JPS6292638U - - Google Patents
Info
- Publication number
- JPS6292638U JPS6292638U JP1986178499U JP17849986U JPS6292638U JP S6292638 U JPS6292638 U JP S6292638U JP 1986178499 U JP1986178499 U JP 1986178499U JP 17849986 U JP17849986 U JP 17849986U JP S6292638 U JPS6292638 U JP S6292638U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- jig
- elevating means
- treatment jig
- automatic loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178499U JPS6292638U (2) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178499U JPS6292638U (2) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292638U true JPS6292638U (2) | 1987-06-13 |
Family
ID=31120686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986178499U Pending JPS6292638U (2) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292638U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154342A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Diffusion furnace |
-
1986
- 1986-11-20 JP JP1986178499U patent/JPS6292638U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154342A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Diffusion furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0184428U (2) | ||
| JPS59117138U (ja) | 半導体製造装置 | |
| JPS6018541U (ja) | 気相成長装置 | |
| JPS6183027U (2) | ||
| JPH0631718Y2 (ja) | ボ−ト搬送装置 | |
| JPS6214723U (2) | ||
| JPS6188233U (2) | ||
| JPH033743U (2) | ||
| JPS63127121U (2) | ||
| JPH0367440U (2) | ||
| JPS63121426U (2) | ||
| JPH02146425U (2) | ||
| JPH0167732U (2) | ||
| JPS62179239U (2) | ||
| JPS62177031U (2) | ||
| JPS63153522U (2) | ||
| JPS59169040U (ja) | 半導体製造用の拡散炉 | |
| JPH0289824U (2) | ||
| JPS6333625U (2) | ||
| JPS59182932U (ja) | ウエハ−搬送装置 | |
| JPS60180206U (ja) | ウエハ搬送装置 | |
| JPS6120037U (ja) | 減圧cvd装置 | |
| JPH0353554U (2) | ||
| JPS6364770U (2) | ||
| JPH0180933U (2) |