JPH02123055U - - Google Patents
Info
- Publication number
- JPH02123055U JPH02123055U JP3186589U JP3186589U JPH02123055U JP H02123055 U JPH02123055 U JP H02123055U JP 3186589 U JP3186589 U JP 3186589U JP 3186589 U JP3186589 U JP 3186589U JP H02123055 U JPH02123055 U JP H02123055U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma
- ion source
- aluminum
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
のプラズマ電極周りを拡大して部分的に示す断面
図である。第２図は、第１図のプラズマ電極の部
分的な平面図である。第３図および第４図は、そ
れぞれ、従来のイオン源の例を示す概略図である
。
２……プラズマ生成容器、６……プラズマ、１
１〜１３……電極、１６……イオンビーム、３０
……電極、３１，３２……アルミニウムから成る
電極板、３３……冷却パイプ。
FIG. 1 is an enlarged sectional view partially showing the vicinity of a plasma electrode of an ion source according to an embodiment of the invention. 2 is a partial plan view of the plasma electrode of FIG. 1; FIG. FIGS. 3 and 4 are schematic diagrams showing examples of conventional ion sources, respectively. 2...Plasma generation container, 6...Plasma, 1
1-13... Electrode, 16... Ion beam, 30
... Electrode, 31, 32 ... Electrode plate made of aluminum, 33 ... Cooling pipe.
Claims (1)
１枚以上の電極を用いてイオンビームを引き出す
構造のイオン源において、前記電極の内の少なく
とも最プラズマ側の電極に、アルミニウムから成
る２枚の電極板間に冷却パイプを挟み込むと共に
これら三者間を密着させた構造の電極を用いたこ
とを特徴とするイオン源。 In an ion source having a structure in which an ion beam is extracted from plasma generated in a plasma generation container using one or more electrodes, at least one of the electrodes closest to the plasma is provided between two electrode plates made of aluminum. An ion source characterized by using electrodes having a structure in which a cooling pipe is sandwiched between the two electrodes, and these three parts are in close contact with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3186589U JPH0719080Y2 (en) | 1989-03-20 | 1989-03-20 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3186589U JPH0719080Y2 (en) | 1989-03-20 | 1989-03-20 | Ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02123055U true JPH02123055U (en) | 1990-10-09 |
| JPH0719080Y2 JPH0719080Y2 (en) | 1995-05-01 |
Family
ID=31258052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3186589U Expired - Lifetime JPH0719080Y2 (en) | 1989-03-20 | 1989-03-20 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719080Y2 (en) |
-
1989
- 1989-03-20 JP JP3186589U patent/JPH0719080Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719080Y2 (en) | 1995-05-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |