JPH02189986A - ニオブ膜または窒化ニオブ膜の加工方法 - Google Patents
ニオブ膜または窒化ニオブ膜の加工方法Info
- Publication number
- JPH02189986A JPH02189986A JP1008567A JP856789A JPH02189986A JP H02189986 A JPH02189986 A JP H02189986A JP 1008567 A JP1008567 A JP 1008567A JP 856789 A JP856789 A JP 856789A JP H02189986 A JPH02189986 A JP H02189986A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- niobium
- film
- mask
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1008567A JPH02189986A (ja) | 1989-01-19 | 1989-01-19 | ニオブ膜または窒化ニオブ膜の加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1008567A JPH02189986A (ja) | 1989-01-19 | 1989-01-19 | ニオブ膜または窒化ニオブ膜の加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02189986A true JPH02189986A (ja) | 1990-07-25 |
| JPH0578197B2 JPH0578197B2 (2) | 1993-10-28 |
Family
ID=11696640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1008567A Granted JPH02189986A (ja) | 1989-01-19 | 1989-01-19 | ニオブ膜または窒化ニオブ膜の加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02189986A (2) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58125884A (ja) * | 1982-01-22 | 1983-07-27 | Hitachi Ltd | ジヨセフソン集積回路の作製法 |
| JPS62183577A (ja) * | 1986-02-07 | 1987-08-11 | Fujitsu Ltd | ジヨセフソン素子の製造方法 |
-
1989
- 1989-01-19 JP JP1008567A patent/JPH02189986A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58125884A (ja) * | 1982-01-22 | 1983-07-27 | Hitachi Ltd | ジヨセフソン集積回路の作製法 |
| JPS62183577A (ja) * | 1986-02-07 | 1987-08-11 | Fujitsu Ltd | ジヨセフソン素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0578197B2 (2) | 1993-10-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |