JPH02148548A - 電磁型対物レンズ及び漏洩磁束消滅方法 - Google Patents
電磁型対物レンズ及び漏洩磁束消滅方法Info
- Publication number
- JPH02148548A JPH02148548A JP63256647A JP25664788A JPH02148548A JP H02148548 A JPH02148548 A JP H02148548A JP 63256647 A JP63256647 A JP 63256647A JP 25664788 A JP25664788 A JP 25664788A JP H02148548 A JPH02148548 A JP H02148548A
- Authority
- JP
- Japan
- Prior art keywords
- coil current
- magnetic flux
- coil
- lower pole
- leakage magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63256647A JPH02148548A (ja) | 1988-10-12 | 1988-10-12 | 電磁型対物レンズ及び漏洩磁束消滅方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63256647A JPH02148548A (ja) | 1988-10-12 | 1988-10-12 | 電磁型対物レンズ及び漏洩磁束消滅方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02148548A true JPH02148548A (ja) | 1990-06-07 |
| JPH0587934B2 JPH0587934B2 (2) | 1993-12-20 |
Family
ID=17295515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63256647A Granted JPH02148548A (ja) | 1988-10-12 | 1988-10-12 | 電磁型対物レンズ及び漏洩磁束消滅方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02148548A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613009A (ja) * | 1993-04-26 | 1994-01-21 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP2015149203A (ja) * | 2014-02-07 | 2015-08-20 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
-
1988
- 1988-10-12 JP JP63256647A patent/JPH02148548A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613009A (ja) * | 1993-04-26 | 1994-01-21 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP2015149203A (ja) * | 2014-02-07 | 2015-08-20 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0587934B2 (2) | 1993-12-20 |
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