JPH021857U - - Google Patents
Info
- Publication number
- JPH021857U JPH021857U JP8009188U JP8009188U JPH021857U JP H021857 U JPH021857 U JP H021857U JP 8009188 U JP8009188 U JP 8009188U JP 8009188 U JP8009188 U JP 8009188U JP H021857 U JPH021857 U JP H021857U
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- power supply
- vacuum
- power source
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本発明の一実施例を説明するための装
置構成図、第２図は従来例を説明するための図で
ある。
１：真空室、２：イオンポンプ、３：イオンポ
ンプ電源、４：粗引き系ポンプ、５：真空仕切弁
、７：排気制御回路、８：イオンポンプ制御リレ
ー、９：制御系電源、１０：交流電源、１１：切
離し許可リレー、１２：自己保持リレー、Ｓ１：
制御系電源スイツチ、Ｓ２：イオンポンプ系電源
スイツチ、Ｓ３：切離しスイツチ。
FIG. 1 is an apparatus configuration diagram for explaining an embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional example. 1: Vacuum chamber, 2: Ion pump, 3: Ion pump power supply, 4: Roughing system pump, 5: Vacuum gate valve, 7: Exhaust control circuit, 8: Ion pump control relay, 9: Control system power supply, 10: AC power supply, 11: Disconnection permission relay, 12: Self-holding relay, S 1 :
Control system power switch, S2 : Ion pump system power switch, S3 : Disconnection switch.
Claims (1)
プで排気するようにした真空排気装置において、
前記被排気系の真空度を検出する真空計と、該真
空計の検出信号に応じて前記イオンポンプを含む
複数の真空ポンプの動作及び真空弁の開閉を制御
する排気系制御回路と、該制御回路を動作させる
ための制御系電源と、前記イオンポンプを動作さ
せるためのイオンポンプ電源と、前記制御系電源
とイオンポンプ電源に電力を供給する交流電源を
備えると共に、前記交流電源とイオンポンプ電源
の間に自己保持回路を設け、前記交流電源と前記
制御系電源との接続を切離し制御系電源を停止さ
せることにより前記イオンポンプへの制御信号を
断つた場合でも、前記イオンポンプ電源が継続し
て動作するようにしたことを特徴とする真空排気
装置。 In a vacuum evacuation device in which a system to be evacuated is evacuated using multiple vacuum pumps including an ion pump,
a vacuum gauge that detects the degree of vacuum in the evacuated system; an exhaust system control circuit that controls the operation of a plurality of vacuum pumps including the ion pump and the opening and closing of vacuum valves according to the detection signal of the vacuum gauge; A control system power supply for operating the circuit, an ion pump power supply for operating the ion pump, an AC power supply for supplying power to the control system power supply and the ion pump power supply, and the AC power supply and the ion pump power supply. A self-holding circuit is provided between the AC power source and the control system power source so that even if the control signal to the ion pump is cut off by disconnecting the AC power source and the control system power source and stopping the control system power source, the ion pump power source continues. A vacuum evacuation device characterized in that it operates by
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8009188U JPH021857U (en) | 1988-06-16 | 1988-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8009188U JPH021857U (en) | 1988-06-16 | 1988-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021857U true JPH021857U (en) | 1990-01-09 |
Family
ID=31304936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8009188U Pending JPH021857U (en) | 1988-06-16 | 1988-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021857U (en) |
-
1988
- 1988-06-16 JP JP8009188U patent/JPH021857U/ja active Pending
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