JPH02123760A - Manufacture of chip type semiconductor device - Google Patents

Manufacture of chip type semiconductor device

Info

Publication number
JPH02123760A
JPH02123760A JP63278378A JP27837888A JPH02123760A JP H02123760 A JPH02123760 A JP H02123760A JP 63278378 A JP63278378 A JP 63278378A JP 27837888 A JP27837888 A JP 27837888A JP H02123760 A JPH02123760 A JP H02123760A
Authority
JP
Japan
Prior art keywords
resin
lead
lead frame
type semiconductor
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63278378A
Other languages
Japanese (ja)
Inventor
Koji Furusato
広治 古里
Tomio Okamura
岡村 富雄
Kenichiro Saito
斉藤 健一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shindengen Electric Manufacturing Co Ltd
Original Assignee
Shindengen Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shindengen Electric Manufacturing Co Ltd filed Critical Shindengen Electric Manufacturing Co Ltd
Priority to JP63278378A priority Critical patent/JPH02123760A/en
Publication of JPH02123760A publication Critical patent/JPH02123760A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To remove resin burr which is attached to a lead part at the time of resin molding by cutting the inner surface of the lead part at the same time when a lead frame is cut. CONSTITUTION:A semiconductor substrate is assembled into a lead frame 2. Thereafter, sealing resin is injected in the sequence from a runner 3 to a gate 4 by using an exclusive metal mold. The resin is molded into a specified package 1. Unnecessary resin burr 5 is firmed along a lead part. A step part 2b is provided at the lead part of the lead frame 2 beforehand. Said part is exposed to the outside of the package 1. The lead frame and the inner surface C of the lead part are cut along the step part. Cutting is performed along dotted lines B and B', and a completed product is obtained. In this method, the burr can be removed readily when the lead frame is cut without providing a deburring step.

Description

【発明の詳細な説明】 本発明はり〜ドフレーム上に半導体基体を接続して樹脂
封止したチップ型半導体装置の製造方法に関するもので
特にパッケージ部より外側に露出しているリード部の樹
脂バリを容易に除去することの可能な製造法を提供する
ものである。第1図(a)、(b)はこの種のチップ型
半導体装置の構造図で図中1は樹脂モールド部(パッケ
ージ部)2aは、リード部で大々リード部の一部を折曲
げ所謂面実装用として供されている。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a chip type semiconductor device in which a semiconductor substrate is connected to a beam frame and sealed with resin. The purpose of the present invention is to provide a manufacturing method that allows easy removal of. FIGS. 1(a) and 1(b) are structural diagrams of this type of chip-type semiconductor device. In the figure, 1 is a resin molded part (package part) 2a is a lead part with a part of the lead part bent. It is provided for surface mounting.

係るチップ型半導体装置は、第2図に示す様に、半導体
基体の組yか終了したリードフレーム2のノード部2a
を樹脂封止を行い、点線B、B′に沿って切断すること
により個々の装置を製造する所で樹脂封止を?テなう時
に使用するモールド金型とリードフレームの関係により
、リードフレーム及びリード部の一部分に不必要な樹脂
バリが発生する。このため従来あらたにバリ取工程を設
けて例えばバリのみを打抜き或いはデフラッシャ等によ
り除く方法が用いられているがこれでは工程が増加して
コストアップになることと、完全に樹脂バリを除去する
ことが出来ない。又、リード部を折り曲げ加工を行ない
完成品となるが、樹脂バリの残っている部分が、基板実
装時に半田付は不良となる欠点があった。
Such a chip type semiconductor device, as shown in FIG.
Resin sealing is performed at a place where individual devices are manufactured by resin sealing and cutting along dotted lines B and B'. Due to the relationship between the molding die and the lead frame used during the process, unnecessary resin burrs are generated on the lead frame and a portion of the lead portion. For this reason, conventional methods have been used to add a burr removal process and remove only the burr, for example, by punching or using a deflasher, but this increases the number of steps and costs, and it is difficult to completely remove the resin burr. I can't. Furthermore, although the lead portion is bent to form a finished product, there is a drawback that the resin burr remains on the part, resulting in poor soldering when mounted on a board.

本発明は、前述の欠点を解消出来る生産性の高いノード
フレーム形状とし、完成品に樹脂バリの耐着していない
チップ型半導体装置を提供するもので、リードフレーム
のリード部に半導体基体を接続する工程と、前記半導体
基体を樹脂モールドする工程と、前記リードフレームを
切断して個々のチップ型半導体装置を形成する工程を含
み、且つ前記切断時に該リード部の内面を同時に切断す
ることにより前記樹脂モールド時に該リード部に付着し
た樹脂バリを除去するようにしたことを特徴とするもの
である。
The present invention provides a chip-type semiconductor device that has a highly productive node frame shape that can eliminate the above-mentioned drawbacks and is free from resin burrs adhering to the finished product, and connects a semiconductor substrate to the lead portion of the lead frame. a step of resin-molding the semiconductor substrate; and a step of cutting the lead frame to form individual chip-type semiconductor devices; The present invention is characterized in that resin burrs attached to the lead portion during resin molding are removed.

第3図は、本発明の詳細な説明図であって、2はリード
フレーム、1はパッケージ(樹脂部)、3はランナ−1
4はゲート、5は樹脂バリである。本装置を製造するに
は、リードフレーム2に半導体基体を組み込んだ後、専
用の封止金型(図示しない)をもちいて、ランナー3か
らゲート4の順に封止樹脂を注入して、所定のパッケー
ジ1に樹脂成形を行なう。不要部分のランナー3とゲト
4は成形直後に分離して除却する。一方vI4脂封止さ
れたものは、封止金型とリードフレーム2のクリアラン
スの関係により、リード部にγGって不必要な樹脂バリ
5が発生する。そこで本発明では樹脂バリ5を除去する
ために、リードフレーム及びリード部の内面を切断して
樹脂バリ5を分離、除去する。リードフレーム2のリー
ド部には、予めパッケージ1の外側に露出する部分に段
差部2bが設けである。これは、切断時にパッケージ1
と切断金型が接触しない為であり、パッケージ1と段差
部2bの寸法Sは0.1mm以上あれば良い+1[が確
認されている。そして段差部に沿ってリドフレーム及び
リード部の内面Cを切断し、更に点線B、B′に沿って
切断することにより、個々の製品とし、二1−ザーの要
求に応じて端子2aを成形して、製品(第1図)を完成
する。なお端子2a部分は、前述した様にパッケージ1
がら露出した:3而面板厚面を除く)が、樹脂封止後に
切断されるため、次工程のメツキ工程等で端子2aの全
面に表面処理が施されるため、基板実装時の半田付は不
良が激減され、強度も向上するので信頼性の高いチップ
型半導体装置が提供出来る。
FIG. 3 is a detailed explanatory diagram of the present invention, in which 2 is a lead frame, 1 is a package (resin part), and 3 is a runner 1.
4 is a gate, and 5 is a resin burr. To manufacture this device, after the semiconductor substrate is assembled into the lead frame 2, a special sealing mold (not shown) is used to inject sealing resin from the runner 3 to the gate 4 in order. Package 1 is molded with resin. The unnecessary portions of the runner 3 and the gate 4 are separated and discarded immediately after molding. On the other hand, in the case of vI4 resin sealed, unnecessary resin burrs 5 due to γG are generated on the lead portion due to the clearance relationship between the sealing mold and the lead frame 2. Therefore, in the present invention, in order to remove the resin burr 5, the inner surfaces of the lead frame and the lead portion are cut to separate and remove the resin burr 5. The lead portion of the lead frame 2 is provided with a stepped portion 2b in advance at a portion exposed to the outside of the package 1. This means that package 1 when cutting
This is because the cutting die does not come into contact with the package 1, and it has been confirmed that the dimension S of the package 1 and the stepped portion 2b should be 0.1 mm or more. Then, the inner surface C of the lid frame and lead portion is cut along the stepped portion, and further cut along the dotted lines B and B' to produce individual products, and the terminal 2a is formed according to the user's request. Then, the product (Fig. 1) is completed. Note that the terminal 2a part is connected to package 1 as mentioned above.
Since the exposed surface (excluding the thick side of the board) is cut after resin sealing, the entire surface of the terminal 2a is subjected to surface treatment in the plating process, etc. in the next process, so soldering during board mounting is difficult. Since the number of defects is drastically reduced and the strength is improved, a highly reliable chip type semiconductor device can be provided.

以上、説明した様に本発明によれば、リードフレムをも
ちいて樹脂封止した時に発生する不必要な樹脂バリをあ
らたにバリ取り工程を設けることなくリードフレームの
切断時に容易に除去でき、生産性の高いチップ型半導体
装置を提供でき、実用上の効果は大なるものである。
As described above, according to the present invention, unnecessary resin burrs that occur when a lead frame is used for resin sealing can be easily removed when cutting the lead frame without requiring a new deburring process. It is possible to provide a chip type semiconductor device with high performance, and the practical effect is great.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図チップ型半導体装置の構造図、第2図は従来の製
造法の説明図、第3図は本発明の実施例を示す説明図で
ある。図中1は樹脂モールド(バッテ ジ)部、 は ノ ドフレ ム、 はそのリ ド部及び段差部、 3はランナ は ゲ ト 5は樹脂バリである。
FIG. 1 is a structural diagram of a chip type semiconductor device, FIG. 2 is an explanatory diagram of a conventional manufacturing method, and FIG. 3 is an explanatory diagram showing an embodiment of the present invention. In the figure, 1 is a resin mold (batch) part, is a throat frame, is a lid part and a stepped part, 3 is a runner, and gate 5 is a resin burr.

Claims (2)

【特許請求の範囲】[Claims] (1)リードフレームのリード部に半導体基体を接続す
る工程と、前記半導体基体を樹 脂モールドする工程と、前記リードフレ ームを切断して個々のチップ型半導体装 置を形成する工程を含み、且つ前記切断 時に該リード部の内面を同時に切断する ことにより前記樹脂モールド時に該リー ド部に付着した樹脂バリを除去するよう にしたことを特徴とするチップ型半導体 装置の製造方法。
(1) A step of connecting a semiconductor substrate to a lead portion of a lead frame, a step of resin molding the semiconductor substrate, and a step of cutting the lead frame to form individual chip-type semiconductor devices; 1. A method for manufacturing a chip-type semiconductor device, characterized in that resin burrs attached to the lead portion during the resin molding are removed by cutting the inner surface of the lead portion at the same time.
(2)リード部に段差部を設け該段差部に沿って該リー
ド部内面を切断するようにした ことを特徴とする特許請求の範囲第(1 )項記載のチップ型半導体装置の製造方 法。
(2) A method for manufacturing a chip-type semiconductor device according to claim (1), characterized in that a stepped portion is provided in the lead portion and the inner surface of the lead portion is cut along the stepped portion.
JP63278378A 1988-11-02 1988-11-02 Manufacture of chip type semiconductor device Pending JPH02123760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63278378A JPH02123760A (en) 1988-11-02 1988-11-02 Manufacture of chip type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63278378A JPH02123760A (en) 1988-11-02 1988-11-02 Manufacture of chip type semiconductor device

Publications (1)

Publication Number Publication Date
JPH02123760A true JPH02123760A (en) 1990-05-11

Family

ID=17596503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63278378A Pending JPH02123760A (en) 1988-11-02 1988-11-02 Manufacture of chip type semiconductor device

Country Status (1)

Country Link
JP (1) JPH02123760A (en)

Similar Documents

Publication Publication Date Title
JPH02123760A (en) Manufacture of chip type semiconductor device
JP2995119B2 (en) Method for manufacturing lead frame for power transistor
JPH0574999A (en) Semiconductor device and its manufacture
JPH05144865A (en) Manufacturing method and device of semiconductor device
JPH08250523A (en) Method for manufacturing semiconductor device
JPH08172153A (en) Semiconductor device lead processing method and lead processing die
JPH05335442A (en) Resin molding method for semiconductor
JPH11163056A (en) Tape carrier manufacturing method
JPH01111363A (en) Manufacture of semiconductor device
JPH0815191B2 (en) Method for manufacturing lead frame
JPH029156A (en) Manufacture of semiconductor device
JPH07321276A (en) Lead frame and method of manufacturing semiconductor device using the same
JPS6331128A (en) Removal of resin tailing
JPS63157451A (en) Lead frame for semiconductor device
JPH07297339A (en) Semiconductor device and manufacturing method thereof
JPH07153892A (en) Lead frame
KR0145766B1 (en) Semiconductor package and the manufacture method thereof
JPS5919364A (en) Manufacture of semiconductor device and lead frame using in manufacture thereof
JP2946775B2 (en) Resin sealing mold
KR920006185B1 (en) IC manufacturing method using bonded lead frame
JPS63147353A (en) Lead frame for semiconductor device
JPS60195958A (en) Lead frame
JPS6217383B2 (en)
JPH10178137A (en) Method for manufacturing resin-molded semiconductor device
JPH0444425B2 (en)