JPH02146366U - - Google Patents
Info
- Publication number
- JPH02146366U JPH02146366U JP5580989U JP5580989U JPH02146366U JP H02146366 U JPH02146366 U JP H02146366U JP 5580989 U JP5580989 U JP 5580989U JP 5580989 U JP5580989 U JP 5580989U JP H02146366 U JPH02146366 U JP H02146366U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cooling
- secondary ion
- ion mass
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims 5
- 239000012472 biological sample Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本案の一実施例の二次イオン質量分析
装置試料室内に具備した冷却および蒸着機構の断
面図である。 １……試料室、２……液体窒素冷却筒、３……
冷却導管、４……冷却素子、５……試料ホールダ
、６……蒸着ユニツト、７……シールド電極支柱
、８……対物レンズ、９……二次イオン引出電極
、１０……試料。
装置試料室内に具備した冷却および蒸着機構の断
面図である。 １……試料室、２……液体窒素冷却筒、３……
冷却導管、４……冷却素子、５……試料ホールダ
、６……蒸着ユニツト、７……シールド電極支柱
、８……対物レンズ、９……二次イオン引出電極
、１０……試料。
Claims (1)
- 【実用新案登録請求の範囲】 １ 液状物質および生体試料など含水成分を対称
に一次イオンビームの照射により二次イオン質量
分析を行う手段に於いて、試料の破損を軽減する
ため装置試料台に冷却素子を具備し該試料を直接
冷却する手段を備えたことを特徴とする二次イオ
ン質量分析装置。 ２ 請求の範囲第１項記載の二次イオン質量分析
装置において、上記該試料冷却後連続にして試料
表面に金属蒸着を施し帯電防止の蒸着機構を備え
たことを特徴とする二次イオン質量分析装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5580989U JPH02146366U (ja) | 1989-05-17 | 1989-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5580989U JPH02146366U (ja) | 1989-05-17 | 1989-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146366U true JPH02146366U (ja) | 1990-12-12 |
Family
ID=31579090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5580989U Pending JPH02146366U (ja) | 1989-05-17 | 1989-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146366U (ja) |
-
1989
- 1989-05-17 JP JP5580989U patent/JPH02146366U/ja active Pending
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