JPH0216195B2 - - Google Patents

Info

Publication number
JPH0216195B2
JPH0216195B2 JP59080732A JP8073284A JPH0216195B2 JP H0216195 B2 JPH0216195 B2 JP H0216195B2 JP 59080732 A JP59080732 A JP 59080732A JP 8073284 A JP8073284 A JP 8073284A JP H0216195 B2 JPH0216195 B2 JP H0216195B2
Authority
JP
Japan
Prior art keywords
workpiece
machining
cut
processing
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59080732A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60223687A (ja
Inventor
Kyoshi Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP59080732A priority Critical patent/JPS60223687A/ja
Publication of JPS60223687A publication Critical patent/JPS60223687A/ja
Publication of JPH0216195B2 publication Critical patent/JPH0216195B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP59080732A 1984-04-20 1984-04-20 高エネルギビ−ムカツト加工方法 Granted JPS60223687A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59080732A JPS60223687A (ja) 1984-04-20 1984-04-20 高エネルギビ−ムカツト加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59080732A JPS60223687A (ja) 1984-04-20 1984-04-20 高エネルギビ−ムカツト加工方法

Publications (2)

Publication Number Publication Date
JPS60223687A JPS60223687A (ja) 1985-11-08
JPH0216195B2 true JPH0216195B2 (fr) 1990-04-16

Family

ID=13726547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59080732A Granted JPS60223687A (ja) 1984-04-20 1984-04-20 高エネルギビ−ムカツト加工方法

Country Status (1)

Country Link
JP (1) JPS60223687A (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4886466A (fr) * 1972-02-16 1973-11-15
JPS5925380B2 (ja) * 1977-06-03 1984-06-16 日本電気ホームエレクトロニクス株式会社 半導体ウエハのスクライブ方法
JPS57193289A (en) * 1981-05-25 1982-11-27 Toshiba Corp Method and device for cutting of tubular body by laser beam

Also Published As

Publication number Publication date
JPS60223687A (ja) 1985-11-08

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