JPH02129727U - - Google Patents
Info
- Publication number
- JPH02129727U JPH02129727U JP3640389U JP3640389U JPH02129727U JP H02129727 U JPH02129727 U JP H02129727U JP 3640389 U JP3640389 U JP 3640389U JP 3640389 U JP3640389 U JP 3640389U JP H02129727 U JPH02129727 U JP H02129727U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- metal material
- pressure
- deformed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例の試料台の縦断面図
である。
１……試料、２……金属薄膜、３……試料台、
４……冷媒供給口、５……冷媒排出口、６……試
料押え、７……冷媒。
FIG. 1 is a longitudinal sectional view of a sample stage according to an embodiment of the present invention. 1...sample, 2...metal thin film, 3...sample stand,
4... Refrigerant supply port, 5... Refrigerant discharge port, 6... Sample holder, 7... Refrigerant.
Claims (1)
において、流体圧力により試料設置面が前記試料
の裏面に沿つて変形可能で良好な熱伝導性を有す
る金属材料で形成したことを特徴とする試料台。 ２ 前記金属材料として、前記試料台に供給され
る熱媒体の圧力により前記変形可能な材料を用い
た第１請求項の記載の試料台。[Claims for Utility Model Registration] 1. A metal material with good thermal conductivity and whose sample mounting surface can be deformed along the back surface of the sample by fluid pressure in a sample stage on which a sample to be processed under reduced pressure is placed. A sample stand characterized by being formed of. 2. The sample stage according to claim 1, wherein the metal material is a material that can be deformed by the pressure of a heat medium supplied to the sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640389U JPH02129727U (en) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640389U JPH02129727U (en) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129727U true JPH02129727U (en) | 1990-10-25 |
Family
ID=31542601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3640389U Pending JPH02129727U (en) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129727U (en) |
-
1989
- 1989-03-31 JP JP3640389U patent/JPH02129727U/ja active Pending
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