JPH02167601A - Flexible vibrator - Google Patents
Flexible vibratorInfo
- Publication number
- JPH02167601A JPH02167601A JP32280388A JP32280388A JPH02167601A JP H02167601 A JPH02167601 A JP H02167601A JP 32280388 A JP32280388 A JP 32280388A JP 32280388 A JP32280388 A JP 32280388A JP H02167601 A JPH02167601 A JP H02167601A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- axis
- flexible
- flexural
- resonance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007769 metal material Substances 0.000 claims abstract description 22
- 238000005520 cutting process Methods 0.000 abstract description 31
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000003754 machining Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/02—Driving main working members
- B23Q5/027—Driving main working members reciprocating members
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、超音波振動により刃物を切削方向に振動させ
て切削する旋盤、形削り盤などの超音波振動切削装置に
用いるのに適した超音波振動の発生源であるたわみ振動
子に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention provides an ultrasonic wave generator suitable for use in ultrasonic vibration cutting devices such as lathes and shapers that cut by vibrating a blade in the cutting direction using ultrasonic vibrations. This relates to a flexural oscillator that is a source of vibration.
従来の技術
超音波振動切削装置に用いられる振動子としては、振動
子自身でたわみ振動を発生するたわみ振動子が用いられ
ている。また、そのようなたわみ振動子は、その出力端
部での振動方向がその軸と直角方向に振動するため、超
音波ウエルダや超音波カッター等のように加工時に印加
する圧力と直角に振動させたい場合などにも、その機構
的な有利さからしばしば利用されている。BACKGROUND OF THE INVENTION As a vibrator used in a conventional ultrasonic vibration cutting device, a flexural oscillator that generates flexural vibration by itself is used. In addition, since the vibration direction of such a flexible vibrator at its output end is perpendicular to its axis, it cannot be vibrated perpendicularly to the pressure applied during processing, such as in an ultrasonic welder or an ultrasonic cutter. Due to its mechanical advantages, it is often used in cases where
このようなたわみ振動子は、特開昭62−114478
号公報により、また、それを適用した超音波振動切削装
置は特開昭63−191501号公報により明らかなよ
うに、既に本出願人によって提案されている。Such a flexural oscillator is disclosed in Japanese Patent Application Laid-Open No. 62-114478.
As is clear from Japanese Patent Laid-Open No. 63-191501, an ultrasonic vibration cutting device to which the same is applied has already been proposed by the present applicant.
超音波振動切削装置に、そのようなたわみ振動子による
振動系を用いた一例を第6図ないし第10図に基づいて
説明する。まず、たわみ振動子1は金属材2,3とこれ
らの金属材2,3により両側を挾まれた二枚の円環状の
電歪素子4.5とにより大径部が形成されている。これ
らの電歪素子4.5は、厚み方向に分極されており、か
つ、直径方向に分断された電極6及び7を有している。An example of using a vibration system using such a flexible oscillator in an ultrasonic vibration cutting device will be described with reference to FIGS. 6 to 10. First, the deflection vibrator 1 has a large diameter portion formed by metal materials 2 and 3 and two annular electrostrictive elements 4.5 sandwiched between the metal materials 2 and 3 on both sides. These electrostrictive elements 4.5 are polarized in the thickness direction and have electrodes 6 and 7 separated in the diameter direction.
このような2枚の電歪素子4.5は、その電極6゜7を
それぞれ対向させ、電極板8,9を介して積層して設け
られている。そして、前記電歪素子4゜5の内周には、
絶縁管10が挿入されており、前記電歪素子5と前記金
属材3の間には、共通電極板11が設けられている。さ
らに、前記金属材2の一端にはボルト12が螺合される
ねじ穴13が形成されており、それらはボルト12によ
り一体に締着されている。These two electrostrictive elements 4.5 are stacked one on top of the other with electrode plates 8 and 9 in between, with their electrodes 6.7 facing each other. And, on the inner periphery of the electrostrictive element 4.5,
An insulating tube 10 is inserted, and a common electrode plate 11 is provided between the electrostrictive element 5 and the metal material 3. Furthermore, a screw hole 13 into which a bolt 12 is screwed is formed at one end of the metal material 2, and the screw holes 13 are fastened together by the bolt 12.
なお、前記電歪素子6,7としては、第7図に示すよう
な円環状のものとして説明したが、実施に当っては、第
9図に示すような一対の半円環状のものを用いても良い
。Although the electrostrictive elements 6 and 7 have been described as having an annular shape as shown in FIG. 7, in actual practice, a pair of semicircular elements as shown in FIG. 9 are used. It's okay.
ついで、前記金属材2の出力端部には、バイト14が固
着されたバイトホルダ15が取付けられている。このバ
イトホルダ15を用いる理由は、前記バイト14がたわ
み振動子lの出力端部に直接固着されていると、バイト
14の交換や刃先の研ぎ直しなどの時に、たわみ振動子
lごと取り外して行なわれなければならず作業が煩雑と
なることを防止するためである。Next, a cutting tool holder 15 to which a cutting tool 14 is fixed is attached to the output end of the metal material 2. The reason for using this cutting tool holder 15 is that if the cutting tool 14 is directly fixed to the output end of the flexible oscillator 1, the entire flexural oscillator 1 must be removed when replacing the tool 14 or resharpening the cutting edge. This is to prevent the work from becoming complicated.
しかして、バイトホルダ15の取付構造について説明す
る。まず、バイト14を固着したバイトホルダ15と金
属材2との結合部は、第6図(b)に示す振動分布のル
ープ部分L1に位置している。The mounting structure of the tool holder 15 will now be explained. First, the joint between the cutting tool holder 15 to which the cutting tool 14 is fixed and the metal material 2 is located in the loop portion L1 of the vibration distribution shown in FIG. 6(b).
そして、バイトホルダ15の端部に左ねじ16が形成さ
れ、前記金属材の端部に右ねじ17が形成され、これら
の左ねじ16と右ねじ17とに螺合する締着具18によ
り前記バイトホルダ15は前記金属材2に締着されてい
る。A left-hand thread 16 is formed at the end of the tool holder 15, and a right-hand thread 17 is formed at the end of the metal material. The tool holder 15 is fastened to the metal material 2.
このようなたわみ振動子1の共振振動時の中心軸上の振
動振幅は、第6図(b)に示すようにノードNl、N2
に形成した段部により大きく拡大されている。そして、
ノードN2.N3部分に位置させて円錐状凹み19.2
0が側面部に形成され、これらの円錐状凹み19.20
に両側の4箇所から尖り先ボルトなどを強く当接するこ
とによって図示しない指示体に固定されている。The vibration amplitude on the central axis during resonance vibration of the flexural oscillator 1 is determined by the nodes Nl and N2 as shown in FIG. 6(b).
It is greatly enlarged by the stepped part formed in the middle. and,
Node N2. Conical recess 19.2 located at N3 part
0 are formed on the side parts, these conical recesses 19.20
It is fixed to the indicator (not shown) by strongly abutting the point bolts or the like from four locations on both sides.
このように構成されたたわみ振動子lの共通電極板11
を基準電位として電極板8,9に互いに逆相の駆動電圧
を印加するか、または、電歪素子4.5の分極方向を互
いに逆に配置して同相の駆動電圧を印加しその周波数を
たわみ共振周波数に調節すると、前述の如き振動振幅分
布を生じて共振振動し、バイト14の刃先は矢印21の
”ように軸線と直角方向に強く振動する。このようなバ
イト14の刃先を、例えば、旋盤のバイトとして切削加
工物の接線方向に超音波振動させながら被加工物を加工
することにより、切削抵抗が著しく減少して加工精度が
向上するなどの大きな振動切削効果を発揮する。Common electrode plate 11 of the flexible vibrator l configured in this way
Apply drive voltages with opposite phases to each other to the electrode plates 8 and 9 using the voltage as a reference potential, or arrange the polarization directions of the electrostrictive elements 4.5 opposite to each other and apply drive voltages with the same phase to change the frequency. When adjusted to the resonant frequency, the vibration amplitude distribution as described above is generated and resonance vibration occurs, and the cutting edge of the cutting tool 14 strongly vibrates in a direction perpendicular to the axis as shown by the arrow 21. By machining the workpiece while applying ultrasonic vibrations in the tangential direction of the workpiece as a cutting tool on a lathe, great vibration cutting effects are achieved, such as significantly reducing cutting resistance and improving machining accuracy.
発明が解決しようとする課題
このようなたわみ振動子1の出力端部には、その目的に
応じて種々の工具が互換可能に取り付けられる。振動切
削に用いられるバイトホルダの例を第11図ないし第1
7図に示す。Problems to be Solved by the Invention Various tools are interchangeably attached to the output end of such a flexible vibrator 1 depending on the purpose. Examples of tool holders used for vibration cutting are shown in Figures 11 to 1.
It is shown in Figure 7.
第11図乃至第13図に示すものは、は普通振幅の真剣
バイト22を銀ロウ接合したバイトホルダ23である。What is shown in FIGS. 11 to 13 is a tool holder 23 in which a serious tool 22 of normal amplitude is bonded with silver solder.
第14図及び第15図に示すものは、同じたわみ振動子
1からの駆動によって大きな振幅で振動するスロウアウ
エイチツプ24を取り付けた高振幅用バイトホルダ25
である。The one shown in FIGS. 14 and 15 is a high-amplitude tool holder 25 equipped with a throw-away tip 24 that vibrates with a large amplitude by driving from the same deflection vibrator 1.
It is.
第16図及び第17図に示すものは、ねじ切りバイト2
6を銀ロウ接合した高振幅ねじ切りバイトホルダ27で
ある。What is shown in Fig. 16 and Fig. 17 is the thread cutting tool 2.
This is a high-amplitude thread cutting tool holder 27 in which 6 is bonded with silver solder.
これらのバイトホルダ23,25.27を用いてたわみ
振動子1を駆動したとき、バイト刃先は図中はとんど上
下方向に直線状に共振振動する。When the bending vibrator 1 is driven using these tool holders 23, 25, and 27, the tool cutting edge resonantly vibrates linearly in the vertical direction in the figure.
しかるに、さらにその厚みを薄くして大きい振幅で振動
させたり、特殊な形状としたバイトホルダでは、刃先の
振動が他の方向の共振と干渉し合って、その振動姿態は
軸に直角な直線状ではなく、傾斜角が変化したり、円弧
状や楕円状を呈するようになる。However, with a tool holder that is made thinner and vibrates with a larger amplitude, or has a special shape, the vibration of the cutting edge interferes with resonance in other directions, and the vibration mode becomes a straight line perpendicular to the axis. Instead, the angle of inclination changes, or the shape becomes arcuate or elliptical.
このような円弧状あるいは楕円状振動は、振動切削加工
によっては著しく有害であって、ワークピースの加工表
面を荒すだけでなく刃先の摩耗やチッピングを増大させ
る原因となる。Such arcuate or elliptical vibrations are extremely harmful in some vibration cutting processes, causing not only roughening of the machined surface of the workpiece but also increased wear and chipping of the cutting edge.
つぎに、そのような有害振動姿態の発生原因について説
明する。Next, the cause of such harmful vibration state will be explained.
第13図に示すように、刃先正面より見て上下方向をY
軸、左右方向をX軸、前後方向すなわち振動子の縦方向
をZ軸とすると、正常な振動状態ではY軸方向の振動の
みが直線状に振動しており、たわみ振動子1の駆動原理
に基いた振動分布を示す。As shown in Figure 13, the vertical direction is Y when viewed from the front of the cutting edge.
If the horizontal direction is the X-axis, and the longitudinal direction of the vibrator is the Z-axis, in normal vibration conditions, only the vibration in the Y-axis direction vibrates linearly, which is the driving principle of the flexible vibrator 1. The vibration distribution based on this figure is shown.
しかるに、それぞれの電歪素子4,5の特性やその寸法
及び金属材2.3の寸法的な精度などを考慮したたわみ
振動子1の構成から見ると、Y軸方向に機構的な完全平
衡が得られないために、Y軸方向のたわみ駆動によるX
軸方向の共振レスポンスをも併せ持ち、また、そのX軸
共振周波数はY軸のそれに近いところに存する。すなわ
ち、振動子1は断面円形のため、振動子1自身のx、Y
軸共振周波数はほとんど同一であり、バイトホルダを取
り付けたときにそのバイトホルダのX、 Y軸の形状に
おける差異によってのみそれぞれの共振周波数の違いが
出てくる。However, from the perspective of the configuration of the flexural vibrator 1, which takes into account the characteristics and dimensions of each electrostrictive element 4, 5, and the dimensional accuracy of the metal material 2.3, it is found that complete mechanical equilibrium is achieved in the Y-axis direction. Because it cannot be obtained, X due to deflection drive in the Y-axis direction
It also has an axial resonance response, and its X-axis resonance frequency is close to that of the Y-axis. That is, since the vibrator 1 has a circular cross section, the x, Y of the vibrator 1 itself
The axial resonance frequencies are almost the same, and when the tool holders are installed, the difference in their resonance frequencies only arises due to the difference in the shapes of the X and Y axes of the tool holders.
さらに、Y軸方向たわみ駆動によるZ軸方向すなわち縦
振動方向の共振レスポンスも発生する。Furthermore, a resonance response in the Z-axis direction, that is, in the longitudinal vibration direction, is also generated due to the deflection drive in the Y-axis direction.
これらの複合レスポンスにより刃先の振動は、それぞれ
のバイトホルダの駆動周波数において多様な振動姿態を
描き出すのである。Due to these composite responses, the vibration of the cutting edge depicts a variety of vibration modes depending on the drive frequency of each tool holder.
一般的に、Z軸共振周波数とX、Y軸共振周波数とはた
わみ振動分布の次数を考慮すれば容易に離すことができ
るため、適確な設計によれば大きな問題となることは少
ない。しかし、X、Y軸共振レスポンスは、前述の様に
バイトホルダの形状によって直接左右されるものであり
、バイトの必要な振動振幅によりY軸方向の厚みが決ま
ると、X、Y軸共振周波数は必然的に決まってくる。In general, the Z-axis resonant frequency and the X and Y-axis resonant frequencies can be easily separated from each other by taking into account the order of the flexural vibration distribution, so with proper design there is little chance of a major problem. However, as mentioned above, the X and Y axis resonance responses are directly affected by the shape of the tool holder, and if the thickness in the Y axis direction is determined by the required vibration amplitude of the tool, the X and Y axis resonance frequencies will be It will inevitably be decided.
一方、バイトホルダとしてはその振幅もさることながら
、真剣バイト、片刃バイト、ねじ切りバイト、平刃バイ
トさらに突っ切りバイトと多様な形状に対応しなければ
ならず、さらにスロウアウエイチップの大きさも各種あ
るため、すべての品種に対してX、Y軸の共振周波数を
離すことは非常に困難となる。On the other hand, as a tool holder, in addition to the amplitude, it must be compatible with a variety of shapes such as serious tools, single-edged tools, thread cutting tools, flat-edged tools, and parting tools, and there are also various sizes of throw-away tips. , it is extremely difficult to separate the resonance frequencies of the X and Y axes for all types.
次に、X、Y軸共振レスポンスの相対的関係が、刃先の
振動方向にどのような影響を与えるかを考察してみる。Next, let's consider how the relative relationship between the X- and Y-axis resonance responses affects the vibration direction of the cutting edge.
まず、それらがほとんど同一の周波数となったときのレ
スポンスを第18図に示す。Y軸の共振レスポンスは、
同図(a)に示すように並列共振周波数faでは正常な
Y軸方向のたわみ振@を発生するが、直列共振周波数f
rにおいては同図(b)に示すX軸共振レスポンスの影
響を受けてそのレスポンスが割れ、振動姿態は著しく傾
斜したり楕円振動を発生する。次に、第19図に示すよ
うに、X軸共振周波数がY軸のそれより低い場合は、f
r、faともに正常なたわみ振動を行なうので問題とは
ならない。First, FIG. 18 shows the response when they become almost the same frequency. The resonance response of the Y axis is
As shown in the figure (a), normal deflection vibration @ in the Y-axis direction is generated at the parallel resonance frequency fa, but at the series resonance frequency f
At r, the response is cracked under the influence of the X-axis resonance response shown in FIG. Next, as shown in Figure 19, if the X-axis resonance frequency is lower than that of the Y-axis, f
Since both r and fa perform normal flexural vibration, there is no problem.
さらに、第20図に示すようにX軸共振周波数がY軸の
それより高い場合には、frでは正常な振動をするが、
faにおける共振特性が大きく乱れて第18図(a)に
おけるfrと同様にその共振姿態は著しく乱れてしまう
。Furthermore, as shown in Figure 20, when the X-axis resonance frequency is higher than that of the Y-axis, normal vibration occurs at fr, but
The resonance characteristics at fa are greatly disturbed, and the resonance state is significantly disturbed, similar to fr in FIG. 18(a).
このように本来のたわみ振動である目的のY軸駆動周波
数の近くに、X軸の直列共振レスポンスが存在すると、
その振動姿態はX軸の干渉を受けて異常な振動状態とな
る。If the X-axis series resonance response exists near the desired Y-axis drive frequency, which is the original flexural vibration,
The vibration state becomes abnormal due to interference from the X axis.
課題を解決するための手段
電歪素子を含む振動系のたわみ振動方向のたわみ共振振
動の慣性質量と、前記たわみ振動方向と直交する方向の
たわみ共振振動の慣性質量とに差をつけた。そして、そ
の手段としては、電歪素子の分割間隙を広くしたり、電
歪素子に連設された金属材に空洞あるいは切り欠きを設
けるようにした。Means for Solving the Problem A difference is made between the inertial mass of flexural resonance vibration in the flexural vibration direction of a vibration system including an electrostrictive element and the inertial mass of flexural resonant vibration in a direction orthogonal to the flexural vibration direction. As a means for this, the dividing gap of the electrostrictive element is widened, or a cavity or a notch is provided in the metal material connected to the electrostrictive element.
作用
空洞あるいは切り欠きを設けたり、電歪素子の分割間隙
を広くすることにより、一方向のたわみ共振周波数は、
それと直角方向のたわみ共振周波数に比べて低下してx
、Y軸共振周波数の差が拡大し、Y軸共振レスポンスに
対するX軸共振レスポンスの干渉がなくなり正しいY軸
方向の振動姿態となる。By providing a working cavity or notch or widening the dividing gap of the electrostrictive element, the flexural resonance frequency in one direction can be
It is lower than the deflection resonance frequency in the perpendicular direction.
, the difference in the Y-axis resonance frequency increases, and the interference of the X-axis resonance response with the Y-axis resonance response disappears, resulting in a correct vibration state in the Y-axis direction.
実施例
本発明の第一の実施例を第1図および第2図を参照して
説明する。前述の従来例に示した部分と同一部分は同一
符号を用い説明も省略する。本実施例は従来の例である
第6図のたわみ振動子lにおける金属材3を短くして金
属材30とするとともに金属材2の大径部を長くして金
属材3■とし、金属材31の上下に丸穴32.33を設
けてたわみ振動子29としたものである。Embodiment A first embodiment of the present invention will be described with reference to FIGS. 1 and 2. Portions that are the same as those shown in the prior art example described above are designated by the same reference numerals, and description thereof will be omitted. In this embodiment, the metal material 3 in the conventional example of the deflection vibrator l shown in FIG. Round holes 32 and 33 are provided above and below 31 to form a deflection vibrator 29.
丸穴32.33をY軸方向に設けたため、Y軸のたわみ
共振周波数は第6図のたわみ振動子1に比べて大きく低
下する一方、X軸のたわみ共振周波数は僅かに低下する
のみとなって、x、Y軸の共振周波数の差は第2図に示
すそれぞれのレスポンスのように大きく拡大する。Since the round holes 32 and 33 are provided in the Y-axis direction, the Y-axis deflection resonance frequency is greatly reduced compared to the deflection vibrator 1 shown in Fig. 6, while the X-axis deflection resonance frequency is only slightly reduced. Therefore, the difference in the resonance frequencies of the x and y axes greatly expands as shown in the respective responses shown in FIG.
このようなたわみ振動子29によれば、X軸方向に薄く
Y軸方向に厚いバイトホルダを用いたときに、X、Y軸
方向の共振周波数の差は縮まってY軸共振レスポンスは
X軸の干渉を受けるようになり、例えば、突っ切りバイ
トにおいてはその形状に制限を受ける。According to such a flexure vibrator 29, when a tool holder that is thin in the X-axis direction and thick in the Y-axis direction is used, the difference between the resonance frequencies in the X and Y-axis directions is reduced, and the Y-axis resonance response is This causes interference, and for example, the shape of a cut-off tool is limited.
しかし、多用されるバイトホルダではX軸方向はそのま
まの幅とし、必要な大きさの振幅を得るためにY軸方向
に薄くするのが普通であり、したがって、Y軸の共振周
波数が下がってX軸のそれとは差が大きくなる方向とな
るため、このタイプは最も好ましい構成である。However, with frequently used tool holders, it is common to keep the same width in the X-axis direction and make it thinner in the Y-axis direction in order to obtain the necessary amplitude. This type is the most preferable configuration because it is the direction in which the difference from that of the axis increases.
次に本発明の第二の実施例を第3図及び第4図を参照し
て説明する。第3図に示すたわみ振動子34は、第6図
の従来例におけるたわみ振動子1の金属材2および金属
材3の両側面を電歪素子4゜5に接する部分を残して切
り取って金属材35および金属材36としたものである
。そのため、X軸方向の質量を切り取ったために、X軸
の共振周波数は第6図のたわみ振動子lに比べて大きく
低下すると共にY軸の共振周波数はほとんど変化しない
ため、第4図に示すそれぞれのレスポンスのごとくX軸
共振周波数が低い方向にその差が開くものである。Next, a second embodiment of the present invention will be described with reference to FIGS. 3 and 4. A flexible vibrator 34 shown in FIG. 3 is constructed by cutting both sides of the metal material 2 and metal material 3 of the conventional example of the flexible vibrator 1 shown in FIG. 35 and metal material 36. Therefore, since the mass in the X-axis direction is removed, the X-axis resonance frequency is greatly reduced compared to the flexure vibrator l shown in Figure 6, and the Y-axis resonance frequency remains almost unchanged. As shown in the response, the difference increases as the X-axis resonance frequency decreases.
このようなたわみ振動子によれば、X軸方向に厚く、Y
軸方向に薄いバイトホルダを用いたときにその差が少な
くなって干渉を受けるようになり、そのようなバイトホ
ルダである高振幅用バイトにおいてその形状に制限を受
ける。したがって、かかる構造のたわみ振動子34は、
比較的低い振幅のバイトホルダに適用される。According to such a flexible oscillator, it is thick in the X-axis direction and thick in the Y-axis direction.
When a tool holder that is thin in the axial direction is used, the difference becomes smaller and interference occurs, and such a tool holder for high amplitude use is limited in its shape. Therefore, the flexural oscillator 34 having such a structure is
Applicable to relatively low amplitude bite holders.
次に、本発明の第三の実施例を第5図を参照して説明す
る。第5図に示すものは従来例の第9図と同様に電歪素
子4.5を分割したものであるが、その間隙を大きく構
成したものである。第6図において用いた第7図あるい
は第9図の電歪素子4゜5に換えて本実施例のような第
5図の電歪素子37.38を用いると、それらの電歪素
子37,38の間隙が広くなったためにY軸の共振周波
数に比べてX軸の共振周波数が低下してそれらの差は拡
大する。これはX軸方向の慣性質量が低くなったためで
、第二の実施例と同様な効果が得られるものである。Next, a third embodiment of the present invention will be described with reference to FIG. The one shown in FIG. 5 is one in which the electrostrictive element 4.5 is divided like the conventional example shown in FIG. 9, but the gap between the two is made larger. If the electrostrictive elements 37 and 38 of FIG. 5 as in this embodiment are used in place of the electrostrictive elements 4.5 of FIG. 7 or 9 used in FIG. Since the gap 38 has become wider, the X-axis resonance frequency is lower than the Y-axis resonance frequency, and the difference between them is widened. This is because the inertial mass in the X-axis direction is lower, and the same effect as the second embodiment can be obtained.
以上の各実施例の説明から理解されるように、例えば、
X軸方向に丸孔を設けた金属材により分割間隙を広くし
た電歪素子を締着すると、−層X。As understood from the description of each embodiment above, for example,
- layer
Y軸共振周波数の差が広がるというように、前述のそれ
ぞれの実施例の組み合わせによってより大きな効果が発
揮される。A greater effect can be achieved by combining the respective embodiments described above, such as increasing the difference in the Y-axis resonance frequency.
また、振動切削装置におけるたわみ振動子の実施例を以
て説明したが、超音波振動をするウエルダやカッター等
のツールにおいても同様に実施される。すなわち、本発
明はX軸方向及びY軸方向のたわみ共振周波数を離すた
めに、どちらかの方向の金属材を切り取ったり、電歪素
子の分割間隙を広げてそれぞれの方向の慣性質量に差を
つけたことに特徴がある。その結果、X軸方向共振レス
ポンスの干渉による振動姿態の乱れに煩わされずに、多
様なツール(バイトホルダ)を使用することができる。Moreover, although the embodiment of the flexure vibrator in a vibration cutting device has been described, the present invention can be similarly implemented in tools such as welders and cutters that generate ultrasonic vibrations. That is, in order to separate the deflection resonance frequencies in the X-axis direction and the Y-axis direction, the present invention cuts out the metal material in either direction or widens the division gap of the electrostrictive element to create a difference in inertial mass in each direction. There is something special about it. As a result, various tools (bite holders) can be used without being bothered by disturbances in the vibration state due to interference of the resonance response in the X-axis direction.
発明の効果
本発明は上述のように、電歪素子を含む振動系のたわみ
振動方向のたわみ共振振動の慣性質量と、前記たわみ振
動方向と直交する方向のたわみ共振振動の慣性質量とに
差をつけ、その手段としては、電歪素子の分割間隙を広
くしたり、電歪素子に連設された金属材に空洞あるいは
切り火きを設けるようにしたので、一方向のたわみ共振
周波数は、それと直角方向のたわみ共振周波数に比べて
低下してX、Y軸共振周波数の差が拡大し、Y軸共振レ
スポンスに対するX軸共振レスポンスの干渉がなくなり
正しいY軸方向の振動姿態とすることができると云う効
果を有する。Effects of the Invention As described above, the present invention creates a difference between the inertial mass of a flexural resonance vibration in the flexural vibration direction of a vibration system including an electrostrictive element and the inertial mass of a flexural resonant vibration in a direction orthogonal to the flexural vibration direction. As a means of achieving this, the dividing gap of the electrostrictive element was widened, or a cavity or a spark was provided in the metal material connected to the electrostrictive element, so that the flexural resonance frequency in one direction was The deflection resonance frequency in the orthogonal direction is lower than that, and the difference between the X and Y-axis resonance frequencies is expanded, and the interference of the X-axis resonance response with the Y-axis resonance response is eliminated, making it possible to obtain the correct vibration state in the Y-axis direction. It has the effect of
第1図は本発明の第一の実施例を示す縦断側面図、第2
図(a)(b)はX軸方向とY軸方向との振動姿態な°
示すグラフ、第3図は本発明の第二の実施例を示す斜視
図、第4図(a)(b)はX軸方向とY軸方向との振動
姿態を示すグラフ、第5図は本発明の第三の実施例を示
す電歪素子の斜視図、第6図(a)(b)は振動分布と
ともにたわみ振動子の従来の構造の一例を示す縦断側面
図、第7図は電歪素子の斜視図、第8図は電極板の斜視
図、第9図は電歪素子の他の形状を示す斜視図、第10
図は第9図に示した電歪素子を用いた斜視図、第11図
はバイトホルダの側面図、第12図はその平面図、第1
3図はその正面図、第14図はバイトホルダの他の例を
示す側面図、第15図はその平面図、第16図はバイト
ホルダのさらに他の例を示す側面図、第17図はその平
面図、第18図(a)(b)乃至第20図(a)(b)
に示すものはX軸とY軸との共振レスポンスの状態を示
すグラフである。
4.5,37.38・・・電歪素子、30,31゜35
.36・・・金属材
出 願 人 多賀電気株式会社
」
6図FIG. 1 is a vertical cross-sectional side view showing the first embodiment of the present invention, and the second
Figures (a) and (b) show the vibration states in the X-axis direction and Y-axis direction.
3 is a perspective view showing the second embodiment of the present invention, FIGS. 4(a) and 4(b) are graphs showing vibration states in the X-axis direction and Y-axis direction, and FIG. A perspective view of an electrostrictive element showing a third embodiment of the invention, FIGS. 6(a) and 6(b) are longitudinal sectional side views showing an example of the conventional structure of a deflection vibrator along with vibration distribution, and FIG. 7 is an electrostrictive element. FIG. 8 is a perspective view of an electrode plate, FIG. 9 is a perspective view showing another shape of the electrostrictive element, and FIG. 10 is a perspective view of the element.
The figure is a perspective view using the electrostrictive element shown in FIG. 9, FIG. 11 is a side view of the tool holder, FIG. 12 is a plan view thereof, and
3 is a front view thereof, FIG. 14 is a side view showing another example of the tool holder, FIG. 15 is a plan view thereof, FIG. 16 is a side view showing still another example of the tool holder, and FIG. 17 is a side view showing another example of the tool holder. Its plan view, FIGS. 18(a)(b) to 20(a)(b)
2 is a graph showing the state of the resonance response between the X axis and the Y axis. 4.5, 37.38... Electrostrictive element, 30, 31° 35
.. 36...Metal material applicant: Taga Electric Co., Ltd." Figure 6
Claims (1)
振振動の慣性質量と、前記たわみ振動方向と直交する方
向のたわみ共振振動の慣性質量とに差をつけたことを特
徴とするたわみ振動子。 2、電歪素子の分割間隙を広くしたことを特徴とする請
求項1記載のたわみ振動子。 3、電歪素子に連設された金属材に空洞あるいは切り欠
きを設けて振動系のたわみ振動方向のたわみ共振振動の
慣性質量と、前記たわみ振動方向と直交する方向のたわ
み共振振動の慣性質量とに差をつけたことを特徴とする
たわみ振動子。[Claims] 1. A difference is made between the inertial mass of the flexural resonance vibration in the flexural vibration direction of the vibration system including the electrostrictive element and the inertial mass of the flexural resonant vibration in the direction orthogonal to the flexural vibration direction. A flexural oscillator featuring: 2. The flexural vibrator according to claim 1, characterized in that the dividing gap of the electrostrictive element is widened. 3. A cavity or notch is provided in the metal material connected to the electrostrictive element to create an inertial mass for flexural resonance vibration in the flexural vibration direction of the vibration system and an inertial mass for flexural resonant vibration in a direction perpendicular to the flexural vibration direction. A flexural vibrator that is characterized by a difference between the two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63322803A JPH0694081B2 (en) | 1988-12-21 | 1988-12-21 | Deflection oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63322803A JPH0694081B2 (en) | 1988-12-21 | 1988-12-21 | Deflection oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02167601A true JPH02167601A (en) | 1990-06-28 |
| JPH0694081B2 JPH0694081B2 (en) | 1994-11-24 |
Family
ID=18147802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63322803A Expired - Lifetime JPH0694081B2 (en) | 1988-12-21 | 1988-12-21 | Deflection oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694081B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006205291A (en) * | 2005-01-27 | 2006-08-10 | Univ Nagoya | Elliptical vibration cutting machine |
| WO2007091425A1 (en) * | 2006-02-08 | 2007-08-16 | Konica Minolta Opto, Inc. | Cutting vibrator, working apparatus, forming mold, and optical element |
| JP2009028784A (en) * | 2008-04-09 | 2009-02-12 | Ito Yoshihiko | Ultrasonic vibration bonding equipment |
| CN114700544A (en) * | 2022-02-23 | 2022-07-05 | 重庆大学 | Longitudinal-torsional coupling three-dimensional ultrasonic knife handle device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63191501A (en) * | 1987-02-04 | 1988-08-09 | Taga Electric Co Ltd | Supersonic vibration cutting device |
-
1988
- 1988-12-21 JP JP63322803A patent/JPH0694081B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63191501A (en) * | 1987-02-04 | 1988-08-09 | Taga Electric Co Ltd | Supersonic vibration cutting device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006205291A (en) * | 2005-01-27 | 2006-08-10 | Univ Nagoya | Elliptical vibration cutting machine |
| WO2007091425A1 (en) * | 2006-02-08 | 2007-08-16 | Konica Minolta Opto, Inc. | Cutting vibrator, working apparatus, forming mold, and optical element |
| JP5115198B2 (en) * | 2006-02-08 | 2013-01-09 | コニカミノルタアドバンストレイヤー株式会社 | Cutting vibrator and processing apparatus |
| JP2009028784A (en) * | 2008-04-09 | 2009-02-12 | Ito Yoshihiko | Ultrasonic vibration bonding equipment |
| CN114700544A (en) * | 2022-02-23 | 2022-07-05 | 重庆大学 | Longitudinal-torsional coupling three-dimensional ultrasonic knife handle device |
| CN114700544B (en) * | 2022-02-23 | 2023-12-12 | 重庆大学 | Longitudinal torsion coupling three-dimensional ultrasonic knife handle device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0694081B2 (en) | 1994-11-24 |
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