JPH02108775U - - Google Patents
Info
- Publication number
- JPH02108775U JPH02108775U JP1513389U JP1513389U JPH02108775U JP H02108775 U JPH02108775 U JP H02108775U JP 1513389 U JP1513389 U JP 1513389U JP 1513389 U JP1513389 U JP 1513389U JP H02108775 U JPH02108775 U JP H02108775U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- carrier
- sealing
- holding
- molecules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案一実施例の概略構成図、第２図
Ａ乃至Ｃは本考案一実施例の要部構成図である。
１…液槽、１ａ…浸漬部、２…センサ、３…バ
リヤ、４…ホルダ、５…基板、６…密閉容器、６
ａ…減圧口、６ｂ…ガス導入口、６ｃ，６ｄ…カ
バー部材、７…真空ポンプ、８…ガス供給源。
FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIGS. 2A to 2C are diagrams of essential parts of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...liquid tank, 1a...immersion part, 2...sensor, 3...barrier, 4...holder, 5...substrate, 6...closed container, 6
a... Decompression port, 6b... Gas inlet, 6c, 6d... Cover member, 7... Vacuum pump, 8... Gas supply source.
Claims (1)
た成膜分子を移しとる成膜担体を移動可能に保持
する担体保持手段と、前記成膜担体を前記液槽上
で密閉状態にする密閉手段と、該密閉手段で密閉
された前記成膜担体を含む空間を減圧する減圧手
段とを備えることを特徴とする成膜装置。 (2) 前記密閉手段で密閉される空間に不活性ガ
スを供給するガス供給手段を備えることを特徴と
する請求項１記載の成膜装置。[Claims for Utility Model Registration] (1) A liquid tank for developing film forming molecules, a carrier holding means for movably holding a film forming carrier for transferring the developed film forming molecules, and a carrier holding means for movably holding the film forming carrier for transferring the developed film forming molecules. A film forming apparatus comprising: a sealing means for sealing the liquid tank; and a pressure reducing means for reducing the pressure in a space containing the film forming carrier sealed by the sealing means. 2. The film forming apparatus according to claim 1, further comprising a gas supply means for supplying an inert gas into the space sealed by the sealing means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1513389U JPH02108775U (en) | 1989-02-10 | 1989-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1513389U JPH02108775U (en) | 1989-02-10 | 1989-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108775U true JPH02108775U (en) | 1990-08-29 |
Family
ID=31226922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1513389U Pending JPH02108775U (en) | 1989-02-10 | 1989-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108775U (en) |
-
1989
- 1989-02-10 JP JP1513389U patent/JPH02108775U/ja active Pending
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