JPH02127033U - - Google Patents

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Publication number
JPH02127033U
JPH02127033U JP3438989U JP3438989U JPH02127033U JP H02127033 U JPH02127033 U JP H02127033U JP 3438989 U JP3438989 U JP 3438989U JP 3438989 U JP3438989 U JP 3438989U JP H02127033 U JPH02127033 U JP H02127033U
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JP
Japan
Prior art keywords
periphery
work
rotation
workpiece
guides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3438989U
Other languages
English (en)
Other versions
JPH0749791Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989034389U priority Critical patent/JPH0749791Y2/ja
Publication of JPH02127033U publication Critical patent/JPH02127033U/ja
Application granted granted Critical
Publication of JPH0749791Y2 publication Critical patent/JPH0749791Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Drying Of Solid Materials (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示すスピン乾燥時の
枚葉式スピン乾燥装置の平面図、第２図は第１図
のＢ−Ｂ線断面図、第３図は本考案の枚葉式スピ
ン乾燥装置の停止時の断面図、第４図は従来の枚
葉式スピン乾燥装置の円板状のワークチヤツク機
構の平面図、第５図は第４図のＡ−Ａ線断面図で
ある。 １１…主軸、１２…フランジ形テーブル、１３
…周囲ガイド、１４…枢支軸、１５…ワーククラ
ンプ爪、１５ａ…押さえ部、１６…板状体ワーク
、１７…切り溝、１８…調整部材。

Claims (1)

  1. 【実用新案登録請求の範囲】 (a) テーブルと、 (b) 該テーブルの周辺部に設けられ、回転中心
    方向に向かつて底面が低くなる傾斜部を設けると
    ともに、周囲部のみにワークを載置する複数の周
    囲ガイドと、 (c) 該ガイドに揺動自在に支持され、回転時の
    遠心力により自立し、ワークを押さえるワークク
    ランプを設けることを特徴とする枚葉式スピン乾
    燥装置。
JP1989034389U 1989-03-28 1989-03-28 枚葉式スピン乾燥装置 Expired - Lifetime JPH0749791Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989034389U JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989034389U JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Publications (2)

Publication Number Publication Date
JPH02127033U true JPH02127033U (ja) 1990-10-19
JPH0749791Y2 JPH0749791Y2 (ja) 1995-11-13

Family

ID=31538817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989034389U Expired - Lifetime JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Country Status (1)

Country Link
JP (1) JPH0749791Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法
JPS63185029A (ja) * 1987-01-28 1988-07-30 Hitachi Ltd ウエハ処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法
JPS63185029A (ja) * 1987-01-28 1988-07-30 Hitachi Ltd ウエハ処理装置

Also Published As

Publication number Publication date
JPH0749791Y2 (ja) 1995-11-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term