JPH02184013A - Manufacture of solid electrolytic capacitor - Google Patents
Manufacture of solid electrolytic capacitorInfo
- Publication number
- JPH02184013A JPH02184013A JP447089A JP447089A JPH02184013A JP H02184013 A JPH02184013 A JP H02184013A JP 447089 A JP447089 A JP 447089A JP 447089 A JP447089 A JP 447089A JP H02184013 A JPH02184013 A JP H02184013A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- layer
- lead
- lead dioxide
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 title description 20
- 239000007787 solid Substances 0.000 title description 18
- 238000004519 manufacturing process Methods 0.000 title description 6
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 claims abstract description 60
- 239000004065 semiconductor Substances 0.000 claims abstract description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 15
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 claims abstract description 13
- 239000003960 organic solvent Substances 0.000 claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 10
- 229920005989 resin Polymers 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 239000004020 conductor Substances 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 17
- 239000011888 foil Substances 0.000 abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 7
- 239000007864 aqueous solution Substances 0.000 abstract description 6
- 239000008213 purified water Substances 0.000 abstract description 6
- 230000032683 aging Effects 0.000 abstract description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 3
- 229940046892 lead acetate Drugs 0.000 abstract description 3
- 239000004925 Acrylic resin Substances 0.000 abstract description 2
- 229920000178 Acrylic resin Polymers 0.000 abstract description 2
- KQNKJJBFUFKYFX-UHFFFAOYSA-N acetic acid;trihydrate Chemical compound O.O.O.CC(O)=O KQNKJJBFUFKYFX-UHFFFAOYSA-N 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract 2
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 abstract 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 abstract 1
- LFVGISIMTYGQHF-UHFFFAOYSA-N ammonium dihydrogen phosphate Chemical compound [NH4+].OP(O)([O-])=O LFVGISIMTYGQHF-UHFFFAOYSA-N 0.000 abstract 1
- 239000003822 epoxy resin Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000002075 main ingredient Substances 0.000 abstract 1
- 229920000647 polyepoxide Polymers 0.000 abstract 1
- 238000002791 soaking Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 50
- 238000000034 method Methods 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000007654 immersion Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- -1 persulfate ions Chemical class 0.000 description 4
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000012452 mother liquor Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- HXDLWJWIAHWIKI-UHFFFAOYSA-N 2-hydroxyethyl acetate Chemical compound CC(=O)OCCO HXDLWJWIAHWIKI-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- 239000004254 Ammonium phosphate Substances 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical class CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium peroxydisulfate Substances [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 1
- VAZSKTXWXKYQJF-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)OOS([O-])=O VAZSKTXWXKYQJF-UHFFFAOYSA-N 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 1
- 235000019289 ammonium phosphates Nutrition 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- NKDDWNXOKDWJAK-UHFFFAOYSA-N dimethoxymethane Chemical compound COCOC NKDDWNXOKDWJAK-UHFFFAOYSA-N 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 229940051250 hexylene glycol Drugs 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は良好な誘電損失特性を維持しつつ、漏れ電流の
小さい固体電解コンデンサを製造する方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for manufacturing a solid electrolytic capacitor with low leakage current while maintaining good dielectric loss characteristics.
(従来の技術)
弁作用金属からなる陽極基体の表面にAI電電体化化皮
膜層半導体層および導電体層を積層した固体電解コンデ
ンサは、半導体層として二酸化マンガン、二酸化鉛、二
酸化鉛と硫酸鉛との混合物やTCNQ塩、導電性高分子
等の有機半導体を用いたものか知られている。この中で
二酸化鉛、二酸化鉛と硫酸鉛との混合物を半導体層とし
て用いたものか、とりわけ、温度特性及び高周波特性の
点で優れている。(Prior art) A solid electrolytic capacitor in which a semiconductor layer and a conductor layer are laminated on the surface of an anode substrate made of a valve metal is made of manganese dioxide, lead dioxide, lead dioxide, and lead sulfate as semiconductor layers. It is known to use organic semiconductors such as mixtures with , TCNQ salts, and conductive polymers. Among these, those using lead dioxide or a mixture of lead dioxide and lead sulfate as the semiconductor layer are particularly excellent in terms of temperature characteristics and high frequency characteristics.
(発明か解決しようとする課題)
しかしながら、前述した固体電解コンデンサは、半導体
層を形成する時に誘電体酸化皮膜層を多かれ少なかれ傷
つけるため、エージング操作によって、誘電体酸化皮膜
層を修復する必要がある。また、二酸化鉛あるいは二酸
化鉛と硫酸鉛との混合物を半導体層として用いた固体電
解コンデンサも作製時において、エージング操作によっ
て漏れ電流(以下LCと略す)を低減させるか、工業生
産上、ニージンク時間が出来るたけ短くて、しかも漏れ
電流の小さい固体電解コンデンサの製法が望まれていた
。(Problem to be solved by the invention) However, in the solid electrolytic capacitor described above, the dielectric oxide film layer is more or less damaged when forming the semiconductor layer, so it is necessary to repair the dielectric oxide film layer by an aging operation. . In addition, when manufacturing solid electrolytic capacitors using lead dioxide or a mixture of lead dioxide and lead sulfate as a semiconductor layer, the leakage current (hereinafter abbreviated as LC) is reduced by an aging operation, or the knee-jink time is reduced in industrial production. There was a desire for a method for producing solid electrolytic capacitors that were as short as possible and had low leakage current.
(課題を解決するための手段)
本発明は、前記の問題点を解決するためになされたもの
で、その要旨は弁作用を有する金属からなる陽極基体の
表面に誘電体酸化皮膜層、この誘電体酸化皮膜層上に二
酸化鉛あるいは二酸化鉛と硫酸鉛とを主成分とする半導
体層を形成した後に、水に可溶な有機溶剤と水とに順次
浸漬させ、その後、半導体層上に導電体層、その上に樹
脂層を積層して固体電解コンデンサを製造する方法にあ
る。(Means for Solving the Problems) The present invention has been made to solve the above-mentioned problems, and its gist is to provide a dielectric oxide film layer on the surface of an anode substrate made of a metal having a valve action. After forming a semiconductor layer mainly composed of lead dioxide or lead dioxide and lead sulfate on the body oxide film layer, the semiconductor layer is sequentially immersed in a water-soluble organic solvent and water, and then a conductive layer is formed on the semiconductor layer. A solid electrolytic capacitor is manufactured by laminating a resin layer on top of the solid electrolytic capacitor.
以下、本発明の方法についてさらに詳しく説明する。The method of the present invention will be explained in more detail below.
本発明の製造方法による固体電解コンデンサの陽極とし
て用いられる弁金属基体としては、例えば、アルミニウ
ム、タンタル、ニオブ、チタンおよびこれらを基質とす
る合金等、弁作用を有する金属かいずれも使用できる。As the valve metal substrate used as the anode of the solid electrolytic capacitor according to the manufacturing method of the present invention, any metal having a valve action can be used, such as aluminum, tantalum, niobium, titanium, and alloys using these as substrates.
陽極基体の表面に設ける誘電体酸化皮膜層は。The dielectric oxide film layer provided on the surface of the anode substrate.
陽極基体表面部分に設けられた陽極基体自体の酸化物層
であってもよく、あるいは、陽極基体の表面トに設けら
れた他の誘電体酸化物の層であってもよいが、特に陽極
弁金属自体の酸化物からなる層であることが望ましい。It may be an oxide layer of the anode substrate itself provided on the surface portion of the anode substrate, or it may be another dielectric oxide layer provided on the surface of the anode substrate, but in particular, the anode valve It is desirable that the layer be made of an oxide of the metal itself.
いずれの場合にも酸化物層を設ける方法としては、電解
液を用いた陽極化成法など従来公知の方法を用いること
かてきる。In either case, the oxide layer can be provided by a conventionally known method such as an anodization method using an electrolytic solution.
また、本発明に用いる半導体層は二酸化鉛、もしくは二
酸化鉛と硫酸鉛を主成分として、従来公知の化学的析出
法、あるいは電気化学的析出法て作製することかできる
。Further, the semiconductor layer used in the present invention can be produced using lead dioxide, or lead dioxide and lead sulfate as main components, by a conventionally known chemical deposition method or electrochemical deposition method.
化学的析出法としては、二酸化鉛を主成分とする半導体
層を形成する場合、例えば、鉛含有化合物を溶かした溶
液と酸化剤を溶かした溶液を混合して反応母液を調製し
た後、反応母液に上述の誘電体酸化皮膜層を設けた陽極
基体を浸漬し、酸化皮膜層上に二酸化鉛の半導体層を析
出させる。また、二酸化鉛と硫酸鉛を主成分とする半導
体層は、例えば、鉛イオン及び過硫酸イオンを含んだ水
溶液を反応母液として化学的に析出させることかできる
(特開昭53−51621号公報)。When forming a semiconductor layer containing lead dioxide as a main component, for example, a chemical precipitation method involves preparing a reaction mother liquor by mixing a solution containing a lead-containing compound and a solution containing an oxidizing agent. The anode substrate provided with the above-mentioned dielectric oxide film layer is immersed in the solution, and a semiconductor layer of lead dioxide is deposited on the oxide film layer. Furthermore, a semiconductor layer containing lead dioxide and lead sulfate as main components can be chemically precipitated using, for example, an aqueous solution containing lead ions and persulfate ions as a reaction mother liquor (Japanese Patent Application Laid-open No. 51621/1983). .
一方、電気化学的析出法としては、例えば、高濃度の鉛
イオンを含んだ電解液中で電解酸化により二酸化鉛を析
出させる方法か挙げられる(特開昭62−185307
号公報)。On the other hand, examples of electrochemical deposition methods include a method in which lead dioxide is deposited by electrolytic oxidation in an electrolytic solution containing a high concentration of lead ions (Japanese Patent Application Laid-Open No. 185307-1982).
Publication No.).
次に、以上述べた方法で半導体層を形成した陽極基体を
まず水に可溶な有機溶剤に浸漬する。有機溶剤としては
、例えば、1価アルコール、フェノール、エーテルはメ
タノール、エタノール、n−プロピルアルコール、イソ
プロピルアルコール、ジオキサン、テトラヒドロフラン
など、酸、エステルはギ酸、酢酸、酪酸、乳酸メチル、
乳酸エチル、リン酸トリエチル、γ−ブチロラクト、ン
、三フッ化酢酸など、多価アルコールとそのエーテル、
エステルはエチレングリコール、エチレングリコールモ
ノメチルエーテル、エチレンクリコールモノエチルエー
テル、エチレングリコールモノメチルエーテル、エチレ
ンクリコールモノアセテート、エチレングリコールモノ
メチルエーテルアセテート、エチレングリコールジメチ
ルエーテル、ジエチレングリコール、ジエチレングリコ
ールモノメチルエーテル、ジエチレングリコールモノメ
チルエーテル、ジエチレンクリコールジメチルエーテル
、トリエチレングリコール、プロピレングリコール、ヘ
キシレンクリコール、グリセリンなど、アルデヒド、ア
セタール、ケトンはアセトン、メチラール、エチルメチ
ルケトン、アセチルアセトンなど、含窒素化合物にトロ
、アミン、アミド)はアセトニトリル、シクロヘキシル
アミン、エチレンシアミン、ピコリン、モノエタノール
アミン、ジェタノールアミン、モルホリン、ジメチルホ
ルムアミド、ヘキサメチルホスホルトリアミドなど、硫
黄化合物は無水亜硫酸、スルホラン、ジメチルスルホキ
シドなどが挙げられる。これらの有機溶剤の内メタノー
ル、エタノール、アセトンなどが主として使用される。Next, the anode substrate on which the semiconductor layer has been formed by the method described above is first immersed in a water-soluble organic solvent. Examples of organic solvents include monohydric alcohols, phenols, and ethers such as methanol, ethanol, n-propyl alcohol, isopropyl alcohol, dioxane, and tetrahydrofuran; acids and esters include formic acid, acetic acid, butyric acid, methyl lactate,
Polyhydric alcohols and their ethers, such as ethyl lactate, triethyl phosphate, γ-butyrolactate, trifluoroacetic acid, etc.
Esters include ethylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monomethyl ether, ethylene glycol monoacetate, ethylene glycol monomethyl ether acetate, ethylene glycol dimethyl ether, diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol monomethyl ether, and diethylene glycol monomethyl ether. Recall dimethyl ether, triethylene glycol, propylene glycol, hexylene glycol, glycerin, etc. Aldehydes, acetals, and ketones include acetone, methylal, ethyl methyl ketone, and acetylacetone; , ethylenecyamine, picoline, monoethanolamine, jetanolamine, morpholine, dimethylformamide, hexamethylphosphortriamide, etc. Examples of the sulfur compound include sulfite anhydride, sulfolane, dimethylsulfoxide, and the like. Among these organic solvents, methanol, ethanol, acetone, etc. are mainly used.
有機溶剤の浸漬条件は室温〜室温+lO°Cの温度下て
工分間〜30分間浸漬する。The immersion conditions for the organic solvent are as follows: immersion at a temperature of room temperature to room temperature + lO<0>C for 30 minutes to 30 minutes.
次に陽極基体を有機溶剤から引きトげて水に浸漬させる
。水は精製水やイオン交換水を使用し、浸漬条件は有機
溶剤の場合と同じ条件でよい。Next, the anode substrate is removed from the organic solvent and immersed in water. Purified water or ion-exchanged water may be used, and the immersion conditions may be the same as those for organic solvents.
次に陽極基体を水から引き」二げて、放置して表面乾燥
してから半導体層の上に従来公知の銀ペースト等の導電
ペーストからなる導電体層を形成し、その導電体層の上
に樹脂モールド、樹脂ケース、樹脂のディッピング、ラ
ミネートフィルムによる外装などの樹脂層を積層し、そ
の後、エージングを行って各種用途の汎用コンデンサ製
品とすることができる。Next, the anode substrate is removed from the water, left to dry, and then a conductor layer made of a conventionally known conductive paste such as silver paste is formed on the semiconductor layer. A resin layer such as a resin mold, a resin case, resin dipping, or a laminate film exterior is laminated on the capacitor, and then aging is performed to make a general-purpose capacitor product for various uses.
弁作用金属の陽極基体の表面に、誘電体酸化皮膜層、二
酸化鉛あるいは二酸化鉛と硫酸鉛とを主成分とする半導
体層を形成し、その後、水に可溶な有機溶剤と水に順番
に浸漬する操作を行うことによって、誘電体酸化皮膜層
に水分が良く浸透する。そして半導体層を形成した時に
傷んだ誘電体酸化皮膜層は水分か良く浸透しているので
、エージング操作によって優れた修復作用をもたらすも
のと考えられる。A dielectric oxide film layer and a semiconductor layer mainly composed of lead dioxide or lead dioxide and lead sulfate are formed on the surface of the anode substrate made of valve metal, and then sequentially soaked in a water-soluble organic solvent and water. By performing the dipping operation, moisture permeates well into the dielectric oxide film layer. Since the dielectric oxide film layer damaged when the semiconductor layer was formed is well permeated with moisture, it is thought that an aging operation brings about an excellent repair effect.
(実施例) 以下、実施例、比較例を示して、未発明を説明する。(Example) Hereinafter, the uninvention will be explained by showing Examples and Comparative Examples.
実施例 l
長さ2 cra、幅0.5CIのアルミニウム箔を陽極
とし、交流により箔の表面を電気化学的にエツチング処
理した後、エツチングアルミニウム箔に陽極端子をかし
め付けし、陽極端子を接続した0次いで、りん酸とりん
酸アンモニウムの水溶液中で電気化学的に処理してアル
ミナの酸化皮膜を形成し、低圧用エツチングアルミニウ
ム箔成1!!l(約lOp、 F / c m’ )を
得た。ついで、酢酸鉛三水和物2.4モル/lの水溶液
と過硫酩アンモニウム4モル/lの水溶液を混合した反
応母液に浸清し、80°Cて30分間反応させた。誘電
体酸化皮膜層上に生じた二酸化鉛と硫酸鉛からなる半導
体層を水洗して未反応物を洗浄した後、 120°Cで
減圧乾燥した。生成した半導体層は二酸化鉛と硫酸鉛か
ら成り、二酸化鉛か約25重硅%含まれることを質量分
析、X線分析、赤外分光分析により確認した。Example 1 An aluminum foil with a length of 2 cra and a width of 0.5 CI was used as an anode, and the surface of the foil was electrochemically etched using alternating current, and then the anode terminal was caulked to the etched aluminum foil to connect the anode terminal. Next, an oxide film of alumina is formed by electrochemical treatment in an aqueous solution of phosphoric acid and ammonium phosphate to form an etched aluminum foil for low pressure use. ! l (approximately lOp, F/cm') was obtained. Then, it was immersed in a reaction mother liquor containing a mixture of a 2.4 mol/l aqueous solution of lead acetate trihydrate and a 4 mol/l aqueous solution of ammonium persulfate, and allowed to react at 80°C for 30 minutes. The semiconductor layer made of lead dioxide and lead sulfate formed on the dielectric oxide film layer was washed with water to remove unreacted substances, and then dried under reduced pressure at 120°C. The produced semiconductor layer was composed of lead dioxide and lead sulfate, and it was confirmed by mass spectrometry, X-ray analysis, and infrared spectroscopy that it contained about 25% lead dioxide.
形成した半導体層をエタノール中へ5分間浸漬して取り
出し、更に精製水中へ5分間浸漬した。The formed semiconductor layer was immersed in ethanol for 5 minutes, taken out, and further immersed in purified water for 5 minutes.
その後室温下で20分間放置後、この半導体層上に銀粉
30部、二酸化鉛60部、アクリル樹脂10部からなる
ペーストを塗布して乾燥した後、このペーストを使って
陰極を取り出し、液状エポキシ樹脂(11本チバガイギ
ー社製XNR−1218)にデイツプ後150’cで1
時間乾燥して樹脂封口し固体電解コンデンサを作製した
。Thereafter, after leaving the semiconductor layer for 20 minutes at room temperature, a paste consisting of 30 parts of silver powder, 60 parts of lead dioxide, and 10 parts of acrylic resin was applied onto the semiconductor layer, and after drying, the cathode was removed using this paste, and liquid epoxy resin was applied. (11 Ciba Geigy XNR-1218) at 150'c after dip.
After drying for a while and sealing with resin, a solid electrolytic capacitor was produced.
実施例 2
実施例1てエタノールをアセトンに代えた以外は、実施
例1と同様にして固体゛電解コンデンサを作製した。Example 2 A solid electrolytic capacitor was produced in the same manner as in Example 1 except that ethanol was replaced with acetone.
実施例 3
実施例1で精製水をイオン交換水に代えた以外は実施例
1と同様にして固体電解コンデンサを作製した。Example 3 A solid electrolytic capacitor was produced in the same manner as in Example 1 except that purified water in Example 1 was replaced with ion-exchanged water.
実施例 4
実施例1と同様な化成箔を陽極とし、陰極に通常の工・
ンチングを施していないアルミ箔を使用して、 1.2
モル/lの酢酸鉛水溶液中で電解酸化を行った。この時
の印加電圧は15vである。Example 4 The same chemically modified foil as in Example 1 was used as an anode, and the cathode was subjected to ordinary processing.
1.2 Using unetched aluminum foil
Electrolytic oxidation was carried out in a mol/l lead acetate aqueous solution. The applied voltage at this time was 15V.
二酸化鉛層か析出した化成箔を水中に30分間放置した
後、120°Cて減圧乾燥した。引き続き。The chemically formed foil on which the lead dioxide layer had been deposited was left in water for 30 minutes, and then dried under reduced pressure at 120°C. continuation.
実施例1と同様な方法でエタノール及び水に浸漬後、導
電体層及び樹脂層を形成し、固体電解コンデンサを作製
した。After immersion in ethanol and water in the same manner as in Example 1, a conductor layer and a resin layer were formed to produce a solid electrolytic capacitor.
比較例 l
実施例1で半導体層を形成後、エタノールと精製水への
浸漬を行わなかった以外は実施例1と同様にして固体電
解コンデンサを作製した。Comparative Example 1 A solid electrolytic capacitor was produced in the same manner as in Example 1, except that after forming the semiconductor layer in Example 1, immersion in ethanol and purified water was not performed.
比較例 2
実施例4で半導体層を形成後、エタノールと精製水への
浸漬を行わなかった以外は実施例4と同様にして固体電
解コンデンサを作製した。Comparative Example 2 A solid electrolytic capacitor was produced in the same manner as in Example 4, except that after forming the semiconductor layer in Example 4, immersion in ethanol and purified water was not performed.
以上、実施例1〜4および比較例1〜2で作製した固体
電解コンデンサ各々20点、計120点を125°Cの
恒温槽に放置し、各々に30vの電圧を印加して30分
エージジグした。この時、 LCが0.5鉢A以下にな
っている個数を「歩留り」として。As described above, the solid electrolytic capacitors produced in Examples 1 to 4 and Comparative Examples 1 to 2, 20 each, 120 in total, were left in a constant temperature bath at 125°C, and a voltage of 30 V was applied to each to age for 30 minutes. . At this time, the number of pieces whose LC is 0.5 pots A or less is considered the "yield".
固体電解コンデンサの性能と共に第1表に示した。Table 1 shows the performance of the solid electrolytic capacitor.
第
表
膜層および二酸化鉛あるいは二酸化鉛と硫酸鉛とを主成
分とする半導体層を形成した後に、水に可溶な有機溶剤
と水とに順番に浸漬させている。そして、その後に半導
体層」―に導電体層と樹脂層を積層しているのて、ニー
ジンク操作によって、良好な81A電損失特性を維持し
つつ、高いLC歩留りの固体電解コンデンサを製造する
ことかできる。After forming the first surface layer and the semiconductor layer containing lead dioxide or lead dioxide and lead sulfate as main components, the film is sequentially immersed in a water-soluble organic solvent and water. After that, a conductor layer and a resin layer are laminated on the semiconductor layer, and a knee-jink operation is used to manufacture a solid electrolytic capacitor with a high LC yield while maintaining good 81A current loss characteristics. can.
Claims (1)
電体酸化皮膜層、この誘電体酸化皮膜層上に二酸化鉛あ
るいは二酸化鉛と硫酸鉛とを主成分とする半導体層を形
成した後に、水に可溶な有機溶剤と水とに順次浸漬し、
しかる後、前記半導体層上に導電体層、この導電体層上
に樹脂層を形成することを特徴とする固体電解コンデン
サの製造方法。(1) After forming a dielectric oxide film layer on the surface of an anode substrate made of a metal having valve action, and forming a semiconductor layer mainly composed of lead dioxide or lead dioxide and lead sulfate on this dielectric oxide film layer, Sequentially immersed in a water-soluble organic solvent and water,
Thereafter, a conductor layer is formed on the semiconductor layer, and a resin layer is formed on the conductor layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP447089A JPH02184013A (en) | 1989-01-11 | 1989-01-11 | Manufacture of solid electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP447089A JPH02184013A (en) | 1989-01-11 | 1989-01-11 | Manufacture of solid electrolytic capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02184013A true JPH02184013A (en) | 1990-07-18 |
Family
ID=11585011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP447089A Pending JPH02184013A (en) | 1989-01-11 | 1989-01-11 | Manufacture of solid electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02184013A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152113A (en) * | 1986-12-17 | 1988-06-24 | 昭和電工株式会社 | Manufacture of solid electrolytic capacitor |
| JPS63312618A (en) * | 1987-06-16 | 1988-12-21 | Showa Denko Kk | Manufacture of solid-state electrolytic capacitor |
-
1989
- 1989-01-11 JP JP447089A patent/JPH02184013A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152113A (en) * | 1986-12-17 | 1988-06-24 | 昭和電工株式会社 | Manufacture of solid electrolytic capacitor |
| JPS63312618A (en) * | 1987-06-16 | 1988-12-21 | Showa Denko Kk | Manufacture of solid-state electrolytic capacitor |
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