JPH02167659A - Surface polishing device and manufacture of polishing work having aligned abrasive trace direction - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a flat surface polishing apparatus used for polishing an aluminum substrate for a magnetic disk or other objects to be polished, and a method for manufacturing a polished product with polished marks aligned in the same direction.

2. Description of the Related Art One type of surface polishing apparatus of this type is equipped with a pair of grinding wheels that are rotatably provided, and a holder for an object to be polished that is able to rotate and revolve between these grinding stones. 2. Description of the Related Art A surface polishing apparatus is known that polishes an object by rotating a grindstone pressed against the object while rotating and revolving a cage. According to such a polishing device, since the workpiece holder itself rotates and revolves, the workpiece can be polished evenly over the entire polishing surface of the grindstone, preventing insects from wearing the whetstone unevenly, and achieving high processing accuracy. A polished surface can be obtained.

Problems to be Solved by the Invention However, in the above-mentioned surface polishing apparatus, conventionally, the rotation of the grindstone and the rotation of the workpiece holder were always stopped at the same time, resulting in the following drawbacks.

That is, due to the rotation and revolution of the polishing object holder itself, the polishing direction of the object to be polished changes constantly during processing, but the
Because the whetstone stops at the same time as the rotation of the grinder stops, the direction of the polishing marks on the polished object is often not aligned until the polishing is finished. For this reason, there has been a drawback in that it is difficult to use this polishing apparatus to produce with a high yield a product quality that requires the polishing marks to be aligned in a certain direction, such as AQ substrates for magnetic disks.

The present invention has been made in view of the above technical background, and aims to provide a flat surface polishing device that can uniformly align the direction of polishing marks, and furthermore, it aims to provide a flat surface polishing device that can uniformly align the direction of polishing marks, and furthermore, it aims to provide a flat surface polishing device that can uniformly align the direction of polishing marks, and furthermore, it aims to provide a flat surface polishing device that can uniformly align the direction of polishing marks. The purpose is to provide a manufacturing method.

Means for Solving the Problems In order to achieve the above-mentioned object, the present invention provides rotatably provided grindstones (3) (4
) and a polished object holder (7) that is provided to be able to revolve while rotating between these grindstones,
The whetstone (3) is brought into pressure contact with the workpiece (B) while rotating.
In the surface polishing apparatus which polishes the workpiece by rotating the workpiece holder (7), the workpiece holder (7
) is characterized in that it is provided with a mechanism for stopping the rotation of the grindstones (3) and (4) after a predetermined time lag after the rotation stop special feature. Furthermore, between a pair of grindstones (3) and (4) provided in the rotating rJ function, the workpiece holder (7) is rotated and revolved, and is pressed against the workpiece to be polished (B). In the method for manufacturing a polished product in which the grindstone (3) (4) is rotated to polish the workpiece (B), the rotation of the workpiece holder (7) is first stopped, and then a predetermined time lag is performed. and then turn the whetstone (3
) (4) is characterized by stopping the rotation.

Here, the grinding wheels (3) and (4) are
As shown in the figure, it is rotatably supported by being attached to the inner surfaces of a pair of rotating opposing surface plates (1) and (2). In addition, the most common configuration for making the holder (7) for the workpiece to be polished capable of rotation and revolution is that the holder (7) is mounted on a sun gear arranged at the center of rotation of the grinding wheels (3) and (4). (5) and an internal gear (6) arranged concentrically outward of the sun gear (5), the outer peripheral surfaces of which are meshed with both the sun gear (5) and the internal gear (6). 6) can be rotated. In addition, a grindstone or surface plate (
1) The rotation of (2), the planetary gear (5), and the internal gear (6) are driven by motors (11) to (13), and these motors are driven by timers (21) and (22). is common. Therefore, the workpiece holder (
7) A mechanism for stopping the rotation of the grindstones (3) and (4) after a predetermined time lag after the point in time when the rotation and revolution stop is preferably incorporated into the timer (21) and (22).

After setting the workpiece (B) on the holder (7), place it on the surface plate (
1) Bring the (2) closer together and apply a predetermined pressure to the grindstones (3) and (4).
) is pressed against the polished object (B). Next, the sun gear (
5), first and second timers (21) that control the operation of the first to third motors (11) to (13) that rotationally drive the internal gear (6) and the surface plates (1) and (2). 22) are turned ON at the same time. As a result, as shown in FIG. 3, the sun gear (5), internal gear (6), and surface plates (1, 2) start rotating and then gradually increase in speed. By the rotation of the sun gear (5) and the internal gear (6), the workpiece holder (7) is moved to the lL of the grinding wheel! It begins to revolve while rotating around the center of rotation. After the speed increases, the sun gear (5), internal gear (6), and surface plate (1) (2) rotate at constant speeds (Nl) (N2) (N3).
) (N4), and the object to be polished (B) is polished by the action of the grindstones (3) and (4).

After a certain period of time (T2) has elapsed, the second timer (22) is first turned off. This allows the second and third motors (12)
(13) is turned off, but the sun gear (5) and internal gear (6) rotate due to inertia and gradually decelerate and eventually stop. After the second timer (22) turns off (T1-T2
), the first timer (2I) turns off after a time lag.
become. As a result, the first motor (l()) is turned off, but the surface plates (1) and (2) are rotating due to inertia while gradually decelerating, and during this time, the cage (7), which has already stopped, is covered. The object to be polished (B) will be polished.In this way, near the end of the polishing process, there will be a period in which only the grinding wheels (3) and (4) are rotated while the holder (7) is stopped and the process is carried out. occurs, so the polishing direction of the object to be polished (B) is constant,
The polishing marks on the polished product subjected to fL+ will also collapse in a certain direction.

Embodiment Next, the structure of the present invention will be explained based on the embodiment shown in FIGS. 1 to 3.

In FIGS. 1 and 2, (A) is a surface polishing device, which includes a pair of upper and lower opposed surface plates (1) and (2), and upper and lower grindstones (3) attached to the inner surface of each surface plate. ) (4), a sun gear (5) arranged at the axis of the grinding wheels between each grinding wheel (3) (4), and an internal gear ( 6), the sun gear (5) and the internal gear (
6) One or more thin plate/14 gear-shaped object holders (
7).

Furthermore, each retainer (7) is formed with a plurality of holes,
A disk-shaped object to be polished (B) having a thickness smaller than that of the retainer is fitted into this hole and held therein. moreover,
The upper and lower surface plates (1) and (2) are driven by 9dl (la) (2
It is connected to a first motor (11) via a) and sprockets (lb) and (2b), and is rotated by the drive of the motor (11). Note that the upper surface plate (
1) is supported by a cylinder (not shown) so as to be able to rise and fall freely, and in the lowered position shown in FIG. 2) is applied with a rotational force in the opposite direction. on the other hand,
The sun gear (5) has a drive shaft (5a) and a sprocket (5).
b) to the second motor (12) and also to the internal gear (
6) is connected to a third motor (13) via a drive shaft (6a) and a sprocket (6b), and rotates at a rotation speed of This keeps the t!i device (7
) is made to rotate and revolve like a planetary gear. Further, the operation of the first motor (11) is controlled by a first timer (21), and the first timer is set to be turned off when T1 time has elapsed after being turned on. On the other hand, the second and third motors (12)
The operation of (13) is controlled by a second timer (22), and this second timer (22) is set to turn off when two hours have elapsed after turning on. Therefore, the operating time T1 of the first timer (21) is the same as that of the second timer (
22) is set longer than the operating time T2. As a result, after the sun gear (5) and internal gear (6) stop rotating, the upper and lower surface plates (1) and (2) stop rotating after a time lag of time (T1-T2). It is said that

Here, the preferable value of (T1-T2) is 1 to
It is best to set it to about 10 seconds. In addition, the upper and lower surface plates (1)
(2), the rotation speed of the sun gear (5) and internal gear (6) is
The ratio is set in advance to clarify so that both sides of the object to be polished (B) can be processed equally.

Next, the operation of the illustrated surface polishing apparatus will be explained with reference to the operational characteristic diagram of FIG.

First, the object to be polished (B) is set in the object holder (7), and then the upper and lower surface plates (1) and (2) are brought close together to bring the grinding wheel (3) closer to each other.
) (4) is pressed against the object to be polished (B) with a predetermined pressure. Next, the first timer (21) and the second timer (2
2) is turned ON at the same time. Then, the first to third motors (11), (12), and (13) are driven, which drives the upper and lower surface plates (1) and (2), the sun gear (5), and the internal gear (6).
) starts rotating, and then the speed gradually increases as shown in FIG. On the other hand, due to the rotation of the sun gear (5) and the internal gear (6), the workpiece holder (7) is moved between the upper and lower grinding wheels (3) (4).
) begins to revolve while rotating around the center of rotation. After the speed increases, the sun gear (5), internal gear (6), and surface plate (1
)(2) is each constant speed rotation (N1)(N2)(N3)(N
4). T2 between H1p after turning on the first and second timers
When the time period elapses, the second timer (22) is first turned off. This allows the second and third motors (12) (
13) is turned off, but the sun gear (5) and internal gear (
6) rotates due to inertia, gradually decelerates, and eventually stops. OFF time lag 1- of the second timer (22)
T2 ) is placed and the first timer (21) is turned off.
become. As a result, the first motor (11) is turned off, but the upper and lower surface plates (1) and (2) continue to rotate due to inertia while gradually decelerating. ) will continue to be polished. By this processing after the polishing object holder (7) is stopped, the polishing direction of the polishing object (B) becomes constant, and the polishing marks of the obtained polished product are aligned in a constant direction. For comparison, the conventional sun gear (5), internal gear (6), and upper and lower surface plates (1) (2) were manufactured in a fourth country.
).

Effects of the Invention As described above, this invention stops the rotation of the grindstone after a predetermined time rough after the rotation of the workpiece holder stops, so that the holder stops just before the end of the polishing process. There will be a period in which only the grindstone rotates and machining is performed in this state. Therefore, it is possible to align the polishing marks on the polished product after finishing the process in a certain direction, and it is possible to reliably produce parts with a high yield, such as AΩ substrates for magnetic disks, which require uniform polishing marks as a product quality. I can provide it.

[Brief explanation of the drawing]

FIG. 1 is a partial cross-sectional view of a flat surface polishing apparatus, FIG. 2 is a perspective view of a main part, FIG. 3 is an operating characteristic diagram, and FIG. 4 is a conventional operating characteristic diagram. (A) ... Surface polishing device, (B) ... Polished object,
(1) Main measuring board, (2) Lower surface plate, (3)
... Upper grindstone, (4) ... Lower grindstone, (5) ... Sun gear, (6) ... Internal gear, (7) ... To-be-polished object holder. More than 100 times

Claims (2)

[Claims] (1) Equipped with a pair of grinding wheels that are rotatably provided, and a holder for the workpiece that is provided so that it can rotate and revolve between these grindstones, and that allows the holder to rotate and revolve while the workpiece is being polished. In a surface polishing apparatus configured to polish an object to be polished by rotating the grindstone that is in pressure contact with the object, the rotation of the grindstone is stopped after a predetermined time lag after the rotation of the object holder is stopped. A flat surface polishing device characterized by being provided with a mechanism for polishing. (2) A polishing process in which the workpiece holder is rotated and revolved between a pair of rotatably provided grindstones, and the grindstone pressed against the workpiece is rotated to polish the workpiece. The method for manufacturing a polished product with polished marks in the same direction is characterized in that the rotation of the object holder is first stopped, and then the rotation of the grindstone is stopped after a predetermined time lag. Method.