JPH0212800Y2 - - Google Patents

Info

Publication number
JPH0212800Y2
JPH0212800Y2 JP2021882U JP2021882U JPH0212800Y2 JP H0212800 Y2 JPH0212800 Y2 JP H0212800Y2 JP 2021882 U JP2021882 U JP 2021882U JP 2021882 U JP2021882 U JP 2021882U JP H0212800 Y2 JPH0212800 Y2 JP H0212800Y2
Authority
JP
Japan
Prior art keywords
sound wave
membrane
vibrating membrane
fixed electrode
back side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2021882U
Other languages
Japanese (ja)
Other versions
JPS58123699U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021882U priority Critical patent/JPS58123699U/en
Publication of JPS58123699U publication Critical patent/JPS58123699U/en
Application granted granted Critical
Publication of JPH0212800Y2 publication Critical patent/JPH0212800Y2/ja
Granted legal-status Critical Current

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  • Diaphragms For Electromechanical Transducers (AREA)
  • Obtaining Desirable Characteristics In Audible-Bandwidth Transducers (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Description

【考案の詳細な説明】 本考案はシングルタイプの静電型振動子に関す
るものである。
[Detailed Description of the Invention] The present invention relates to a single type electrostatic vibrator.

従来の一般的な静電型振動子としては第1図に
示すようなケース5′と、音波放射用の孔2′を開
口した蓋体12とで周縁部を挾持された振動膜
1′の裏面にフラツトな面を有する固定電極4′を
押上げばね8′にて弾接したものが提供されてき
たが、かかる従来例では音波放射指向特性におい
てサイドローブが大きいという問題があつた。尚
図中11′は可動電極、3は固定金具である。
A conventional general electrostatic vibrator has a vibrating membrane 1' which is held at its peripheral edge by a case 5' and a cover body 12 having a hole 2' for sound wave radiation, as shown in FIG. A fixed electrode 4' having a flat back surface has been provided in elastic contact with a push-up spring 8', but such a conventional example has the problem of large side lobes in the sound wave radiation directional characteristics. In the figure, 11' is a movable electrode, and 3 is a fixed metal fitting.

そこで本考案の発明者達は第2図に示すように
音波放射面である振動膜1を音波放射方向に対し
て凹面としてサイドローブを小さくした静電型振
動子を提案している。即ち図中4の固定電極は有
底筒状の形状をなし、その底部中央は周部中心方
向に下り傾斜するように内側に凹設せられて、そ
の凹平面部4aには音波通過用の孔2を多数穿設
し、また一端側の開口部にはケース5を螺着して
閉塞してある。そして固定電極4の内部にはケー
ス5底部に取付けてある押えばね8によつて弾発
された膜固定具9a,9bを収納するとともに該
膜固定具9a,9bによつて周縁が挾着された振
動膜1が前記凹平面部4aの裏側に密着配設せら
れている。膜固定具9aは絶縁体で形成され、他
方膜固定具9bは導電体で形成され、夫々の膜固
定具9a,9bは互いに内外に螺合一体化してお
り、膜固定具9bの上端と、膜固定具9aの内向
鍔との間で振動膜1の周縁を挾着し、また膜固定
具9bの底部で音波遮蔽体なる背板10を構成し
ている。振動膜1は背板10側の面に可動電極1
1を蒸着したもので、この可動電極11には膜固
定具9b、押えばね8を通じて振動電源(図示せ
ず)の一方の極性が接続される。
Therefore, the inventors of the present invention have proposed an electrostatic vibrator in which a vibrating membrane 1, which is a sound wave radiation surface, is concave with respect to the sound wave radiation direction to reduce side lobes, as shown in FIG. That is, the fixed electrode 4 in the figure has a cylindrical shape with a bottom, and the center of the bottom is recessed inward so as to be inclined downward toward the center of the periphery. A large number of holes 2 are formed, and the opening at one end is closed by screwing a case 5. Inside the fixed electrode 4, there are housed membrane fixing devices 9a and 9b that are pressed by a pressing spring 8 attached to the bottom of the case 5, and the peripheral edges are clamped by the membrane fixing devices 9a and 9b. A vibrating membrane 1 is disposed in close contact with the back side of the concave plane portion 4a. The membrane fixing device 9a is made of an insulating material, while the membrane fixing device 9b is made of a conductive material. The peripheral edge of the vibrating membrane 1 is clamped between the inward facing collar of the membrane fixture 9a, and a back plate 10 serving as a sound wave shield is formed at the bottom of the membrane fixture 9b. The vibrating membrane 1 has a movable electrode 1 on the surface on the back plate 10 side.
One polarity of a vibration power source (not shown) is connected to this movable electrode 11 through a membrane fixture 9b and a pressing spring 8.

しかして可動電極11と固定電極4との間に例
えば駆動電源を接続し、振動膜1を振動させると
音波が孔2を介して図において上方に放射される
ことになる。
When, for example, a driving power source is connected between the movable electrode 11 and the fixed electrode 4 and the vibrating membrane 1 is vibrated, sound waves are radiated upward in the figure through the holes 2.

ところで、第3図に示すように上記静電型振動
子は出力音圧と、駆動周波数における音波の波長
との関係は破線で示すような関係を有するもので
あるが、振動膜1と背板10との距離(以下背室
寸法)lがλ/2,λ,3λ/2,2λというよう
にn/2λ(n=1.2…正の整数)であれば同図の実 線で示すように出力音圧レベルが低下し、ビーム
のパターンも変化してしまうという恐れがある。
By the way, as shown in FIG. 3, the electrostatic vibrator has a relationship between the output sound pressure and the wavelength of the sound wave at the driving frequency as shown by the broken line. If the distance (hereinafter referred to as the back chamber dimension) to 10 is n/2λ (n = 1.2...positive integer) such as λ/2, λ, 3λ/2, 2λ, the output will be as shown by the solid line in the same figure. There is a risk that the sound pressure level will drop and the beam pattern will change.

本考案はその点に鑑みて為されたもので、その
目的とするところは音波を効率よく出力すること
ができる静電型振動子を提供するにある。
The present invention was devised in view of this point, and its purpose is to provide an electrostatic vibrator that can efficiently output sound waves.

しかして実施例にあつては第2図の背室寸法l
をl=n/2λの等式が成立しないように最大使用 周周波数における波長の1/2未満と設定するので
ある。
However, in the case of the embodiment, the back chamber dimension l in FIG.
is set to be less than 1/2 of the wavelength at the maximum usable frequency so that the equation l=n/2λ does not hold.

本考案は音波を通過するために多数の孔を開
け、表面側を凹面とするとともに裏面側を凸面と
した固定電極の裏面上に振動膜を取付けて、固定
電極側に面した音波放射面である振動膜の音波放
射方向を凹面とし、振動膜の音波放射方向とは反
対側に設けた音波遮断用の背板と振動膜との距離
を使用周波数における音波波長の1/2未満として
あるので、出力音圧のレベルが小さくなることが
なくて音波のパターンの変化を防止でき、確実か
つ効率よく音波放射が行なえるという利点を有す
る。
In this invention, a large number of holes are made to allow sound waves to pass through, and a vibrating membrane is installed on the back side of a fixed electrode with a concave surface on the front side and a convex surface on the back side. The sound wave radiation direction of a certain vibrating membrane is concave, and the distance between the vibrating membrane and the sound wave blocking back plate provided on the side opposite to the sound wave radiation direction of the vibrating membrane is less than 1/2 of the sound wave wavelength at the frequency used. This has the advantage that the level of the output sound pressure does not become small, so that changes in the sound wave pattern can be prevented, and sound wave radiation can be performed reliably and efficiently.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来例の断面図、第2図は本考案の実
施例の断面図、第3図は同上の原理説明図であ
り、1は振動膜、2は孔、4は固定電極、10は
背板、lは背室寸法である。
FIG. 1 is a sectional view of a conventional example, FIG. 2 is a sectional view of an embodiment of the present invention, and FIG. 3 is a diagram explaining the principle of the same. 1 is a vibrating membrane, 2 is a hole, 4 is a fixed electrode, is the back plate, and l is the back chamber dimension.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 音波を通過するために多数の孔を開け、表面側
を凹面とするとともに裏面側を凸面とした固定電
極の裏面上に振動膜を取付けて、固定電極側に面
した音波放射面である振動膜の音波放射方向を凹
面とし、振動膜の音波放射方向とは反対側に設け
た音波遮断用の背板と振動膜との距離を使用周波
数における音波波長の1/2未満として成ることを
特徴とする静電型振動子。
A vibrating membrane is installed on the back side of a fixed electrode with a concave surface and a convex surface on the back side, which has many holes for the passage of sound waves, and has a concave surface on the front side and a convex surface on the back side.The vibrating membrane is a sound wave emission surface facing the fixed electrode side. The sound wave radiation direction is a concave surface, and the distance between the sound wave blocking back plate provided on the opposite side of the vibration membrane to the sound wave radiation direction and the vibration membrane is less than 1/2 of the sound wave wavelength at the operating frequency. Electrostatic type vibrator.
JP2021882U 1982-02-15 1982-02-15 Electrostatic vibrator Granted JPS58123699U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021882U JPS58123699U (en) 1982-02-15 1982-02-15 Electrostatic vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021882U JPS58123699U (en) 1982-02-15 1982-02-15 Electrostatic vibrator

Publications (2)

Publication Number Publication Date
JPS58123699U JPS58123699U (en) 1983-08-23
JPH0212800Y2 true JPH0212800Y2 (en) 1990-04-10

Family

ID=30032392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021882U Granted JPS58123699U (en) 1982-02-15 1982-02-15 Electrostatic vibrator

Country Status (1)

Country Link
JP (1) JPS58123699U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2008224542B2 (en) 2007-03-14 2012-01-19 Qualcomm Incorporated MEMS microphone

Also Published As

Publication number Publication date
JPS58123699U (en) 1983-08-23

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