JPS5928714A - Crystal oscillator - Google Patents

Crystal oscillator

Info

Publication number
JPS5928714A
JPS5928714A JP13899882A JP13899882A JPS5928714A JP S5928714 A JPS5928714 A JP S5928714A JP 13899882 A JP13899882 A JP 13899882A JP 13899882 A JP13899882 A JP 13899882A JP S5928714 A JPS5928714 A JP S5928714A
Authority
JP
Japan
Prior art keywords
axis
temperature
crystal resonator
taken
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13899882A
Other languages
Japanese (ja)
Inventor
Fujio Kitamado
不二夫 北窓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP13899882A priority Critical patent/JPS5928714A/en
Publication of JPS5928714A publication Critical patent/JPS5928714A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02015Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To miniaturize the oscillator, by tilting a cut-face of a side end of the oscillator in the axial direction at a prescribed angle in the direction of Y of the crystal axis from the normal of the major surface, keeping the temperature of inflection point of the frequency characteristic almost to room temperatrue, and decreasing the frequency change due to the ambient temperature. CONSTITUTION:The X axis of a crystal chip is taken as the lengthwise direction, a normal in parallel with a Y' axis rotated by theta in the direction of the Z axis from the Y axis is set and parallel major planes 13, 15 are formed so as to be vertical to the X axis. The direction of the normal to the major planes 13, 15 is taken as the Y' axis, an axis rotated from the Z axis by angle theta is taken as the Z' axis to form the crystal oscillator 11. Side end faces 17, 19 in the broadwise direction of the oscillator 11 are formed on a plane tilted by angle alpha closewise from the Y' axis to obtain the thickness slip crystal oscillator. Further, the 1st angle theta is taken as 34 deg.13'-35 deg.18', the 2nd angle alpha is taken as the vicinity of 5 deg., and the temperature inflection point of the frequency characteristic is taken as nearly room temperature.

Description

【発明の詳細な説明】 本発明は、厚みすべり振動によって共振動作をなす水晶
振動子に関し、特に周波数のrhA度特性が改善された
水晶振動子に閃するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a crystal resonator that performs resonant operation by thickness shear vibration, and is particularly directed to a crystal resonator with improved frequency rhA characteristics.

従来公知な厚みすべりによる水晶振動子の一例として、
水晶片のY軸(電気軸)に長手方向をとり、当該X軸に
対して垂直であり且つY軸(機械軸)からZlkIl(
光軸)の方向に35°前後傾斜した軸線に、法線か平行
となる2つの主表面を形成し、さらに、振動子の幅方向
の側端面を、主表面の法線から2軸の方向にわずかに傾
斜させたものがあった。こねによれは、胸囲温良が貧化
しても共振周波数の変化か少なかった。それと共に、周
波数温度特性が略3次曲線を示し、且つその変曲点か室
温(25℃)となっている。
As an example of a conventionally known crystal resonator with thickness slip,
The longitudinal direction is the Y axis (electrical axis) of the crystal blank, and it is perpendicular to the X axis and ZlkIl (
Two main surfaces are formed that are normal or parallel to the axis that is tilted back and forth by 35 degrees in the direction of the optical axis, and the side end surfaces in the width direction of the vibrator are aligned in the direction of the two axes from the normal to the main surfaces. There was one that was tilted slightly. As for kneading, the change in resonance frequency was small even when the chest temperature became poor. At the same time, the frequency-temperature characteristic shows a substantially cubic curve, and its inflection point is at room temperature (25° C.).

しかしながら、上述したような水晶振動子にあつて、周
波数か当該振動子の厘さに反比例する岸み振動を利用す
るものであるところから、特に4MHz以下の周波数と
なるように形状の各寸法を選び実トしたところ周波数温
度特性は極めて不十分子4ものでま1つだ。例えば、室
温にて変曲点をもち、その点での周波数t°が3.6 
MfJ zの水晶振動子で、周波数の変化1比△(/1
は低温(−10°C)で+200 ppHl、高温(7
0°C)で−300ppmを示した(第5図参照)。こ
の起因するところは、振動子の押さか大きくなることに
因り、輪郭振動等不要振動の影譬か現わtlてくるもの
と思われる。
However, since the above-mentioned crystal oscillator utilizes shore vibration whose frequency is inversely proportional to the stiffness of the oscillator, each dimension of the shape must be adjusted to have a frequency of 4 MHz or less. When I selected it and tried it out, the frequency-temperature characteristics were extremely unsatisfactory. For example, it has an inflection point at room temperature, and the frequency t° at that point is 3.6.
In a crystal resonator of MfJ z, the frequency change 1 ratio △ (/1
+200 ppHl at low temperature (-10°C), and +200 ppHl at high temperature (7
(0°C), it showed -300 ppm (see Figure 5). The reason for this is thought to be that unnecessary vibrations such as contour vibrations appear due to the increased pressure of the vibrator.

このように、公知の厚みすべり水晶振動子は室温25℃
における周波数に対して、周囲温度か変化すると周波数
が大きく変化する欠点かあった。
In this way, the known thickness-shear crystal oscillator operates at a room temperature of 25°C.
The disadvantage was that the frequency changes significantly when the ambient temperature changes.

本発明の目的は、」一連した欠点を解消するためになさ
れたもので、周波数温度特性の変曲点温度を略室温(:
25±2℃)に保ち、当該温度における基準となる周波
数に比して、周囲温度か大きく変化しても周波数の変化
の少ない形状小型の水晶振動子を提供することにある。
The purpose of the present invention was to eliminate a series of drawbacks, and the inflection point temperature of the frequency-temperature characteristic was changed to approximately room temperature (:
The object of the present invention is to provide a small-sized crystal resonator whose frequency changes less even if the ambient temperature changes significantly compared to the reference frequency at the temperature.

このような目的は、上述したような水晶振動子にあって
、当該振動子の幅方向における側端面を、主表面の法線
からY軸の方向に傾斜させたカット面とすることによっ
て達成される。
Such an objective can be achieved in the above-mentioned crystal resonator by making the side end faces in the width direction of the resonator into cut surfaces inclined from the normal to the main surface in the Y-axis direction. Ru.

以下図面を用いて本発明を詳述する。The present invention will be explained in detail below using the drawings.

第1図(Δ)および凹(4本発明の一実施例を示す。Figure 1 (Δ) and concave (4) show an embodiment of the present invention.

本実施例水晶振動子11は、上述した公知の水晶振動子
と同様、水酩片のY軸を長手方向とし、Y軸からZ&I
lの方向にθたけ回転させた回転Y @i (Y′軸)
に平1行な法線を有し且つY軸に対して垂直となるよう
に、2つの主表面13.15を形成している。ここて、
この主表面13,151こ対する法線方向をY l m
+とし、同様にzlillIか角度Uたけ回転した軸を
2′軸としている。
The crystal oscillator 11 of this embodiment, like the above-mentioned known crystal oscillator, has the Y-axis of the quartz piece as the longitudinal direction, and Z&I from the Y-axis.
Rotation Y @i (Y' axis) rotated by θ in the direction of l
Two main surfaces 13.15 are formed so as to have normal lines parallel to and perpendicular to the Y axis. Here,
The normal direction to this main surface 13,151 is Y l m
+, and similarly, the axis rotated by an angle U by zlillI is set as the 2' axis.

この新しいY′軸からY軸側につまり図中、時計方向に
角度(また1)傾斜した面に、振動子11の幅方向(Z
′軸)における側端面17.19を形成している。この
ように、本発明の淳みすべり水晶振動子は、その主表面
に対する法線力向からY軸方向に角度αたけ傾斜させて
、幅方向の側端面その幅方向(Z′軸)における側端面
を、主表面に対する法線方向から2軸方向、つまり図中
では反時81方向(本発明とは反対力向)に傾斜した角
曳゛向でカットしていた。
In the width direction (Z
' axis) forms a side end surface 17.19. In this way, the Atsushi-shear crystal oscillator of the present invention is tilted by an angle α in the Y-axis direction from the direction of the normal force to its main surface, so that the side end faces in the width direction (Z' axis) are The end face was cut in an angular direction inclined in biaxial directions from the normal direction to the main surface, that is, in the counterclockwise 81 direction in the figure (opposite force direction to the present invention).

第2図は、上述したようにカットした本発り[実施例に
おける周波数温度特性を示し、ここで、横軸は本実絶倒
水晶振動子が動作する 温度°r (QC〕を、縦軸に
は変曲点温良’l’c = 25℃における基準と?、
する共振周波数tに対する温ii化に因る周波数変化飼
△fの比△f’ / f (p pm )をそれぞれと
っている。ハ゛お、この結果は水晶振動子の長さeと厚
さLとノ辺比e/L = 14.24、 lllft+
W トMさモトノ辺比w/l=3.10、a = 5°
、f−36MIJzとした実h+cよるものである。
FIG. 2 shows the frequency-temperature characteristics of the crystal oscillator [Example] cut as described above, where the horizontal axis represents the temperature °r (QC) at which the crystal resonator operates, and the vertical axis represents the temperature °r (QC) at which the crystal resonator operates. What is the standard at the inflection point temperature = 25℃?
The ratio Δf'/f (ppm) of the frequency change Δf due to temperature increase to the resonant frequency t is taken. Oh, this result is the length e of the crystal resonator, the thickness L, and the side ratio e/L = 14.24, lllft+
W ToM side ratio w/l = 3.10, a = 5°
, f-36MIJz and actual h+c.

この特性からも分るように、−10℃(’1’ <79
’に亘り△t’ / fかわずか±5 ppHl  以
内におさまっており、第5図16示す従来のものと比べ
て約l/40の液化比に抑制さ第1ている。第5図は、
比較のたy)に示したものであり、水晶振動子の幅方向
におけるカット向の傾斜角度は土表面の法線からzIk
l。
As can be seen from this characteristic, -10℃ ('1'<79
Δt'/f is within ±5 ppHl over the entire range, and the liquefaction ratio is suppressed to about 1/40 compared to the conventional one shown in FIG. Figure 5 shows
For comparison, the inclination angle of the cut direction in the width direction of the crystal resonator is zIk from the normal to the soil surface.
l.

方向:ことった5°、その他は第3図の場合と同様であ
る。
Direction: 5°, otherwise the same as in Figure 3.

また、この特性曲線は、水^ム振動子の便ハ1温度範囲
例えは−106C<’1’<7(1°に亘り略3次関数
曲線となっていると共に、25℃を中心にして変化比Δ
t’ / fか負と正とで略対称と八っている。
In addition, this characteristic curve is a substantially cubic function curve over the temperature range of the water oscillator, for example -106C<'1'<7 (1°), and is centered around 25°C. Change ratio Δ
t'/f is approximately symmetrical between negative and positive.

第3図は、本発明実施例の水晶振動子でと、つて幅Wと
厚さもとの辺比w/Lを一定値(=3.10)Iことり
、長さlと厚さtとの辺比g/L  を各種変えて周波
数を測定腰周波数温度特性を得たものである。ここで、
l/Lか1422.14.23.14.24,14.2
5であるときの特性を、それぞれ曲線31,32.33
.34で示す。なおこの結果ハα=5°、1’=3.6
MHz、 1j=35°03′〜02′に基ついている
FIG. 3 shows a crystal resonator according to an embodiment of the present invention, where the width W and the original thickness ratio w/L are constant (=3.10) I, and the length l and thickness t. The frequency was measured by varying the side ratio g/L to obtain the waist frequency temperature characteristics. here,
l/L or 1422.14.23.14.24,14.2
5, the characteristics are shown by curves 31, 32, and 33, respectively.
.. 34. Note that this result is α=5°, 1'=3.6
Based on MHz, 1j=35°03'~02'.

これからも分るように、周囲温度′1゛か一10°C〜
70℃の間であっても、本発明実施例の水晶振動子にお
ける周波数表化は殆んと10ppm以下におさまってい
る。従って、従来公知のものか例えは’1’ = 70
0テ△i’/lカ略300 pprn  T=ニアツタ
Dl に比べて、△f/lか約/30となっており、周波数温
度特性か極めて良好であることが判るであろう。
As you can see from now on, the ambient temperature is '1' or -10°C.
Even at a temperature of 70° C., the frequency expressed in the crystal resonator of the embodiment of the present invention is mostly below 10 ppm. Therefore, the conventionally known example is '1' = 70
0te Δi'/l is approximately 300 pprn T=Niatuta Dl Compared to that, Δf/l is approximately /30, and it can be seen that the frequency-temperature characteristics are extremely good.

第4図は、本発明実施例の水晶振動子であって長さlと
岸さもとの辺比1/lを一定値(=14.23)にとり
、幅Wと淳さもとの辺比w/lを各種皮えて周波数温度
特性をとったものである。ここで、w/lヲ3.08.
3.09.3.10,3.11.3,12であるときの
特性を、それぞれ曲線41.42.43.44.45で
示す。なお、この結果は、a=5°、f=3.6MkJ
z、  1J=35°03’ −02’に基ついている
FIG. 4 shows a crystal resonator according to an embodiment of the present invention, in which the length l and the side ratio of the bottom of the bank are set to a constant value 1/l (=14.23), and the width W and the side ratio of the bottom of the bottom w The frequency-temperature characteristics are taken for various values of /l. Here, w/lwo 3.08.
3.09.3.10, 3.11.3, and 12 are shown by curves 41.42.43.44.45, respectively. Furthermore, this result shows that a=5°, f=3.6MkJ
z, 1J=35°03'-02'.

第3図および第4図から本発明のカットカ法による水晶
振動子において温度特性における辺比の因子はw/L 
) e/LのN係かあることか判明した。
From FIGS. 3 and 4, the factor of the side ratio in the temperature characteristics of the crystal resonator using the cutoff method of the present invention is w/L.
) It turned out that there was someone in charge of N at e/L.

ずffわち、長さβ方向に対して@W方向に強い副振動
か存在しているものと思われる。従って、長さeおよび
幅Wを、本発明のカットにより選択することにより、製
造容易且つ大を生産に向く範囲で良好な温度特性を示す
水晶振動子か得られる。
In other words, it seems that there is a strong secondary vibration in the @W direction with respect to the length β direction. Therefore, by selecting the length e and width W according to the cutting method of the present invention, it is possible to obtain a crystal resonator that is easy to manufacture and exhibits good temperature characteristics within a range suitable for large-scale production.

以上実施例につき1述したように、振動子の幅方向にお
ける側端のカット面を、主表面の法線がら結晶軸のY軸
方向に角度aで傾斜させたことにより、特に基準となる
周波数か4MIJz以下において、その周波数温度特性
が極めて良好となる。それと共に、特性が3次曲線とな
り、その変曲点は呈温に維持でき、当該変曲点に関して
佼化比△f/fが正、負に対称となり使用に際して極め
て好都合である。
As described above for the embodiments, the cut surfaces of the side ends in the width direction of the vibrator are inclined at an angle a from the normal to the main surface to the Y-axis direction of the crystal axis, so that the frequency that becomes the reference frequency is particularly high. The frequency-temperature characteristics become extremely good below 4 MIJz. At the same time, the characteristics become a cubic curve, the inflection point of which can be maintained at a constant temperature, and the ratio Δf/f of the inflection point becomes symmetrical in positive and negative directions, which is extremely convenient for use.

なお、水晶振動子の励振手段は示さなかったが、例えば
2つの主表面のそれぞれに一対の*極を設けて電界を印
加する等各種の公知な手段かある。
Note that although the excitation means for the crystal resonator is not shown, there are various known means such as, for example, providing a pair of *poles on each of the two main surfaces and applying an electric field.

また、不要振動の抑圧および振動子保持を容易とするた
めに、ベベル加工、コンベックス加工してもよい。
Furthermore, bevel processing or convex processing may be applied to suppress unnecessary vibrations and to facilitate the holding of the vibrator.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(Alおよび(B+は本発明による水晶振動子の
一実施例を示す正面図および斜視図、第2図11j本発
明の一実施例における温度対発振周波数の変化比を示す
特性線図、第3図は本発明実施例において辺比w/lを
一定にしておき、 長さと厘さとの比1/Lを変えた場
合の温度対発振周波数の変化比の特性を示す線図、第4
図は本発明実施例において長さと厚さとの比e/Lを一
定にしておき、辺比w/Lを変えた場合の温度対発振周
波数の変化比の特性を示す線図、第5図は従来公知の水
晶振動子の温度特性を示す線図である。 11・・水晶振動子、13.15・・−主表面、17.
19・−側端面、31〜34.41〜45・・特性曲線
。 特許出願人 京都セラミック株式会社 ペ1 9 圧
Figure 1 (Al and (B+) are front and perspective views showing one embodiment of the crystal resonator according to the present invention, Figure 2 11j Characteristic diagram showing the change ratio of temperature versus oscillation frequency in one embodiment of the present invention , FIG. 3 is a diagram showing the characteristics of the change ratio of temperature versus oscillation frequency when the side ratio w/l is kept constant in the embodiment of the present invention and the ratio 1/L between length and width is changed. 4
The figure is a diagram showing the characteristics of the change ratio of the oscillation frequency versus temperature when the length-to-thickness ratio e/L is kept constant and the side ratio w/L is changed in the embodiment of the present invention. FIG. 2 is a diagram showing the temperature characteristics of a conventionally known crystal resonator. 11...Crystal resonator, 13.15...-main surface, 17.
19.- side end surface, 31-34. 41-45. Characteristic curve. Patent applicant: Kyoto Ceramic Co., Ltd.

Claims (1)

【特許請求の範囲】 1、水島片のY軸に長手方向をとり、Y軸から2軸に1
181角度0だけ回転した回転Y軸に平行な法線を有し
且つ前記Y軸に対して垂直に主表面を形成し、幅方向に
おける側端面を、前記法線から前記Y軸の方向に第2角
度αたけ傾斜させた面で形成したことを特徴とする水晶
振動子。 2、特許請求の範囲第1項記載の水晶振動子において、
前記j61角度θを34°13′〜35’18’の範囲
円にて形成したことを特徴とする水晶振動子。 3、特許請求の範囲第1項記載の水晶振動子において、
前記第2角度αが5°近辺であることを特徴とする水晶
振動子。 4、特許請求の範囲第1項〜第3項のいずれかに記載の
水晶振動子において、共振周波数に対する温度による周
波数変化蓋の比の温度特性における疾曲点温度か略室温
となることを特徴とする水晶振動子。 5、特許請求の範囲第4項記載の水晶振動子において、
前記変曲点温度か4MHz以−トエートことを特徴とす
る水晶振動子。
[Claims] 1. The longitudinal direction is taken on the Y axis of the Mizushima piece, and 1 on the two axes from the Y axis.
The main surface has a normal parallel to the rotational Y-axis rotated by 181 angle 0 and is perpendicular to the Y-axis, and the side end surface in the width direction is parallel to the Y-axis from the normal. A crystal resonator characterized in that it is formed of surfaces inclined by two angles α. 2. In the crystal resonator according to claim 1,
A crystal resonator characterized in that the j61 angle θ is formed by a circle ranging from 34°13' to 35'18'. 3. In the crystal resonator according to claim 1,
A crystal resonator characterized in that the second angle α is around 5°. 4. The crystal resonator according to any one of claims 1 to 3, characterized in that the temperature characteristic of the ratio of the frequency change lid due to temperature to the resonance frequency is a bending point temperature or approximately room temperature. crystal oscillator. 5. In the crystal resonator according to claim 4,
A crystal resonator characterized in that the inflection point temperature is 4 MHz or higher.
JP13899882A 1982-08-09 1982-08-09 Crystal oscillator Pending JPS5928714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13899882A JPS5928714A (en) 1982-08-09 1982-08-09 Crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13899882A JPS5928714A (en) 1982-08-09 1982-08-09 Crystal oscillator

Publications (1)

Publication Number Publication Date
JPS5928714A true JPS5928714A (en) 1984-02-15

Family

ID=15235084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13899882A Pending JPS5928714A (en) 1982-08-09 1982-08-09 Crystal oscillator

Country Status (1)

Country Link
JP (1) JPS5928714A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007097042A (en) * 2005-09-30 2007-04-12 Kyocera Kinseki Corp Crystal diaphragm
JP2008141347A (en) * 2006-11-30 2008-06-19 Kyocera Kinseki Corp Temperature compensated oscillator
JP2011182025A (en) * 2010-02-26 2011-09-15 Kyocera Kinseki Corp Temperature compensation type piezoelectric oscillator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197394A (en) * 1975-02-21 1976-08-26
JPS5491091A (en) * 1977-12-28 1979-07-19 Seiko Instr & Electronics Ltd Rectangular at-cut crystal vibrator
JPS5537052A (en) * 1978-09-06 1980-03-14 Seiko Instr & Electronics Ltd At-cut crystal oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197394A (en) * 1975-02-21 1976-08-26
JPS5491091A (en) * 1977-12-28 1979-07-19 Seiko Instr & Electronics Ltd Rectangular at-cut crystal vibrator
JPS5537052A (en) * 1978-09-06 1980-03-14 Seiko Instr & Electronics Ltd At-cut crystal oscillator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007097042A (en) * 2005-09-30 2007-04-12 Kyocera Kinseki Corp Crystal diaphragm
JP2008141347A (en) * 2006-11-30 2008-06-19 Kyocera Kinseki Corp Temperature compensated oscillator
JP2011182025A (en) * 2010-02-26 2011-09-15 Kyocera Kinseki Corp Temperature compensation type piezoelectric oscillator

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