JPH02149105U - - Google Patents
Info
- Publication number
- JPH02149105U JPH02149105U JP5840889U JP5840889U JPH02149105U JP H02149105 U JPH02149105 U JP H02149105U JP 5840889 U JP5840889 U JP 5840889U JP 5840889 U JP5840889 U JP 5840889U JP H02149105 U JPH02149105 U JP H02149105U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thin film
- deposited
- magnetic head
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 27
- 230000005291 magnetic effect Effects 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000011229 interlayer Substances 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims 5
- 239000007769 metal material Substances 0.000 claims 5
- 239000000463 material Substances 0.000 claims 3
- 229910044991 metal oxide Inorganic materials 0.000 claims 2
- 150000004706 metal oxides Chemical class 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 229910001120 nichrome Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Description
第１図乃至第１０図は本考案に係り、第１図は
薄膜磁気ヘツドの要部断面図、第２図、第３図、
第４図、第５図、第６図、第７図、第８図及び第
９図は夫々薄膜磁気ヘツドの製造方法を示す断面
図、第１０図は他の実施例の薄膜磁気ヘツドの要
部断面図である。第１１図は従来の薄膜磁気ヘツ
ドの要部断面図である。
１…基板、２…下部磁性層、３…ギヤツプスペ
ーサ、４ａ…第１導体コイル層、４ｂ…第２導体
コイル層、５…層間絶縁層、６…上部磁性層、１
０…第１の拡散防止層、１１…第２の拡散防止層
。
1 to 10 relate to the present invention, in which FIG. 1 is a sectional view of the main part of a thin film magnetic head, FIGS. 2 and 3,
4, 5, 6, 7, 8, and 9 are cross-sectional views showing a method for manufacturing a thin film magnetic head, respectively, and FIG. 10 is a schematic diagram of another embodiment of a thin film magnetic head. FIG. FIG. 11 is a sectional view of a main part of a conventional thin film magnetic head. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Lower magnetic layer, 3...Gap spacer, 4a...First conductor coil layer, 4b...Second conductor coil layer, 5...Interlayer insulating layer, 6...Upper magnetic layer, 1
0...First diffusion prevention layer, 11...Second diffusion prevention layer.
Claims (1)
性層を被着形成し、該下部磁性層上に導体コイル
層、該導体コイル層を覆う非磁性の金属酸化物材
料よりなる層間絶縁層及び磁気キヤツプ形成用の
ギヤツプスペーサを被着形成し、前記層間絶縁上
に強磁性金属材料よりなる上部磁性層を被着形成
してなる薄膜磁気ヘツドにおいて、前記層間絶縁
層を拡散防止層を介して前記下部磁性層上に被着
形成したことを特徴とする薄膜磁気ヘツド。 (2) 基板上に強磁性金属材料よりになる下部磁
性層を被着形成し、該下部磁性層上に導体コイル
層、該導体コイル層を覆う非磁性の金属酸化物材
料よりなる層間絶縁層及び磁気キヤツプ形成用の
ギヤツプスペーサを被着形成し、前記層間絶縁上
に強磁性金属材料よりなる上部磁性層を被着形成
してなる薄膜磁気ヘツドにおいて、前記上部磁性
層を拡散防止層を介して前記層間絶縁層上に被着
形成したことを特徴とする薄膜磁気ヘツド。 (3) 前記拡散防止層Ｃｒ，Ｔｉ，Ｎｉ，Ｗ，Ｍ
ｏ，ＮｉＣｒ，ＴｉＷ，ＴｉＣ，ＴｉＮ等により
形成したことを特徴とする請求項(1)又は(2)記載
の薄膜磁気ヘツド。 (4) 前記拡散防止層の熱膨張係数が該拡散防止
層と接している前記強磁性金属材料の熱膨張係数
と前記金属酸化物材料の熱膨張係数との間にある
ことを特徴とする請求項(1)又は(2)記載の薄膜磁
気ヘツド。[Claims for Utility Model Registration] (1) A lower magnetic layer made of a ferromagnetic metal material is deposited on a substrate, a conductor coil layer is placed on the lower magnetic layer, and a non-magnetic metal is used to cover the conductor coil layer. In a thin film magnetic head, an interlayer insulating layer made of an oxide material and a gap spacer for forming a magnetic cap are deposited, and an upper magnetic layer made of a ferromagnetic metal material is deposited on the interlayer insulating layer. 1. A thin film magnetic head, characterized in that a layer is deposited on the lower magnetic layer via a diffusion prevention layer. (2) A lower magnetic layer made of a ferromagnetic metal material is deposited on the substrate, a conductive coil layer is formed on the lower magnetic layer, and an interlayer insulating layer made of a non-magnetic metal oxide material covers the conductive coil layer. and a gap spacer for forming a magnetic cap, and an upper magnetic layer made of a ferromagnetic metal material is deposited on the interlayer insulation. A thin film magnetic head characterized in that the thin film magnetic head is formed on the interlayer insulating layer. (3) The diffusion prevention layer Cr, Ti, Ni, W, M
2. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is made of NiCr, TiW, TiC, TiN, or the like. (4) A claim characterized in that the coefficient of thermal expansion of the diffusion prevention layer is between the coefficient of thermal expansion of the ferromagnetic metal material in contact with the diffusion prevention layer and the coefficient of thermal expansion of the metal oxide material. The thin film magnetic head according to item (1) or (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5840889U JPH02149105U (en) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5840889U JPH02149105U (en) | 1989-05-19 | 1989-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149105U true JPH02149105U (en) | 1990-12-19 |
Family
ID=31583989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5840889U Pending JPH02149105U (en) | 1989-05-19 | 1989-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149105U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140510A (en) * | 1983-12-28 | 1985-07-25 | Sony Corp | Substrate for thin film magnetic head |
| JPS62145521A (en) * | 1985-12-18 | 1987-06-29 | Sony Corp | Thin film magnetic head |
| JPS6331310A (en) * | 1986-07-25 | 1988-02-10 | Murata Mfg Co Ltd | Lc filter |
| JPS63175213A (en) * | 1987-01-14 | 1988-07-19 | Hitachi Ltd | thin film magnetic head |
-
1989
- 1989-05-19 JP JP5840889U patent/JPH02149105U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140510A (en) * | 1983-12-28 | 1985-07-25 | Sony Corp | Substrate for thin film magnetic head |
| JPS62145521A (en) * | 1985-12-18 | 1987-06-29 | Sony Corp | Thin film magnetic head |
| JPS6331310A (en) * | 1986-07-25 | 1988-02-10 | Murata Mfg Co Ltd | Lc filter |
| JPS63175213A (en) * | 1987-01-14 | 1988-07-19 | Hitachi Ltd | thin film magnetic head |
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