JPH0217834U - - Google Patents
Info
- Publication number
- JPH0217834U JPH0217834U JP1988096377U JP9637788U JPH0217834U JP H0217834 U JPH0217834 U JP H0217834U JP 1988096377 U JP1988096377 U JP 1988096377U JP 9637788 U JP9637788 U JP 9637788U JP H0217834 U JPH0217834 U JP H0217834U
- Authority
- JP
- Japan
- Prior art keywords
- shaft body
- hole
- semiconductor substrate
- fixed plate
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988096377U JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988096377U JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217834U true JPH0217834U (cs) | 1990-02-06 |
Family
ID=31321267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988096377U Pending JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217834U (cs) |
-
1988
- 1988-07-22 JP JP1988096377U patent/JPH0217834U/ja active Pending