JPH02196221A - Liquid crystal display panel and its manufacturing method - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an active matrix liquid crystal display panel suitable for larger screens and higher definition, and a method for manufacturing the same.

[Conventional technology]

Recently, there has been a strong demand for larger flat display panels and higher image quality, and among the various flat display panels, liquid crystal display panels are the most advanced in practical use and can meet the above demands. seen as the most promising.

Moreover, it is difficult to meet the above requirements with the so-called simple matrix method, as it is not possible to increase the contrast or increase the number of scanning lines. The latter is currently being actively researched and developed. In this method, a switching element is provided for each pixel, and a selection signal is sent from a scanning electrode and a signal electrode to turn each switching element on and off to select a pixel to be lit.

As the above switching element, for example, Proc.

Japan Display '86. pp, 62~
As described in No. 67, there are devices that use three-terminal type and two-terminal type nonlinear elements. A three-terminal type device is a so-called TFT (Thin Film Transistor).
; thin film transistor), a −S i :
H (Hydro generated amorp)
hous 5ilicon; amorphous silicon) or p-3i (poly 5ilicon)
; Polysilicon). Diodes of various types are also used in the two-terminal element.

Now, such an active matrix type liquid crystal display panel is constructed as follows.

That is, first, SiO is applied to the alkali-free glass or its surface.
On a first glass plate made of soda lime glass coated with □, the above switching element and I To which is a transparent conductor are connected to the switching element.
A pixel electrode made of a (Indium Tin Oxide) film is formed, and a color filter and a counter electrode made of an ITO film are formed on a second glass plate made of the same material as the first glass plate.

Then, the first and second glass plates are opposed to each other with the sides on which the elements and electrodes are formed inside, and the space between them is injected with liquid crystal and sealed.

At this time, the distance between the first and second glass plates (the so-called liquid crystal gap) is kept approximately equal at any position on the liquid crystal display panel by dispersing and sandwiching a plurality of beads. .

[Problem to be solved by the invention]

The conventional active matrix type liquid crystal display panel described above has the following problems.

(1) The presence of parasitic capacitance causes crosstalk, which causes problems such as deterioration of contrast and distortion of halftone display.

For example, when TPT is used as a switching element, for example, Proc, Euro D 1sp
lay'87. As shown in pp. 59-62, there are parasitic capacitances between the gate and source and other parasitic capacitances,
This causes leakage of unnecessary signals. Therefore, a method for driving a liquid crystal display panel to correct this problem was developed, for example, in 1986. JapanDisplay
'86. As shown in pp. 196”199,
Although various efforts have been made, no satisfactory results have been obtained so far.

In addition, when using TPT, the scanning electrode is provided on the first glass plate (hereinafter referred to as the lower plate) and the signal electrode is provided on the second glass plate (hereinafter referred to as the upper plate). There are wiring formats, but in such wiring formats, the influence of parasitic capacitance tends to be somewhat large, and in this case as well, for example, Proe, Euro Display
'87. As shown in pp. 55-58, TFT
Efforts have been made to improve the driving waveform of the gate scanning electrode.

On the other hand, when using a two-terminal element, which is considered to be suitable for larger screens in terms of yield and man-hours, etc., the wiring method described above for the scanning electrode and signal electrode (the scanning electrode is placed on the lower plate) is used. , signal electrodes are respectively provided on the upper plate), and therefore the influence of parasitic capacitance is large.

(2) When increasing the screen size, the parasitic capacitance per scanning electrode and the parasitic capacitance per signal type LIT become larger.1. For pixels located far away from the signal source, the signal writing speed becomes slower, and as a result,
There was a problem that brightness gradient occurred.

(3) When increasing the screen size, the liquid crystal display panel will bend due to the weight of the glass plate (i.e., the upper and lower plates) and the liquid crystal, and the liquid crystal gap will vary depending on the position on the liquid crystal display panel. As a result, there was a problem in that the gradation varied within the screen.

The purpose of the present invention is to solve the problems of the prior art described above,
There is little crosstalk, and even when the screen is enlarged,
It is an object of the present invention to provide a liquid crystal display panel and a method for manufacturing the same in which the speed of writing signals to pixels located far from a signal source does not become slow or the liquid crystal gap becomes non-uniform.

[Means to solve the problem]

In order to achieve the above object, the present invention provides a predetermined distance between adjacent pixel electrodes, including the scanning electrode portion and the switching element portion, corresponding to each of the four side portions of each pixel electrode. A filling body made of a material having a dielectric constant lower than that of the liquid crystal is provided between the lower plate and the plate except for a portion of the liquid crystal.

Moreover, in that case, the filling body may be fixed to the lower plate and the upper plate, respectively.

[Effect]

For liquid crystals that have a high dielectric constant of usually 10 or more, fillers with a lower dielectric constant (for example, when using epoxy resin or polyimide resin, the dielectric constant is 3).
By providing the parasitic capacitance L between the pixel electrode and the scanning electrode on the lower plate as described above, the parasitic capacitance L between the pixel electrode and the adjacent pixel electrode.

The parasitic capacitance between the pixel electrode and the adjacent signal electrode on the upper plate, the parasitic capacitance between the scanning electrode on the lower plate and the signal electrode on the upper plate, etc. are reduced. Therefore, so-called crosstalk, in which the pixel electrode voltage fluctuates when the pixel electrode is disturbed by the voltage applied to the next scan electrode or adjacent signal electrode, is reduced, causing problems such as deterioration of contrast and distortion of halftone display. Image problems will no longer occur.

It should be noted that since some of the boundary portions are not provided with fillers, liquid crystal can easily come and go between adjacent pixels, and therefore there is no problem with liquid crystal injection.

Further, when the filling body is fixed to the lower plate and the upper plate, the lower plate and the upper plate are fixed for each pixel by the filling body, so when the screen is enlarged, Even if the liquid crystal display panel is slightly bent due to the weight of the glass plate and liquid crystal, the liquid crystal gap can be made equal at any position on the liquid crystal display panel, thus eliminating variations in gradation within the screen. be able to.

〔Example〕

A first embodiment of the present invention will be described below with reference to FIG.

FIG. 1(a) is a perspective view showing a first embodiment of the present invention, FIG. 1(b) is a plan view showing an enlarged view of one of the pixels in FIG. 1(a), and FIG. (C) is a sectional view showing the cross section in the A-A' direction in FIG. 1(b), and FIG.
It is a sectional view showing a BB' force direction cross section in figure (b).

In FIG. 1, the lower plate 1 is made of alkali-free glass,
A conductive transparent pixel electrode 2 with an ITO film deposited to a thickness of 0.12 μm is formed on the surface of the pixel electrode 2.
At the same time, a Cr film is further deposited to a thickness of 0.1 pm on the ITO wiring electrode formed on the same surface and photo-etched to form the scanning electrode 9. Thus, a two-terminal element 8 is formed.

Each component 2.8 formed on the lower plate 1.
A protective film 3 made of silicon nitride is formed with a thickness of 1 am so as to cover all of the pixel electrode 2 (including the two-terminal element 8) on the protective film 3.
A filler 11 made of polyimide is formed in the area between the pixel electrode 2 and the adjacent pixel electrode (where the ITO film is not formed) by rotary coating (or roller coating), heat curing, and photoetching. Further, on all of these, an alignment film 4 mainly composed of polyimide is formed with a thickness of 0.1 μm. Note that this alignment film 4 is subjected to so-called rubbing.

On the other hand, the upper plate 7 is also made of alkali-free glass, and a color filter (not shown) is formed on its surface. With the same width, an ITO film is deposited to a thickness of 0.12 μm and photo-etched to form a signal electrode 6, and furthermore, an alignment film 4' mainly composed of polyimide is formed on it to a thickness of 0.1 μm.
It is formed with a thickness of m. This alignment film 4' is also subjected to rubbing. Further, the signal electrode 6 plays the role of a counter electrode to the pixel electrode 2, and is provided continuously with a constant width in a straight line from the end of the display section of the upper plate 7 to the signal electrode terminal.

Then, an epoxy adhesive is applied as a sealant (not shown) by screen printing to the outer periphery of the upper plate 7 on which the above-mentioned components 4' and 6 are formed, and after drying, the upper plate 7 ．． Place the lower plate 1 with the side on which each component is formed inside,
Align and heat press to temporarily bond. Then, heat and pressure are applied to harden the sealing agent, and at the same time, the upper surface of the filler 11 (on which the alignment film is attached) and the alignment film 4' of the upper plate 7 are bonded together. After this, the liquid crystal 5 is applied to the upper plate 7 using the injection port provided in the sealant. All gaps between the lower plates 1 are filled, and then the inlet is sealed, for example with a UV-curable adhesive. Then, a group of signal electrode terminals (not shown) at the end of the upper plate 7 and a group of scanning electrode terminals (not shown) at the end of the lower plate 1 are adhesively wired to the scanning IC and the signal IC, respectively.

The above manufacturing process will be explained once again using FIG. 2.

FIG. 2 is a process diagram showing the main parts of the manufacturing process for manufacturing the liquid crystal display panel of FIG.

In addition, in FIG. 2, the upper plate 7. The first half of the pattern forming process for the lower plate 1 is omitted.

For the upper plate 7, after forming an ITO film pattern to form the signal electrode 6 (step a), forming an alignment film 4' (step b) and rubbing (step C).

Sealant printing (step d) and sealant drying (step e) are performed in sequence. On the other hand, for the lower plate 1, after forming the protective film (step f), forming the filling body (block g),
Formation of alignment film 4 (step h).

Rubbing (step i) is performed sequentially. Next, the upper plate 7 after completing this process. Align the lower plate 1 and align the upper and lower plates using an optical aligner (step j)
Then, by heating and pressurizing (step k), the upper plate 7 and the lower plate 1 are bonded and a seal pattern is formed. Then, in a vacuum, the injection port is brought into contact with the liquid crystal 5, the liquid crystal 5 is sucked into the panel, and the liquid crystal is injected (stepping is performed, followed by sealing (step m), and the liquid crystal shown in FIG. The display panel is completed.

Here, the screen diagonal size of the liquid crystal display panel in FIG. 1 is 20 inches (vertical 249+ms, horizontal 443M), and the number N of scanning electrodes is 100.

The number of signal electrodes M is 2700 (10x3 for three primary colors), and the pixel pitch is 164 μm in the horizontal direction.

It is 249 μm in the vertical direction, and the width of the scanning electrode 9 is 20 μm.
m, the distance between scanning electrode 9 and pixel xi:pole 2 is ]0μ
The distance between the m2 pixel electrodes 2 and the distance between the signal electrodes 6 is 10 μm, and the width of the signal electrode 6 is 154 μm.

Next, the voltage response in the pixels when the liquid crystal display panel shown in FIG. 1 is driven will be explained.

FIG. 3 is a circuit diagram showing an equivalent circuit of the liquid crystal display panel of FIG. 1.

In FIG. 3, sl, s2. ... is a scanning electrode, di
,d,2. . . . are signal electrodes, and the resistance value of one pixel light of the - scanning electrode is R3+the resistance value of one pixel light of the - signal electrode is R6. In addition, the equivalent circuit of the two-terminal element 8 is a parallel circuit of resistors RN[, + capacitors CNL, and the equivalent circuit of one pixel light of the liquid crystal 5 is the liquid crystal resistor R+,
The two-terminal element 8 and the liquid crystal 5 form a series circuit between the scanning electrode and the signal electrode, forming a parallel circuit of c*liquid crystal capacitance it Ctc.

In addition, in the figure, capacitances connected by dotted lines exist as parasitic capacitances. Pointing out these parasitic capacitances, the parasitic capacitance C! between the scanning electrode and the signal electrode! l D +parasitic capacitance csr between scan electrode and pixel electrode, adjacent scan electrode and pixel! The parasitic capacitance between the pixel electrode and the pixel electrode C3PZ, the parasitic capacitance between the adjacent signal electrode and the pixel electrode, ff1cd9, etc.

4 and 5 are waveform diagrams showing examples of voltage waveforms applied to the scanning electrode and signal electrode of FIG. 3, respectively, and voltage waveforms applied thereby to the liquid crystal.

4 and 5, (a) is the waveform of the voltage vs applied to the scanning electrode sl of FIG. 3, respectively, and (b) is the waveform of the voltage v4 applied to the signal electrode d2 of FIG. 3, respectively. , is. In addition, (C) is an equivalent circuit of one pixel light of the liquid crystal shown in Fig. 3 (liquid crystal resistance RL C + liquid crystal capacitance I C
This is the waveform of the voltage VLC applied to both ends of the LC parallel circuit), and is normalized by the rising voltage threshold ■1 of the two-terminal element. In addition, (d) is the voltage waveform of crosstalk leaking from the adjacent signal electrodes to both ends of the equivalent circuit of one pixel light of the liquid crystal (parallel circuit of liquid crystal resistor RL C + liquid crystal capacitor CLc) in Fig. 3. , is standardized by the rising voltage threshold value ■1 of a two-terminal element.

In both the example of FIG. 4 and the example of FIG.
The pulse waveform that becomes □ is F! The polarity is reversed and applied every / - time T.

On the other hand, in the example of FIG. 4, the signal type tid2 has voltages V,
As, in the selection period T, -■6. Holding period T, V! 1
A pulse waveform satisfying (VD > VH) is applied with its polarity inverted every frame time Tt.

Therefore, in the example of FIG. 4, among the plurality of pixels connected to the signal electrode d2, the target pixel is turned ON (i.e., lit), and all other pixels are OFF (i.e.,
), which is the most disadvantageous ON state.

In the example of FIG. 5, the voltage V is applied to the signal electrode d2 during the selection period T, and 6. Retention period T.

So-■. A pulse waveform with the polarity reversed every frame time Tt is applied. Therefore, in the example shown in FIG. 5, among the plurality of pixels connected to the signal electrode d2, the target pixel is turned OFF, and all other pixels are turned ON, which is the most disadvantageous OFF state.

In the example of FIGS. 4 and 5, the frame time T.

is 1/60 sec, and the selection period T is Tt/N=1/
It is 60000 seconds. In addition, the rising voltage threshold (2) of the two-terminal element is set to IOV. When the absolute value of the applied voltage is below this VT, the resistance R of the two-terminal element
ML becomes 4.7X10'Ω (off resistance value), which is equal to the liquid crystal resistance RLc per pixel, and at a voltage of 7 or more, the resistance RNL becomes 4.7X10'Ω (on resistance value), A value of 10' is obtained as the on-off ratio.Here, ■, of the voltage waveform of the scanning electrode is selected equal to ■1, and ■□ is set to 1/1O of Vl, and vo of the voltage waveform of the signal electrode is set as the voltage waveform of the scanning electrode. The voltage waveform is set to 1/2 of 3, and Vc is selected to be equal to VD.

Now, in the case of the example shown in FIG. 4, which is the most disadvantageous ON state, the value of the voltage vLc will be the maximum possible value V, +V, -V (in this example, the normalized value) within the selection period T1. 0.
5) and reaches saturation, and at the beginning of the retention period Tb, the volume is 1 cnL.
Due to the effect of
The S value (root mean square value) is 0.39.

In this display state, an experiment is performed in which a voltage waveform that causes the largest disturbance to the target pixel is applied to the adjacent signal electrode. The voltage waveform that causes the greatest disturbance is the voltage waveform that is −VD during the holding period T, that is, the voltage waveform that turns on all pixels connected to the adjacent signal electrodes.

As a result of the above experiment, the waveform of the voltage VLC hardly changed, and the brightness of the target pixel in the ON state on the image did not change either. In addition, when we investigated the voltage VLCO value at that time, we found that crosstalk from adjacent signal electrodes was detected as shown in Figure 4 (
It was found that only a small amount of birch-like waveform shown by the solid line in d) was added to the waveform in FIG. 4(C).

On the other hand, in the case of the example of FIG. 5, which is the most disadvantageous OFF state, the voltage vtcO value is o, as an RMS value.

It was 14 (normalized value).

In this display state, an experiment is performed in which a voltage waveform that causes the largest disturbance to the target pixel is applied to the adjacent signal electrode. The voltage waveform that causes the greatest disturbance is the voltage waveform that is VD during the holding period T, that is, the voltage waveform that turns off all pixels connected to the adjacent signal electrodes.

As a result of the above experiment, the waveform of the voltage vtc did not change, and the brightness of the target pixel in the OFF state on the image did not change. In addition, when the value of the voltage VLC at that time was investigated, it was found that crosstalk from adjacent signal electrodes was detected as shown in Figure 5(d).
It was found that only a small amount of waveform as shown by the solid line was added to the waveform in FIG. 5(C).

Now, for comparison with the liquid crystal display panel of this embodiment shown in FIG. An experiment in which a voltage waveform imparting disturbance to that pixel was applied to an adjacent signal electrode was conducted in the same manner as in the example of FIG. 4 described above.

As a result of the experiment, the brightness of the target pixel in the ON state on the image was lower than in the example shown in FIG. 4. In addition, when the voltage VLCO value was examined, a slowly attenuated waveform with an initial value (normalized value) of approximately -0.1, as shown by the dotted line in Figure 4(d), was generated as crosstalk from adjacent signal electrodes. It was found that the waveform was added to the waveform of FIG. 4(C).

As a result, it can be seen that in the conventional example, the value of voltage VLC is approximately 20% lower than in this example, and the parasitic capacitance 1c,
It was also confirmed that the coupling caused by , is a major cause of crosstalk. In other words, it has been shown that the present invention is resistant to crosstalk and can solve the problem of brightness fluctuations depending on the image display content.

Next, in the conventional liquid crystal display panel, an experiment was conducted in which the target pixel was driven in the most disadvantageous OFF state, and a voltage waveform that caused the greatest disturbance to the pixel was applied to the adjacent signal electrode. This was done in the same way as in the example shown.

As a result of the experiment, the OFF state of the target pixel became worse than in the example shown in FIG. 5, and the image became slightly grayish instead of completely black. Also, the voltage V,. .

When we also investigated the value of (
It became clear that it was added to the waveform of C). In other words, the voltage that exceeds approximately 20% in the ON state is the voltage V41.
．． It was found that this voltage caused the liquid crystal to leak more light.

We also conducted an experiment in which a target pixel was driven in the most unfavorable OFF state for a conventional liquid crystal display panel, and a voltage waveform that did not interfere with the pixel was applied to the adjacent signal electrode.

As a result of the experiment, the voltage VLC waveform had an extra loose attenuation waveform with an initial value (normalized value) of about 0.02,
Voltage V1. The normalized value of C reached 0.034. Therefore, in the conventional example, in addition to the voltage of the scanning electrode that drives the target pixel, parasitic capacitance! It was found that the voltage of the adjacent scanning electrode was picked up by the coupling by tCsr'.

In addition, when performing halftone display in which the brightness of the target pixel is constant in the conventional example, the brightness of the target pixel actually fluctuates depending on the display state of adjacent pixels, but this phenomenon It was also found that this is because the voltage of the adjacent scanning electrode leaks due to the coupling due to the parasitic capacitance CSP', and the voltage of the adjacent signal electrode leaks due to the coupling due to the parasitic capacitance CdP.

That is, parasitic capacitance C4p+cs+, which causes brightness fluctuations,
' are each about 0.056 pF in the conventional example.

They reach approximately 0.057pF, but in this example, they are reduced to approximately 0.0065pF and 0°002pF, respectively.

In this way, the reason why the parasitic capacitance is large in the conventional example and reduced in this example is that in the conventional example, the pixel boundary has a dielectric constant of 1.
0 liquid crystal, and the equivalent dielectric constant including the protective film (SiNx dielectric constant 7. Alignment film: dielectric constant 3) is 8.7.
4, whereas in this example, it is filled with a filler (polyimide resin) with a dielectric constant of 3, and a protective film (SiNs
This is because the equivalent dielectric constant of the pixel boundary including the dielectric constant 7) is 3.3.

Therefore, it is clear that if most of the volume of the pixel boundary is filled with a filler whose dielectric constant is smaller than that of the liquid crystal, the parasitic capacitance that becomes a problem will be reduced, and this will have the effect of improving image quality.

FIG. 6 is a process diagram showing the main parts of another manufacturing process for manufacturing the liquid crystal display panel of FIG. 1.

In addition, in FIG. 6, the upper plate 7. The first half of the pattern forming process for the lower plate 1 is omitted.

In the manufacturing process shown in FIG. 6, unlike the manufacturing process shown in FIG. Bead dispersion for setting the liquid crystal gap (step n) is performed, then a filler is printed, which also serves as sealant printing (step d), and the sealant is dried (step e). The subsequent steps are the same as those shown in FIG.

According to the manufacturing process shown in FIG. 6, independent filling body forming steps (coating, drying, photo-etching) can be omitted.

Next, a second embodiment of the present invention will be described using FIG. 7.

FIG. 7(a) is a perspective view showing a second embodiment of the present invention, FIG. 7(b) is a plan view showing an enlarged view of one of the pixels in FIG. 7(a), and FIG. (C) is a sectional view showing the A-A' force direction cross section in Fig. 7(b), and Fig. 7(d) is a cross-sectional view showing the AA' force direction section in Fig. 7(b).
Sectional view showing the cross section in the BB' direction in Figure (b), No. 7
FIG. 7(e) is a sectional view showing a cross section along the line C-C' in the force direction in FIG. 7(b).

This embodiment differs from the embodiment shown in FIG. , crossing the two-terminal element 8 and the scan electrode 9 in the vicinity thereof, a point limited only to the area connecting the ends of adjacent pixel electrodes, and a filling body formed at the boundary part of the signal electrode 6. However, the length is approximately the same as the total length of the two sides of the pixel electrode 2 parallel to the signal electrode 6.

With this configuration, the liquid crystal can easily flow between each pixel, and the liquid crystal can be easily injected in the liquid crystal injection process (steps in FIG. 2 or 6), reducing the working time. The effect on the image is also similar to that of the embodiment shown in FIG.

Next, a third embodiment of the present invention will be described using FIG. 8.

FIG. 8(a) is an enlarged plan view of one of the pixels in the third embodiment of the present invention, and FIG. 8(b) is the plan view shown in FIG. 8(a).
), FIG. 8 (
C) is a sectional view showing the BB' force direction cross section in Fig. 8(a), and Fig. 8(d) is a sectional view showing c-c' in Fig. 8(a).
FIG. 3 is a cross-sectional view showing a cross section in the force direction.

The difference between this embodiment and the embodiment shown in FIG. 1 or 7 is as follows.
Of the filling bodies 11 formed at the boundary portions of the pixel electrodes 2,
A filling body formed on the portion of the scanning electrode 9 including the two-terminal element 8 is formed on the lower plate l, a filling body formed on the boundary portion of the signal electrode 6 is formed on the upper plate 7, In addition, these filling bodies are not in contact with the opposing upper plate 7 or lower plate 1.

Note that the manufacturing process of this example is as follows. Therefore, when applying the manufacturing process shown in FIG. 2, a new step of forming a filling body on the upper plate 7 (bead dispersion is also required) is added, and the manufacturing process shown in FIG. When applying this method, it is sufficient to newly insert a step of forming a filling body on the lower plate l.

According to this embodiment, the same image effects and manufacturing process effects as in the embodiment shown in FIG. 7 can be obtained.

As a modification of this embodiment, among the filling bodies 11 formed at the boundary portions of the pixel electrodes 2, the filling bodies formed on the lower plate 1 (i.e., the filling bodies formed on the scanning electrode 9 including the two-terminal element 8) are The filler formed in the pixel electrode 2 in the direction of the scanning electrode 9.
The filler formed on the upper plate 7 (that is, the filler formed at the boundary of the signal electrode 6) is extended in the direction of the signal electrode 6 to the vicinity of the four corners of the pixel electrode 2. However, it is also possible to make both filling bodies face each other and contact each other near the four corners of the pixel electrode 2, and to define the liquid crystal gap by the sum of the thicknesses of both filling bodies.

At this time, the thickness of the filling body formed on the lower plate 1 and the thickness of the filling body formed on the upper plate 7 do not necessarily have to be equal, and in order to reduce parasitic capacitance, the thickness of the filling body formed on the upper plate 7 is not necessarily equal. It is more effective to increase the thickness of the filler formed thereon.

Next, a fourth embodiment of the present invention will be described using FIG. 9.

FIG. 9(a) is an enlarged plan view of one of the pixels in the fourth embodiment of the present invention, and FIG.
), a cross-sectional view showing the A-A' force direction cross section at
c) is a cross-sectional view showing the BB' force direction cross section in FIG. 9(a), and FIG. 9(d) is a cross-sectional view showing the cross-section in the force direction of FIG. 9(a).
FIG. 3 is a cross-sectional view showing a cross section in the force direction.

This embodiment differs from the embodiments shown in FIG. 1, FIG. 7, or FIG. 8 in that the protective film 3 is formed only in the portion where the filler 11 is formed.

The manufacturing process of this example will be explained using FIG. 10.

FIG. 10 is a process diagram showing the main parts of the manufacturing process for manufacturing the liquid crystal display panel of FIG. 9.

In addition, in FIG. 10, the manufacturing process of the upper plate 1 is omitted.

First, an ITO film and a Cr film are sequentially deposited on the lower plate 1 (step 0), and then a pattern for forming the scanning electrode 92 and pixel electrode 2 is formed (step P) by photoetching. In this state, a Cr film is also laminated on the pixel electrode 2 of the ITO film.

Next, a-3ill is deposited on the entire surface, and a Cr film is further deposited thereon to a thickness of 0.1 pm, and a photoresist pattern of the two-terminal element 8 is formed by a normal photoresist pattern forming process. Then, the photoresist pattern is removed by dry etching (such as RIE) L2 with a gas containing fluorine, and the formation of the lower terminal type element 8 (step q) is completed.

Furthermore, the external connection terminals are masked, and a protective film 3 made of silicon nitride is deposited using plasma CVD (step R), and then a filler film made of polyimide resin is deposited (step S). Apply by rotating or using a roller foot.

After the filler film dries, a photoresist is applied, and after it dries, a bottom resist pattern of the filler is formed.

After etching the filler film, dry etching (such as RIE) using a gas containing fluorine is performed, and the bottom resist pattern is removed to complete the formation of the filler pattern and the protective film pattern (step t). After removing the Cr film on the pixel electrode 2 by etching (step u) 7, alignment films 4 and 4' are formed (step h).
)I do.

The manufacturing process of the lower plate 1 and the manufacturing process of the "-plate 7" after the alignment film forming process are the same as those shown in FIG.

In this embodiment, although a portion of the Cr film on the scanning electrode 9'2 is missing G3, the resistance of the scanning electrode 9 hardly increases.

In addition, the pattern of the filler formed in the scanning electrode 9 part has corners not at right angles but at 45s, and this is to lower the resistance when injecting the liquid crystal and to facilitate the injecting.

In this embodiment, there is no protective film 3 on the pixel electrode 2, and therefore the liquid crystal volume is equivalently thicker.
Drive efficiency is improved. Moreover, three photomasks are sufficient for manufacturing the lower plate 1, including one for forming the filling body. That is, compared to the embodiments of FIG. 1, FIG. 2, and FIG.
・You can save one mask. Further, the effect on the image is equivalent to or better than the embodiments shown in FIGS. 1, 7, and 8 described above.

Next, a fifth embodiment of the present invention will be described using FIG. 11.

FIG. 11(a) is an enlarged plan view of one of the pixels in the fifth embodiment of the present invention, and FIG. 11(b) is a plan view showing the first pixel in the fifth embodiment.
Cross-sectional view 1 showing the A-A' force direction cross section in Figure 1(a)
, FIG. 11(C) is a sectional view showing the BB' force direction cross section in FIG. 11(a), and FIG.
) is a cross-sectional view showing a cross section along the line C-C′ in the force direction.

In this embodiment, the protective film 3 made of silicon nitride is removed from the embodiment shown in FIG. 9 described above, and the filler 11 also serves as a protective film, so that the number of steps can be reduced.

Further, in this embodiment, a photosensitive polyimide resin can be used for the filler 11, and there is an advantage that the photoresist and its coating process can be omitted.

〔Effect of the invention〕

According to the present invention, the parasitic capacitance between a pixel electrode and adjacent signal electrodes and adjacent scanning electrodes can be reduced to nearly 10% of the conventional value. Therefore, since there is less cross-distortion, it is possible to realize a high-definition liquid crystal display panel without deteriorating contrast or distorting halftone display.
Furthermore, even if the screen is made larger, the signal writing speed for pixels located far from the signal source becomes slow and luminance gradient does not occur.

In addition, it is possible to fix the lower and upper plates with a filler, so when increasing the screen size, even if the liquid crystal display panel bends slightly due to the weight of the glass plate and liquid crystal, the The liquid crystal gap can be made equal at any position, and therefore, variations in gradation within the screen can be eliminated.

In particular, even if a two-terminal element is used as a switching element, which reduces yield and requires fewer steps, it is possible to sufficiently manufacture large-screen, high-definition liquid crystal display panels without deteriorating image quality. It is also possible to realize a 20-inch class high-definition liquid crystal display panel, which was considered extremely expensive and unlikely to be realized.

[Brief explanation of the drawing]

FIG. 1(a) is a perspective view showing a first embodiment of the present invention, FIG. 1(b) is a plan view showing an enlarged view of one of the pixels in FIG. 1(a), and FIG. (C) is a sectional view showing the A-A' force direction cross section in Fig. 1(b), and Fig. 1(d) is a cross-sectional view showing the AA' force direction cross section in Fig. 1(b).
2 is a process diagram showing the main parts of the manufacturing process for manufacturing the liquid crystal display panel shown in FIG. Circuit diagram showing the equivalent circuit of the liquid crystal display panel, No. 4
5 and 5 are waveform diagrams showing an example of the voltage waveforms applied to the scanning electrode and signal electrode of FIG. 3, respectively, and the voltage waveforms applied to the liquid crystal accordingly. FIG. FIG. 7(a) is a perspective view showing the second embodiment of the present invention, and FIG. 7(b) is a process diagram showing the main parts of other manufacturing steps for manufacturing. A plan view showing an enlarged view of one of the pixels, FIG. 7(C) is the seventh
7(d) is a sectional view showing the cross section in the B-B' direction in FIG. 7(b), and FIG. 7(e) is c in Figure 7(b)
-c' A sectional view showing the cross section in the force direction, FIG. 8(a) is a plan view showing an enlarged view of one of the pixels in the third embodiment of the present invention, and FIG. 8(a) is a sectional view showing the AA' force direction cross section, FIG. 8(C) is a sectional view showing the BB' force direction cross section in FIG. 8(a), FIG. 8(d)
9(a) is a plan view showing an enlarged view of one of the pixels in the fourth embodiment of the present invention, and FIG. 9(b) is a sectional view showing the AA' force direction cross section in FIG. 9(a),
Figure (C) is a cross-sectional view showing the BB' force direction cross section in Figure 9(a), and Figure 9(d) is the c-
c' A sectional view showing a cross section in the force direction, FIG. 10 is a process diagram showing the main part of the manufacturing process for manufacturing the liquid crystal display panel of FIG. 9, and FIG. 11(a) is a fifth embodiment of the present invention FIG. 11(b) is a plan view showing an enlarged view of one of the pixels in the example, FIG. FIG. 11(d) is a sectional view showing a cross section along line BB' in the force direction in FIG. 11(a), and FIG. Explanation of symbols l...lower plate, 2...pixel electrode, 3...protective film, 4
．． 4'... Alignment film, 5... Liquid crystal, 6... Signal electrode, 7... Upper plate, 8... Two-terminal element, 9... Scanning electrode, 11... Filler . Figure 1 (a) Agent Patent Attorney Akio Namiki Figure (b) Figure Cd) Figure 1,000 Violation J& Figure 1, Figure (a) Figure 1,000 J and 2F (Figure 7 ( b) Fig. (d) Fig. (e) Fig. (c) Fig. (a) Fig. (e) Fig. (d) Fig. (b) Fig. 10 Chisai anti Fig. 9 (a) Fig. Figure (c) Figure (d) 1a11 Figure (a) Figure (c) Figure 11 (d) Figure 11 (1))

Claims (1)

[Claims] 1. A plurality of scanning electrodes extending at least in the first direction on one surface of the first transparent plate, and a plurality of scanning electrodes extending along the scanning electrodes between each scanning electrode. a plurality of transparent pixel electrodes each having a substantially rectangular shape, and a plurality of pixel electrodes connected between each pixel electrode and one of two adjacent scan electrodes in each pixel electrode. a switching element, a transparent counter electrode is formed on one surface of the second transparent plate, and a switching element is formed on one surface of the second transparent plate;
The surface of the second transparent plate on which the scanning electrode, pixel electrode, and switching element are formed (hereinafter referred to as the first surface) and the surface of the second transparent plate on which the counter electrode is formed (hereinafter referred to as the second surface) ) facing each other, liquid crystal is injected into the space between them, and the liquid crystal is sealed, the liquid crystal display panel comprising the scanning electrode portion and the switching element portion corresponding to each of the four side portions of each pixel electrode. , the liquid crystal is disposed between the first surface of the first transparent plate and the second surface of the second transparent plate, except for a predetermined portion at the boundary between adjacent pixel electrodes. 1. A liquid crystal display panel comprising a filler made of a material having a dielectric constant lower than that of the liquid crystal display panel. 2. In the liquid crystal display panel according to claim 1, the portion in the boundary portion where the filler is not provided is:
A liquid crystal display panel characterized in that each pixel electrode has four corner portions. 3. In the liquid crystal display panel according to claim 1 or 2, the height of the filler is between the first surface of the first transparent plate and the second surface of the second transparent plate. A liquid crystal display panel characterized in that the intervals between the two are defined. 4. The liquid crystal display panel according to claim 1, 2 or 3, wherein the filler is located in the first portion of the first transparent plate.
a first filling body formed in a portion of the boundary portion along the first direction on the surface; and a first filling body formed in the portion of the boundary portion along the first direction on the second surface of the second transparent plate; a second filling body formed in a portion along a second direction substantially perpendicular to the first direction. 5. In the liquid crystal display panel according to claim 4, a portion of the first filling body and the second filling body are formed between the first surface of the first transparent plate and the second surface of the second transparent plate. The first surface of the first transparent plate and the second surface of the second transparent plate overlap with each other at the height of the first and second filling bodies. A liquid crystal display panel characterized in that an interval between the two is defined. 6. The liquid crystal display panel according to claim 1, 2, 3, 4 or 5, wherein the filler is made of resin. 7. The liquid crystal display panel according to claim 6, wherein the resin is a polyimide resin or an epoxy resin. 8. The liquid crystal display panel according to claim 1, 2, 3, 4, 5, 6, or 7, wherein the filler is arranged on the first surface of the first transparent plate and the first surface of the second transparent plate. A liquid crystal display panel characterized in that it is fixed to two surfaces. 9. The liquid crystal display panel according to claim 1, 2, 3, 4, 5, 6, 7 or 8, wherein the switching element is a two-terminal type element. 10. The liquid crystal display panel according to claim 1, 2, 3, 4, 5, 6, 7, 8 or 9,
A liquid crystal display panel characterized in that a protective film is provided on the first surface of the first transparent plate. 11. The liquid crystal display panel according to claim 10, wherein the protective film is provided only on a portion of the first surface of the first transparent plate where the filler is provided. panel. 12.Claims 1, 2, 3, 4, 5, 6, 7, 8, 9, 1
12. The liquid crystal display panel according to claim 0 or 11, wherein the filler is formed by exposure, development, and etching. 13. The liquid crystal display panel according to claim 12, wherein an alignment film is formed after the filling body is formed, and the alignment film is rubbed. 14.Claims 1, 2, 3, 4, 5, 6, 7, 8, 9, 1
12. The liquid crystal display panel according to claim 0 or 11, wherein the filler is formed by printing. 15. Claim 1, 2, 3, 4, 5, 6, 7, 8 or 9
In the manufacturing method for manufacturing a liquid crystal display panel according to , a transparent pixel electrode film and a metal film are sequentially deposited on one surface of the first transparent plate to form a pattern of the scanning electrode and a pattern of the pixel electrode. a first step of forming the switching element across the formed scan electrode and the pixel electrode; and a second step of forming the switching element over the formed scan electrode, the pixel electrode, and the switching element. a third step of forming a filler body film, and then forming a pattern of the filler by photoetching; and removing an unnecessary metal film on the pixel electrode using the filler pattern formed on the pixel electrode as a mask; a fourth step of etching, and a fifth step of forming an alignment film on the formed scanning electrode, the pixel electrode, the switching element, and the filling body, and rubbing the alignment film. A method for manufacturing a liquid crystal display panel characterized by: 16. The method of manufacturing a liquid crystal display panel according to claim 15, wherein a photosensitive resin is used for the filler film so that it also serves as a photoresist. 17. The manufacturing method for manufacturing a liquid crystal display panel according to claim 10 or 11, wherein a transparent pixel electrode film and a metal film are sequentially deposited on one surface of the first transparent plate, and the pattern of the scanning electrode and a first step of forming a pattern of the pixel electrode; a second step of forming the switching element across the formed scan electrode and the pixel electrode; a third step of sequentially depositing the protective film and the filler film on the switching element, and then forming a pattern of the protective film and a pattern of the filler, respectively, by photo-etching; and forming a pattern on the pixel electrode. a fourth step of etching an unnecessary metal film on the pixel electrode using the pattern of the protective film and the pattern of the filler as a mask, and etching the formed scanning electrode, pixel electrode, switching element, and protection A method for manufacturing a liquid crystal display panel, comprising a fifth step of forming an alignment film on the film and the filler, and rubbing the alignment film. 18, Claims 1, 2, 3, 4, 5, 6, 7, 8, 9, 1
0, 11, 12, 13, or 14, in the manufacturing method for manufacturing a liquid crystal display panel according to item 0, 11, 12, 13, or 14, on the second surface of the second transparent plate, a sealing material is provided around the area facing the plurality of pixel electrodes. After the first step of printing resin and drying the sealing resin, the first step of printing the first transparent plate
and a second step of aligning the surface of the second transparent plate with the second surface of the second transparent plate, applying pressure and heating to the first transparent plate and the second transparent plate, and applying pressure and heat to the sealing plate. A method for manufacturing a liquid crystal display panel, comprising: a third step of fixing the first transparent plate and the second transparent plate using a resin and the filler.