JPH0214423A - Vacuum deposition device for producing magnetic recording medium - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vacuum for manufacturing magnetic recording media, which manufactures magnetic recording media by forming a magnetic layer on the surface of a non-magnetic support while running it. This relates to a vapor deposition apparatus.

[Summary of the invention]

The present invention relates to a vacuum evaporation apparatus for manufacturing magnetic recording media, which manufactures magnetic recording media by forming a magnetic layer on the surface of a nonmagnetic support by vapor deposition while running the nonmagnetic support. By forcing or tending to drive the magnetic recording medium, the running system is stabilized and a highly reliable magnetic recording medium is manufactured.

[Prior art] Traditionally used in video tape recorders (VTI'?), etc. As a magnetic recording medium! 2. Description of the Related Art So-called coated magnetic recording media are widely used, which are manufactured by coating a magnetic coating material mixed with an n-type coating material, a binder, an additive, etc. on a non-magnetic support and drying the coating.

However, in recent years, with the demand for smaller size and longer operating times for equipment such as video tape recorders, and the emergence of so-called digital video tape recorders, higher density recording and shorter wavelength recording have been promoted, and it has become difficult to meet these demands. Research into magnetic recording media with high coercive force has been progressing, and some of them have been put into practical use.

Such high coercive force magnetic recording media include, for example, so-called metal magnetic thin film type magnetic recording media in which a ferromagnetic metal material is directly deposited on a nonmagnetic support. This metal magnetic thin film type magnetic recording medium not only has excellent coercive force and squareness ratio, and has excellent electromagnetic conversion characteristics at short wavelengths, but also allows recording demagnetization because the thickness of the magnetic layer can be made extremely thin. It has many advantages, such as extremely small loss of thickness during playback and reproduction, and the ability to increase the packing density of the magnetic material because there is no need to mix non-magnetic materials such as powder or powder into the magnetic layer. ing.

To manufacture the above magnetic recording medium, vacuum thin film formation technology,
For example, vacuum evaporation method, sputtering method.

Among these methods, the vacuum evaporation method is used because the apparatus is simple and the Yiin formation rate is fast. In order to manufacture a magnetic recording medium by such a vacuum evaporation method, a large-diameter cooling can is interposed in the middle of the tape-shaped nonmagnetic support being run from an unwinding roll to a winding roll in a vacuum. A magnetic layer is formed by evaporating and depositing a metal magnetic material on the non-magnetic support while traveling on the circumferential surface of the cooling can.

[Problems to be solved by the invention]

By the way, a plurality of guide rolls are disposed in the running system of the non-magnetic support, that is, in the running path spanning the unwinding roll, the cooling can, and the take-up roll, to make the non-magnetic support run smoothly. ing.

However, although these guide rolls are rotatably attached, they are only rotated by the frictional force caused by sliding contact with the running non-magnetic support, so they resist the running of the non-magnetic support. give. In particular, if the number of guide rolls in the traveling path increases, the resistance will increase accordingly, and a large resistance will be added to the traveling system of the nonmagnetic support. This resistance acts in the opposite direction to the medium running direction and applies back tension to the non-magnetic support, thereby applying a load to drive units such as the unwinding roll, take-up roll, and cooling can.

As a result, it becomes impossible to run the non-magnetic support at a constant speed, resulting in inconveniences such as the inability to ensure stable running conditions.

In addition, if the back tension is large, there is a risk that the magnetic layer will be formed with the non-magnetic support stretched or bent, and in this case, the non-magnetic support may return to its normal state. Occasionally, the magnetic layer is cracked, the film peels off, or the film thickness becomes defective.

Therefore, the present invention was proposed in view of the conventional situation, and aims to stabilize the running system of the non-magnetic support,
It is an object of the present invention to provide a vacuum evaporation apparatus for manufacturing a magnetic recording medium that can manufacture a magnetic recording medium that is free from film peeling, has excellent reliability, and can improve yield.

[Means for solving the invention]

The vacuum evaporation apparatus for manufacturing magnetic recording media of the present invention includes the above-mentioned 1
In order to achieve this purpose, a non-magnetic support traveling mechanism consisting of an unwinding roll, a winding roll, a cooling can, and a guide roll, and an evaporation mechanism consisting of an evaporation source and heating means for the evaporation source are provided in the vacuum chamber. It is characterized in that the guide rolls are forcedly driven or tendentially driven.

Here, the above-mentioned forced drive means that the guide roll is directly rotated in the running direction of the non-magnetic support using a drive device such as a motor.

On the other hand, in the forced drive, the guide roll is rotated by a direct drive device, whereas in the tension drive, the drive of the drive device is not directly transmitted to the guide roll, but is indirectly rotated by the guide roll through, for example, a bearing. The non-magnetic support is rotated in the traveling direction by transmitting the information to the media, thereby making it possible to cope with fluctuations in the medium traveling speed.

In addition, when performing the above-mentioned forced drive and tendency drive,
It is better to synchronize the guide 1 call with the cooling can and rotate it by °ζ.

[Effect]

According to the vacuum evaporation apparatus for manufacturing magnetic recording media of the present invention, the guide rolls constituting the non-magnetic support traveling mechanism are forcedly driven or tended to be driven, so that friction due to sliding contact between the guide rolls and the non-magnetic support The force is reduced and there is no possibility that pack tension will be applied to the non-magnetic support.

Therefore, the non-magnetic support is prevented from elongating or bending, and good running conditions are ensured. Further, there is no load on drive units such as the unwinding roll, cooling can, and winding roll, and the running system can be stabilized.

[Example] Hereinafter, a specific example to which the present invention is applied will be described with reference to the drawings.

As shown in FIG. 1, the vacuum evaporation apparatus for manufacturing a magnetic recording medium of the present invention includes an unwinding roll (2), a winding roll (3), a guide A non-magnetic support traveling mechanism constituting a traveling system for the elongated non-magnetic support (6) consisting of rolls (4), (4) and a cooling can (5), a crucible (7) which is a vapor deposition source, and a cooling can (5). The vapor deposition mechanism includes an electron gun (8) serving as a heating means for heating the crucible (7).

The vacuum evaporation apparatus includes the elongated nonmagnetic support (6).
is supplied from the unwinding roll (2) and cooled by the cooling can (5).
After forming a magnetic layer thereon, a vapor deposition type magnetic recording medium is manufactured by winding it up onto a winding roll (3).

The non-magnetic support (6) is placed on the side of the crucible (7) in the middle part where the non-magnetic support (6) runs from the unwinding roll (2) to the take-up roll (3), which constitutes the running system of the non-magnetic support (6). A cooling can (5) is provided so as to be pulled out. The cooling can (5) runs the non-magnetic support (6) at a constant speed toward the take-up roll (3) while sliding the non-magnetic support (6) on its peripheral surface. A metal magnetic material is deposited on the surface of the support (6). Note that the cooling can (5) is provided with a cooling device (not shown) to suppress changes due to the upper temperature limit of the non-magnetic support (6) in contact with the cooling can (5).

In addition, the cooling can (5) and the unwinding roll (2
) and between the take-up rolls (3), guide rolls (4) and (4) are disposed in order to make the non-magnetic support (6) run smoothly.

The guide rolls (4), (4) are directly driven, that is, forcedly driven, by a drive device such as a motor, and the grooved support (6) is moved in synchronization with the cooling can (5). It is designed to rotate in the direction of travel. According to this, it is possible to reduce the frictional force due to sliding contact between the guide rolls (4), (4) and the non-magnetic support (6), so the resistance force applied to the non-magnetic support (6) is suppressed. . Therefore, there is no possibility that back tension will be applied to the non-magnetic support (6), and the occurrence of elongation or bending of the non-magnetic support (6) is also avoided, ensuring a good running condition. In addition, there is no load on drive units such as the unwinding roll (2), the cooling can (5), and the take-up roll (3), making it possible to stabilize the running system.

Note that motors are independently attached to the guide rolls (4) and (4), but for example, a constant number of rotations is transmitted to a positive value between both guide rolls (4) and (4). Rather than using a possible timing belt, both guide rolls (4), (4) may be rotated by a single motor. Furthermore, in addition to the above-mentioned timing belt, for example, a flat belt, a pulley, etc. may be used.

Furthermore, in the present invention, the above-mentioned guide roll (4).

(4) may be driven in a tendentious manner. That is, as shown in FIG. 2, a guide roll outer cylinder (14) that is in sliding contact with the non-magnetic support (6) is attached to the guide roll shaft (12) via a bearing (13), and the guide roll (4)
, (4), and the guide roll shaft (12) is rotated in the running direction of the non-magnetic support (6) by a drive device such as a motor. According to this, the guide roll shaft (1
2) is rotated by a direct drive.

On the other hand, the guide roll outer cylinder (14) has a guide roll shaft (
12) is rotatable via a bearing (13), so the non-magnetic support (6) can also be rotated in the running direction at a rotation speed not corresponding to the rotation speed of the drive device but less than this. move. According to this, the guide roll outer cylinder (14
) Although it is not a forced drive that directly rotates the
Mechanical loss etc. are reduced and the guide roll (4
), (4) and the non-magnetic support (6) can reduce frictional force due to sliding contact, and the resistance force applied to the non-magnetic support (6) can be suppressed. Therefore, a good running condition of the non-magnetic support (6) is ensured.

Therefore, it is possible to manufacture a highly reliable magnetic recording medium with a high yield and free of film peeling, cracks, etc.

Further, the cooling can (5) and an exhaust hole (9) provided in the vacuum chamber (1) at a position opposite to the cooling can (5)
A crucible (
7) is provided. The above metal magnetic material (lO) is
It is heated by the electron beam from the electron gun (8), evaporates, and adheres to the surface of the nonmagnetic support (6) running along the circumferential surface of the cooling can (5). Note that the crucible (7) contains a magnetic material (1) on the evaporated gold.
0) can be deposited by arbitrarily controlling the deposition rate.

Further, between the cooling can (5) and the crucible (7) and in the vicinity of the cooling can (5), a cooling can (
5) is curved to face the circumferential surface of the shielding plate (1).
1) is provided. This block 1lliIiFi, (l
l) is to control the evaporation state of the evaporation vapor flow of the metal magnetic material (10) from the crucible (7) and the introduction state of inert gas, which will be described later. It is also used to regulate the vapor deposition range of the vapor flow. Furthermore, between the cooling can (5) and the crucible (7), an inert gas (for example, Ar or N) is added at the same time as the metal magnetic material (IO) is deposited.

A gas introduction pipe (12) is provided for introducing gas (e.g., etc.).

To manufacture a magnetic recording medium using the vacuum evaporation apparatus described above, the non-magnetic support (6) is fed out from the unwinding roll (2) and sequentially moved to the cooling can (5) via one of the guide rolls (4). and when running on the circumferential surface of the cooling can (5), the metal magnetic material (1O) is heated and evaporated with an electron gun (8) to form a metal magnetic thin film on the surface of the non-magnetic support (6). . Then, the non-magnetic support (6) on which the metal magnetic thin film is formed and used as a magnetic recording medium is directed from the cooling can (5) to the winding roll (3) via the other guide roll (4). It is run and wound up.

Here, a magnetic recording medium was actually produced using the vacuum evaporation apparatus under the following conditions.

That is, polyethylene terephthalate is used as the nonmagnetic support (6), and Co-N1 alloy (Co
:Ni-80: 20) with gold IA&N material (10)
A ferromagnetic metal tWJf9 of 2,000 yen was deposited as a magnetic layer. Moreover, the above-mentioned non-magnetic support (6)
The thickness of the guide roll (4) was changed to 10 #m, 8 prn, and 6 μm, and the guide roll (4) was forcibly driven (Example! to Example 3)
Alternatively, magnetic recording media of various thicknesses are manufactured by using the Tendency Drive (Example 4 to Example 6), and the running state of the non-magnetic support (6) and the roll after being wound around the winding roll (3) are Formation i-john (rolled form Jl!t
) was observed with 11 eyes. As a comparative example, a guide roll (
A magnetic recording medium was manufactured using 4) under the same conditions as above.

The results are shown in Table 1. In Table 1, 0. Those that are somewhat good are indicated by Δ, and those that are poor are indicated by ×.

Margin Table 1 Below: As seen from Table 1 above, the guide roll (4)
In Examples 1 to 3 in which the guide roll (4) was forcibly driven, the running condition and Both roll formations were good. especially,
When the thickness of the non-magnetic support (6) becomes thinner, the running condition and roll formation of the non-magnetic support (6) deteriorate (Comparative Example 2 and Comparative Example 3), but Ga II: 1-Rule (4) Example 2 in which the was forcibly driven. In Example 3, all cases approach relatively good conditions, and are effective even for the extremely thin non-magnetic support (6). In addition, in the magnetic recording medium obtained in this experimental example, no cranking occurred in the magnetic layer, and no film peeling or the like was observed.

Therefore, if a magnetic recording medium is manufactured using the vacuum evaporation apparatus of this embodiment in which the guide roll is forcibly driven, a good running condition of the non-magnetic support can be ensured, and the magnetic recording medium obtained thereby The reliability of the system will also be further improved.

On the other hand, in Examples 4 to 6 in which the guide roll (4) was driven in a tendentious manner, the running condition and roll formation of the non-magnetic support (6) were both good, as in the case where the guide roll (4) was driven in a forced manner. Therefore, even if the guide roll is driven in a tendentious manner, a good running condition of the non-magnetic support (6) can be ensured. In addition, in the magnetic layer of the magnetic recording medium obtained in this case as well, there was no occurrence of cranking and no film peeling.

〔Effect of the invention〕

As is clear from the above description, according to the vacuum evaporation apparatus for manufacturing magnetic recording media of the present invention, the guide rolls constituting the non-magnetic support traveling mechanism are forcedly driven or tendentiously driven. The frictional force due to the sliding contact between the magnetic support and the non-magnetic support is reduced, the resistance force applied to the magnetic support is suppressed, and no back tension occurs. Therefore, the occurrence of elongation, bending, etc. of the non-magnetic support is also avoided, and good running conditions are ensured. Further, there is no load on the driving parts such as the unwinding roll, the cooling can, the S scraping roll, etc., and the running system is stabilized.

Therefore, a highly reliable magnetic recording medium free from film peeling, cranks, etc. can be manufactured with a high yield.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing an example of a vacuum evaporation apparatus for manufacturing a magnetic recording medium to which the present invention is applied. FIG. 2 is an enlarged cross-sectional view of a main part showing an example of a guide roll that is driven by tendency. Vacuum chamber unwinding roll winding roll guide roll cooling - Tonyan non-magnetic support crucible electron gun patent applicant Sony Corporation

Claims (2)

[Claims] (1) A non-magnetic support traveling mechanism consisting of an unwinding roll, a winding roll, a cooling can, and a guide roll, and an evaporation mechanism consisting of an evaporation source and heating means for the evaporation source are provided in a vacuum chamber, A vacuum evaporation apparatus for manufacturing a magnetic recording medium, characterized in that the guide roll is forcibly driven. (2) A non-magnetic support traveling mechanism comprising an unwinding roll, a winding roll, a cooling can, and a guide roll, and an evaporation mechanism comprising an evaporation source and heating means for the evaporation source are provided in a vacuum chamber, A vacuum deposition apparatus for manufacturing a magnetic recording medium, characterized in that the guide roll is driven in a tendentious manner.