JPH02136326U - - Google Patents
Info
- Publication number
- JPH02136326U JPH02136326U JP4445889U JP4445889U JPH02136326U JP H02136326 U JPH02136326 U JP H02136326U JP 4445889 U JP4445889 U JP 4445889U JP 4445889 U JP4445889 U JP 4445889U JP H02136326 U JPH02136326 U JP H02136326U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- tray
- vapor phase
- vapor
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910000792 Monel Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910000856 hastalloy Inorganic materials 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229910001026 inconel Inorganic materials 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4445889U JPH02136326U (2) | 1989-04-18 | 1989-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4445889U JPH02136326U (2) | 1989-04-18 | 1989-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02136326U true JPH02136326U (2) | 1990-11-14 |
Family
ID=31557781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4445889U Pending JPH02136326U (2) | 1989-04-18 | 1989-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02136326U (2) |
-
1989
- 1989-04-18 JP JP4445889U patent/JPH02136326U/ja active Pending
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