JPH0215735U - - Google Patents
Info
- Publication number
- JPH0215735U JPH0215735U JP9377588U JP9377588U JPH0215735U JP H0215735 U JPH0215735 U JP H0215735U JP 9377588 U JP9377588 U JP 9377588U JP 9377588 U JP9377588 U JP 9377588U JP H0215735 U JPH0215735 U JP H0215735U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- electrode
- ground potential
- chuck device
- insulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Wire Bonding (AREA)
- Electron Beam Exposure (AREA)
- Jigs For Machine Tools (AREA)
Description
第１図ａ，ｂは夫々本考案の一実施例を示した
静電チヤツク装置の平面図、Ａ―Ａ断面図、第２
図は本考案の他の実施例を示したもの、第３図ａ
は従来の静電チヤツク装置の一例を示した平面図
、同図ｂはそのＡ―Ａ断面図である。
１：絶縁部材、２：静電チヤツク用電極、３：
ウエハ、４：電源、５：大地電極。
Figures 1a and 1b are a plan view, an AA cross-sectional view, and a second
The figure shows another embodiment of the present invention, Figure 3a
1 is a plan view showing an example of a conventional electrostatic chuck device, and FIG. 1: Insulating member, 2: Electrostatic chuck electrode, 3:
Wafer, 4: power supply, 5: ground electrode.
Claims (1)
地電位にある材料との間に電圧を印加して材料を
静電的に吸着するように成した静電チヤツク装置
において、上記静電チヤツク用電極のサイド側と
上記材料のエツジ部との間に大地電位にある電極
を配置した静電チヤツク装置。 In an electrostatic chuck device configured to electrostatically attract a material by applying a voltage between an electrostatic chuck electrode with an insulating member interposed therebetween and a material at ground potential, the electrostatic chuck electrode described above An electrostatic chuck device comprising an electrode at ground potential between the side of the material and the edge of the material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093775U JPH0717153Y2 (en) | 1988-07-15 | 1988-07-15 | Electrostatic chuck device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988093775U JPH0717153Y2 (en) | 1988-07-15 | 1988-07-15 | Electrostatic chuck device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215735U true JPH0215735U (en) | 1990-01-31 |
| JPH0717153Y2 JPH0717153Y2 (en) | 1995-04-19 |
Family
ID=31318250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988093775U Expired - Lifetime JPH0717153Y2 (en) | 1988-07-15 | 1988-07-15 | Electrostatic chuck device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717153Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103222043A (en) * | 2010-09-08 | 2013-07-24 | 恩特格林斯公司 | High conductivity electrostatic chuck |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142654A (en) * | 1986-12-04 | 1988-06-15 | Sumitomo Metal Ind Ltd | Electrostatic suction device |
-
1988
- 1988-07-15 JP JP1988093775U patent/JPH0717153Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142654A (en) * | 1986-12-04 | 1988-06-15 | Sumitomo Metal Ind Ltd | Electrostatic suction device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103222043A (en) * | 2010-09-08 | 2013-07-24 | 恩特格林斯公司 | High conductivity electrostatic chuck |
| JP2013542590A (en) * | 2010-09-08 | 2013-11-21 | インテグリス・インコーポレーテッド | Highly conductive electrostatic chuck |
| KR20140012613A (en) * | 2010-09-08 | 2014-02-03 | 엔테그리스, 아이엔씨. | High conductivity electrostatic chuck |
| CN103222043B (en) * | 2010-09-08 | 2016-10-12 | 恩特格林斯公司 | A kind of high conductivity electrostatic chuck |
| US9692325B2 (en) | 2010-09-08 | 2017-06-27 | Entegris, Inc. | High conductivity electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0717153Y2 (en) | 1995-04-19 |