JPH02146425U - - Google Patents
Info
- Publication number
- JPH02146425U JPH02146425U JP5581189U JP5581189U JPH02146425U JP H02146425 U JPH02146425 U JP H02146425U JP 5581189 U JP5581189 U JP 5581189U JP 5581189 U JP5581189 U JP 5581189U JP H02146425 U JPH02146425 U JP H02146425U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- heat diffusion
- reactor core
- lid
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5581189U JPH02146425U (2) | 1989-05-17 | 1989-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5581189U JPH02146425U (2) | 1989-05-17 | 1989-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146425U true JPH02146425U (2) | 1990-12-12 |
Family
ID=31579094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5581189U Pending JPH02146425U (2) | 1989-05-17 | 1989-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146425U (2) |
-
1989
- 1989-05-17 JP JP5581189U patent/JPH02146425U/ja active Pending
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