JPH0215723U - - Google Patents

Info

Publication number
JPH0215723U
JPH0215723U JP9308488U JP9308488U JPH0215723U JP H0215723 U JPH0215723 U JP H0215723U JP 9308488 U JP9308488 U JP 9308488U JP 9308488 U JP9308488 U JP 9308488U JP H0215723 U JPH0215723 U JP H0215723U
Authority
JP
Japan
Prior art keywords
discharge electrode
bottom plate
electrode according
attached
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9308488U
Other languages
Japanese (ja)
Other versions
JP2543506Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988093084U priority Critical patent/JP2543506Y2/en
Publication of JPH0215723U publication Critical patent/JPH0215723U/ja
Application granted granted Critical
Publication of JP2543506Y2 publication Critical patent/JP2543506Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の着脱式放電電極の底板の一例
を示す平面図であり、第２図、第３図、第４図、
第５図は、本考案で使用する型材の一例を示す斜
視図である。また、第６図は従来のプラズマＣＶ
Ｄ装置を示す断面図であり、第７図は本考案の着
脱式放電電極を従来のプラズマＣＶＤ装置に取付
けた状態を示す断面図である。 図面において、１……底板、２〜５……型材、
６……既設放電電極、７……基板、８……高周波
電源、９……貫通穴、１０……タツプ穴、１１…
…原料ガス供給穴を示す。 FIG. 1 is a plan view showing an example of the bottom plate of the removable discharge electrode of the present invention, and FIGS. 2, 3, 4,
FIG. 5 is a perspective view showing an example of the mold material used in the present invention. Also, Figure 6 shows the conventional plasma CV
FIG. 7 is a cross-sectional view showing the D device, and FIG. 7 is a cross-sectional view showing a state in which the removable discharge electrode of the present invention is attached to a conventional plasma CVD device. In the drawings, 1... bottom plate, 2 to 5... shape material,
6...Existing discharge electrode, 7...Substrate, 8...High frequency power supply, 9...Through hole, 10...Tap hole, 11...
... Shows the raw material gas supply hole.

Claims (1)

【実用新案登録請求の範囲】 (1) 少なくとも底板と、該底板に装脱着自在に
設けられうる型材より構成される着脱式プラズマ
放電電極。 (2) 装着された型材により底板上に凹凸形状が
形成される請求項１記載の放電電極。 (3) 底板上に型材を装着しうるタツプ穴が設け
られている請求項１記載の放電電極。 (4) 既設の放電電極上に底板を介して着脱自在
に取りつけられる請求項１記載の放電電極。 (5) 底板を既設の放電電極上に緊結するための
貫通穴が設けられている請求項１記載の放電電極
。[Claims for Utility Model Registration] (1) A removable plasma discharge electrode comprising at least a bottom plate and a profile that can be detachably attached to the bottom plate. (2) The discharge electrode according to claim 1, wherein an uneven shape is formed on the bottom plate by the attached mold material. (3) The discharge electrode according to claim 1, wherein the bottom plate is provided with a tap hole into which a shaped material can be attached. (4) The discharge electrode according to claim 1, which is detachably attached to an existing discharge electrode via a bottom plate. (5) The discharge electrode according to claim 1, further comprising a through hole for fastening the bottom plate onto the existing discharge electrode.
JP1988093084U 1988-07-15 1988-07-15 Removable discharge electrode Expired - Lifetime JP2543506Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988093084U JP2543506Y2 (en) 1988-07-15 1988-07-15 Removable discharge electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988093084U JP2543506Y2 (en) 1988-07-15 1988-07-15 Removable discharge electrode

Publications (2)

Publication Number Publication Date
JPH0215723U true JPH0215723U (en) 1990-01-31
JP2543506Y2 JP2543506Y2 (en) 1997-08-06

Family

ID=31317534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988093084U Expired - Lifetime JP2543506Y2 (en) 1988-07-15 1988-07-15 Removable discharge electrode

Country Status (1)

Country Link
JP (1) JP2543506Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226925A (en) * 1985-04-01 1986-10-08 Anelva Corp Discharge reaction device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226925A (en) * 1985-04-01 1986-10-08 Anelva Corp Discharge reaction device

Also Published As

Publication number Publication date
JP2543506Y2 (en) 1997-08-06

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