JPH02129726U - - Google Patents

Info

Publication number
JPH02129726U
JPH02129726U JP3791489U JP3791489U JPH02129726U JP H02129726 U JPH02129726 U JP H02129726U JP 3791489 U JP3791489 U JP 3791489U JP 3791489 U JP3791489 U JP 3791489U JP H02129726 U JPH02129726 U JP H02129726U
Authority
JP
Japan
Prior art keywords
wafer
support
grooves
devices
gaps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3791489U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3791489U priority Critical patent/JPH02129726U/ja
Publication of JPH02129726U publication Critical patent/JPH02129726U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】
第１図イおよびロは本考案のウエハ支持具を示
す斜視図および横断面図、第２図イおよびロは従
来の四点支持ウエハ支持具の斜視図および横断面
図、第３図イ，ロは面取りウエハの端部拡大断面
図である。 １：支持具本体、２：通気孔、３：ウエハ、４
：ウエハ装置用の溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハをその厚み方向に間隙を空けて並
    列に支持するウエハ支持具であつて、支持具本体
    が略断面半円形状に形成された半円筒体であり、
    その内面にウエハ周縁が略半周にわたつて線接触
    する如くウエハ装置用の溝を長手方向に間隔を置
    いて複数設け、複数のウエハ装置用の溝間に通気
    孔を設けたことを特徴とするウエハ支持具。
JP3791489U 1989-03-30 1989-03-30 Pending JPH02129726U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3791489U JPH02129726U (ja) 1989-03-30 1989-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3791489U JPH02129726U (ja) 1989-03-30 1989-03-30

Publications (1)

Publication Number Publication Date
JPH02129726U true JPH02129726U (ja) 1990-10-25

Family

ID=31545450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3791489U Pending JPH02129726U (ja) 1989-03-30 1989-03-30

Country Status (1)

Country Link
JP (1) JPH02129726U (ja)

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