JPH02146832U

JPH02146832U -

Info

Publication number: JPH02146832U
Application number: JP4877790U
Authority: JP
Priority date: 1990-05-10
Filing date: 1990-05-10
Publication date: 1990-12-13

Description

[Brief explanation of drawings]

第１図は本考案によるペレツトボンデイング装
置の一例を示す略平面図、第２図は第１図のマウ
ントユニツト部を示す側面図、第３図は第１図に
おける基板と基板支持台の一部を示す略平面図、
第４図は第１図における基板と基板支持台を示す
断面図、第５図は本考案の一実施例を示す制御系
統図、第６図は第５図のパターン認識回路におけ
る認識の状態を示す座標図である。１１……基板、１３……ペレツト、２２……マ
ウントユニツト、２５……Ｘテーブル、２７……
Ｙテーブル、３１……コレツト、４１……キヤリ
ア、４２……ガイドレール、４４……位置決めピ
ン、４５……位置決め孔、４６……設定器、４９
……パターン認識回路、５０……モニタ、５１…
…演算回路、５２……マーク発生回路、５３……
制御回路、５４……駆動器、Ｍ，ｍ……検出定点
、Ａ，ａ，Ｂ，ｂ……マウント点。 FIG. 1 is a schematic plan view showing an example of the pellet bonding apparatus according to the present invention, FIG. 2 is a side view showing the mount unit shown in FIG. 1, and FIG. A schematic plan view showing the part;
FIG. 4 is a sectional view showing the substrate and substrate support in FIG. 1, FIG. 5 is a control system diagram showing an embodiment of the present invention, and FIG. 6 shows the recognition state in the pattern recognition circuit shown in FIG. FIG. 11...Substrate, 13...Pellet, 22...Mount unit, 25...X table, 27...
Y table, 31... Collet, 41... Carrier, 42... Guide rail, 44... Positioning pin, 45... Positioning hole, 46... Setting device, 49
...Pattern recognition circuit, 50...Monitor, 51...
... Arithmetic circuit, 52 ... Mark generation circuit, 53 ...
Control circuit, 54...Driver, M, m...Detection fixed point, A, a, B, b...Mount point.

Claims

[Scope of utility model registration request]

In a pellet bonding apparatus that sequentially mounts pellets on a substrate having a plurality of predetermined mounting points supported by a substrate support using a collet whose movement is controlled by a drive unit, a predetermined detection point is placed on the substrate. a setting section in which regular positions of the fixed point and the plurality of predetermined mounting points are stored; an imaging section that takes an image of the board; and a recognition section that recognizes the actual position of the detection fixed point based on the image taken by the imaging section. , determining the amount of deviation of the actual position recognized by the recognition unit from the normal position stored in the setting unit regarding the detection fixed point, and determining the actual position of each of the plurality of predetermined mounting points based on this amount of deviation; Pellet bonding characterized by having a calculation unit that performs the calculation, and a control unit that controls the drive unit to move the collet that sequentially adsorbs pellets to a plurality of actual mounting points calculated by the calculation unit. Device.