JPH02146751U - - Google Patents
Info
- Publication number
- JPH02146751U JPH02146751U JP5582589U JP5582589U JPH02146751U JP H02146751 U JPH02146751 U JP H02146751U JP 5582589 U JP5582589 U JP 5582589U JP 5582589 U JP5582589 U JP 5582589U JP H02146751 U JPH02146751 U JP H02146751U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- electron gun
- emission
- field emission
- emission current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本案の一実施例のブロツク図、第２図
はエミシヨン電流のエミシヨン電流と時間関係を
示す図である。
１……陰極、２……第一陽極、３……第二陽極
、４……電圧電源、５……加速電圧電源、６……
比較回路、７……電子銃焼き出し電源、８……ヒ
ータ、９……陰極加熱電源。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a diagram showing the relationship between emission current and time. 1... Cathode, 2... First anode, 3... Second anode, 4... Voltage power supply, 5... Accelerating voltage power supply, 6...
Comparison circuit, 7...electron gun baking power supply, 8...heater, 9...cathode heating power supply.
Claims (1)
形電子銃、電子銃を制御するための加速電圧電源
、エミシヨン電流引き出し電源を有する装置にお
いて、陰極より放射されるエミシヨン電流の初期
減少領域における立ち下がり時間の割合により、
電子銃の焼き出し時間を設定することを特徴とす
る電界放射形走査電子顕微鏡。 In a device having a field emission type electron gun having an emission power supply extraction electrode, an accelerating voltage power supply for controlling the electron gun, and an emission current extraction power supply, the ratio of the fall time in the initial decrease region of the emission current emitted from the cathode is determined. ,
A field emission scanning electron microscope characterized by setting a bakeout time of an electron gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5582589U JPH02146751U (en) | 1989-05-17 | 1989-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5582589U JPH02146751U (en) | 1989-05-17 | 1989-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146751U true JPH02146751U (en) | 1990-12-13 |
Family
ID=31579120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5582589U Pending JPH02146751U (en) | 1989-05-17 | 1989-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146751U (en) |
-
1989
- 1989-05-17 JP JP5582589U patent/JPH02146751U/ja active Pending
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