JPH02198716A - Electrolytic finishing method - Google Patents

Electrolytic finishing method

Info

Publication number
JPH02198716A
JPH02198716A JP1014431A JP1443189A JPH02198716A JP H02198716 A JPH02198716 A JP H02198716A JP 1014431 A JP1014431 A JP 1014431A JP 1443189 A JP1443189 A JP 1443189A JP H02198716 A JPH02198716 A JP H02198716A
Authority
JP
Japan
Prior art keywords
machining
amount
finishing
workpiece
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1014431A
Other languages
Japanese (ja)
Inventor
Yohei Kuwabara
桑原 陽平
Haruki Sugiyama
治樹 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shizuoka Seiki Co Ltd
Original Assignee
Shizuoka Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shizuoka Seiki Co Ltd filed Critical Shizuoka Seiki Co Ltd
Priority to JP1014431A priority Critical patent/JPH02198716A/en
Priority to DE8989313267T priority patent/DE68902821T2/en
Priority to EP89313267A priority patent/EP0376581B1/en
Priority to CA002006138A priority patent/CA2006138A1/en
Priority to US07/453,878 priority patent/US5015347A/en
Priority to KR1019890019767A priority patent/KR930004833B1/en
Publication of JPH02198716A publication Critical patent/JPH02198716A/en
Pending legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To improve a contact detection accuracy by a contact detector and to correctly measure a working amount by measuring an actual working amount after removing an oxide film, etc., formed on the work face of a work by the finishing work under first conditions. CONSTITUTION:When an oxide film or the like of the work face 4a of a work 4 is removed by finishing work, the working amt. of the work 4 is measured and accumulated working amount is calculated. Then, in the case that this accumulated working amount does not a specific valued against a designated work amount the next number of working times is calculated based on the working amount and the number of working times. This succeeding working times are set as the number of working times of the next finishing work and the next finishing work is performed by the specified peak current density and the working pulse for improving the surface roughness of the pulse width. Thus, an actual working amount is measured after removing the oxide film, etc., formed on the work face 4a of the work 4, so the contact detection accuracy is improved and the working amount can be correctly be measured.

Description

【発明の詳細な説明】 [産業上の利用分野コ この発明は、電解仕上げ加工方法に係り、特に接触検知
精度を向上させ、ワークの加工量を正確に測定し得て、
高い加工精度が得られる電解仕上げ加工方法に関する。
[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to an electrolytic finishing method, and in particular improves contact detection accuracy and accurately measures the processing amount of a workpiece.
This invention relates to an electrolytic finishing method that provides high processing accuracy.

[従来の技術] 従来、放電加工されたワークと、このワークの加工面に
倣った電極面を有する電極とを、静止した電解液中で所
定の間隙で対向配置し、その極間に単一の加工パルスを
供給するとともに、間隙に電解液を間欠的に噴出して、
該間隙の加工屑を排除しながらワークを仕上げ加工する
電解仕上げ加工方法としては、例えば特開昭63−11
4815号公報に開示のものが知られている。
[Prior art] Conventionally, a workpiece that has been subjected to electric discharge machining and an electrode having an electrode surface that follows the machined surface of the workpiece are placed facing each other with a predetermined gap in a stationary electrolytic solution, and a single electrode is placed between the electrodes. In addition to supplying machining pulses, electrolyte is intermittently jetted into the gap.
An example of an electrolytic finishing method for finishing a workpiece while eliminating machining debris in the gap is disclosed in Japanese Patent Application Laid-Open No. 63-11.
The one disclosed in Japanese Patent No. 4815 is known.

[発明が解決しようとする問題点] ところで、この電解仕上げ加工方法にあっては、ワーク
の加工量を精度よく制御することが難しく、高い加工精
度が得られないという不都合があった。
[Problems to be Solved by the Invention] However, this electrolytic finishing method has the disadvantage that it is difficult to accurately control the amount of workpiece processed, and high processing accuracy cannot be obtained.

即ち、この電解仕上げ加工方法にあっては、仕上げ加工
に当り、ワークの放電加工面の粗さを確認し、必要とす
る粗さ面を得るために、実験(試し加工)によって求め
たモノグラフから、目標とする加工量を入力する。また
、材料毎の電気化学当量と実験による加工効率のデータ
とから演算式を求め、この演算式により、前記人力した
加工量に相当する単位面積当りのクーロン量を算出し、
このクーロン量に基づいて加工回数を設定する。
In other words, in this electrolytic finishing machining method, in order to confirm the roughness of the electrical discharge machined surface of the workpiece during finishing machining, and to obtain the required surface roughness, a monograph obtained through experiment (trial machining) is used. Enter the target machining amount from . In addition, a calculation formula is determined from the electrochemical equivalent of each material and experimental processing efficiency data, and using this calculation formula, the amount of coulombs per unit area corresponding to the amount of manual processing is calculated,
The number of processing times is set based on this coulomb amount.

そして、通常、実験と同じ条件で加工されれば、任意の
加工量に対して加工精度(寸法精度)は±5%程度に収
まる。しかしながら、実際の加工を実験と同じ条件で行
うことは、電解液の濃度、温度、ペーパー等の変化によ
り難しい。また、ワークの表面形状は複雑で、その正確
な表面積を計算で求めるのが困難であり、入力された表
面積の誤差が単位面積当りのクーロン量を狂わせ、加工
精度に悪影響を与える。更に、フラッシング動作による
間隙の電解液の排除条件を、実験と同じ水準で行うこと
が困難であるとともに、複雑な形状のワークでは、表面
全域に亙っての確実な排除が困難で、加工効率が悪化し
、実際の加工量が人力した加工量よりも少なくなるのが
現状であり、目標とする寸法精度が得られないなど、高
い加工精度を得ることができない。
Normally, if machining is performed under the same conditions as in the experiment, the machining accuracy (dimensional accuracy) will be within about ±5% for any amount of machining. However, it is difficult to perform actual processing under the same conditions as in the experiment due to changes in the electrolyte concentration, temperature, paper, etc. Furthermore, the surface shape of the workpiece is complex, and it is difficult to calculate its accurate surface area, and errors in the input surface area disturb the amount of coulombs per unit area, which adversely affects machining accuracy. Furthermore, it is difficult to perform flushing operations to remove the electrolyte in the gaps at the same level as in experiments, and for workpieces with complex shapes, it is difficult to reliably remove the electrolyte over the entire surface, resulting in poor machining efficiency. The current situation is that the actual machining amount is less than the amount of manual machining, and high machining accuracy cannot be achieved, such as the target dimensional accuracy not being achieved.

そこでこの発明の目的は、上述の不都合を除去し、特に
接触検知精度を向上させ、ワークの加工量を正確に測定
し得て、高い加工精度が得られる電解仕上げ加工方法を
実現するにある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned disadvantages, particularly to improve the accuracy of contact detection, to accurately measure the processing amount of a workpiece, and to realize an electrolytic finishing method that can obtain high processing accuracy.

[課題を解決するための手段] この目的を達成するために、この出願の第1発明は、所
定形状に加工されたワークと、このワークの加工面に倣
った電極面を有する電極とを、電解液中で所定の間隙で
対向配置し、その極間に加工パルスを供給するとともに
、前記間隙に電解液の噴流を供給して加工屑を排除しな
がら前記ワークを仕上げ加工するものにおいて、前記ワ
ークの目標とする加工量を設定するステップと、少なく
とも、前記ワークの加工面に光沢面を得る第1の条件と
、この第1の条件とは異なり前記加工面の面粗度を向上
させる第2の条件とからなる、前記加工パルスの条件を
設定するステップと、前記第1の条件による仕上げ加工
の後に、前記ワークの加工量を測定するステップと、こ
の測定した加工量に基づいて前記第2の条件の加工回数
を変更するステップとを具備することを特徴とする。
[Means for Solving the Problem] In order to achieve this object, the first invention of this application includes a workpiece machined into a predetermined shape, and an electrode having an electrode surface patterned after the machined surface of the workpiece. The workpiece is placed facing each other at a predetermined gap in an electrolytic solution, and a machining pulse is supplied between the poles, and a jet of the electrolytic solution is supplied to the gap to remove machining debris while finish machining the workpiece. a step of setting a target machining amount of the workpiece, at least a first condition for obtaining a glossy surface on the machined surface of the workpiece, and a first condition for improving the surface roughness of the machined surface, which is different from the first condition. a step of setting conditions for the machining pulse, a step of measuring the amount of machining of the workpiece after finishing machining according to the first condition, and a step of determining the machining amount of the workpiece based on the measured amount of machining. The present invention is characterized by comprising a step of changing the number of times of machining under the second condition.

また、第2発明は、第1発明において、前記ワークの加
工量を測定した後で、前記第2の条件による仕上げ加工
の前に、電極とワークとの芯出しを行うステップを具備
することを特徴とし、第3発明は、第1又は第2発明に
おいて、前記第2の条件による仕上げ加工の最大加工回
数を設定するステップを具備することを特徴とする。
A second aspect of the present invention is the first aspect of the present invention, further comprising the step of centering the electrode and the workpiece after measuring the machining amount of the workpiece and before finishing machining under the second condition. A third aspect of the present invention is characterized in that, in the first or second aspect, the method further comprises a step of setting a maximum number of finishing operations according to the second condition.

[作用] この出願の第1発明の構成によれば、目標とする加工量
と、ワークの加工面に光沢面が得られるの第1の条件及
び面粗度が向上する第2の条件からなる加工パルスの条
件とを設定し、第2の条件によってワークの加工面に生
成及び付着した酸化被膜及び加工屑等を、第1の条件に
よる仕上げ加工で除去し、加工面を清浄な状態にした上
で、電極とワークとを接触させ、ワークの実際の加工量
を測定する。これにより、接触検知精度が向上し、正確
な加工量の測定が可能となる。そして、この測定した加
工量と、この加工量が得られる前記第1の条件の加工回
数から、次の第2の条件の加工回数を算出して設定変更
し、該条件による仕上げ加工を行う。これを測定加工量
が設定加工量に対して所定差になるまで繰り返し、仕上
げ加工を終了する。
[Operation] According to the configuration of the first invention of this application, the target processing amount is comprised of the first condition that a glossy surface is obtained on the machined surface of the workpiece, and the second condition that the surface roughness is improved. The machining pulse conditions were set, and the oxide film, machining debris, etc. generated and attached to the machined surface of the workpiece under the second condition were removed by finishing machining under the first condition, and the machined surface was left in a clean state. At the top, the electrode and the workpiece are brought into contact and the actual machining amount of the workpiece is measured. This improves contact detection accuracy and enables accurate measurement of processing amount. Then, from this measured amount of machining and the number of times of machining under the first condition to obtain this amount of machining, the number of times of machining under the next second condition is calculated, the setting is changed, and finishing machining is performed under the condition. This is repeated until the measured machining amount becomes a predetermined difference from the set machining amount, and finishing machining is completed.

また、第2発明の構成によれば、例えば電極を移動させ
ることによって加工量を測定し、この測定後に、電極と
ワークとの芯出しを行い、第2の条件による仕上げ加工
を行うため、ワークの加工面全域に亙って電極間隙を一
定に維持し得て、加工量の均一化が図れる。さらに、第
3発明の構成によれば、面粗度を向上させる第2の条件
による仕上げ加工の最大加工回数を設定し、この最大加
工回数毎に第1の条件に基づく仕上げ加工を行うため、
酸化被膜の生成及び電極間隙内の加工屑を一定量以下に
抑えることができ、仕上げ加工の加工効率を向上させ得
る。
Further, according to the configuration of the second invention, for example, the amount of machining is measured by moving the electrode, and after this measurement, the electrode and the workpiece are centered, and finishing machining is performed under the second condition. The electrode gap can be maintained constant over the entire machining surface, and the amount of machining can be made uniform. Furthermore, according to the configuration of the third invention, the maximum number of finishing operations based on the second condition for improving the surface roughness is set, and the finishing operation based on the first condition is performed every time the maximum number of operations is performed.
The formation of an oxide film and the processing debris in the electrode gap can be suppressed to a certain amount or less, and the processing efficiency of finishing processing can be improved.

[実施例] 以下、図面を参照してこの出願の第1〜3発明の一実施
例を詳細かつ具体的に説明する。
[Example] Hereinafter, examples of the first to third inventions of this application will be described in detail and specifically with reference to the drawings.

第1図において、この出願の各発明を実施し得る電解仕
上げ加工装置1は、電極2を固定する電極固定装置3、
ワーク4を固定するワーク固定装置5、サーボモータ6
の回転運動を往復運動に変換する駆動変換部7、加工パ
ルスを発生する電源装置8、ヘッド駆動制御部9と加工
条件制御部10と電解液流制御部11等からなる制御装
置12、各種データ等を入力する入力装置13、電解液
を濾過する電解液濾過装置14、加工槽15等からなる
In FIG. 1, an electrolytic finishing device 1 capable of implementing each invention of this application includes an electrode fixing device 3 for fixing an electrode 2;
A workpiece fixing device 5 that fixes the workpiece 4 and a servo motor 6
A drive conversion section 7 that converts rotational motion into reciprocating motion, a power supply device 8 that generates processing pulses, a control device 12 that includes a head drive control section 9, a processing condition control section 10, an electrolyte flow control section 11, etc., and various data. It consists of an input device 13 for inputting information, an electrolyte filtering device 14 for filtering the electrolyte, a processing tank 15, and the like.

前記電極固定装置3は、その下部に設けたロッド16の
下端に、例えば純銅もしくはグラファイトからなる電極
2を、その電極面2aとワーク4の加工面4aとが三次
元方向に−様な間隙17を保つように固定する。この電
極固定装置3は、前記ヘッド駆動制御部9の制御信号に
よるサーボモータ6の回転により上下動し、電極面2a
と加工面4aとを所定の間隙17に設定する。また、前
記ワーク固定装置5は、絶縁性の高いグラナイトもしく
はセラミックス製のテーブルで、その上面には例えば型
彫放電加工されたワーク4を図示しないセット治具等に
より固定する。なお、第1図中、符号18は間隙17に
清浄な電解液を噴出するための噴出ノズルである。
The electrode fixing device 3 has an electrode 2 made of, for example, pure copper or graphite attached to the lower end of a rod 16 provided at the bottom thereof, and a gap 17 such that the electrode surface 2a and the processed surface 4a of the workpiece 4 are spaced in a three-dimensional direction. Fix it to keep it. This electrode fixing device 3 is moved up and down by the rotation of a servo motor 6 based on a control signal from the head drive control section 9, and the electrode surface 2a
and the processed surface 4a are set at a predetermined gap 17. Further, the workpiece fixing device 5 is a table made of highly insulating granite or ceramics, and a workpiece 4 subjected to die engraving electric discharge machining, for example, is fixed to the upper surface of the table using a setting jig or the like (not shown). Note that in FIG. 1, reference numeral 18 is a jet nozzle for jetting clean electrolyte into the gap 17.

前記入力装置13は、ワーク4の材質と加工面積、目標
とする加工量D(以下指定加工量という)、後述する加
工パルスの、光沢面を得るための第1の条件と面粗度を
向上させるための第2の条件、初期電極間隙δ等を入力
し、これらの各信号を制御装置12のヘッド駆動制御部
9及び加工条件制御部10に出力する。
The input device 13 improves the first condition for obtaining a glossy surface and the surface roughness of the material and machining area of the workpiece 4, the target machining amount D (hereinafter referred to as the designated machining amount), and machining pulses to be described later. The second conditions for this, the initial electrode gap δ, etc. are input, and these signals are output to the head drive control section 9 and processing condition control section 10 of the control device 12.

また、前記電解液濾過装置14は、加工で生じた電解生
成物等を含む電解液を濾過するもので、前記電解液流制
御部11の制御信号に基づいて、加工開始時に加工槽1
5に電解液を供給するとともに、加工中に電極2とワー
ク4の間隙17に生成した加工屑を排除するために、加
工パルスの供給毎に上昇動作する電極2と同期して、該
間隙17に清浄な電解液を前記噴出ノズル18を介して
噴出する。
Further, the electrolyte filtration device 14 filters an electrolyte containing electrolytic products generated during machining, and based on a control signal from the electrolyte flow control section 11, the electrolyte filtration device 14 filters the electrolytic solution in the machining tank at the start of machining.
In order to supply the electrolytic solution to the electrode 5 and remove machining debris generated in the gap 17 between the electrode 2 and the workpiece 4 during machining, the gap 17 is A clean electrolyte is then jetted out through the jetting nozzle 18.

前記電極2とワーク4との極間に、所定の条件の加工パ
ルスを供給する電源装置8と、この電源装置8を制御す
る前記加工条件制御部10は、例えば第2図に示す如く
構成する。
A power supply device 8 that supplies machining pulses under predetermined conditions between the electrode 2 and the workpiece 4, and the machining condition control unit 10 that controls the power supply device 8 are configured as shown in FIG. 2, for example. .

即ち、電源装置8は直流電源部19と充放電部20とで
構成され、直流電源部19は、変圧器21と整流器22
とからなり、変圧器21により電圧を所定値に降下させ
、整流器22により整流して直流電流を得て、後述する
蓄電器23−1〜23−nに供給する。
That is, the power supply device 8 includes a DC power supply section 19 and a charging/discharging section 20, and the DC power supply section 19 includes a transformer 21 and a rectifier 22.
A transformer 21 lowers the voltage to a predetermined value, a rectifier 22 rectifies the DC current, and supplies the direct current to capacitors 23-1 to 23-n, which will be described later.

また、充放電部20は、極間に電荷を放電する複数個の
蓄電器23−1〜23−nと、これらの各蓄電器23−
1〜23−nに接続し直流電源部19側への電荷の逆流
を阻止するダイオード24−1〜24−nと、放電側へ
電荷を放電させるべく開閉される放電スイッチ25−1
〜25−nと、前記各蓄電器23−1〜23−nを所定
に充電すべく前記直流電源部19からの電源を給断する
充電スイッチ26等とからなる。
The charging/discharging unit 20 also includes a plurality of capacitors 23-1 to 23-n that discharge charges between electrodes, and each of these capacitors 23-
Diodes 24-1 to 24-n connected to diodes 1 to 23-n to prevent backflow of charges to the DC power supply section 19 side, and a discharge switch 25-1 that is opened and closed to discharge charges to the discharge side.
25-n, a charging switch 26, etc., for supplying and disconnecting power from the DC power supply section 19 in order to charge each of the capacitors 23-1 to 23-n to a predetermined value.

前記加工条件制御部10は、蓄電器23−1〜23−n
の充電電圧値を検出する電圧検出器27と、この電圧検
出器27で検出した充電電圧値とD/A変換器28から
の出力値とを比較する電圧比較器29と、この電圧比較
器29からの出力信号により前記蓄電器23−1〜23
−nの充電の完了及び開始を検出する充電検出器30と
、極間に放電される電荷の電流値を検出する電流検出器
31と、この電流検出器31で検出した電流値のピーク
値をホールドするピークホールド回路32と、このピー
クホールド回路32でホールドしたピーク値とD/A変
換器33の出力値とを比較する電流比較器34と、所定
時間幅のパルスを発生するパルス発生器37と極間に放
電する電荷の電流波形を設定する電流波形設定器38か
らの入力信号により前記各放電スイッチ25−1〜25
−nに開閉駆動信号を出力するゲート回路35と、前記
各蓄電器23−1〜23−nへ供給する充電電圧値を設
定しその信号を前記D/A変換器28に出力する充電電
圧設定器36と、極間に流れる電流値を設定しその信号
を前記D/A変換器33に出力する電流設定器39と、
前記各回路からの人力信号に基づき加工条件等を演算・
処理するCPU40と、電極2とワーク4の接触を検知
する接触検知器41等からなる。なお、図中符号42は
逆起電力によって各放電スイッチ25−1〜25−nが
破壊するのを防止するダイオードである。
The processing condition control unit 10 controls the capacitors 23-1 to 23-n.
a voltage detector 27 that detects the charging voltage value of the voltage detector 27; a voltage comparator 29 that compares the charging voltage value detected by the voltage detector 27 with the output value from the D/A converter 28; According to the output signal from the capacitors 23-1 to 23
A charge detector 30 detects the completion and start of charging of -n, a current detector 31 detects the current value of the charge discharged between the electrodes, and a peak value of the current value detected by this current detector 31. A peak hold circuit 32 that holds the peak value, a current comparator 34 that compares the peak value held by the peak hold circuit 32 with the output value of the D/A converter 33, and a pulse generator 37 that generates a pulse with a predetermined time width. Each of the discharge switches 25-1 to 25 is controlled by an input signal from a current waveform setting device 38 that sets the current waveform of the charge discharged between the electrodes.
-n, a gate circuit 35 that outputs an opening/closing drive signal, and a charging voltage setting device that sets a charging voltage value to be supplied to each of the capacitors 23-1 to 23-n and outputs the signal to the D/A converter 28. 36, a current setting device 39 that sets the current value flowing between the electrodes and outputs the signal to the D/A converter 33;
Processing conditions etc. are calculated based on the human power signals from each of the circuits mentioned above.
It consists of a CPU 40 for processing, a contact detector 41 for detecting contact between the electrode 2 and the workpiece 4, and the like. Note that the reference numeral 42 in the figure is a diode that prevents each of the discharge switches 25-1 to 25-n from being destroyed by back electromotive force.

前記接触検知器41は、第3図に示す如く、極間に分解
電圧以下の基準電圧を供給する基準電源43と、電流検
出用の抵抗44と、この抵抗440両端にそれぞれ抵抗
45.46を介して、その入力側を接続する増幅器47
と、この増幅器47の出力信号と可変抵抗48によって
設定した信号とを比較する比較器49とで構成する。第
3図中符号50は、前記電流検出器31の電流検出用の
抵抗である。なお、前記分解電圧とは、ワーク4・電解
液・電極2からなる電気二重層の電極反応が開始する電
圧である。
As shown in FIG. 3, the contact detector 41 includes a reference power source 43 that supplies a reference voltage lower than the decomposition voltage between electrodes, a resistor 44 for current detection, and resistors 45 and 46 at both ends of this resistor 440. an amplifier 47 connecting its input side via
and a comparator 49 that compares the output signal of this amplifier 47 with a signal set by a variable resistor 48. Reference numeral 50 in FIG. 3 is a resistor for current detection of the current detector 31. Note that the decomposition voltage is the voltage at which the electrode reaction of the electric double layer consisting of the workpiece 4, electrolytic solution, and electrode 2 starts.

この接触検知器41は、基準電源43から供給する基準
電圧に基づいて、極間電流を検出し、この極間電流と前
記可変抵抗48で設定した基準電流とを比較し、極間電
流が基準電流より大きくなった場合に、CPU40に接
触検知信号を出力する。
This contact detector 41 detects a current between the electrodes based on a reference voltage supplied from a reference power source 43, compares this current between the electrodes with a reference current set by the variable resistor 48, and determines that the current between the electrodes is the reference current. When the contact detection signal becomes larger than the current, a contact detection signal is output to the CPU 40.

次に、この出願の第1発明について第4〜6図のフロー
チャートに基づいて説明する。
Next, the first invention of this application will be explained based on the flowcharts of FIGS. 4 to 6.

仕上げ加工に際しては、電極固定装置3のロッド16の
下端に、例えばワーク4を型彫放電加工する際に使用し
た電極2を固定するとともに、ワーク固定装置5にワー
ク4をそれぞれ固定(60) L/、電極2とワーク4
の芯出し後に、前記入力装置13により、次の各データ
等を入力(61)する。
During finishing, the electrode 2 used, for example, when performing die-sinking electric discharge machining on the workpiece 4 is fixed to the lower end of the rod 16 of the electrode fixing device 3, and the workpieces 4 are each fixed to the workpiece fixing device 5 (60) L. /, electrode 2 and work 4
After centering, the following data and the like are input using the input device 13 (61).

D :指定加工量 δ :初期電極間隙 ipl:加工パルスの第1の条件の ピーク電流密度 tl:〃      パルス幅 (パルスのオン時間) n :    〃   加工回数 i 92 :加工パルスの第2の条件のピーク電流密度 t2 :    〃     パルス幅N、:    
〃   初期加工回数 そして、加工槽15に硝酸ナトリウム等の電解液を供給
して、仕上げ加工の自動運転が開始(62)されると、
CPU40は、電源装置8から前記第1の条件による加
工パルスを供給して、仕上げ加工1を行う(63)。
D: Specified machining amount δ: Initial electrode gap ipl: Peak current density tl of the first condition of the machining pulse:〃 Pulse width (pulse on time) n:〃 Number of machining i 92: Under the second condition of the machining pulse Peak current density t2: 〃 Pulse width N,:
〃 Initial processing number Then, when an electrolytic solution such as sodium nitrate is supplied to the processing tank 15 and automatic operation of finishing processing is started (62),
The CPU 40 supplies machining pulses according to the first condition from the power supply 8 and performs finishing machining 1 (63).

この仕上げ加工1 (63)は、第5図に示す如く、電
極2を初期電極間隙δを維持する位置に設定(63−1
) L/、極間にピーク電流密度がiplでパルス幅が
t、の単一の加工パルスを供給(63−2)する。この
加工パルスがオフしたら、電極2を上昇(63−3)さ
せるとともに、間隙17に前記噴出ノズル18から電解
液を噴出(63−4) L/て、加工パルスの供給によ
り生成した電解生成物等からなる加工屑を該間隙17か
ら排除し、電極2を下降(63−5)させて、前記ステ
ップ(63−1)で設定した位置に再設定する。そして
、CPU40のカウンタa(図示せず)をクリア(63
−6) t、、て、該カウンタaのカウント数Caを+
1 (63−7)するとともに、このカウント数Caが
所定数、即ち前記ステップ(61)で入力設定した加工
回数nであるか否かを判断(63−8) L/、この判
断(63−8)でNOの場合は、ステップ(63−2)
に戻り、判断(63−8)でYESになるまで、ステッ
プ(63−2)〜(63−7)を繰り返す。
This finishing process 1 (63) is performed by setting the electrode 2 at a position that maintains the initial electrode gap δ (63-1), as shown in FIG.
) L/, a single machining pulse with a peak current density of ipl and a pulse width of t is supplied between the electrodes (63-2). When this machining pulse is turned off, the electrode 2 is raised (63-3), and the electrolytic solution is ejected from the jet nozzle 18 into the gap 17 (63-4), thereby producing an electrolytic product generated by supplying the machining pulse. The processing waste consisting of the like is removed from the gap 17, and the electrode 2 is lowered (63-5) and reset to the position set in the step (63-1). Then, the counter a (not shown) of the CPU 40 is cleared (63
-6) t, , the count number Ca of the counter a is +
1 (63-7), and also determines whether this count number Ca is a predetermined number, that is, the number of machining times n input and set in the step (61) (63-8) L/, and this determination (63-8). If NO in 8), step (63-2)
Steps (63-2) to (63-7) are repeated until the determination (63-8) becomes YES.

なお、この仕上げ加工1における加工パルスは、後述す
る面粗度向上用の加工パルスの供給により、ワーク4の
加工面4aに生成及び付着した酸化被膜等を除去するも
ので、その条件は、ピーク電流密度jf)tが30〜5
0A/cm2、パルス幅t1が20m5ec以上、加工
回数nが3〜lOに設定される。
The machining pulses in this finishing machining 1 are used to remove the oxide film, etc. generated and attached to the machining surface 4a of the workpiece 4 by supplying machining pulses for improving surface roughness, which will be described later.The conditions are as follows: Current density jf)t is 30 to 5
The pulse width t1 is set to 0 A/cm2, the pulse width t1 is set to 20 m5ec or more, and the number of processing times n is set to 3 to 10.

仕上げ加工1 (63)により、ワーク4の加工面4a
の酸化被膜等を除去すると、仕上げ加工1による加工が
最初か否かを判断(64) L/、最初の加工である場
合はこの判断(64)でYESとなり、後述するステッ
プ(70)ヘジャンブする。また、仕上げ加工1を2回
以上行うと、判断(64)でNOとなり、ワーク4の加
工量Δdiを測定(65)する。 このステップ(65
)を、第6図に基づいて詳細に説明する。まず、X軸方
向の加工量Δd2を測定(65−1)するために、CP
U40の図示しないカウンタbをクリア(65−1a)
 L/て、該カウンタbのカウント数cbに+1 (6
5−1b) シ、電極2を所定距離t、例えば1μm下
降(65−1c)させる。そして、前記接触検知器41
からの接触検知信号の有無を判断(65−1d) l、
、、この判断(65−1d)でNoの場合は、ステップ
(65−1b)に戻り、判断(65−1d)でYESに
なるまで、ステップ(65−1b) 〜(65−1c)
を繰り返す。判断(65−1d)でYESになると、電
極2の移動量Lzを次の式(1)によって算出(65−
1e) シ、CPU40に記Lz=CbXt     
            ”Φ (1)但し、cbはカ
ウンタbのカウント数である。
By finishing machining 1 (63), the machined surface 4a of the workpiece 4
After removing the oxide film, etc., it is determined whether finishing processing 1 is the first processing (64) L/, and if it is the first processing, this judgment (64) becomes YES, and the process proceeds to step (70) described later. . Further, if finishing machining 1 is performed twice or more, the determination (64) becomes NO, and the machining amount Δdi of the workpiece 4 is measured (65). This step (65
) will be explained in detail based on FIG. First, in order to measure the machining amount Δd2 in the X-axis direction (65-1), CP
Clear counter b (not shown) of U40 (65-1a)
L/t, the count number cb of the counter b is +1 (6
5-1b) Lower the electrode 2 by a predetermined distance t, for example, 1 μm (65-1c). And the contact detector 41
Determine whether there is a contact detection signal from (65-1d) l,
,, If this judgment (65-1d) is No, return to step (65-1b), and repeat steps (65-1b) to (65-1c) until the judgment (65-1d) becomes YES.
repeat. If the judgment (65-1d) is YES, the movement amount Lz of the electrode 2 is calculated by the following formula (1) (65-1d).
1e) Written in CPU 40 Lz=CbXt
``Φ (1) However, cb is the count number of counter b.

なお、この移動量Lzは、例えば前記ステップ(63−
1)で設定した電極2のZ軸上の最下端を基準点A1即
ちX−Y−Z軸の原点(0,0,0)として記憶し、電
極2がワーク4に接触した時の該基準点AのZ軸の座標
に基づいて算出される。
In addition, this movement amount Lz is, for example, the step (63-
The lowest end of the electrode 2 on the Z axis set in 1) is memorized as the reference point A1, that is, the origin (0, 0, 0) of the X-Y-Z axis, and this reference point is used when the electrode 2 contacts the workpiece 4. It is calculated based on the Z-axis coordinates of point A.

移動量Lzが算出されると、・この値に基づいて次の式
(2)によってX軸方向の加工量Δdzを算出(65−
If)する。
Once the movement amount Lz is calculated, the machining amount Δdz in the X-axis direction is calculated based on this value using the following formula (2) (65-
If).

Δdz= (CbXt)−δ  −−−(2)但し、δ
は前記入力装置13で入力設定した初期電極間隙である
Δdz= (CbXt)−δ −−−(2) However, δ
is the initial electrode gap input and set using the input device 13.

加工量Δdzが算出されると、電極2を移動量Lz (
=CbXt)だけ上昇させ、これにより電極2を初期位
置に設定(65−18) t、、て、X軸方向の加工量
Δdxを測定するステップ(65−2)に移る。
When the processing amount Δdz is calculated, the electrode 2 is moved by the moving amount Lz (
Cb

ステップ(65−2)は、前記ステップ(65−1a)
〜(65−If)と同様のステップ(65−2a) 〜
(65−2f)により、まずX軸のプラス(+)方向の
加工量Δ dz(+)を算出した後、(+)及び(−)
の両方向を測定したか否かの判断(65−2g)でNO
となり、再びステップ(65−2a) 〜(65−2f
)によフてX軸の(−)方向の加工量Δdxc−)を算
出する。そして、両方向の加工量Δdx(+)及びΔd
x(−)が算出されたら、X軸方向の加工量Δdxを次
の式(3)により算出(65−2h)する。
Step (65-2) is the step (65-1a)
~ Step (65-2a) similar to (65-If) ~
(65-2f), first calculate the machining amount Δ dz (+) in the plus (+) direction of the X axis, then (+) and (-)
NO when determining whether measurements were taken in both directions (65-2g)
Then, step (65-2a) ~ (65-2f
), the machining amount Δdxc-) in the (-) direction of the X-axis is calculated. Then, the machining amount Δdx(+) and Δd in both directions
Once x(-) is calculated, the machining amount Δdx in the X-axis direction is calculated using the following equation (3) (65-2h).

Δdx=(Δdx(+)+Δdx())/2・・・(3
)加工量Δdxを算出したら、電極2を移動量Lx(−
)だけ(+)方向に移動して、初期位置に設定(65−
2i) L/、X軸方向の加工量Δdxを測定する一連
のステップ(65−2)を終了する。
Δdx=(Δdx(+)+Δdx())/2...(3
) After calculating the machining amount Δdx, move the electrode 2 by the moving amount Lx(-
) in the (+) direction and set it to the initial position (65-
2i) A series of steps (65-2) for measuring the machining amount Δdx in the L/X-axis directions is completed.

このステップ(65−2’)によりX軸方向の加工量Δ
dxを算出したら、このステップ(65−2)と全く同
様の方法(その説明は省略する)により、Y軸方向の加
工量Δctyを測定(65−3)する。そして、各軸の
加工量Δd Z %Δdx、Δdyに基づいて、次の式
(4)によって加工量Δdiを算出(85−4)する。
By this step (65-2'), the machining amount Δ in the X-axis direction is
After calculating dx, the machining amount Δacty in the Y-axis direction is measured (65-3) using the same method as this step (65-2) (the explanation thereof will be omitted). Then, based on the machining amount Δd Z %Δdx and Δdy of each axis, the machining amount Δdi is calculated using the following equation (4) (85-4).

Δdj=(Δd2+Δdx+Δdy) / 3 ”・(
4)以上が加工量Δdiを算出するステップ(65)で
ある。
Δdj=(Δd2+Δdx+Δdy)/3”・(
4) The above is the step (65) of calculating the processing amount Δdi.

このステップ(65)によって加工量Δdiが算出され
ると、この加工量Δdiに基づいて累積加工量dを算出
(66)する、そして、この累積加工量dが前記ステッ
プ(61)で入力設定した指定加工量りに対して所定値
r内か否かを判断(67) L/、この判断(67)で
Noの場合、即ち累積加工量dがDtrに達していない
場合は、ステップ(65)で算出した加工量Δdiと加
工回数Niとに基づいて、次の式(5)によって加工回
数N1+1を算出(68)する。
When the machining amount Δdi is calculated in this step (65), the cumulative machining amount d is calculated based on this machining amount Δdi (66), and this cumulative machining amount d is input and set in the step (61). Determine whether or not the specified machining scale is within a predetermined value r (67) L/; if this determination (67) is No, that is, if the cumulative machining amount d has not reached Dtr, step (65) Based on the calculated processing amount Δdi and the number of processing times Ni, the number of processing times N1+1 is calculated using the following equation (5) (68).

N ill =αX(Ni/Δdi)   ・・・(5
)この式(5)は、第7図に示すように、例えばi=1
とした場合、Niに相当する最初のNi回の加工による
実際の加工量Δdlから、所定の加工量α(例えばα=
10μm)が得られる、N illである2回目の加工
回数N2を算出するものである。
N ill = αX (Ni/Δdi) ... (5
) This equation (5), for example, i=1, as shown in FIG.
In this case, a predetermined processing amount α (for example, α=
10 μm) is calculated, which is the second processing number N2 which is N ill.

なお、第7図の点線アは、予め実験等により求めた計算
上の加工直線、点線イは最初のN1回の加工に基づく加
工直線、実線つは実際の加工線である。
Note that the dotted line A in FIG. 7 is a calculated machining straight line obtained in advance through experiments, etc., the dotted line A is a machining straight line based on the first N1 machining operations, and the solid line is an actual machining line.

加工回数N i+1が算出されると、このN i+1を
次のステップの仕上げ加工2 (70)の加工回数とし
て設定(69) L/、ピーク電流密度がip2でパル
ス幅がt2の面粗度向上用の加工パルスにより、仕上げ
加工2をN i+1回行う(70)。この仕上げ加工2
も、極間に供給する加工パルスの条件は異なるものの、
その動作は前記仕上げ加工1 (63)と全く同一であ
るため、その説明は省略する。
Once the number of machining operations N i+1 is calculated, this N i+1 is set as the number of operations for the next step, finishing machining 2 (70) (69) L/, surface roughness improvement with a peak current density of ip2 and a pulse width of t2. Finishing machining 2 is performed N i +1 times using the machining pulses (70). This finishing process 2
Although the conditions of the machining pulse supplied between the poles are different,
Since the operation is exactly the same as the finishing process 1 (63), the explanation thereof will be omitted.

なお、この仕上げ加工2における加工パルスは、例えば
jp2が30〜50A/cm2、t2が10m5ec以
下、toff2(パルスの休止時間)が100〜500
m5ecの単一パルスを5パルス連続したパルス列を使
用するが、もちろん仕上げ加工1と同様の単一のパルス
を使用することもできる。
In addition, the machining pulse in this finishing machining 2 is, for example, jp2 is 30 to 50 A/cm2, t2 is 10 m5ec or less, and toff2 (pulse rest time) is 100 to 500 A/cm2.
A pulse train consisting of 5 consecutive m5ec single pulses is used, but of course the same single pulse as in finishing process 1 can also be used.

仕上げ加工2が所定回数Ni+1回行われると、ステッ
プ(63)に戻り仕上げ加工1を行う。そして、各ステ
ップを繰り返し、判断(67)で累積加工fldが指定
加工量りに対して所定値r内になった場合に、該判断(
67)でYESとなり、仕上げ加工を終了(71)する
When finishing machining 2 has been performed a predetermined number of times Ni+1, the process returns to step (63) and finishing machining 1 is performed. Then, each step is repeated, and if the cumulative machining fld is within the predetermined value r for the specified machining scale in the judgment (67), the judgment (67) is made.
67) becomes YES, and the finishing process ends (71).

このように、この実施例にあっては、仕上げ加工1によ
り、ワーク4の加工面4aに生成した酸化皮膜等を除去
した後に、実際の加工量Δdiを測定するため、前記接
触検知器41による接触検知精度が向上し、加工量Δd
iを正確に測定することができる。また、測定した実際
の加工量Δdiに基づいて、面粗度向上のための仕上げ
加工2の加工回数Niを算出して変更するため、加工量
を制御しつつ仕上げ加工を行うことができ、加工量を指
定加工量りに近づけることができて、ワーク4の寸法精
度を向上させ得る。さらに、仕上げ加工2の加工回数N
iは自動的に算出及び設定され、仕上げ加工時間の短縮
が図れる。
As described above, in this embodiment, after removing the oxide film etc. generated on the machined surface 4a of the workpiece 4 in the finishing process 1, the contact detector 41 measures the actual process amount Δdi. Improved contact detection accuracy and reduced machining amount Δd
i can be measured accurately. In addition, since the number of machining steps Ni for finishing machining 2 for improving surface roughness is calculated and changed based on the measured actual machining amount Δdi, finishing machining can be performed while controlling the machining amount. The amount can be brought close to the designated machining scale, and the dimensional accuracy of the workpiece 4 can be improved. Furthermore, the number of processing N for finishing processing 2
i is automatically calculated and set, and the finishing machining time can be shortened.

第8図はこの出願の第2発明の一実施例を示すフローチ
ャートであり、この実施例の特徴は、加工量Δdiを測
定(65) L/、これに基づいて累積加工量dを算出
(66) L/た後に、電極2とワーク4との芯出しく
72)を行うようにした点にある。
FIG. 8 is a flowchart showing an embodiment of the second invention of this application, and the feature of this embodiment is that the processing amount Δdi is measured (65) L/, and the cumulative processing amount d is calculated based on this (66 ) The point is that the electrode 2 and the workpiece 4 are aligned (72) after the electrode 2 and the workpiece 4 are removed.

他のステップについては、第4図と同一であるため、同
一符号を付して、その詳細な説明は省略する。
Since the other steps are the same as those in FIG. 4, they are given the same reference numerals and detailed explanation thereof will be omitted.

ステップ(72)の芯出しは、加工量Δdiを測定する
際に、電極2をZ、x及びY軸方向にそれぞれ移動させ
るため、仕上げ加工2の前に、改めて電極2を所定位置
に設定するためにあり、例えば第9図に示す如く行われ
る。
In the centering step (72), the electrode 2 is moved in the Z, x, and Y axis directions when measuring the machining amount Δdi, so the electrode 2 is set at a predetermined position again before finishing machining 2. For example, it is performed as shown in FIG.

即ち、まず、加工量Δdiを測定する前記ステップ(6
5)の、ステップ(65−2e・・・第6図参照)で算
出した移動量Lx(+)及びLx(−)から、X軸方向
の平均移動量Lxを、次の式(6)によって算出(72
−1)する。
That is, first, the step (6) of measuring the processing amount Δdi is performed.
From the movement amounts Lx(+) and Lx(-) calculated in step 5) (65-2e...see Figure 6), the average movement amount Lx in the X-axis direction is calculated using the following formula (6). Calculation (72
-1) Do.

Lx=(Lx(÷)+Lx(−)) / 2   ・・
・(6)そして、電極2の前記基準点Aが、この平均移
動量LXに相当する座標に位置する如く該電極2を移動
(72−2)させるとともに、Y軸方向についてもX軸
方向と全く同様に、平均移動f!kLyを算出(72−
3) L/、電極2を移動(72−4)させる。その後
、電極2を下降(72−5)させて、ワーク4に接触(
72−6)させ、その位置から前記ステップ−(65−
1e・・・第6図参照)で算出した移動量Lzだけ上昇
(72−7)させる。
Lx=(Lx(÷)+Lx(-))/2...
・(6) Then, move the electrode 2 (72-2) so that the reference point A of the electrode 2 is located at the coordinate corresponding to this average movement amount LX, and also move the Y-axis direction as well as the X-axis direction. In exactly the same way, the average movement f! Calculate kLy (72-
3) L/, move the electrode 2 (72-4). Thereafter, the electrode 2 is lowered (72-5) and comes into contact with the workpiece 4 (72-5).
72-6), and from that position repeat step -(65-
1e...see FIG. 6) is increased (72-7) by the amount of movement Lz calculated.

なお、電極2とワーク4の芯出し方法は、上記実施例の
ステップ(72−1)〜(72−7’)を所定回数繰り
返すようにしてもよく、また、加工量Δdiの測定の後
に、電極2を再度X及びY軸方向の(+)及び(−)方
向にそれぞれ移動させて、接触検知させ、その移動量の
172に相当する位置に設定するというステップを行う
ようにしてもよい。さらに、芯出しの方向もx、y、z
軸の3方向に限ぎらず、X及びY軸方向についてのみ行
ったり、3方向にC軸(z軸の回転方向)方向を加える
等、適宜に変更し得るものである。
Note that the method for centering the electrode 2 and the workpiece 4 may be such that steps (72-1) to (72-7') of the above embodiment are repeated a predetermined number of times, and after measuring the processing amount Δdi, The electrode 2 may be moved again in the (+) and (-) directions of the X and Y axes, respectively, to detect contact, and set at a position corresponding to the amount of movement 172. Furthermore, the direction of centering is also x, y, z.
The present invention is not limited to the three axes, and may be modified as appropriate, such as only in the X and Y axes, or adding the C-axis (rotation direction of the z-axis) to the three directions.

このように、この実施例にあっては、加工量を測定した
後で仕上げ加工2の前に、移動させた電極2とワーク4
との芯出しを行うため、例えばX軸あるいはY軸の(+
)及び(−)方向の加工量に差がある場合でも、電極2
の位置を修正して仕上げ加工2を行うことができ、加工
面4a全域に亙って電極間隙を一定に維持し得て、加工
量を均一にすることができ、特に凹窩状に形成された三
次元形状物に適用して効果的である。
In this embodiment, after measuring the machining amount and before finishing machining 2, the moved electrode 2 and workpiece 4 are
For example, in order to perform centering with
Even if there is a difference in the machining amount in the ) and (-) directions, the electrode 2
Finishing machining 2 can be performed by correcting the position of the machining surface 4a, the electrode gap can be maintained constant over the entire machining surface 4a, and the amount of machining can be made uniform. It is effective when applied to three-dimensional shaped objects.

第10図は、この出願の第3発明の一実施例を示すフロ
ーチャートであり、この実施例の特徴は、第1発明また
は第2発明の仕上げ加工2において、その加工回数Ni
を所定回数以上行わないようにした点にある。以下この
実施例ついて説明するが、この実施例における、仕上げ
加工1(83,85)及び仕上げ加工2(84,93)
、加工量Δdiの測定(88)及び累積加工量dの算出
(89) 、累積加工量dと指定加工量りの比較(90
)等は、上記各実施例と同一であるため、その詳細な説
明は省略する。
FIG. 10 is a flowchart showing an embodiment of the third invention of this application, and the feature of this embodiment is that in the finishing machining 2 of the first invention or the second invention, the number of times Ni
The point is that this is not done more than a predetermined number of times. This example will be explained below, but in this example, finishing machining 1 (83, 85) and finishing machining 2 (84, 93)
, Measurement of machining amount Δdi (88) and calculation of cumulative machining amount d (89), Comparison of cumulative machining amount d and specified machining amount (90)
), etc. are the same as in each of the above embodiments, so detailed explanation thereof will be omitted.

まず、電極2とワーク40セツト(80)後に、データ
人力(81)するが、ここでは、上記各実施例のデータ
の他に、仕上げ加工2の最大加工回数βと、回数Nrと
して0回を入力する。この回数Nrは、後述する仕上げ
加工1 (85)と仕上げ加工2 (93)の繰り返し
回数である。データが入力されてCPU40に設定され
ると、仕上げ加工の自動運転が開始(82)され、まず
、仕上げ加工1(83)と仕上げ加工2 (84)を最
初の仕上げ加工として行う。そして、仕上げ加工1を再
び行い(85) 、前記回数Nrを−1して回数nrを
求め(86) 、この回数nrがOより小さいか否かを
判断(87)する。
First, after the electrode 2 and the workpiece 40 are set (80), the data is manually input (81). input. This number of times Nr is the number of repetitions of finishing machining 1 (85) and finishing machining 2 (93), which will be described later. When the data is input and set in the CPU 40, automatic finishing operation is started (82), and finishing machining 1 (83) and finishing machining 2 (84) are performed as the first finishing machining. Then, finishing machining 1 is performed again (85), the number of times Nr is subtracted by 1 to obtain the number of times nr (86), and it is determined whether this number of times nr is smaller than O (87).

加工開始時にはNrはO設定であるため、nr=−1で
判断(87)はYESとなり、加工量Δdiを測定(8
8) L/、累積加工量dの算出(89)及び累積加工
量dが指定加工量りに対して所定値r内か否かの判断(
90)を行う。そして、次の式(7)により、仕上げ加
工2の加工回数Ni+1と繰り返し回数Nrを算出する
とともに、この式(7)から加工回数N i+1の余り
回数N i+1”を求める(91)。
Since Nr is set to O at the start of machining, the judgment (87) is YES when nr=-1, and the machining amount Δdi is measured (87).
8) Calculation of L/, cumulative machining amount d (89), and determination of whether cumulative machining amount d is within a predetermined value r for the designated machining scale (
90). Then, the number of machining Ni+1 and the number of repetitions Nr of finishing machining 2 are calculated using the following equation (7), and the remainder number N i+1'' of the number of processing N i+1 is determined from this equation (7) (91).

Ni+1/β=N r  (Ni+1’ )  ・・・
(7)但し、N i+1は前記式(5)によって算出し
た加工回数、βは仕上げ加工2の最大加工回数、Nrは
繰り返し回数である。
Ni+1/β=N r (Ni+1')...
(7) However, N i+1 is the number of times of machining calculated by the above formula (5), β is the maximum number of times of finishing machining 2, and Nr is the number of repetitions.

ステップ(91)で各加工回数が算出されると、この回
数を設定(92) L/、これに基づいて仕上げ加工2
を行い(93) 、前記ステップ(85)に戻る。
When the number of times of each machining is calculated in step (91), this number of times is set (92) L/, and finishing machining 2 is performed based on this.
(93) and returns to step (85).

前記判断(87)でNoの場合、即ち、ステップ(91
)で算出した繰り返し回数Nrが2以上になった場合は
、nrがOか否かの判断(94)に移り、この判断(9
4)でNoの場合は前記ステップ(93)に移り、また
、YESの場合は、仕上げ加工2の加工回数βをNi+
1’に設定変更(95)する。
If the judgment (87) is No, that is, step (91)
), if the number of repetitions Nr calculated by
If No in 4), proceed to step (93), and if YES, set the number of machining β of finishing machining 2 to Ni+
Change the setting to 1' (95).

ここで、以上のステップを具体的な数値例に基づいて説
明する。例えばステップ(81)でβ=50を入力設定
し、ステップ(92)で算出した加工回数N i+1が
120の場合、式(7)により、Nr=2とNi+1=
20が算出される。そして、ステップ(93)で仕上げ
加工2をβ(=50)回行った後に、ステップ(85)
に戻り、以降のステップに入るが、ステップ(86)の
nrはnr=2−1で1となり、判断(87)ではNo
となって、判断(94)に移る。
Here, the above steps will be explained based on a specific numerical example. For example, if β=50 is input and set in step (81) and the number of machining times N i+1 calculated in step (92) is 120, then Nr=2 and Ni+1=
20 is calculated. Then, after performing finishing machining 2 β (=50) times in step (93), step (85)
Returns to step (86) and enters the subsequent steps, but nr in step (86) is 1 as nr=2-1, and judgment (87) is No.
Then, the process moves to judgment (94).

nrは1であるためこの判断(94)ではNOとなり、
ステップ(93)に移って再び仕上げ加工2をβ回行う
Since nr is 1, this judgment (94) is NO,
The process moves to step (93) and finishing machining 2 is performed again β times.

そして、再びステップ(86)に移るが、ここではnr
が0となり、判断(87)でNO1判断(94)でYE
Sとなり、ステップ(95)に移る。このステップ(9
5)では、ステップ(93)における仕上げ加工2の加
工回数βをN i+1 ’に、即ちステップ(91)で
算出した余りの加工回数N i+1 ’に設定変更し、
仕上げ加工2をN i+1 ’回行う。以上により、ス
テップ(93)における仕上げ加工2の加工回数は、β
+β+(N i+1’)となり、ステップ(92)で算
出した加工回数N i+1の120回行われることにな
る。そして、この後に、判断(87)でYESとなって
、120回の加工回数による加工量Δdiを測定(88
)する。
Then, the process moves to step (86) again, but here nr
becomes 0, and the judgment (87) is NO1.The judgment (94) is YE.
S, and the process moves to step (95). This step (9
In 5), the number of machining β of finishing machining 2 in step (93) is changed to N i+1 ′, that is, the number of machining N i+1 ′ that is the remainder calculated in step (91),
Finishing process 2 is performed N i+1 ' times. As a result of the above, the number of processing times for finishing processing 2 in step (93) is β
+β+(N i+1'), and the machining is performed 120 times, which is the number of machining times N i+1 calculated in step (92). After this, the judgment (87) becomes YES, and the machining amount Δdi is measured by the number of machining operations (88).
)do.

なお、仕上げ加工2の最大加工回数βは、仕上げ加工1
による酸化被膜及び加工屑等の排除効果から、25〜6
0回に設定すればより好ましいことが実験により確認さ
れている。
Note that the maximum number of machining β for finishing machining 2 is the same as that of finishing machining 1.
25 to 6 from the effect of removing oxide film and processing waste
It has been confirmed through experiments that it is more preferable to set it to 0 times.

このように、この実施例にあっては、算出した仕上げ加
工2の加工回数Ni+1が、設定した最大加工回数β以
上の場合は、仕上げ加工2を連続してβ回以上は行わず
、β回行った後に一旦仕上げ加工1を行うため、仕上げ
加工2によるワーク4の加工面4aへの酸化被膜の生成
及び加工間隙内の加工屑を一定量以下に抑えることがで
き、間隙への加工屑の大量介在による加工精度及び加工
効率の低下を防止し得る。
As described above, in this embodiment, if the calculated number of finishing operations 2 (Ni+1) is equal to or greater than the set maximum number of operations β, finishing operations 2 will not be performed consecutively more than β times, but will be repeated β times. Since finishing machining 1 is performed once after finishing machining, the formation of an oxide film on the machined surface 4a of the workpiece 4 due to finishing machining 2 and the machining debris in the machining gap can be suppressed to a certain amount or less, and the machining debris in the gap can be suppressed. Deterioration in machining accuracy and machining efficiency due to large amounts of interference can be prevented.

なお、上記各実施例においては、加工量の測定時期を、
所定の加工量αが得られる加工回数に基づいて行い、そ
の測定もZ軸、X軸及びY軸方向の3方向について行っ
たが、この発明はこれに何ら限定されず、例えば、測定
した加工量とその加工回数から、目標とする加工量りが
得られる加工回数Nを求め、この加工回数Nの所定比率
毎に加工量を測定するようにしてもよいし、測定方向も
Z軸方向のみとしてもよい。
In addition, in each of the above examples, the timing of measuring the processing amount is
The measurement was performed based on the number of machining operations that resulted in a predetermined machining amount α, and the measurements were also performed in three directions: the Z-axis, the X-axis, and the Y-axis directions. However, the present invention is not limited to this in any way; From the amount and the number of machining operations, the number of machining steps N that will yield the target machining amount may be determined, and the amount of machining may be measured at every predetermined ratio of the number of machining steps N. Alternatively, the measurement direction may be set only in the Z-axis direction. Good too.

また、上記各実施例においては、加工量を測定する際に
、電極を移動させたが、ワークを移動させてもよいし、
さらに上記各実施例におけるフローチャートは一例にす
ぎず、各フローチャートを組み合わせ等、この出願の各
発明の要旨を逸脱しない範囲において、適宜変更可能で
あることはいうまでもない。
Furthermore, in each of the above embodiments, the electrode was moved when measuring the amount of processing, but the workpiece may also be moved.
Further, the flowcharts in each of the above embodiments are merely examples, and it goes without saying that the flowcharts can be combined or otherwise modified as appropriate without departing from the gist of each invention of this application.

[発明の効果] この出願の各発明は上述の通りに構成したので、次に記
載する効果を奏する。
[Effects of the Invention] Each of the inventions of this application is configured as described above, so that the following effects are achieved.

(第1発明) ■ 第1の条件による仕上げ加工により、ワークの加工
面に生成した酸化被膜等を除去した後に、実際の加工量
を測定するため、接触検知器による接触検知精度が向上
し、加工量を正確に測定することができる。
(First invention) ■ The actual amount of machining is measured after removing the oxide film etc. generated on the machined surface of the workpiece due to finishing machining under the first condition, so the accuracy of contact detection by the contact detector is improved. The amount of processing can be measured accurately.

■ 測定した実際の加工量に基づいて、面粗度向上のた
めの第2の条件による仕上げ加工の加工回数を変更する
ため、加工量を制御しつつ仕上げ加工を行い得て、加工
量を目標とする加工量に近づけることができ、寸法精度
を向上させる等、高い加工精度が得られる。
■ Based on the measured actual amount of machining, the number of times of finishing machining under the second condition for improving surface roughness is changed, so finishing can be performed while controlling the amount of machining, and the target amount of machining can be achieved. High machining accuracy can be obtained, such as by making it possible to approach the amount of machining required, improving dimensional accuracy, etc.

■ 第2の条件による仕上げ加工の加工回数は自動的に
算出及び設定されるため、仕上げ加工時間の短縮が図れ
る。
- Since the number of finishing operations under the second condition is automatically calculated and set, the finishing processing time can be shortened.

(第2発明) 加工量を測定した後で第2の条件による仕上げ加工の前
に、電極とワークとの芯出しを行うため、ワークの加工
面全域に亙って電極間隙を一定に維持し得て、加工量を
均一にすることができ、特に三次元形状のワークであっ
ても、高い加工精度を得ることができる。
(Second invention) In order to center the electrode and the workpiece after measuring the machining amount and before finish machining under the second condition, the electrode gap is maintained constant over the entire machining surface of the workpiece. This makes it possible to make the amount of processing uniform, and in particular, to obtain high processing accuracy even for three-dimensional shaped workpieces.

(第3発明) 第2の条件による仕上げ加工の加工回数が、設定した最
大加工回数以上の場合は、最大加工回数経過後に一旦第
1の条件による仕上げ加工を行うため、ワークの加工面
への酸化被膜の生成及び加工間隙内の加工屑の量を一定
量以下に抑えることができ、加工精度及び加工効率を向
上させることができる
(Third invention) If the number of finishing operations under the second condition is equal to or greater than the set maximum number of operations, the finishing operation under the first condition is performed once after the maximum number of operations has elapsed. It is possible to suppress the formation of oxide film and the amount of machining debris in the machining gap below a certain amount, improving machining accuracy and machining efficiency.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明に係る電解仕上げ加工装置の概略構
成図、第2図は同要部のブロック図、第3図は同接触検
知器の回路図、第4図は第1発明の一実施例を示すフロ
ーチャート、第5図及び第6図は同要部のフローチャー
ト、第7図は加工回数と加工量の関係を示す図、第8図
は第2発明の一実施例を示すフローチャート、第9図は
同要部のフローチャート、第1O図は第3発明の一実施
例を示すフローチャートである。 1・・・電解仕上げ加工装置、2・・・電極、2a・・
・電極面、      4・・・ワーク、4&・・・加
工面、      8・・・電R装置、9・・・ヘッド
駆動制御部、10・・・加工条件制御部11・・・電解
液流制御部、  12・・・制御装置、18拳・・噴出
ノズル、    40◆◆◆CPU、41・・・接触検
知器。 特許出願人  静岡製機株式会社 代表者鈴木重夫 第1図 第3図 第7図 第4図 第5図 Ca:カウンタaのカウント数 第8図 第9図
FIG. 1 is a schematic configuration diagram of an electrolytic finishing apparatus according to the present invention, FIG. 2 is a block diagram of the main parts, FIG. 3 is a circuit diagram of the contact detector, and FIG. Flowchart showing an embodiment, FIGS. 5 and 6 are flowcharts of the same essential parts, FIG. 7 is a diagram showing the relationship between the number of processing times and the amount of processing, and FIG. 8 is a flowchart showing an embodiment of the second invention. FIG. 9 is a flowchart of the main part, and FIG. 1O is a flowchart showing an embodiment of the third invention. 1... Electrolytic finishing processing device, 2... Electrode, 2a...
・Electrode surface, 4... Workpiece, 4 &... Machining surface, 8... Electric R device, 9... Head drive control section, 10... Machining condition control section 11... Electrolyte flow control Part, 12...control device, 18 fist...spray nozzle, 40◆◆◆CPU, 41...contact detector. Patent applicant Shizuoka Seiki Co., Ltd. Representative Shigeo Suzuki Figure 1 Figure 3 Figure 7 Figure 4 Figure 5 Ca: Count number of counter a Figure 8 Figure 9

Claims (3)

【特許請求の範囲】[Claims] (1)イ、所定形状に加工されたワークと、このワーク
の加工面に倣った電極面を有する電極とを、電解液中で
所定の間隙で対向配置し、その極間に加工パルスを供給
するとともに、前記間隙に電解液の噴流を供給して加工
屑を排除しながら前記ワークを仕上げ加工するものにお
いて、 ロ、前記ワークの目標とする加工量を設定するステップ
と、 ハ、少なくとも、前記ワークの加工面に光沢面を得る第
1の条件と、この第1の条件とは異なり前記加工面の面
粗度を向上させる第2の条件とからなる、前記加工パル
スの条件を設定するステップと、 ニ、前記第1の条件による仕上げ加工の後に、前記ワー
クの加工量を測定するステップと、 ホ、この測定した加工量に基づいて前記第2の条件の加
工回数を変更するステップと、 を具備する電解仕上げ加工方法。
(1) A. A workpiece machined into a predetermined shape and an electrode having an electrode surface that follows the machined surface of the workpiece are placed facing each other with a predetermined gap in an electrolytic solution, and a processing pulse is supplied between the electrodes. At the same time, the workpiece is finished machined while supplying a jet of electrolyte to the gap to remove machining debris, b) setting a target machining amount of the workpiece, and c) at least the steps of the above-mentioned. Setting conditions for the machining pulse, which are comprised of a first condition for obtaining a glossy surface on the machined surface of the workpiece, and a second condition for improving the surface roughness of the machined surface, which is different from the first condition. D. Measuring the amount of machining of the workpiece after the finishing machining under the first condition; E. Changing the number of times of machining under the second condition based on the measured amount of machining. An electrolytic finishing method comprising:
(2)請求項1記載の電解仕上げ加工方法において、前
記ワークの加工量を測定した後で、前記第2の条件によ
る仕上げ加工の前に、電極とワークとの芯出しを行うス
テップを具備する電解仕上げ加工方法。
(2) The electrolytic finishing method according to claim 1, further comprising the step of centering the electrode and the work after measuring the amount of work on the work and before finishing under the second condition. Electrolytic finishing method.
(3)請求項1又は2記載の電解仕上げ加工方法におい
て、前記第2の条件による仕上げ加工の最大加工回数を
設定するステップを具備する電解仕上げ加工方法。
(3) The electrolytic finishing method according to claim 1 or 2, further comprising the step of setting a maximum number of finishing operations under the second condition.
JP1014431A 1988-12-26 1989-01-24 Electrolytic finishing method Pending JPH02198716A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP1014431A JPH02198716A (en) 1989-01-24 1989-01-24 Electrolytic finishing method
DE8989313267T DE68902821T2 (en) 1988-12-26 1989-12-19 ELECTROLYTIC PRODUCTION PROCESS.
EP89313267A EP0376581B1 (en) 1988-12-26 1989-12-19 Electrolytic finishing method
CA002006138A CA2006138A1 (en) 1988-12-26 1989-12-20 Electrolytic finishing method
US07/453,878 US5015347A (en) 1988-12-26 1989-12-20 Electrolytic finishing method
KR1019890019767A KR930004833B1 (en) 1988-12-26 1989-12-26 Electrolytic finishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1014431A JPH02198716A (en) 1989-01-24 1989-01-24 Electrolytic finishing method

Publications (1)

Publication Number Publication Date
JPH02198716A true JPH02198716A (en) 1990-08-07

Family

ID=11860832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1014431A Pending JPH02198716A (en) 1988-12-26 1989-01-24 Electrolytic finishing method

Country Status (1)

Country Link
JP (1) JPH02198716A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211834A (en) * 1982-05-12 1983-12-09 アウデイ・エヌエスウ−・オ−ト・ウニオ−ン・アクチエンゲゼルシヤフト Method of processing surface of material to be processed made of cast iron containing carbon
JPS63167000A (en) * 1986-12-27 1988-07-11 Shizuoka Seiki Co Ltd Three-dimentionally electrolytic mirror-finishing method
JPS63283817A (en) * 1987-05-15 1988-11-21 Shizuoka Seiki Co Ltd Finishing method by electro-chemical machining

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211834A (en) * 1982-05-12 1983-12-09 アウデイ・エヌエスウ−・オ−ト・ウニオ−ン・アクチエンゲゼルシヤフト Method of processing surface of material to be processed made of cast iron containing carbon
JPS63167000A (en) * 1986-12-27 1988-07-11 Shizuoka Seiki Co Ltd Three-dimentionally electrolytic mirror-finishing method
JPS63283817A (en) * 1987-05-15 1988-11-21 Shizuoka Seiki Co Ltd Finishing method by electro-chemical machining

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