JPH02187634A - Fourier-transformation infrared spectroscopic analyzing device - Google Patents
Fourier-transformation infrared spectroscopic analyzing deviceInfo
- Publication number
- JPH02187634A JPH02187634A JP1007144A JP714489A JPH02187634A JP H02187634 A JPH02187634 A JP H02187634A JP 1007144 A JP1007144 A JP 1007144A JP 714489 A JP714489 A JP 714489A JP H02187634 A JPH02187634 A JP H02187634A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- sample chamber
- sample
- valve
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 8
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 4
- 239000001569 carbon dioxide Substances 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000012844 infrared spectroscopy analysis Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 238000003780 insertion Methods 0.000 abstract 2
- 230000037431 insertion Effects 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004454 trace mineral analysis Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は赤外分光分析に関し、特にフーリエ変換赤外分
光分析装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to infrared spectroscopy, and more particularly to a Fourier transform infrared spectrometer.
従来、この種のフーリエ変換赤外分光分析装置は赤外線
光路に乾燥空気又はパージガスを循環させて測定を行な
っていた。Conventionally, this type of Fourier transform infrared spectrometer has performed measurements by circulating dry air or purge gas in the infrared light path.
上述した従来のフーリエ変換赤外分光分析装置は赤外線
光路に乾燥空気又は窒素等のパージガスを循環させてい
るため、試料交換時に室内雰囲気中の水分、炭酸カス等
の不純物が浸入し、容易に除去できず、微量分析を行な
う場合、光路内の水分および炭酸ガス等のピークか表わ
れて測定が圏難になるという欠点がある。The conventional Fourier transform infrared spectrometer described above circulates dry air or a purge gas such as nitrogen in the infrared optical path, so impurities such as moisture and carbon dioxide in the room atmosphere enter during sample exchange and are easily removed. However, when performing trace analysis, peaks of moisture, carbon dioxide, etc. appear in the optical path, making measurement difficult.
本発明の目的は前記課題を解決したフーリエ変換赤外分
光分析装置を提供することにある。An object of the present invention is to provide a Fourier transform infrared spectrometer that solves the above problems.
前記目的を達成するため、本発明に係るフーリエ変換赤
外分光分析装置においては、フーリエ変換赤外分光分析
装置本体内の赤外線光路を真空に保持する機構を有する
ものである。In order to achieve the above object, the Fourier transform infrared spectrometer according to the present invention has a mechanism for maintaining the infrared light path in the main body of the Fourier transform infrared spectrometer body in a vacuum.
以下、本発明の一実施例を図により説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の一実施例を示す構成図である。FIG. 1 is a block diagram showing an embodiment of the present invention.
図において、分光器部２及び検出器部４の間に試料室３
を配置し、その相互間を試料室遮断バルブ６を介して連
通されである。さらに分光器部２及び検出器部４に真空
ポンプ１を直接接続するとともに、試料室３に真空ポン
プ１をリーク・バルブ７ａを介して接続し、赤外線光路
を真空状態に保持する構成にしである。５は真空計、７
ｂは試斜字３を大気開放するリーク・バルブである。In the figure, a sample chamber 3 is located between the spectrometer section 2 and the detector section 4.
are arranged, and they are communicated with each other via a sample chamber isolation valve 6. Furthermore, the vacuum pump 1 is directly connected to the spectrometer section 2 and the detector section 4, and the vacuum pump 1 is connected to the sample chamber 3 via a leak valve 7a, so that the infrared light path is maintained in a vacuum state. . 5 is a vacuum gauge, 7
b is a leak valve that opens test italics 3 to the atmosphere.
試料８を交換する際には、試料室遮断バルブ６を閉じて
試料室３を分光器部２及び検出器部４から切り離した状
態でリーク・バルブ７ｂを開けて大気開放し、交換され
、その交換後はリーク・バルブ７ａを開いて試料室３を
一定の真空度になるまで真空ポンプｌにて脱気し、一定
真空度に達したことを真空計で確認された後、試料室遮
断バルブ６を開けて、分光器部２、試料室３、検出器部
４を相互に連通させ、試料８の測定を行う。When replacing the sample 8, the sample chamber isolation valve 6 is closed to separate the sample chamber 3 from the spectrometer section 2 and the detector section 4, and the leak valve 7b is opened to release the sample to the atmosphere. After replacement, open the leak valve 7a and evacuate the sample chamber 3 with the vacuum pump l until it reaches a certain degree of vacuum.After confirming with the vacuum gauge that the specified degree of vacuum has been reached, close the sample chamber cutoff valve. 6 is opened, the spectrometer section 2, sample chamber 3, and detector section 4 are communicated with each other, and the sample 8 is measured.
本発明によれば、分光器部２、試料室３、検出器部４に
わたる赤外線光路は真空ポンプ１により真空状態に保持
されることとなり、不純物等の混入を極力抑えることが
可能となる。According to the present invention, the infrared light path extending through the spectrometer section 2, sample chamber 3, and detector section 4 is maintained in a vacuum state by the vacuum pump 1, making it possible to suppress contamination of impurities and the like as much as possible.
以上説明したように本発明は赤外線光路を真空に保持す
ることにより、水分の吸収及び炭酸ガスの吸収を極力少
なくすることができ、さらに真空中に保持された物質の
赤外分光分析ができるという効果がある。As explained above, the present invention is capable of minimizing moisture absorption and carbon dioxide absorption by keeping the infrared light path in a vacuum, and further enables infrared spectroscopic analysis of substances kept in a vacuum. effective.
第１図は本発明の一実施例を示す構成図である。
１・・・真空ポンプ ２・・・分光器部３・・・
試料室 ４・・・検出器部５・・・真空計
６・・・試料室遮断バルブ７ａ、７ｂ・・・
リーク・バルブ
８・・・試料FIG. 1 is a block diagram showing an embodiment of the present invention. 1... Vacuum pump 2... Spectrometer section 3...
Sample chamber 4...Detector part 5...Vacuum gauge
6...Sample chamber shutoff valves 7a, 7b...
Leak valve 8...sample
Claims (1)
路を真空に保持する機構を有することを特徴とするフー
リエ変換赤外分光分析装置。(1) A Fourier transform infrared spectrometer characterized by having a mechanism for keeping an infrared light path in a vacuum in the main body of the Fourier transform infrared spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1007144A JPH02187634A (en) | 1989-01-13 | 1989-01-13 | Fourier-transformation infrared spectroscopic analyzing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1007144A JPH02187634A (en) | 1989-01-13 | 1989-01-13 | Fourier-transformation infrared spectroscopic analyzing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02187634A true JPH02187634A (en) | 1990-07-23 |
Family
ID=11657877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1007144A Pending JPH02187634A (en) | 1989-01-13 | 1989-01-13 | Fourier-transformation infrared spectroscopic analyzing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02187634A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100354958B1 (en) * | 1999-10-05 | 2002-10-19 | 학교법인 계명기독학원 | Infrared Spectroscopic Apparatus with equally-divided multiple Sample Loader and Selective Beam Chopper |
-
1989
- 1989-01-13 JP JP1007144A patent/JPH02187634A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100354958B1 (en) * | 1999-10-05 | 2002-10-19 | 학교법인 계명기독학원 | Infrared Spectroscopic Apparatus with equally-divided multiple Sample Loader and Selective Beam Chopper |
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