JPH0214807B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a piezoelectric vibrating component with resistance.

Conventionally, when you want to combine a piezoelectric vibrating component such as a resonator, a filter, an oscillator, a trap element, a resonant element for FM disc liminator, etc., which are formed by providing electrodes on a piezoelectric substrate, with a resistor, what are resistors and piezoelectric vibrating components? They were made separately and handled separately on the printed circuit board, but if they were separate, the number of parts would increase, resulting in a disadvantage in terms of space on the printed circuit board.

Therefore, in recent years, piezoelectric vibrating components have been proposed in which electrodes and resistors are provided on a single piezoelectric substrate, which is advantageous in terms of space due to the reduction in the number of components and miniaturization.

A general method for manufacturing piezoelectric vibrating parts as described above uses a porcelain material with a composition that exhibits piezoelectric properties.
This is fired to form a piezoelectric substrate, this piezoelectric substrate is polarized to give it piezoelectricity, and processed into a resonant electrode and the like. After this, a resistance paste was applied to the piezoelectric substrate and fixed by baking.

However, if the piezoelectric substrate is heated to high temperatures when baking the resistance paste, the piezoelectricity of the piezoelectric substrate will be lost, so it is necessary to bake the resistance paste at a temperature below which does not impair the piezoelectricity of the piezoelectric substrate. be.

For this reason, there is a problem that the resistor is insufficiently baked, making it impossible to obtain a strong one, and causing variations in resistance value and changes over time.

This invention was made to solve the above-mentioned problems, and it is an object of the present invention to provide a piezoelectric vibrating component in which the resistance can be baked at high temperature and the resistance has excellent strength and accuracy.

The structure of this invention is to provide a resistive film at a desired position on a substrate that can be made into a piezoelectric ceramic plate, bake it at a sufficient temperature, coat the surface of the resistive film except for both ends with nonconducting ink, and then coat the entire surface of the substrate with nonconducting ink. Polarization is performed by applying an electrode film, and the necessary pattern is printed on the electrode film with resist ink and etched, making it possible to bake the resistive film at high temperature before forming the electrode film. It is.

Hereinafter, one embodiment of the present invention will be described based on the accompanying drawings.

The drawing shows an example of application to a piezoelectric vibrating component in which a piezoelectric ceramic filter with a single element configuration is provided with one resistor.
Figures 1 to 9 show the manufacturing process.
Although Figure 0 shows the same electrical circuit as above, it can also be applied to other piezoelectric vibrating components such as resonators.

First, as shown in FIG. 1, a substrate 1 is formed using a material that can be made into a piezoelectric ceramic plate, and then, as shown in FIG. The resistive film 2 is formed by baking at a high temperature.

The resistive film 2 becomes firmly fixed by baking at high temperature.

As shown in FIG. 3, after the surface of the resistive film 2 except for both ends is coated with a nonconducting ink 3, an electrode film 4 is provided on the entire front and back surfaces of the substrate 1. (See Figure 4) The electrode film 4 is formed by means such as vapor deposition or sputtering, and the portion of the resistive film 2 covered with the non-conducting ink 3 does not come into contact with the electrode film 4, and both ends thereof Only the exposed portion will be electrically connected to the electrode film 4, and this portion will later become the connection portion between the input and output terminals of the electrode.

A high direct current voltage is applied to the front and back electrode films of the substrate 1 on which the electrode film 4 is formed, and polarization treatment is performed in the thickness direction of the mother substrate as shown in FIG.
to form.

Thereafter, an electrode pattern to be left on both the front and back electrode films 4 is printed with resist ink 5.

FIG. 6 shows the resist ink of the electrode pattern applied to the front surface of the piezoelectric substrate 1a, and FIG. 7 shows the resist ink applied to the back surface of the piezoelectric substrate 1a.

The resist ink 5 on the surface is applied to form a pair of vibrating electrodes, and portions corresponding to input/output terminals reach the ends of the nonconductive ink 3.

After printing the resist ink 5, both the front and back electrode films 4 are etched. When etching is performed, only the areas covered with resist ink 5 remain as they are,
The exposed unnecessary portions of the electrode film 4 are removed, and the resist ink 5 is removed by subsequent cleaning.
The electrode 6 of the required pattern is formed as shown in FIG.

Further, as shown in FIG. 9, if necessary, the resistance film 2 may be trimmed 7 together with the nonconductor ink 3 to obtain a desired resistance value. A piezoelectric ceramic filter is completed in which the input and output terminals A and B are connected by a resistive film 2, and a vibrating electrode 6c is provided on the back side. All you have to do is process it.

In the embodiment, one piezoelectric vibrating component was manufactured, but a large mother board may be used and a large number of piezoelectric vibrating components may be processed simultaneously.

As described above, according to the present invention, a resistive film is provided at the required position of a substrate that can be made into a piezoelectric ceramic plate, and then the resistive film is coated with a nonconducting ink, and then an electrode film is formed, and the substrate is coated with a nonconducting ink. By sequentially polarizing the electrode film, printing with resist ink on the electrode film, and etching to remove unnecessary parts of the electrode film, the resistive film can be formed before the piezoelectric substrate is polarized. As a result, it is now possible to bake a resistive film at a sufficiently high temperature regardless of the piezoelectricity of the piezoelectric substrate, forming a strong and highly accurate resistive film, resulting in a composite piezoelectric vibrating component with consistent performance. be able to.

[Brief explanation of drawings]

Each of FIGS. 1 to 9 is a process diagram showing a manufacturing method according to the present invention, and FIG. 10 is a circuit diagram showing an example of a piezoelectric vibrating component. DESCRIPTION OF SYMBOLS 1... Substrate, 1a... Piezoelectric substrate, 2... Resistive film, 3... Nonconductor ink, 4... Electrode film, 5...
Resist ink, 6...electrode, 7...trimming.

Claims (1)

[Claims] 1. A resistive film is provided at the required position of a substrate that can be made into a piezoelectric ceramic plate and baked, the surface of this resistive film except for both ends is coated with non-conducting ink, an electrode film is provided on the entire surface of the substrate, and then the polarization of the substrate is performed. A method for manufacturing a piezoelectric vibrating component having resistance, which comprises printing a pattern to be left on the electrode film after polarization with resist ink, and then etching to remove unnecessary portions of the electrode film.