JPH02141992U - - Google Patents
Info
- Publication number
- JPH02141992U JPH02141992U JP1989052100U JP5210089U JPH02141992U JP H02141992 U JPH02141992 U JP H02141992U JP 1989052100 U JP1989052100 U JP 1989052100U JP 5210089 U JP5210089 U JP 5210089U JP H02141992 U JPH02141992 U JP H02141992U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- discharge
- output
- power supply
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 230000002159 abnormal effect Effects 0.000 claims description 9
- 230000007704 transition Effects 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Protection Of Static Devices (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Discharge Heating (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図はグロ放電負荷の一例の説明図、第２図
は従来のグロー放電負荷電源装置の説明図、第３
図は従来回路における異常放電消弧動作の説明図
、第４図はグロー放電領域への移行経過の説明図
、第５図は本考案の一実施例回路図である。
１……ガスボンベ、２……真空ポンプ、３……
気密容器、４……被処理物、５……直流電源、Ａ
……直流電圧発生回路、Ｂ……定電圧制御回路、
Ｃ……電源回路、６……インバータ回路、７……
昇圧トランス、８……整流用ダイオード、９……
平滑回路、１０……出力電流検出器、１１……異
常放電電流検出用比較回路、１２……位相制御回
路、１３……出力側電流検出用比較回路、１４…
…１次側電流検出器、１５……交直変換回路、１
６……１次側電流検出用比較回路、１７……オア
ゲート、１８……異常放電制御回路、Ｄ……グロ
ー放電移行回路、Ｅ……異常放電制御回路の動作
阻止用回路、Ｆ……放電エネルギ供給用電圧垂下
回路、１９……出力側電流検出用増幅器、２０…
…放電開始位置検出用比較回路、２１……タイマ
回路、２２……電流側路用ダイオード、２３……
ピークレベル検出回路、２４……垂下機能付与回
路。
Fig. 1 is an explanatory diagram of an example of a glow discharge load, Fig. 2 is an explanatory diagram of a conventional glow discharge load power supply device, and Fig. 3 is an explanatory diagram of an example of a glow discharge load.
FIG. 4 is an explanatory diagram of the abnormal discharge extinguishing operation in a conventional circuit, FIG. 4 is an explanatory diagram of the progress of transition to the glow discharge region, and FIG. 5 is a circuit diagram of an embodiment of the present invention. 1...Gas cylinder, 2...Vacuum pump, 3...
Airtight container, 4...Product to be processed, 5...DC power supply, A
...DC voltage generation circuit, B...constant voltage control circuit,
C...Power supply circuit, 6...Inverter circuit, 7...
Step-up transformer, 8... Rectifier diode, 9...
Smoothing circuit, 10... Output current detector, 11... Comparison circuit for abnormal discharge current detection, 12... Phase control circuit, 13... Comparison circuit for output side current detection, 14...
...Primary side current detector, 15...AC/DC conversion circuit, 1
6... Comparison circuit for primary side current detection, 17... OR gate, 18... Abnormal discharge control circuit, D... Glow discharge transition circuit, E... Circuit for blocking operation of abnormal discharge control circuit, F... Discharge Energy supply voltage drooping circuit, 19... Output side current detection amplifier, 20...
...Discharge start position detection comparison circuit, 21...Timer circuit, 22...Current bypass diode, 23...
Peak level detection circuit, 24... drooping function imparting circuit.
Claims (1)
圧発生回路と、この回路の出力電流を検出してグ
ロー放電電流を一定に制御する位相制御回路と、
異常放電時の出力側電流の検出回路と、この出力
により動作して前記インバータ回路による負荷へ
の電力供給を遮断する異常放電制御回路を備えた
グロー放電負荷用電源装置において、前記異常放
電電流検出回路の電流検出レベルより電流検出レ
ベルの高い放電開始位置検出回路と、放電開始よ
り安定なグロー放電への移行に要する時間だけ、
前記異常放電時の出力電流検出回路出力を側路し
て前記異常放電制御回路が受け付けないようにす
るタイマ回路と、平滑用チヨークの出力電流のピ
ークレベルの検出回路とその出力により動作して
グロー放電領域への移行まで、前記インバータ回
路の出力電圧を垂下させて前記電源回路が過負荷
とならないように放電エネルギを供給する垂下機
能付与回路を設けたことを特徴とするグロー放電
負荷用電源装置。 a DC voltage generation circuit equipped with an inverter circuit and a rectification and smoothing circuit; a phase control circuit that detects the output current of this circuit and controls the glow discharge current to a constant level;
In a glow discharge load power supply device comprising a detection circuit for an output side current at the time of abnormal discharge, and an abnormal discharge control circuit that is operated by this output to cut off power supply to the load by the inverter circuit, the abnormal discharge current detection Only the discharge start position detection circuit has a current detection level higher than the current detection level of the circuit, and the time required for transition to stable glow discharge from discharge start.
A timer circuit that bypasses the output of the output current detection circuit at the time of abnormal discharge so that the abnormal discharge control circuit does not receive it, a detection circuit for the peak level of the output current of the smoothing choke, and a glow A power supply device for a glow discharge load, characterized in that a drooping function imparting circuit is provided to droop the output voltage of the inverter circuit and supply discharge energy so that the power supply circuit does not become overloaded until transition to a discharge region. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052100U JPH0733429Y2 (en) | 1989-05-02 | 1989-05-02 | Power supply for glow discharge load |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052100U JPH0733429Y2 (en) | 1989-05-02 | 1989-05-02 | Power supply for glow discharge load |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02141992U true JPH02141992U (en) | 1990-11-30 |
| JPH0733429Y2 JPH0733429Y2 (en) | 1995-07-31 |
Family
ID=31572118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989052100U Expired - Lifetime JPH0733429Y2 (en) | 1989-05-02 | 1989-05-02 | Power supply for glow discharge load |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733429Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019522454A (en) * | 2016-06-07 | 2019-08-08 | レイボルド ゲーエムベーハー | Apparatus and method for driving a vacuum pump |
-
1989
- 1989-05-02 JP JP1989052100U patent/JPH0733429Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019522454A (en) * | 2016-06-07 | 2019-08-08 | レイボルド ゲーエムベーハー | Apparatus and method for driving a vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733429Y2 (en) | 1995-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |