JPH0336947U - - Google Patents
Info
- Publication number
- JPH0336947U JPH0336947U JP9785089U JP9785089U JPH0336947U JP H0336947 U JPH0336947 U JP H0336947U JP 9785089 U JP9785089 U JP 9785089U JP 9785089 U JP9785089 U JP 9785089U JP H0336947 U JPH0336947 U JP H0336947U
- Authority
- JP
- Japan
- Prior art keywords
- defect
- extraction unit
- ccd camera
- defect extraction
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 19
- 238000000605 extraction Methods 0.000 claims description 7
- 239000000284 extract Substances 0.000 claims 2
- 230000002950 deficient Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
第１図は本考案の一実施例を示すブロツク図、
第２図は従来のデイスク表面欠陥検査装置を示す
ブロツク図、第３図は検出対象欠陥の一例を示し
た図である。
１……２次元ＣＣＤカメラ、２，３……欠陥抽
出ユニツト、４……欠陥選択ユニツト、ａ……欠
陥例１、ｂ……欠陥例２。
FIG. 1 is a block diagram showing an embodiment of the present invention.
FIG. 2 is a block diagram showing a conventional disk surface defect inspection apparatus, and FIG. 3 is a diagram showing an example of a defect to be detected. 1... Two-dimensional CCD camera, 2, 3... Defect extraction unit, 4... Defect selection unit, a... Defect example 1, b... Defect example 2.
Claims (1)
続され前記ＣＣＤカメラの画像の濃淡を第１のし
きい値により判別して欠陥情報を抽出する第１の
欠陥抽出ユニツトと、前記第１の欠陥抽出ユニツ
トと並列に前記ＣＣＤカメラに接続され前記第１
のしきい値より低い第２のしきい値により前記Ｃ
ＣＤの画像の濃淡を判別して欠陥情報を抽出する
第２の欠陥抽出ユニツトと、前記第１と第２の欠
陥抽出ユニツトに接続され前記第１の欠陥抽出ユ
ニツトが抽出した欠陥情報はすべて欠陥とし前記
第２の欠陥抽出ユニツトが抽出した欠陥情報を予
め設定した大きさ以上のもののみを欠陥とする欠
陥選択ユニツトとを含むことを特徴とするデイス
ク表面欠陥検査装置。 a two-dimensional CCD camera; a first defect extraction unit that is connected to the CCD camera and extracts defect information by determining the density of the image of the CCD camera using a first threshold; and the first defect extraction unit. connected to the CCD camera in parallel with the first
The second threshold value lower than the threshold value of C
A second defect extraction unit extracts defect information by determining the density of the CD image, and is connected to the first and second defect extraction units, and all the defect information extracted by the first defect extraction unit is defective. and a defect selection unit which selects as defects only defects having a size larger than a preset value based on the defect information extracted by the second defect extraction unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9785089U JPH0336947U (en) | 1989-08-21 | 1989-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9785089U JPH0336947U (en) | 1989-08-21 | 1989-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0336947U true JPH0336947U (en) | 1991-04-10 |
Family
ID=31646977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9785089U Pending JPH0336947U (en) | 1989-08-21 | 1989-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336947U (en) |
-
1989
- 1989-08-21 JP JP9785089U patent/JPH0336947U/ja active Pending
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