JPH02129342U

JPH02129342U -

Info

Publication number: JPH02129342U
Application number: JP3827989U
Authority: JP
Priority date: 1989-03-31
Filing date: 1989-03-31
Publication date: 1990-10-25
Anticipated expiration: 2004-03-31
Also published as: JP2507416Y2

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示すバツフア装置
の斜視図、第２図はアーム支持ブロツクの縦断正
面図、第３図はバツフア装置のブロツクダイヤグ
ラム、第４図及び第５図はそれぞれ動作プログラ
ムを略示すフローチヤートである。Ｒ……基板搬送路、Ｒ_１……回収部、Ｒ_２……
通り抜け部、Ｒ_３……引き渡し部、Ｐ……基板収
容溝のピツチ、Ｗ……基板、１０……回収手段、
１１……基板保持具、１２……搬送アーム、１３
……アーム支持ブロツク、２０……カセツト、２
５……昇降手段、３０……払出し手段、４０……
制御手段。 Fig. 1 is a perspective view of a buffer device showing an embodiment of the present invention, Fig. 2 is a vertical cross-sectional front view of an arm support block, Fig. 3 is a block diagram of the buffer device, and Figs. 4 and 5 show its operation. 1 is a flowchart schematically illustrating the program. R...Substrate transport path, _R1 ...Recovery section, _R2 ...
Pass-through portion, _R3 ...Delivery portion, P...Pitch of substrate storage groove, W...Substrate, 10...Recovery means,
11... Substrate holder, 12... Transfer arm, 13
...Arm support block, 20...Cassette, 2
5... Lifting means, 30... Dispensing means, 40...
control means.

Claims

[Scope of Claim for Utility Model Registration] A collecting means for picking up and collecting boards one by one from a board transport path, a cassette for temporarily storing the collected boards, which has board storage grooves formed in multiple stages vertically, and A substrate buffering device configured to be attached to a substrate transport path, comprising a payout means for taking out the substrates one by one and delivering them to the substrate transport path, and a control means for driving and controlling the collection means and the payout means, and configured to be attached to the substrate transport path, A part of the substrate transport path is formed by connecting a substrate collection section, a pass-through section, and a delivery section in order from the upper side in the board transport direction on the substrate transport path, and a cassette is placed and fixed above the pass-through section. , a collecting means is arranged on the upper side of the cassette, and a dispensing means is arranged on the lower side of the cassette, and the collecting means and the dispensing means each include a transport arm equipped with a substrate holder, and the transport arm can be driven forward and backward toward the cassette. 1. A substrate buffering device, comprising: an arm support block for supporting the board; and a lifting means for raising and lowering the arm support block so as to position the arm support block;