JPH0210671Y2 - - Google Patents
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- Publication number
- JPH0210671Y2 JPH0210671Y2 JP6670479U JP6670479U JPH0210671Y2 JP H0210671 Y2 JPH0210671 Y2 JP H0210671Y2 JP 6670479 U JP6670479 U JP 6670479U JP 6670479 U JP6670479 U JP 6670479U JP H0210671 Y2 JPH0210671 Y2 JP H0210671Y2
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- JP
- Japan
- Prior art keywords
- thickness
- polarization
- vibration
- input
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000919 ceramic Substances 0.000 claims description 53
- 230000010287 polarization Effects 0.000 claims description 26
- 238000006073 displacement reaction Methods 0.000 description 19
- 238000009826 distribution Methods 0.000 description 16
- 230000005684 electric field Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000001914 filtration Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【考案の詳細な説明】
本考案は、厚み縦振動や厚み辷り振動等の厚み
振動を利用したエネルギー閉じ込め型多重モード
セラミツクフイルタに関するもので、その目的と
するところは調和高調波によるスプリアスの抑圧
を図り、濾波特性を改善することにある。[Detailed description of the invention] The present invention relates to an energy-trapping multi-mode ceramic filter that utilizes thickness vibrations such as longitudinal thickness vibrations and thickness sliding vibrations, and its purpose is to suppress spurious waves caused by harmonics. The aim is to improve the filtering characteristics.
例えば厚み縦振動を用いたエネルギー閉じ込め
型セラミツクフイルタは、第1図と第2図で示す
ように厚み方向に分極したセラミツク板1の主表
面に分割した入出力電極3,5を、その裏面に対
向するアース電極7を形成したものが一般に知ら
れている。なお、11は外部回路との接続用端子
で、9はその端子と電極3,5,7とを結ぶリー
ド電極でセラミツク板1上に設けられている。 For example, an energy trapping ceramic filter using thickness longitudinal vibration has input/output electrodes 3, 5 divided on the main surface of a ceramic plate 1 polarized in the thickness direction, as shown in FIGS. 1 and 2, on the back surface. A device in which opposing ground electrodes 7 are formed is generally known. Note that 11 is a terminal for connection to an external circuit, and 9 is a lead electrode connecting the terminal to the electrodes 3, 5, and 7, which are provided on the ceramic plate 1.
このセラミツクフイルタには、第2図で示すよ
うに対称モードAと斜対称モードBの振動変位分
布が生じ、特に対称モードAの振動変位分布は入
出力電極3,5間付近で大きくなり、また対称モ
ードAの方が斜対称モードBよりも振動変位分布
が大きい。そしてこのようなセラミツクフイルタ
は、基本振動以外にもその奇数倍の調和高調波が
生じ易く、しかも前記入出力電極付近、つまり対
称モードAの振動変位分布の大きい部分に集中し
て調和高調波が分布し、スプリアス特性を悪化さ
せていた。第5図は、従来のセラミツクフイルタ
の示す濾波特性図である。 As shown in Fig. 2, this ceramic filter has vibration displacement distributions of symmetrical mode A and oblique symmetrical mode B. In particular, the vibrational displacement distribution of symmetrical mode A becomes large near the area between input and output electrodes 3 and 5, and The symmetrical mode A has a larger vibration displacement distribution than the obliquely symmetrical mode B. In addition to the fundamental vibration, such ceramic filters tend to generate harmonic harmonics that are odd multiples of the fundamental vibration.Moreover, the harmonic harmonics are concentrated near the input/output electrodes, that is, in the area where the vibration displacement distribution of symmetrical mode A is large. distribution, worsening spurious characteristics. FIG. 5 is a filtering characteristic diagram of a conventional ceramic filter.
本考案は、以上の欠点を改善するものであり以
下実施例を説明する。 The present invention is intended to improve the above-mentioned drawbacks, and examples thereof will be described below.
第3図は本考案の一実施例を示すもので、厚み
方向に分極Pを施したセラミツク板1の主表面に
分割した入出力電極3,5を、その裏面に対向す
るアース電極7を形成した厚み縦振動によるエネ
ルギー閉じ込め型セラミツクフイルタにおいて、
その入出力電極3,5間に相当するセラミツク板
1の分極Qを、入出力電極3,5とアース電極7
間のセラミツク板の厚み方向分極と異ならせたこ
とを特徴とするセラミツクフイルタである。セラ
ミツクフイルタとしての外形は第1図に示した平
面形状と同一である。 FIG. 3 shows an embodiment of the present invention, in which split input/output electrodes 3 and 5 are formed on the main surface of a ceramic plate 1 which is polarized in the thickness direction, and a ground electrode 7 is formed on the back surface thereof. In the energy trapping type ceramic filter due to thickness longitudinal vibration,
The polarization Q of the ceramic plate 1 corresponding to the input/output electrodes 3, 5 is determined between the input/output electrodes 3, 5 and the earth electrode 7.
This ceramic filter is characterized in that the polarization in the thickness direction of the ceramic plates between the two is different. The external shape of the ceramic filter is the same as the planar shape shown in FIG.
また、第4図は他の実施例を示すもので、面方
向に分極P′を施したセラミツク板1を用いた厚み
辷り振動によるセラミツクフイルタにおいて、入
出力電極3,5間に相当するセラミツク板1の分
極方向を、入出力電極3,5とアース電極7間の
分極方向に対して異ならせたセラミツクフイルタ
であり、電極形状は第3図と同一である。 FIG. 4 shows another embodiment, in which a ceramic filter using thickness-sliding vibration using a ceramic plate 1 polarized P' in the plane direction is used. This is a ceramic filter in which the polarization direction of the electrode 1 is different from the polarization direction between the input/output electrodes 3 and 5 and the ground electrode 7, and the electrode shape is the same as that in FIG.
本考案のセラミツクフイルタは、入出力電極
3,5間に相当するセラミツク板1の分極Qの方
向が斜めになつており、セラミツク板1の厚み方
向の分極Pや面方向の分極P′に対して異ならせ、
つまり斜交する如き関係をもたせることにより、
以下に説明するように振動変位が変わる。 In the ceramic filter of the present invention, the direction of the polarization Q of the ceramic plate 1 corresponding to the input/output electrodes 3 and 5 is oblique, and the direction of the polarization Q in the thickness direction and the polarization P' in the plane direction of the ceramic plate 1 are oblique. make a difference,
In other words, by creating an oblique relationship,
The vibration displacement changes as explained below.
第7図と第8図は振動変位を説明するための3
次元の直交座標軸を表している。まず第7図にお
いて、厚み方向に分極Pを施してあるセラミツク
板1に分極方向と同じ方向に電界E3を加えて厚
み縦振動を励振する場合を考える。なお厚み方向
は3軸の方向と一致させてある。応力T=0とす
ると厚み縦振動に直接関与する3軸方向のひずみ
S3は次の圧電方程式で表される。 Figures 7 and 8 are three diagrams for explaining vibration displacement.
Represents the orthogonal coordinate axes of a dimension. First, in FIG. 7, consider the case where an electric field E3 is applied in the same direction as the polarization direction to the ceramic plate 1 which has been polarized P in the thickness direction to excite longitudinal vibration in the thickness. Note that the thickness direction is made to coincide with the direction of the three axes. When stress T = 0, strain in three axial directions directly related to longitudinal thickness vibration
S 3 is expressed by the following piezoelectric equation.
S3=d33E3 (1)
d33は圧電ひずみ定数、つまりd定数の成分で
ある。 S 3 =d 33 E 3 (1) d 33 is a piezoelectric strain constant, that is, a component of the d constant.
次に、第8図のように1軸の回りに角度θだけ
回転させて1′,2′,3′軸からなる新しい座標系を
考える。セラミツク板1も同じように回転させる
が、新しい座標系においては厚み方向に角度θだ
け傾いた分極Qを施してあると考える。 Next, consider a new coordinate system consisting of the 1', 2', and 3' axes by rotating it around one axis by an angle θ as shown in FIG. The ceramic plate 1 is also rotated in the same way, but in the new coordinate system it is assumed that the polarization Q is tilted by an angle θ in the thickness direction.
新しい座標系におけるセラミツク板1の厚み方
向と3′軸の方向は無論一致するので分極Qの方向
は3′軸方向から角度θだけ傾いている。厚み方
向の電界E′3を前記電界E3に等しくした時新しい
座標系における厚み方向のひずみS′3は(1)式と同
じように次の(2)式で表される。 Since the thickness direction of the ceramic plate 1 and the 3'-axis direction in the new coordinate system match, of course, the direction of the polarization Q is inclined by an angle θ from the 3'-axis direction. When the electric field E' 3 in the thickness direction is made equal to the electric field E 3 described above, the strain S' 3 in the thickness direction in the new coordinate system is expressed by the following equation (2) in the same way as equation (1).
S′3=d′33E′3=d′33E3 (2)
ここで、d′33は最初の座標系でのd定数の成分
を用いて(3)式で表される。 S′ 3 =d′ 33 E′ 3 =d′ 33 E 3 (2) Here, d′ 33 is expressed by equation (3) using the component of the d constant in the first coordinate system.
d′33=d33cos4θ+d22sin4θ+(2d23+4d44)
・sin2θcos2θ−4(d34cos2θ+d24sin2θ)
・sinθcosθ (3)
圧電セラミツクにおいては、d22=d23=d44=
d34=0であり、又厚み縦振動に直接関与しない
成分d24を無視すると(4)式で表される。 d′ 33 = d 33 cos 4 θ+d 22 sin 4 θ+ (2d 23 +4d 44 ) ・sin 2 θcos 2 θ−4 (d 34 cos 2 θ+d 24 sin 2 θ) ・sin θcosθ (3) In piezoelectric ceramics, d 22 = d23 = d44 =
d 34 =0, and if the component d 24 that does not directly participate in the thickness longitudinal vibration is ignored, it is expressed by equation (4).
d′33=d33cos4θ≦d33 (4) そして次の(5)式の関係が導かれる。 d' 33 = d 33 cos 4 θ≦d 33 (4) Then, the following relationship in equation (5) is derived.
|S′3|≦|S3| (5)
従つてセラミツク板1の厚み方向に分極Pを施
してある厚み縦振動子に於いては、その分極方向
を傾けるとひずみは減少する。言いかえると、振
動の変位分布が低下する。 |S' 3 |≦|S 3 | (5) Therefore, in a thickness-longitudinal vibrator in which polarization P is applied in the thickness direction of the ceramic plate 1, the strain decreases when the polarization direction is tilted. In other words, the vibration displacement distribution is reduced.
これはまた、面方向に分極軸を有する、厚み辷
り振動子についても同様に論じられる。 This can also be discussed in the same way for a thickness wandering oscillator that has a polarization axis in the in-plane direction.
すなわち、主表面と平行な方向に分極P′を施し
てあるセラミツク板1にその分極方向と垂直方向
の電界を加えて厚み辷り振動を励振する場合、第
11図のように1,2,3軸からなる座標系を選
ぶと、厚み辷り振動に直接関与するひずみS4は次
の圧電方程式で表される。 That is, when applying an electric field perpendicular to the polarization direction to the ceramic plate 1, which is polarized P' in a direction parallel to the main surface, to excite thickness-traversing vibration, 1, 2, 3 as shown in FIG. If we choose a coordinate system consisting of the axes, the strain S 4 that is directly involved in thickness sliding vibration is expressed by the following piezoelectric equation.
S4=d24E2 (6) なおE2は2軸の方向と一致する電界である。 S 4 =d 24 E 2 (6) Note that E 2 is an electric field that coincides with the direction of the two axes.
次に、第11図の1軸の回りに角度θだけ回転
させて1′,2′,3′軸からなる新しい座標系を考え
る。 Next, consider a new coordinate system consisting of the 1', 2', and 3' axes by rotating it by an angle θ around the 1 axis in FIG.
厚み縦振動の場合と同様、新しい座標系でのひ
ずみS′4と最初の座標系でのひずみS4を比較する。
S′4は(7)式で表される。 As in the case of longitudinal thickness vibration, compare the strain S′ 4 in the new coordinate system with the strain S 4 in the original coordinate system.
S′ 4 is expressed by equation (7).
S′4=d′24E′2=d′24E2 (7)
ここで、d′24を最初の座標系でのd定数の成分
を用いて表すと(8)式のようになる。 S' 4 = d' 24 E' 2 = d' 24 E 2 (7) Here, if d' 24 is expressed using the component of the d constant in the first coordinate system, it becomes as shown in equation (8).
d′24={d33sin2θ−d22cos2θ+2(d34−d24)・
sinθcosθ}sinθcosθ+{d24cos2θ+d34sin2θ+(
d23
+2d44)・sinθcosθ}・(cos2θ−sin2θ) (8)
となる。圧電セラミツクでは、d22=d23=d34=
d44=0であり、厚み辷り振動に直接関与しない
成分d33を無視すると、(8)式は(9)式となる。 d′ 24 = {d 33 sin 2 θ−d 22 cos 2 θ+2(d 34 −d 24 )・
sinθcosθ}sinθcosθ+{d 24 cos 2 θ+d 34 sin 2 θ+(
d23
+2d 44 )・sinθcosθ}・(cos 2 θ−sin 2 θ) (8) For piezoelectric ceramics, d 22 = d 23 = d 34 =
If d 44 =0 and the component d 33 that is not directly involved in the thickness sliding vibration is ignored, equation (8) becomes equation (9).
d′24=d24cos2θ(cos2θ−sin2θ)−2d24・
sin2θcos2θ=d24cos2θ(cos2θ−3sin2θ)=d24cos
2θ.
(4cos2θ−3)=d24cosθ・cos(3θ)≦d24 (9)
となる。そして、厚み縦振動の場合と同様の(10)式
が導かれる。 d′ 24 = d 24 cos 2 θ (cos 2 θ−sin 2 θ)−2d 24・
sin 2 θcos 2 θ=d 24 cos 2 θ (cos 2 θ−3sin 2 θ)=d 24 cos
2 θ.
(4cos 2 θ−3)=d 24 cosθ・cos(3θ)≦d 24 (9). Then, the same equation (10) as in the case of thickness longitudinal vibration is derived.
|S′4|≦|S4| (10)
第9図と第10図には夫々従来と本考案のセラ
ミツクフイルタの横断面図が対称モードの基本振
動と調和高調波の振動変位分布と共に示してあ
る。前記したように分極方向を傾けることにより
振動変位分布が低下するので、入出力電極3,5
間にこのような分極Qを施せば対称モードの基本
振動の変位分布A1と調和高調波の振動変位分布
A2はいずれも第10図に示すように第9図に比
較して低下する。しかし、調和高調波の振動変位
分布A2の方が入出力電極3,5間に集中してい
るので、基本振動の変位分布A1に比較して低下
が著しい。従つて本考案によれば基本振動の変位
分布A1を実用上支障のない程度の範囲にとどめ、
不都合な調和高調波の振動変位分布A2だけを充
分低下させることができる。 |S′ 4 |≦|S 4 | (10) Figures 9 and 10 show the cross-sectional views of the conventional and inventive ceramic filters, respectively, along with the vibration displacement distributions of the fundamental vibration of the symmetric mode and the harmonics. There is. As mentioned above, since the vibration displacement distribution is reduced by tilting the polarization direction, the input/output electrodes 3 and 5
If such a polarization Q is applied between them, the displacement distribution of the fundamental vibration of the symmetric mode A 1 and the vibration displacement distribution of the harmonics
As shown in FIG. 10, A 2 is decreased compared to FIG. 9. However, since the harmonic vibration displacement distribution A 2 is more concentrated between the input and output electrodes 3 and 5, it is significantly lower than the fundamental vibration displacement distribution A 1 . Therefore, according to the present invention, the displacement distribution A1 of the fundamental vibration is kept within a range that does not cause any practical problems, and
Only the vibration displacement distribution A 2 of the undesirable harmonics can be sufficiently reduced.
第6図は、第3図に示した実施例の濾波特性図
であり、調和高調波を著しく抑圧できたことを示
している。特に3次高調波は、約30dB改善され
ている。 FIG. 6 is a filtering characteristic diagram of the embodiment shown in FIG. 3, and shows that harmonics can be suppressed significantly. In particular, the third harmonic has been improved by about 30dB.
ところで、本考案のように、入出力電極3,5
間に相当するセラミツク板の分極Qの方向をセラ
ミツク板1の全体の分極方向に対して異ならせる
方法としては、次の手法が考えられる。まず厚み
方向に分極したセラミツク板1に入出力電極3,
5及びアース電極7を形成し、その後厚み方向の
分極が反転しない範囲で電極間に電界を加える。
例えば入出力電極3,5間に電界Eを印加する。
その時、入力電極3とアース電極7間及び出力電
極5とアース電極7間には1/2Eの電界が加わる
ので1/2Eを抗電界以下で実施する必要がある。 By the way, as in the present invention, the input and output electrodes 3 and 5
As a method of making the direction of polarization Q of the ceramic plate corresponding to the gap different from the polarization direction of the entire ceramic plate 1, the following method can be considered. First, input and output electrodes 3,
5 and a ground electrode 7 are formed, and then an electric field is applied between the electrodes within a range where the polarization in the thickness direction is not reversed.
For example, an electric field E is applied between the input and output electrodes 3 and 5.
At this time, an electric field of 1/2E is applied between the input electrode 3 and the earth electrode 7 and between the output electrode 5 and the earth electrode 7, so it is necessary to carry out 1/2E at a level below the coercive electric field.
また、本考案は前述の実施例のようにセラミツ
ク板1に施した分極P・P′に対し、入出力電極
3,5間に相当するセラミツク板の分極方向を斜
交させる場合に限らず、逆方向にする等して方向
を異ならせることによつても本考案の目的とする
調和高調波の低下が実現できる。もちろんこの場
合にも基本振動には支障がない。 Further, the present invention is not limited to the case where the polarization direction of the ceramic plate corresponding to the input/output electrodes 3 and 5 is obliquely crossed with respect to the polarization P and P' applied to the ceramic plate 1 as in the above-mentioned embodiment. The reduction in harmonics, which is the objective of the present invention, can also be achieved by changing the direction, such as by reversing the direction. Of course, in this case as well, there is no problem with the basic vibration.
さて前述の実施例において、一つのセラミツク
フイルタについて説明したが、複数のセラミツク
フイルタを同一セラミツク板に形成することも可
能であり、また個々のセラミツクフイルタも一対
の入出力電極3,5のみならず複数の電極から成
る多重モードフイルタに広く実施できる。 Now, in the above embodiment, one ceramic filter was explained, but it is also possible to form a plurality of ceramic filters on the same ceramic plate, and each ceramic filter can be formed not only by a pair of input/output electrodes 3 and 5. It can be widely implemented in multimode filters consisting of multiple electrodes.
以上説明したように、本考案は、厚み方向若し
くは面方向に分極したセラミツク板1の主表面に
分割する入出力電極、その裏面に対向するアース
電極を形成した厚み振動を用いるセラミツクフイ
ルタにおいて、その入出力電極間に相当するセラ
ミツク板の分極方向を、入出力電極とアース電極
間の分極方向と異ならせたセラミツクフイルタで
あることから、スプリアス特性の良好なフイルタ
が得られる。 As explained above, the present invention is a ceramic filter using thickness vibration, which has input/output electrodes divided on the main surface of a ceramic plate 1 polarized in the thickness direction or surface direction, and a ground electrode opposite to the back surface thereof. Since this is a ceramic filter in which the polarization direction of the ceramic plate between the input and output electrodes is different from the polarization direction between the input and output electrodes and the earth electrode, a filter with good spurious characteristics can be obtained.
第1図:従来のセラミツクフイルタを示す平面
図。第2図:従来のセラミツクフイルタを示す横
断面図。第3図:本考案のセラミツクフイルタの
一実施例を示す横断面図。第4図:本考案のセラ
ミツクフイルタの他の実施例を示す横断面図。第
5図:第2図に示すセラミツクフイルタの示す濾
波特性図。第6図:第3図に示すセラミツクフイ
ルタの示す濾波特性図。第7図、第8図:本考案
に係る振動変位を説明するための3次元の直交座
標軸。第9図:従来のセラミツクフイルタの振動
変位分布を示す横断面図。第10図:本考案のセ
ラミツクフイルタの振動変位分布を示す横断面
図。第11図:本考案に係る別の振動変位を説明
するたの3次元の直交座標軸。
1:セラミツク板、3,5:入出力電極、7:
アース電極、P,P′,Q:分極。
FIG. 1: A plan view showing a conventional ceramic filter. FIG. 2: A cross-sectional view showing a conventional ceramic filter. FIG. 3: A cross-sectional view showing one embodiment of the ceramic filter of the present invention. FIG. 4: A cross-sectional view showing another embodiment of the ceramic filter of the present invention. FIG. 5: A filtering characteristic diagram of the ceramic filter shown in FIG. 2. FIG. 6: A filtering characteristic diagram of the ceramic filter shown in FIG. 3. FIGS. 7 and 8: Three-dimensional orthogonal coordinate axes for explaining vibration displacement according to the present invention. FIG. 9: A cross-sectional view showing the vibration displacement distribution of a conventional ceramic filter. FIG. 10: A cross-sectional view showing the vibration displacement distribution of the ceramic filter of the present invention. FIG. 11: Three-dimensional orthogonal coordinate axes for explaining another vibration displacement according to the present invention. 1: Ceramic board, 3, 5: Input/output electrode, 7:
Earth electrode, P, P', Q: polarization.
Claims (1)
板の主表面に分割した入出力電極を、その裏面に
入出力電極に対向するアース電極を形成した厚み
縦振動又は厚み辷り振動を用いるセラミツクフイ
ルタにおいて、その入力電極と出力電極間に位置
する間隙部分のセラミツク板の分極方向を前記分
極方向とは部分的に異ならせたことを特徴とする
セラミツクフイルタ。 In a ceramic filter that uses thickness longitudinal vibration or thickness sliding vibration, the input and output electrodes are divided on the main surface of a ceramic plate polarized in the thickness direction or in the plane direction, and a ground electrode is formed on the back surface of the ceramic plate to face the input and output electrodes. A ceramic filter characterized in that the direction of polarization of the ceramic plate in the gap located between the electrode and the output electrode is partially different from the direction of polarization.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6670479U JPH0210671Y2 (en) | 1979-05-18 | 1979-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6670479U JPH0210671Y2 (en) | 1979-05-18 | 1979-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55168222U JPS55168222U (en) | 1980-12-03 |
| JPH0210671Y2 true JPH0210671Y2 (en) | 1990-03-16 |
Family
ID=29300648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6670479U Expired JPH0210671Y2 (en) | 1979-05-18 | 1979-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210671Y2 (en) |
-
1979
- 1979-05-18 JP JP6670479U patent/JPH0210671Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55168222U (en) | 1980-12-03 |
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