JPH0214796U - - Google Patents
Info
- Publication number
- JPH0214796U JPH0214796U JP1988093709U JP9370988U JPH0214796U JP H0214796 U JPH0214796 U JP H0214796U JP 1988093709 U JP1988093709 U JP 1988093709U JP 9370988 U JP9370988 U JP 9370988U JP H0214796 U JPH0214796 U JP H0214796U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- semiconductor manufacturing
- manufacturing equipment
- vertical
- element holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093709U JPH0214796U (de) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093709U JPH0214796U (de) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214796U true JPH0214796U (de) | 1990-01-30 |
Family
ID=31318179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988093709U Pending JPH0214796U (de) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214796U (de) |
-
1988
- 1988-07-15 JP JP1988093709U patent/JPH0214796U/ja active Pending