JPH0211357U - - Google Patents
Info
- Publication number
- JPH0211357U JPH0211357U JP9010188U JP9010188U JPH0211357U JP H0211357 U JPH0211357 U JP H0211357U JP 9010188 U JP9010188 U JP 9010188U JP 9010188 U JP9010188 U JP 9010188U JP H0211357 U JPH0211357 U JP H0211357U
- Authority
- JP
- Japan
- Prior art keywords
- sensor element
- photo sensor
- light
- transparent
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
Description
第１図〜第４図は本考案に係るフオトセンサ素
子の第１実施例の製作工程説明用平面図、第５図
は第４図のＡ−Ａ断面図、第６図は第１実施例の
説明用側面図、第７図は本考案に係るフオトセン
サ素子が検出するコード信号の説明図、第８図〜
第１１図は本考案に係るフオトセンサ素子の第２
実施例の製作工程説明用平面図、第１２図は本考
案に係るフオトセンサ素子の第３実施例の説明用
平面図である。
１：透光性絶縁基板、２：透明電極、３：透光
窓、４：半導体層、５：金属電極、６：電極取り
出し部、７：センサ部、８：保護膜、９：被検出
物、１０：発光ダイオード、１１：電極取り出し
部、１２：積層部、１３：円形部、１４：仕切り
部。
1 to 4 are plan views for explaining the manufacturing process of the first embodiment of the photo sensor element according to the present invention, FIG. 5 is a sectional view taken along line A-A in FIG. 4, and FIG. An explanatory side view, FIG. 7 is an explanatory diagram of a code signal detected by the photo sensor element according to the present invention, and FIGS.
FIG. 11 shows the second photo sensor element according to the present invention.
FIG. 12 is a plan view for explaining the manufacturing process of the embodiment, and FIG. 12 is a plan view for explaining the third embodiment of the photo sensor element according to the present invention. 1: Transparent insulating substrate, 2: Transparent electrode, 3: Transparent window, 4: Semiconductor layer, 5: Metal electrode, 6: Electrode extraction part, 7: Sensor part, 8: Protective film, 9: Detected object , 10: Light emitting diode, 11: Electrode extraction part, 12: Lamination part, 13: Circular part, 14: Partition part.
Claims (1)
不透明部材を積層していない非積層部を透光窓と
し、該透光窓の周囲に透明電極、非晶質シリコン
系半導体層、金属電極及び高分子材料である保護
膜を順次積層して単または複数個のセンサ部を形
成し、前記透光窓の形状が前記保護膜によつて形
成されてなることを特徴とするフオトセンサ素子
。 ２ 透光窓の周囲に位置して４個のセンサ部が形
成されてなる実用新案登録請求の範囲第１項記載
のフオトセンサ素子。 ３ フオトセンサ素子が正方形状に形成され、一
辺が該フオトセンサ素子の一辺の長さの1/2以下
の長さである略正方形状のセンサ部を４個形成し
、前記フオトセンサ素子の中央に位置して、円形
の透光窓を形成するように前記センサ部を切欠し
てなる実用新案登録請求の範囲第１項または第２
項記載のフオトセンサ素子。 ４ 透光窓の周囲に位置するセンサ部の透明電極
が共通にされてなる実用新案登録請求の範囲第１
項または第２項または第３項記載のフオトセンサ
素子。 ５ 透光窓の周囲に位置するセンサ部の金属電極
が共通にされてなる実用新案登録請求の範囲第１
項または第２項または第３項記載のフオトセンサ
素子。 ６ 透光窓の周囲に位置するセンサ部に対応して
透光窓が区切られてなる実用新案登録請求の範囲
第１項または第２項または第３項または第４項ま
たは第５項記載のフオトセンサ素子。 ７ 透光性絶縁基板上に、透明電極、非晶質シリ
コン系半導体層、金属電極及び高分子材料でなる
保護膜を順次積層して、平面視正方形状のフオト
センサ素子を形成し、一辺が該フオトセンサ素子
の一辺の長さの1/2以下の長さである略正方形状
のセンサ部を４個形成し、前記フオトセンサ素子
の中央に位置して、円形の透光窓を形成するよう
に前記センサ部を切欠するとともに、前記保護膜
によつて前記透光窓内に平面視十字形状の積層部
を形成してなるフオトセンサ素子。[Claims for Utility Model Registration] 1. On a transparent insulating substrate, a non-laminated part consisting of only the insulating substrate and no other opaque material is formed as a transparent window, and around the transparent window, a transparent electrode, An amorphous silicon-based semiconductor layer, a metal electrode, and a protective film made of a polymeric material are sequentially laminated to form one or more sensor parts, and the shape of the light-transmitting window is formed by the protective film. A photo sensor element characterized by: 2. The photo sensor element according to claim 1, in which four sensor sections are formed around a light-transmitting window. 3. A photo sensor element is formed in a square shape, and four substantially square sensor parts each having a side length of 1/2 or less of the length of one side of the photo sensor element are formed, and the sensor parts are located in the center of the photo sensor element. Claim 1 or 2 of the Utility Model Registration Claim, wherein the sensor portion is cut out to form a circular light-transmitting window.
Photosensor element described in section. 4 Utility model registration claim 1 in which the transparent electrodes of the sensor portion located around the transparent window are common
The photo sensor element according to item 1 or 2 or 3. 5 Utility model registration claim 1, in which the metal electrodes of the sensor parts located around the transparent window are common
The photo sensor element according to item 1 or 2 or 3. 6. Utility model registration claim 1 or 2 or 3 or 4 or 5, in which a light-transmitting window is divided corresponding to sensor sections located around the light-transmitting window. Photo sensor element. 7. A transparent electrode, an amorphous silicon-based semiconductor layer, a metal electrode, and a protective film made of a polymeric material are sequentially laminated on a light-transmitting insulating substrate to form a photo sensor element having a square shape in plan view. Four substantially square sensor portions having a length of 1/2 or less of the length of one side of the photo sensor element are formed, and the sensor portion is positioned at the center of the photo sensor element to form a circular light-transmitting window. A photo sensor element having a sensor portion cut out and a laminated portion having a cross shape in plan view formed within the light-transmitting window by the protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988090101U JPH085568Y2 (en) | 1988-07-06 | 1988-07-06 | Photo sensor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988090101U JPH085568Y2 (en) | 1988-07-06 | 1988-07-06 | Photo sensor element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0211357U true JPH0211357U (en) | 1990-01-24 |
| JPH085568Y2 JPH085568Y2 (en) | 1996-02-14 |
Family
ID=31314634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988090101U Expired - Lifetime JPH085568Y2 (en) | 1988-07-06 | 1988-07-06 | Photo sensor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085568Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138268A (en) * | 1978-04-14 | 1979-10-26 | Sakae Fujimoto | Overhead travelling crane |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217159U (en) * | 1985-07-13 | 1987-02-02 |
-
1988
- 1988-07-06 JP JP1988090101U patent/JPH085568Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217159U (en) * | 1985-07-13 | 1987-02-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138268A (en) * | 1978-04-14 | 1979-10-26 | Sakae Fujimoto | Overhead travelling crane |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH085568Y2 (en) | 1996-02-14 |