の画
像信号とを上記テレビカメラから画像処理装置に
入力し、上記ヘツド面及び干渉縞の画像信号を画
像処理することによりヘツドの姿勢を計測するヘ
ツド姿勢計測装置であつて、上記テレビカメラと
ヘツド面との間隔は、少なくともヘツド面への合
焦位置から干渉縞への合焦位置までの範囲におい
て上記干渉対物レンズの光軸上で変更可能であり
、テレビカメラを通じて入力される上記ヘツド面
の画像信号と干渉縞の画像信号とを画像処理して
ヘツドの姿勢を計測することを特徴とするヘツド
姿勢計測装置。 Using a television camera that obtains an image signal through a microscope having an interference objective lens, the image signal of the head surface located on the optical axis of the interference objective lens and the image signal of interference fringes generated on the head surface by the interference objective lens are recorded as described above. A head attitude measuring device that measures the attitude of the head by inputting it from a television camera to an image processing device and processing image signals of the head surface and interference fringes, wherein the distance between the television camera and the head surface is: The optical axis of the interference objective lens can be changed at least in the range from the focus position on the head surface to the focus position on the interference fringes, and the image signal of the head surface input through the television camera and the interference fringe can be changed. A head attitude measuring device characterized in that the head attitude is measured by performing image processing on an image signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11981689U JPH0733128Y2 (en) | 1988-10-20 | 1989-10-13 | Head posture measuring device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63-137162 | 1988-10-20 | ||
| JP13716288 | 1988-10-20 | ||
| JP11981689U JPH0733128Y2 (en) | 1988-10-20 | 1989-10-13 | Head posture measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02105111U true JPH02105111U (en) | 1990-08-21 |
| JPH0733128Y2 JPH0733128Y2 (en) | 1995-07-31 |
Family
ID=31718884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11981689U Expired - Fee Related JPH0733128Y2 (en) | 1988-10-20 | 1989-10-13 | Head posture measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733128Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04177108A (en) * | 1990-11-13 | 1992-06-24 | Canon Inc | How to measure the pose of an object |
-
1989
- 1989-10-13 JP JP11981689U patent/JPH0733128Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04177108A (en) * | 1990-11-13 | 1992-06-24 | Canon Inc | How to measure the pose of an object |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733128Y2 (en) | 1995-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |