JPH02169184A - Vacuum sealing device for metal tubes - Google Patents

Vacuum sealing device for metal tubes

Info

Publication number
JPH02169184A
JPH02169184A JP32067888A JP32067888A JPH02169184A JP H02169184 A JPH02169184 A JP H02169184A JP 32067888 A JP32067888 A JP 32067888A JP 32067888 A JP32067888 A JP 32067888A JP H02169184 A JPH02169184 A JP H02169184A
Authority
JP
Japan
Prior art keywords
vacuum
container
metal tube
sealing
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32067888A
Other languages
Japanese (ja)
Other versions
JP2644866B2 (en
Inventor
Shigeru Sakaguchi
坂口 繁
Hitoshi Sugawara
菅原 均
Yoichi Shimizu
陽一 清水
Kiyomi Matsushima
松島 清美
Yoshiaki Uchinuma
内沼 善朗
Toshiyuki Takahashi
俊幸 高橋
Takayoshi Onitake
鬼武 孝好
Osamu Hamashima
浜嶋 修
Masanori Sekino
関野 正紀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Kyowa Engineering Co Ltd
Original Assignee
Hitachi Kyowa Kogyo Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kyowa Kogyo Ltd, Hitachi Ltd filed Critical Hitachi Kyowa Kogyo Ltd
Priority to JP63320678A priority Critical patent/JP2644866B2/en
Publication of JPH02169184A publication Critical patent/JPH02169184A/en
Application granted granted Critical
Publication of JP2644866B2 publication Critical patent/JP2644866B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Butt Welding And Welding Of Specific Article (AREA)
  • Pressure Vessels And Lids Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、容器内を真空に封止する装置に係り。[Detailed description of the invention] [Industrial application field] The present invention relates to a device for vacuum sealing the inside of a container.

特に、容器内を所定の真空度に対し、バラツキ無く真空
封止するのに好適な装置に関する。
In particular, the present invention relates to a device suitable for vacuum-sealing the inside of a container to a predetermined degree of vacuum without variation.

〔従来の技術〕[Conventional technology]

従来の装置は、特開昭56−63780号公報に記載さ
れ、第1図に示すように5封止用金属管2の先端に真空
源15を装着し、封止用金属管2.及び。
A conventional device is described in Japanese Patent Application Laid-Open No. 56-63780, and as shown in FIG. 1, a vacuum source 15 is attached to the tip of a metal tube 2 for sealing. as well as.

その先の貯槽1を真空引きした後、封f用金gtM?を
加圧ヘッド5で挟んで、管の壁を密着させた後。
After evacuating the storage tank 1 beyond that, sealing gold gtM? is sandwiched between the pressure heads 5 and the walls of the tube are brought into close contact.

通電加熱し、真空封止を行っている。なお、この他に、
関連するものに特開昭58−154464号公報があり
、これははじめ、管内壁に溶剤を塗布し同様の手順で溶
着封止を行うものである。
It is heated with electricity and vacuum sealed. In addition to this,
A related example is Japanese Patent Application Laid-Open No. 58-154464, which first applies a solvent to the inner wall of the pipe and performs welding and sealing using the same procedure.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術は、封止用金属管とこの金属管。 The above-mentioned conventional technology is a sealing metal tube and this metal tube.

及び、貯槽を真空にする真空源との接続法について考慮
がされておらず、 (1)接続部での洩れ (2)接続に腹雑な操作を要し、自動化が困雅(3)封
止用金属管が長くなる。
Also, no consideration was given to the connection method to the vacuum source that evacuates the storage tank, resulting in (1) leaks at the connection, (2) tedious connections, making automation difficult, and (3) sealing. The stop metal pipe becomes longer.

という問題点があった。There was a problem.

即ち、第3図の公知例では、封止用金属管2を真空接続
口20に挿入し1弾力性密封部材18に空圧源19より
空気を供給して金属管の外周周りに膨らませて、仮密封
した後、真空源15で金属管2.貯槽1から成る容器3
を真空引きする。その後、所定の真空度適例いた後、加
圧ヘッド5で、金属管2を挟み、管の壁を互いに強く密
着させた後、その壁を溶接し、真空封止している。
That is, in the known example shown in FIG. 3, a sealing metal tube 2 is inserted into a vacuum connection port 20, and air is supplied from an air pressure source 19 to an elastic sealing member 18 to inflate it around the outer circumference of the metal tube. After temporarily sealing, the metal tube 2. Container 3 consisting of storage tank 1
Vacuum. Thereafter, after reaching a predetermined degree of vacuum, the metal tube 2 is sandwiched between the pressurizing heads 5 and the walls of the tubes are brought into close contact with each other, and then the walls are welded and vacuum sealed.

しかし、この方法では、 (1)弾力性密封部材で金属管との間を仮密封している
が、金属管の外径2表面粗さを高精度に加工しないと、
仮密封が困難で、封止後も、真空封止ができなくて、貯
槽に空気の残留する恐れがある。又、金属管を弾力性密
封部材18の中へ挿入する時、金属管端面で弾力性密封
部材を傷つけ、所定の真空度に到達せずに封入する恐れ
がある。
However, with this method, (1) Although the space between the metal tube and the metal tube is temporarily sealed with an elastic sealing member, the outer diameter and surface roughness of the metal tube must be processed with high precision.
Temporary sealing is difficult, and even after sealing, vacuum sealing may not be possible and air may remain in the storage tank. Further, when inserting the metal tube into the elastic sealing member 18, there is a risk that the elastic sealing member may be damaged by the end face of the metal tube, and the tube may be sealed without reaching a predetermined degree of vacuum.

金属管の外周を加工し、外径を均一にし表面粗さを高精
度にするには、多大の工数を要する。
Machining the outer periphery of a metal tube to make the outer diameter uniform and the surface roughness highly accurate requires a large amount of man-hours.

(2)封止時、金属管を押し潰して、管壁を互いに密着
させる操作が要るため1弾力性密封部材18と金属管2
の仮密封位置は、金属管の加圧ヘッドによる封正位百よ
りも十分に離し、金属管を押し潰しても変形の及ばぬ位
置にする必要があり、封止用金属管を長くせざるを得な
い。
(2) When sealing, it is necessary to crush the metal tube and bring the tube walls into close contact with each other; 1. The elastic sealing member 18 and the metal tube 2.
The temporary sealing position must be far enough away from the sealing position of the metal tube by the pressure head, and must be in a position where the metal tube cannot be deformed even if it is crushed, and the metal tube for sealing must be long. I don't get it.

(3)その他にも真空源と金属管の接続法とし、ねじ込
み継手を用いる方法もあるが、真空に対する信頼性と繰
作の容易さに欠けるという問題点があった。
(3) There is also a method of connecting a vacuum source and a metal tube using a threaded joint, but this method has problems in that it lacks reliability against vacuum and ease of operation.

(4)また、18接時、金属管の内面が真空で、外面側
が大気圧のため5圧力差により、金m溶融時に溶は落ち
、溶接不良となる恐れがあった。
(4) In addition, when welding, the inner surface of the metal tube was in vacuum and the outer surface was at atmospheric pressure, so there was a risk that the molten metal would drop when the gold was melted, resulting in defective welding.

(5)更に、加圧ヘッドに通電し、金属管壁を溶接する
際に、加圧ヘッドが過熱し、金属が溶着して、以後、溶
接が不安定になるという問題があった。
(5) Furthermore, when the pressure head is energized and the metal tube walls are welded, there is a problem in that the pressure head overheats, metal is welded, and welding becomes unstable thereafter.

本発明の目的は、 (1)真空封止する容器を常に一定の所定の真空度で、
且つ、能率良く封止すること、 (2)ifl接する金属管の内外面の圧力差を無くシ。
The purpose of the present invention is to: (1) always maintain a vacuum-sealed container at a constant predetermined degree of vacuum;
(2) Eliminate the pressure difference between the inner and outer surfaces of the metal tube in contact with the ifl.

金属溶融時の溶は落ちを防ぎ、溶接不良を防止すること (3)金属管を溶接する際に加圧ヘッドに金属が溶着す
ることを防ぎ、安定した溶接封止を行うこと を目的とする。
The purpose is to prevent melt from dripping during metal melting and to prevent welding defects. (3) The purpose is to prevent metal from adhering to the pressure head when welding metal pipes and to perform stable weld sealing. .

〔課題を解決するための手段〕[Means to solve the problem]

上記目的は容器に収納する物質をM蔵するI′l?槽と
貯槽の上部に取付けた金属管より構成した容器を開閉扉
より真空容器の中に入れ、この真空容器内を真空排気す
ることにより、容器の内外を所定の真空度とし、しかる
後に、金属管を真空容器内の加圧ヘッドで圧着し、適当
な通電加圧条件で溶接することにより達成される。
The above purpose is to store the substance to be stored in the container. A container made up of metal tubes attached to the top of the tank and storage tank is placed into a vacuum container through an opening/closing door, and the inside of this vacuum container is evacuated to achieve a predetermined degree of vacuum inside and outside the container. This is accomplished by crimping the tubes with a pressure head inside a vacuum container and welding them under appropriate energization and pressure conditions.

〔作用〕[Effect]

容器は真空容器の開閉扉より、出し入れする。 Containers are taken in and out through the opening/closing door of the vacuum container.

開閉扉は、必要真空度に応じて、(4頼性の高い確実な
シール機構を選択採用できるので、封止する容器の交換
毎に容器内の到達真空度(真空封」−後の容器内真空度
)がバラツクことかない。
Depending on the degree of vacuum required, the opening/closing door can be selected from 4 highly reliable and reliable sealing mechanisms. There is no variation in the degree of vacuum.

真空容器に入れて、真空排気するので、封止容器交換毎
の真空源との接続が不要となる。又、そのため、金属管
を高精度に加トすることが不要となる。更に、金5c管
は、圧着後1通電溶接される長さ丈あれば良い。
Since it is placed in a vacuum container and evacuated, there is no need to connect it to a vacuum source every time the sealed container is replaced. Moreover, it is therefore not necessary to add the metal tube with high precision. Furthermore, the gold 5c tube only needs to be long enough to be welded once after crimping.

金属管の内外を真空引きするので、内外で圧力差が無い
ので、薄肉金属管の場合でも、全5I管溶接時、)容融
全属が溶は落ちることが無く、溶接可能条件範囲が広く
なる。
Since the inside and outside of the metal tube is vacuumed, there is no pressure difference between the inside and outside, so even in the case of thin-walled metal tubes, when welding all 5I tubes, all the molten metal will not drop, and the range of welding conditions is wide. Become.

封止する容器の内外の真空度を所定の値にした後、加圧
シリンダの加圧力と加圧時間1通電量と通′社時間、通
電と加圧のタイミングを調“)さすることにより、加圧
ヘラ1−の過熱を防ぎ、加圧ヘッドに金属の溶着するの
を防ぐ。
After setting the degree of vacuum inside and outside the container to be sealed to the specified value, adjust the pressure of the pressurizing cylinder, the pressurizing time, the amount of energization, the energizing time, and the timing of energizing and pressurizing. , to prevent the pressure spatula 1- from overheating and to prevent metal from welding to the pressure head.

〔実施例〕〔Example〕

以下1本発明の一実施例を第1図により説明する。 An embodiment of the present invention will be described below with reference to FIG.

真空封止される容器3の金属管2を挟むように対向して
、溶接時のff1l’+を段用する加圧ヘッド5が配置
され、この加圧ヘッド5は、スライトロツドロの先端に
装着されている。スライドロッド6は電極部軸受11に
よって支持され、電極部軸受11とスライドロッドには
Oリング9が、設置されている。真空容器4には真空容
器フランジ12が設置され、このフランジ12Nこ電極
部軸受11が、テフロン製の絶縁スペーサ10を介して
取付けられている。真空容器フランジ12.電極部軸受
11にはシールのため、Oリング8.7が装着されてい
る。スライドロッド6の後端には、加圧シリンダ13が
装着され、溶接電源14が接続されている。
A pressure head 5 for applying ff1l'+ at the time of welding is arranged opposite to sandwich the metal tube 2 of the container 3 to be vacuum sealed, and this pressure head 5 is attached to the tip of the slide rod. ing. The slide rod 6 is supported by an electrode bearing 11, and an O-ring 9 is installed between the electrode bearing 11 and the slide rod. A vacuum vessel flange 12 is installed on the vacuum vessel 4, and an electrode portion bearing 11 is attached to the flange 12N via an insulating spacer 10 made of Teflon. Vacuum vessel flange 12. An O-ring 8.7 is attached to the electrode bearing 11 for sealing. A pressure cylinder 13 is attached to the rear end of the slide rod 6, and a welding power source 14 is connected thereto.

真空容器4の端面には、封止する容器3を出し入れする
ための開閉扉17が装着され1間に装入された0リング
17でシールされている。又、真空容器4は真空源であ
る真空ポンプ15と恒久的に接続されている。
An opening/closing door 17 for taking in and out the container 3 to be sealed is attached to the end face of the vacuum container 4, and is sealed with an O-ring 17 inserted between the opening and closing doors 17. Further, the vacuum container 4 is permanently connected to a vacuum pump 15 which is a vacuum source.

真空容器の開閉B%17より真空容器4内に挿入された
容器3は、真空容器4内が真空ポンプ15により真空排
気されるに伴い、容器3の貯槽1゜封止用金属管2とも
真空となる。所定の真空度が得られると、先ず、加圧シ
リンダ13がg勤し、スライドロッド6が、電極部軸受
11内を滑り。
The container 3 inserted into the vacuum container 4 from opening/closing of the vacuum container B%17 is evacuated by the vacuum pump 15, and as the inside of the vacuum container 4 is evacuated, the storage tank 1° of the container 3 and the metal tube 2 for sealing are also evacuated. becomes. When a predetermined degree of vacuum is obtained, first, the pressurizing cylinder 13 is activated, and the slide rod 6 slides inside the electrode bearing 11.

スライドロッド6の先端の加圧ヘッド5が、左右より封
止用金属管2を押し、金属管壁を密着させる。その後、
加圧しながら、電源14より通電することにより、金属
管2gを溶接する。溶接電源14はスライドロッド6に
接続され、スライドロッド6が絶縁スペーサ10により
真空容器・1と電気的に絶縁されているので、溶接電流
は溶1妾電源1・1よりスライドロッド6を通して金属
管2.対向側の加圧ヘッド5.スライドロッド6と流れ
て溶接される。
The pressure head 5 at the tip of the slide rod 6 presses the sealing metal tube 2 from the left and right to bring the metal tube walls into close contact. after that,
The metal tube 2g is welded by applying electricity from the power source 14 while applying pressure. The welding power source 14 is connected to the slide rod 6, and since the slide rod 6 is electrically insulated from the vacuum vessel 1 by the insulating spacer 10, the welding current is transmitted from the welding power source 1 to the metal tube through the slide rod 6. 2. Opposite pressure head 5. It flows and is welded to the slide rod 6.

金属管溶接時の加圧力、加圧時間1通電量2通電時間9
通電と加圧のタイミング、間隔は第2図のパターンで実
施する。加f丁ヘッドと金属管接触後、−回目の通電を
行い、加圧状態で1通電を一時停止後、第二回目の通電
を行う。
Pressure force when welding metal tubes, pressurization time 1 energization amount 2 energization time 9
The timing and interval of energization and pressurization are carried out according to the pattern shown in Fig. 2. After contacting the cutting head with the metal tube, the -th energization is performed, and after the first energization is temporarily stopped in a pressurized state, the second energization is performed.

二回目通電停止後も加圧のまま溶接部を冷却する。−同
口通電の完了後の通電停止、I−により、加圧ヘッドの
温度がFす、過熱を防ぐ。又、加圧状態で冷却すること
により、溶接変形やスプリングバックを防ぐ。
Even after the second energization is stopped, the welded part is cooled while being pressurized. - By stopping the energization after completing the energization of the same port, the temperature of the pressure head is reduced to F to prevent overheating. Also, cooling under pressure prevents welding deformation and springback.

本実施例によれば、絶縁スペーサ10で、電気的絶縁と
真空シールとを行い、加圧シリンダを真空容器4外へ出
すことにより、真空容器の大きさを封止する金属容器の
大きさに対し過度にならぬよう効率的な大きさにするこ
とができ、容器製作上のコスト低減と、真空排気を容易
にすることができる。
According to this embodiment, the insulating spacer 10 performs electrical insulation and vacuum sealing, and by bringing the pressurized cylinder out of the vacuum container 4, the size of the vacuum container is reduced to the size of the metal container to be sealed. On the other hand, it is possible to make the size of the container efficient so as not to make it excessively large, and it is possible to reduce the cost of manufacturing the container and to facilitate vacuum evacuation.

〔発明の効果〕 本発明によれば、容器内を常に安定した真空状態に保つ
ことができ、真空封止後の真空度が高精度な容器を製作
することができる。
[Effects of the Invention] According to the present invention, it is possible to maintain a stable vacuum state inside the container at all times, and it is possible to manufacture a container with a highly accurate degree of vacuum after vacuum sealing.

真空封止時、容器毎に真空源との接続が不要のため、複
雑な操作及び金属管の高精度な加工が不要となり、生産
の自動化を容易にし、加工工数を減らすことができる。
When vacuum-sealing, it is not necessary to connect each container to a vacuum source, which eliminates the need for complicated operations and high-precision processing of metal tubes, making it easier to automate production and reduce processing man-hours.

接続代分金属管を短かくでき、狭い容積に多くの封止容
器を収納できる。
The metal pipe for connection can be shortened, and many sealed containers can be stored in a small space.

真空封止の信頼性を高める効果がある。This has the effect of increasing the reliability of vacuum sealing.

また、加圧1通電条件の選定により、加圧ヘッドに金属
の溶nするのを防ぐことができる。
Further, by selecting the pressure 1 energization conditions, it is possible to prevent metal from melting into the pressure head.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の断面図、第2図は、第1図
の加圧・通電条件を示す図、第3図は従来例の断面図で
ある。 1・・・貯槽、2・・封止用金属管、3・・・容器、4
・・真空容器、5・・・加圧ヘッド、6・・・スライド
ロッド、7.8,9.17・・・○リング、10・・・
絶縁スペーサ、11・・電極部軸受、12・・・真空容
器フランジ、J3 ・加圧シリンダ、14・・・溶接電
源、15・・・真空源、16・・開閉が、17・・弾力
性密封部材。 1つ 空圧源、20・・・金属管挿入口。
FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a diagram showing the pressurization and energization conditions of FIG. 1, and FIG. 3 is a sectional view of a conventional example. 1... Storage tank, 2... Metal tube for sealing, 3... Container, 4
...Vacuum container, 5...Pressure head, 6...Slide rod, 7.8, 9.17...○ ring, 10...
Insulating spacer, 11... Electrode part bearing, 12... Vacuum vessel flange, J3 - Pressure cylinder, 14... Welding power source, 15... Vacuum source, 16... Opening/closing, 17... Elastic sealing Element. 1 pneumatic source, 20...metal tube insertion port.

Claims (1)

【特許請求の範囲】 1、金属管を通気口としてもつ容器を真空に封止する装
置において、 前記容器を真空容器に入れ、前記真空容器内を真空排気
することにより、封止する前記容器内を真空にする手段
と、前記金属管に通電すると共に圧着させる手段と、こ
れ等を制御する手段とを備えたことを特徴とする金属管
の真空封止装置。 2、真空度が所定の値になるように真空排気後、加圧力
、加圧時間、通電量、通電時間、通電と加圧のタイミン
グ、及び、間隔を溶接条件とすることを特徴とする特許
請求項第1項の真空封止装置。
[Scope of Claims] 1. In an apparatus for vacuum sealing a container having a metal tube as a vent, the container is placed in a vacuum container and the inside of the vacuum container is evacuated to seal the container. 1. A vacuum sealing device for a metal tube, comprising: means for evacuating the metal tube; means for energizing and crimping the metal tube; and means for controlling these. 2. A patent characterized in that the welding conditions are applied pressure, pressurization time, energization amount, energization time, timing of energization and pressurization, and interval after evacuation so that the degree of vacuum reaches a predetermined value. The vacuum sealing device according to claim 1.
JP63320678A 1988-12-21 1988-12-21 Vacuum sealing device for metal tubes Expired - Fee Related JP2644866B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63320678A JP2644866B2 (en) 1988-12-21 1988-12-21 Vacuum sealing device for metal tubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63320678A JP2644866B2 (en) 1988-12-21 1988-12-21 Vacuum sealing device for metal tubes

Publications (2)

Publication Number Publication Date
JPH02169184A true JPH02169184A (en) 1990-06-29
JP2644866B2 JP2644866B2 (en) 1997-08-25

Family

ID=18124110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63320678A Expired - Fee Related JP2644866B2 (en) 1988-12-21 1988-12-21 Vacuum sealing device for metal tubes

Country Status (1)

Country Link
JP (1) JP2644866B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1075757C (en) * 1997-09-04 2001-12-05 大连宝原核设备有限公司 Resistance plugging spot welding of vacuum pumping port with internal pressure container
KR100914959B1 (en) * 2007-09-03 2009-09-02 주식회사 쏠리스 Pinch-off Device for Vacuum Canning

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5813482A (en) * 1981-07-14 1983-01-25 Diesel Kiki Co Ltd Resistance welding method for sintered alloy material
JPS58134284U (en) * 1982-03-01 1983-09-09 松下電器産業株式会社 Vacuum sealing jig
JPS62196595A (en) * 1986-02-24 1987-08-29 Furukawa Alum Co Ltd Sealing of operating liquid sealing port for heat pipe
JPS62248581A (en) * 1986-04-21 1987-10-29 Showa Alum Corp Manufacture of heat pipe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5813482A (en) * 1981-07-14 1983-01-25 Diesel Kiki Co Ltd Resistance welding method for sintered alloy material
JPS58134284U (en) * 1982-03-01 1983-09-09 松下電器産業株式会社 Vacuum sealing jig
JPS62196595A (en) * 1986-02-24 1987-08-29 Furukawa Alum Co Ltd Sealing of operating liquid sealing port for heat pipe
JPS62248581A (en) * 1986-04-21 1987-10-29 Showa Alum Corp Manufacture of heat pipe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1075757C (en) * 1997-09-04 2001-12-05 大连宝原核设备有限公司 Resistance plugging spot welding of vacuum pumping port with internal pressure container
KR100914959B1 (en) * 2007-09-03 2009-09-02 주식회사 쏠리스 Pinch-off Device for Vacuum Canning

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