JPH0217646U

JPH0217646U -

Info

Publication number: JPH0217646U
Application number: JP9767988U
Authority: JP
Priority date: 1988-07-22
Filing date: 1988-07-22
Publication date: 1990-02-05

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示すブロツク図、
第２図ａ〜ｃは第１図に示す実施例の動作説明図
、第３図は従来の一例を示すブロツク図、第４図
ａ〜ｆは第３図に示す従来例の動作説明図である
。Ａ…ピンホール、Ｂ…黒点、１…２値画像記憶
部、２…輪郭線算出部、３，１０…比較回路、４
…光電変換回路、５…２値化回路、６…記憶回路
、７…輪郭線抽出回路、８…算出回路、９…準正
常パターン作成部、１１…拡大縮小回路、１２…
縮小拡大回路。 FIG. 1 is a block diagram showing an embodiment of the present invention.
Figures 2 a to c are explanatory diagrams of the operation of the embodiment shown in Figure 1, Figure 3 is a block diagram showing a conventional example, and Figures 4 a to f are explanatory diagrams of the operation of the conventional example shown in Figure 3. be. A... Pinhole, B... Black dot, 1... Binary image storage section, 2... Contour calculation section, 3, 10... Comparison circuit, 4
...Photoelectric conversion circuit, 5...Binarization circuit, 6...Storage circuit, 7...Outline extraction circuit, 8...Calculation circuit, 9...Semi-normal pattern creation section, 11...Enlargement/reduction circuit, 12...
Reduction/enlargement circuit.

補正昭６３．１０．２０図面の簡単な説明を次のように補正する。明細書第８頁第１４行目の「第２図ａ〜ｃは」
を「第２図は」と訂正します。明細書第８頁第１５行目の「第４図ａ〜ｆは」
を「第４図は」と訂正します。Amendment October 20, 1981 The brief description of the drawing is amended as follows. "Figure 2 a to c" on page 8, line 14 of the specification
Correct it to "Figure 2 is". "Figures 4 a to f" on page 8, line 15 of the specification
Correct it to "Figure 4 is".

Claims

[Scope of utility model registration request]

A photoelectric conversion circuit that inputs an optical image of a pattern to be inspected and converts it into an electrical signal, and a photoelectric conversion circuit that converts the electrical signal into an electrical signal.
a binary image storage unit comprising a binary circuit that converts into a digital signal and a storage circuit that stores the binary signal as binary data; and a binary image storage unit that extracts the outline of the pattern from the binary data. a contour line calculation section including a contour line extraction circuit that outputs a contour line signal; a calculation circuit that calculates the length of the contour line of the pattern from the contour line signal and outputs calculated data; 1. A pattern defect detection device comprising: a comparison circuit that calculates a minimum value of the length of a contour line, compares the obtained reference value, and detects a pattern smaller than the reference value as a defective pattern.