JPH02192802A - Production of metallic sheet for shadow mask - Google Patents

Production of metallic sheet for shadow mask

Info

Publication number
JPH02192802A
JPH02192802A JP1000889A JP1000889A JPH02192802A JP H02192802 A JPH02192802 A JP H02192802A JP 1000889 A JP1000889 A JP 1000889A JP 1000889 A JP1000889 A JP 1000889A JP H02192802 A JPH02192802 A JP H02192802A
Authority
JP
Japan
Prior art keywords
rolling
rolls
dull
shadow mask
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1000889A
Other languages
Japanese (ja)
Inventor
Keiji Osaki
大崎 慶治
Yutaka Kawai
裕 河合
Akio Fujii
藤井 昭男
Yoshiaki Nagatomo
長友 義昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP1000889A priority Critical patent/JPH02192802A/en
Publication of JPH02192802A publication Critical patent/JPH02192802A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B1/00Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • B21B1/227Surface roughening or texturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metal Rolling (AREA)
  • Reduction Rolling/Reduction Stand/Operation Of Reduction Machine (AREA)

Abstract

PURPOSE:To allow the vacuum adhesion of a reference pattern made of glass and to improve the quality of perforation by etching by executing rolling several times by using dull rolls subjected to fine ruggedness working and increasing the area occupying rate of the rugged surface on the front surface without increasing average roughness. CONSTITUTION:The surface of one roll or both rolls of work rolls for rolling are subjected to fine ruggedness working. The metallic sheet is rolled 3 to 5 times by using such dull rolls to form the surfaces consisting of the ruggedness having 0.2 to 1.mum Ra center line average height of the surface on the front surfaces of one or both surfaces of the sheet in such a manner that the area occupying rate of the surfaces satisfy >=80%. The air flow passages at the time of evacuation to a vacuum are sufficiently and uniformly assured and the adhesive property of the reference patterns made of glass is improved. The etching property of the metallic sheet for shadow masks is, therefore, improved.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、シャドウマスク用金属薄板の製造方法に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a thin metal plate for a shadow mask.

(従来の技術とその間厘点) シャドウマスク型カラーテレビブラウン管には、蛍光面
と電子銃との間に、色選別のため、フォトエツチングに
より穿孔された多数の小孔を有するシャドウマスクが配
置される。この材料として通常厚さが0.1〜Q、25
mn+の軟鋼板あるいは高品位用途にはFe−36Ni
合金(インバー)が使用されている。
(Conventional technology and disadvantages) In a shadow mask type color television CRT, a shadow mask having a large number of small holes perforated by photoetching is placed between the fluorescent screen and the electron gun for color selection. Ru. This material usually has a thickness of 0.1 to Q, 25
Fe-36Ni for mn+ mild steel plate or high grade applications
Alloy (Invar) is used.

これらシャドウマスクの一般の製造方法は以下のようで
ある。
The general manufacturing method of these shadow masks is as follows.

金属薄板素材を洗浄し、フォトレジストを塗布、乾燥後
所定のガラス製基準パターンを真空密着させて露光し、
塩化第二鉄でエツチングすることにより多数の小孔を形
成する。その後、焼鈍、レベラ、プレスの加工処理工程
により所定の曲率半径を有する球面状に成形され、最終
的に酸化熱処理をして熱輻射能の向上、乱反射防止のた
めに黒化処理する。
The metal thin plate material is cleaned, photoresist is applied, and after drying, a predetermined glass reference pattern is vacuum-adhered and exposed.
A large number of small holes are formed by etching with ferric chloride. Thereafter, it is formed into a spherical shape with a predetermined radius of curvature through the processing steps of annealing, leveling, and pressing, and is finally subjected to oxidation heat treatment and blackening treatment to improve heat radiation and prevent diffused reflection.

ところで、通常のワークロールにより圧延した平滑な表
面を有する金属薄板にフォトレジストを塗布し、ガラス
製基準パターンを重ねて真空引きを行なうと空気の流路
抵抗が大きく、局部的に真空度の悪い個所ができるため
ガラス製基準パターンとの密着が悪く、エツチングで穿
孔した製品の品質低下を生ずるという問題がある。そこ
で、通常シャドウマスク用金属薄板は、ロール表面にシ
ョツトブラスト加工や放電加工、レーザービーム加工な
どにより微細な凹凸加工を施したダルロールと呼ばれる
ロールを用いて圧延される。ダルロール圧延により金属
薄板表面に微細な凹凸を転写し、真空引き時の空気流路
となしガラス製基準パターンの密着性を改良してエツチ
ングでの穿孔品の品質低下を防止しようとしている。
By the way, when a photoresist is applied to a thin metal plate with a smooth surface rolled by an ordinary work roll, and a glass reference pattern is layered on top of it and vacuum is drawn, the air flow resistance is large and the degree of vacuum is poor locally. Because of the formation of spots, there is a problem in that the adhesion with the glass reference pattern is poor and the quality of the etched product deteriorates. Therefore, a metal thin plate for a shadow mask is usually rolled using a roll called a dull roll whose surface has been subjected to fine irregularities by shot blasting, electric discharge machining, laser beam machining, or the like. Fine irregularities are transferred to the surface of the thin metal plate by dull roll rolling, and the adhesion between the air flow path and the blank glass reference pattern during vacuuming is improved to prevent the quality of perforated products from deteriorating during etching.

しかし、通常行なわれているダルロールを用いた1回の
通板による圧延では、ダルロールによる圧延前に通常の
平滑面を有するロールによって圧延された際の平滑な表
面が金属薄板表面に多く残存し、ダルロール表面の凹凸
模様によって金属薄板表面に転写された凹凸を呈する面
の面積占有率(この平滑ロール圧延時の平滑な表面部分
を除き。
However, in the conventional rolling process in which the metal sheet is passed once using dull rolls, a large amount of the smooth surface obtained by rolling with a roll having a normal smooth surface remains on the surface of the thin metal sheet before rolling with the dull rolls. Area occupancy of the uneven surface transferred to the surface of the thin metal sheet by the uneven pattern on the surface of the dull roll (excluding the smooth surface area during rolling with this smooth roll).

ダルロールによって転写された凹凸面部分のみが全表面
積に対して占める割合を凹凸面面積占有率と定義する)
が小さく表面性状の均一性に欠けるため、真空引き時の
空気流路が充分かつ均一に確保されているとはいえない
、したがって、ガラス製基準パターンの密着性がなお充
分ではなく、エツチングによる穿孔品の品質も未だ充分
とはいえない状態にある。
The ratio of the uneven surface area transferred by the dull roll to the total surface area is defined as the uneven surface area occupation rate.)
Since the surface texture is small and the surface texture is not uniform, it cannot be said that a sufficient and uniform air flow path is secured during vacuuming. The quality of the products is still not satisfactory.

従って、シャドウマスク用金属薄板のエツチングによる
穿孔品の品質を改良する方法が望まれている。
Accordingly, there is a need for a method of improving the quality of etched perforations in thin metal sheets for shadow masks.

(問題解決に関する知見) 本発明は、シャドウマスク用金属薄板のエツチングによ
る穿孔品の品質改良を課題とし、課題解決に関し、微細
な凹凸加工を施したダルロールを用いて数回圧延するこ
とにより5表面中心線平均粗さRaを大きくすることな
く、金属薄板表面に形成される凹凸面の面積占有率を増
大することにより、真空引き時の空気流路が充分でかつ
均一に確保されるためガラス製基準パターンの密着性が
向上し、エツチング性が改良されるという知見を得た。
(Knowledge related to problem solving) The present invention aims to improve the quality of perforated products by etching thin metal plates for shadow masks. By increasing the area occupation rate of the uneven surface formed on the surface of the thin metal sheet without increasing the center line average roughness Ra, a sufficient and uniform air flow path is ensured during evacuation. It was found that the adhesion of the reference pattern was improved and the etching properties were improved.

(発明の構成) 上記目的は、圧延用ワークロールの片ロールまたは両ロ
ール表面に、微細な凹凸加工を施し、当該ワークロール
を用いて金属薄板を3〜5回圧延することにより、金属
薄板の片面または両面に形成される表面中心線平均粗さ
Raが0.2〜1.0μmの凹凸からなる表面の面積占
有率が80%以上を満足するように構成させることを特
徴とするシャドウマスク用金属薄板の製造方法によって
達成される。
(Structure of the Invention) The above object is to form a thin metal sheet by applying fine irregularities to the surface of one or both rolls of a rolling work roll and rolling the metal sheet 3 to 5 times using the work roll. For a shadow mask, characterized in that the surface area occupancy rate of the surface consisting of irregularities with a surface centerline average roughness Ra of 0.2 to 1.0 μm formed on one or both sides satisfies 80% or more. This is achieved by a method for manufacturing thin metal sheets.

圧延によりシャドウマスク用金属薄板表面に形成される
表面中心線平均粗さRaの増大は、金属薄板表面の凹凸
における傾斜面が長くなることを意味する。従って、真
空引き時の空気流路の確保はできるが、ガラス製基準パ
ターンと金属薄板表面との間の空間が大きくなり密着性
が悪くなるため。
An increase in the surface centerline average roughness Ra formed on the surface of the thin metal sheet for a shadow mask by rolling means that the sloped surface of the unevenness on the surface of the thin metal sheet becomes longer. Therefore, although it is possible to secure an air flow path during evacuation, the space between the glass reference pattern and the surface of the thin metal plate becomes large, resulting in poor adhesion.

Raには適正範囲があり、0.2〜1.0μmが望まし
い。
There is an appropriate range for Ra, and 0.2 to 1.0 μm is desirable.

圧延の回数は後記実施例により実証されるように本発明
の効果は3回以上で現われるが、5回を越えると、薄鋼
板に付与されるひずみが増大してエツチング性が悪化す
ること、及び凹凸面面積占有率が圧延回数5回にてほぼ
飽和しており、いたずらに圧延工程の口数を重ねること
は製造コストを高くするため上限を5回とした。
As demonstrated by the examples below, the effect of the present invention appears when the number of rolling is three or more times, but if it exceeds five times, the strain imparted to the thin steel sheet increases and the etching property deteriorates. The uneven surface area occupancy was almost saturated after 5 rolling steps, and unnecessarily increasing the number of rolling steps would increase the manufacturing cost, so the upper limit was set at 5.

真空引き時の空気流路が充分でかつ均一に確保されて、
ガラス製基準パターンの密着性を向上させることにより
シャドウマスク用金属薄板のエツチング性を改良するた
めには、圧延により金属薄板表面に形成される凹凸面の
面積占有率は80%以上、望ましくは90%以上を満足
するのが望ましく、その凹凸の表面中心線平均粗さRa
 O,2〜1.0μmであることを必要とする。
Ensuring a sufficient and uniform air flow path during vacuuming,
In order to improve the etching properties of the metal thin plate for shadow mask by improving the adhesion of the glass reference pattern, the area occupation rate of the uneven surface formed on the metal thin plate surface by rolling should be 80% or more, preferably 90% or more. % or more, and the surface center line average roughness Ra of the uneven surface
O, 2 to 1.0 μm.

(発明の具体的開示) 次に実施例によって本発明を具体的に説明する。(Specific disclosure of invention) Next, the present invention will be specifically explained with reference to Examples.

素材としてc: o、ooa%(重量%以下同じ)、S
i:0.14%、Mn: 0.30%、P: 0.00
4%、s: o、ooio%、Ni: 36.14%残
部Fe及び不可避的不純物からなるFa−36Ni合金
を用いた。Fe−36Ni合金を溶製後通常の熱間圧延
及び冷間圧延工程により厚さ0.160mmの冷間鋼板
とした。厚さ0.160mmの冷延鋼板を無酸化雰囲気
において焼鈍後、ショツトブラストにより表面に微細な
凹凸加工を施したダルロールにより金属薄板の両面に凹
凸模様を転写するため通常回数を1回から5回まで変化
させて圧延加工を行った。なお、ここで圧延に用いたダ
ルロール表面の中心線平均粗さRaは0.90〜1.0
0μm(ダルロール表面における凹凸模様の面積占有率
は100%でありロール研削時の平滑な表面は残存して
いない)であり、ダル圧延の通板1回あたりの圧下率は
0.5〜3.0%の範囲で圧延加工を行った。
Material: C: o, ooa% (same below weight%), S
i: 0.14%, Mn: 0.30%, P: 0.00
An Fa-36Ni alloy consisting of 4%, s: o, ooio%, Ni: 36.14% and the balance Fe and inevitable impurities was used. After melting the Fe-36Ni alloy, it was made into a cold steel plate with a thickness of 0.160 mm by normal hot rolling and cold rolling processes. After annealing a cold-rolled steel plate with a thickness of 0.160 mm in a non-oxidizing atmosphere, the roughness pattern is transferred to both sides of the thin metal plate using a dull roll whose surface is finely roughened by shot blasting, usually from 1 to 5 times. The rolling process was performed by changing the Note that the center line average roughness Ra of the dull roll surface used for rolling is 0.90 to 1.0.
0 μm (the area occupation rate of the uneven pattern on the surface of the dull roll is 100%, and no smooth surface remains after roll grinding), and the reduction rate per pass of the dull rolling is 0.5 to 3. Rolling was performed within a range of 0%.

次いでこれらの各圧延回数の金属薄板をそれぞれ洗浄し
た後、フォトレジストを塗布し乾燥後所定のガラス製基
準パターンを真空密着させて露光した。その後塩化第二
鉄でエツチングして開孔試験をした。
Next, after each of these thin metal plates having been rolled was washed, a photoresist was applied thereto, and after drying, a predetermined glass reference pattern was vacuum-adhered and exposed. After that, it was etched with ferric chloride and a hole opening test was performed.

第1表には、各圧延回数時の表面中心線平均粗さRa、
金属薄板表面に占める凹凸面の面積占有率及びエツチン
グ後の開孔不良率を示す、ここで開孔不良率とはエツチ
ングにより開孔した孔の総数に対する形状不良孔の数の
百分率をいう。
Table 1 shows the surface center line average roughness Ra at each rolling number,
It shows the area occupation rate of the uneven surface on the surface of the metal thin plate and the defective hole opening rate after etching, where the defective hole rate refers to the percentage of the number of holes with defective shapes to the total number of holes formed by etching.

第1表より、ダルロールを用いて3回以上圧延すること
により1表面中心線平均粗さRaをほとんど増加させる
ことなく凹凸面面積占有率を増加することができる。
From Table 1, by rolling three or more times using dull rolls, the area occupation rate of the uneven surface can be increased without substantially increasing the center line average roughness Ra of one surface.

通板回数が1回ないし2回では凹凸面面積占有率は30
%以下であるが、3回通板することにより80%以上と
なり、4回以上の通板では90%以上にすることができ
る。
When the board is passed once or twice, the uneven surface area occupancy rate is 30.
% or less, but by passing the plate three times it becomes 80% or more, and by passing the plate four or more times it can increase to 90% or more.

第1表から明らかなように、金属薄板表面の凹凸面面積
占有率を80%以上にすることによって開孔不良率が1
0%未満に改良され、望ましくは90%以上にすること
によって開孔不良率は一層低減される。
As is clear from Table 1, by increasing the surface area occupancy of the uneven surface of the thin metal plate to 80% or more, the rate of defective holes can be reduced by 1.
By improving it to less than 0%, preferably to 90% or more, the open hole defect rate can be further reduced.

上述の結果は添付写真を参照することによって、よく理
解できよう。添付第1〜6図は、未ダル圧延鋼板および
第1表に示す比較例および実施例で得られるダル圧延板
の表面組織を示めす100倍の顕微鏡写真である。5回
の圧延で効果がほぼ飽和することが伺われる。
The above results can be better understood by referring to the attached photos. Attached Figures 1 to 6 are 100x micrographs showing the surface structures of non-dull rolled steel sheets and dull rolled sheets obtained in the Comparative Examples and Examples shown in Table 1. It can be seen that the effect is almost saturated after rolling five times.

上記実施例はFe−36Ni合金についてのものである
が1本発明法はFe−36Ni合金に限らずシャドウマ
スク用軟鋼板やその他フォトエツチング用途に用いられ
る金R薄板に対しても利用が可能である。
Although the above examples are for Fe-36Ni alloy, the method of the present invention can be used not only for Fe-36Ni alloy but also for mild steel plates for shadow masks and other gold R thin plates used for photoetching purposes. be.

(発明の効果) 本発明によれば、シャドウマスク用金属薄板の製造工程
における真空引き時の空気流路を充分かつ均一に確保す
ることが出来るため、ガラス製基準パターンを完全に真
空密着させることができる。
(Effects of the Invention) According to the present invention, it is possible to ensure a sufficient and uniform air flow path during evacuation during the manufacturing process of a metal thin plate for a shadow mask, so that the glass reference pattern can be completely vacuum-adhered. Can be done.

従って、エツチングにおける穿孔品質を著しく向上させ
ることができ、その効果は大きい。
Therefore, the perforation quality in etching can be significantly improved, and the effect is significant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1〜6図は未ダル圧延鋼板および第1表に示す比較例
および実施例で得られるダル圧延鋼板の金属表面組織を
示す100倍の顕微鏡写真である。
Figures 1 to 6 are 100x micrographs showing the metal surface structures of non-dull rolled steel sheets and dull rolled steel sheets obtained in the comparative examples and examples shown in Table 1.

Claims (1)

【特許請求の範囲】[Claims] 圧延用ワークロールの片ロールまたは両ロール表面に、
微細な凹凸加工を施し、当該ワークロールを用いて金属
薄板を3〜5回圧延することにより、金属薄板の片面ま
たは両面に形成される凹凸面の面積占有率が80%以上
であり、なおかつ凹凸部の表面中心線平均粗さRaが0
.2〜1.0μmからなる条件を満足するように構成さ
せることからなるシャドウマスク用金属薄板の製造方法
On the surface of one or both rolls of the rolling work roll,
By applying fine unevenness processing and rolling the metal thin plate 3 to 5 times using the work roll, the area occupation rate of the uneven surface formed on one or both sides of the metal thin plate is 80% or more, and the unevenness is The surface center line average roughness Ra of the part is 0
.. A method for manufacturing a thin metal plate for a shadow mask, which comprises configuring the thin metal plate for a shadow mask so as to satisfy the condition of 2 to 1.0 μm.
JP1000889A 1989-01-20 1989-01-20 Production of metallic sheet for shadow mask Pending JPH02192802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1000889A JPH02192802A (en) 1989-01-20 1989-01-20 Production of metallic sheet for shadow mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1000889A JPH02192802A (en) 1989-01-20 1989-01-20 Production of metallic sheet for shadow mask

Publications (1)

Publication Number Publication Date
JPH02192802A true JPH02192802A (en) 1990-07-30

Family

ID=11738373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1000889A Pending JPH02192802A (en) 1989-01-20 1989-01-20 Production of metallic sheet for shadow mask

Country Status (1)

Country Link
JP (1) JPH02192802A (en)

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