JPH02201713A - Magnetic head and production thereof - Google Patents

Magnetic head and production thereof

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Publication number
JPH02201713A
JPH02201713A JP2172489A JP2172489A JPH02201713A JP H02201713 A JPH02201713 A JP H02201713A JP 2172489 A JP2172489 A JP 2172489A JP 2172489 A JP2172489 A JP 2172489A JP H02201713 A JPH02201713 A JP H02201713A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
sliding surface
magnetic head
ferromagnetic metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2172489A
Other languages
Japanese (ja)
Inventor
Yasushi Watanabe
恭志 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP2172489A priority Critical patent/JPH02201713A/en
Publication of JPH02201713A publication Critical patent/JPH02201713A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To improve wear resistance by butting a pair of magnetic core half bodies, which are formed by inserting ferromagnetic metallic films between a pair of flat plate materials coated one end inclusive of recording medium- sliding surfaces with carbon films, against each other via a nonmagnetic material. CONSTITUTION:Both the magnetic core half bodies 11, 12 consist of a pair of the flat plate materials 11a, 11b, 12a, 12b consisting of ferrite magnetic materials, etc., in the state of coating one end part inclusive of the recording medium-sliding surfaces 13 with the amorphous carbon films and the ferromagnetic metallic films 14 inserted between a pair of these flat plate materials 11a, 11b, 12a, 12b. These two magnetic cores 11, 12 are butted against each other via the gap spacer material and the magnetic gap 16 is formed between the ferromagnetic metallic films 14 on the recording medium-sliding surfaces 13. The recording medium-sliding surfaces 13 of the magnetic head 10 are constituted of only the ferromagnetic metallic films 14 and the carbon films C in such a manner and, therefore, the magnetic head having the extremely good wear resistance is obtd.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、磁気記録再生装置に用いられている磁気ヘッ
ドに係り、特にテープ摺動面に非晶質カーボン等を真空
薄膜成形技術により形成した磁気ヘッドに関する (従来の技術) 情報信号の記録再生動作を磁気的に行うようにした磁気
記録再生方式は、磁気記録媒体に対する情報信号の記録
動作と、磁気記録媒体からの情報信号の再生動作とを極
めて容易に行ないうるために、多くの技術分野における
情報信号の記録再生のための手段として従来から広く採
用されているが、広帯域情報信号の記録再生ならびに情
報信号の高密度記録再生の要望が高まるのに伴って、磁
気記録再生の分野においても磁気記録媒体として高い抗
磁力を有する磁性材料を使用し、記録跡中(トラック中
)の狭小化を図って、情報信号を高密度記録再生するこ
とが行われるようになった。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a magnetic head used in a magnetic recording/reproducing device, and particularly relates to a magnetic head in which amorphous carbon or the like is formed on a tape sliding surface by vacuum thin film forming technology. Related to a magnetic head (prior art) A magnetic recording and reproducing method in which recording and reproducing operations of information signals are performed magnetically includes an operation of recording information signals on a magnetic recording medium and an operation of reproducing information signals from the magnetic recording medium. It has been widely adopted as a means for recording and reproducing information signals in many technical fields because it is extremely easy to perform this. As the field of magnetic recording and reproduction increases, magnetic materials with high coercive force are used as magnetic recording media, and by narrowing the recording trace (track), information signals are recorded and reproduced at high density. Things started to happen.

磁気記録媒体に使用される磁性材料として高い抗磁力を
有するものが使用されるようになったことにより、磁気
ヘッドを構成するなめに使用される磁性材料としても、
飽和磁束密度の高い磁性材料が必要とされるようになっ
たので、従来のように磁気ヘッドのコアを強磁性酸化物
磁性体くフェライト磁性体)だけで構成したのでは情報
信号を満足な状態で磁気記録媒体に記録することができ
ず、磁気ヘッドとして、それのコアの一部または全部を
飽和磁束密度の高い磁性材料、例えば、強磁性体合金、
強磁性体材料のアモルファスで構成するようにしたもの
が提案されている。
As magnetic materials with high coercive force have come to be used in magnetic recording media, magnetic materials used in magnetic heads are also becoming more popular.
As magnetic materials with high saturation magnetic flux density are now required, it is no longer possible to maintain information signals in a satisfactory state by constructing the core of a magnetic head using only a ferromagnetic oxide magnetic material (ferrite magnetic material) as in the past. As a magnetic head, part or all of its core is made of a magnetic material with a high saturation magnetic flux density, such as a ferromagnetic alloy, which cannot record on a magnetic recording medium.
A structure made of amorphous ferromagnetic material has been proposed.

すなわち、磁気記録媒体に使用される磁性材料として、
例えば抗磁力が10000eのものを用いて高密度磁気
記録更生を表現しようとされたような場合に、その磁気
記録媒体に対する情報信号の磁気記録及び磁気記録媒体
からの情報信号の再生に当り、飽和磁束密度が例えば5
200ガウスの多結晶フェライトを磁気コアに用いた磁
気ヘッドを使用したところで、前記した磁気記録媒体に
対する磁気記録更生を良好に行なうことはできない。
In other words, as a magnetic material used in magnetic recording media,
For example, when trying to express high-density magnetic recording retrieval using a magnetic recording medium with a coercive force of 10,000e, it is difficult to achieve saturation when magnetically recording information signals on the magnetic recording medium and reproducing information signals from the magnetic recording medium. For example, if the magnetic flux density is 5
Even if a magnetic head using a 200 Gauss polycrystalline ferrite for the magnetic core is used, it is not possible to perform magnetic recording retrieval on the above-mentioned magnetic recording medium satisfactorily.

それで、前記のように高い抗磁力を有する磁性材料が使
用されている磁気記録媒体に対する記録再生動作のため
に使用される磁気ヘッドとしても、例えば飽和磁束密度
が9500〜12500ガウスのセンダスト合金のよう
な大きな飽和磁束密度を有する磁性材料による薄膜を、
強磁性酸化物磁性体(フェライト磁性体)よりなる磁気
コアにおける磁気記録媒体に接する部分付近だけに真空
成膜技術(真空薄膜形成技術)を適用して設けた構成形
態のものが提案されている。
Therefore, magnetic heads used for recording and reproducing operations on magnetic recording media in which magnetic materials with high coercive force are used as described above, such as Sendust alloy with a saturation magnetic flux density of 9,500 to 12,500 Gauss, are used. A thin film made of a magnetic material with a large saturation magnetic flux density,
A configuration has been proposed in which vacuum film formation technology (vacuum thin film formation technology) is applied only to the vicinity of the part of the magnetic core made of ferromagnetic oxide magnetic material (ferrite magnetic material) that contacts the magnetic recording medium. .

ところで、磁気回路が強磁性酸化物磁性体(フェライト
磁性体)よりなる磁気コアに真空成膜技術により強磁性
体金属の薄膜を形成させて、前記の強磁性体金属の薄膜
の部分で狭トラツク中の磁気空隙を構成させるようにし
た磁気ヘッドとしては、例えば特開昭60−18250
7号公報にも開示されているように、高硬度非磁性材料
と強磁性体金属の薄膜とにより狭トラツク中で耐磨耗性
の良好な摺動面を備えている構成の磁気ヘッドが提案さ
れている。
By the way, a magnetic circuit is formed by forming a thin film of ferromagnetic metal on a magnetic core made of a ferromagnetic oxide magnetic material (ferrite magnetic material) using vacuum film forming technology, and forming a narrow track in the thin film of ferromagnetic metal. For example, a magnetic head having a magnetic gap formed therein is disclosed in Japanese Patent Application Laid-Open No. 60-18250.
As disclosed in Publication No. 7, a magnetic head is proposed that has a sliding surface with good wear resistance in a narrow track made of a highly hard non-magnetic material and a thin film of ferromagnetic metal. has been done.

一方、近年、基板上に下部磁性層、ギャップ層、導体コ
イル層、上部磁性層を順次真空薄膜形成技術によって形
成した薄膜磁気ヘッドと呼ばれる構成の磁気ヘッドも提
案されている。この薄膜磁気ヘッドによれば、例えば、
特願昭63−182152に開示されている様に、各層
が平坦となっているために磁気コアの特性の劣化もなく
、また磁気コアによる磁路も短かくできることが特徴で
ある。
On the other hand, in recent years, a magnetic head having a structure called a thin film magnetic head has been proposed in which a lower magnetic layer, a gap layer, a conductive coil layer, and an upper magnetic layer are sequentially formed on a substrate by vacuum thin film forming technology. According to this thin film magnetic head, for example,
As disclosed in Japanese Patent Application No. 63-182152, each layer is flat, so there is no deterioration in the characteristics of the magnetic core, and the magnetic path through the magnetic core can be shortened.

(発明が解決しようとする課題) 前記した従来構成の磁気ヘッドでは、それの耐磨耗性を
有する摺動面を構成させるために磁気へラド製作に当っ
て使用される素材として、磁気へラドにおける磁気コア
となされるべき部分と対応するフェライト磁性体のブロ
ック材と摺動面を構成する高硬度の非磁性耐磨耗性のブ
ロック材、例えばガラスやセラミックのブロック材とを
溶着したちのが用いられている。
(Problems to be Solved by the Invention) In the magnetic head of the conventional configuration described above, magnetic heald is used as a material used in manufacturing the magnetic heald to construct the sliding surface that has wear resistance. A block material of ferrite magnetic material corresponding to the part to be formed as the magnetic core and a highly hard non-magnetic wear-resistant block material constituting the sliding surface, such as a glass or ceramic block material, are welded together. is used.

ところが、磁気ヘッドの製作に当って前記のような素材
、即ち、前記のようにフェライト磁性体のブロック材と
高硬度の非磁性耐磨耗材料のブロック材、例えばガラス
のブロック材とを溶着したものが磁気ヘッドの素材とし
て使用される場合には、磁気ヘッドの製作のための工程
数が非常に多くなる。
However, when manufacturing a magnetic head, the above-mentioned materials, that is, a block of ferrite magnetic material and a block of high hardness non-magnetic wear-resistant material, such as a glass block, are welded together. When this material is used as a material for a magnetic head, the number of steps required to manufacture the magnetic head becomes extremely large.

また、ガラスやセラミックのかわりに、カーボンブロッ
クを用いた場合には、この材料に真空薄膜成形技術など
によって強磁性金属膜や非磁性膜を形成することは付着
力等の問題により困難であった。
Additionally, when carbon blocks are used instead of glass or ceramics, it is difficult to form ferromagnetic metal films or nonmagnetic films on this material using vacuum thin film forming technology due to problems such as adhesion. .

また、薄膜磁気ヘッドと称されている構成形態の磁気ヘ
ッドの場合においても、例えはカーホン基板を用いた場
合に真空薄膜成形技術により強磁性金属膜や非磁性膜を
形成することは前記同様、付着力等の問題で困難であっ
た。
Also, in the case of a magnetic head with a configuration called a thin-film magnetic head, for example, when a carphone substrate is used, a ferromagnetic metal film or a non-magnetic film is formed by vacuum thin film forming technology, as described above. This was difficult due to problems such as adhesion.

(課題を解決するための手段) 本発明は、上記課題を解決するためになされたものであ
り、フェライト磁性材または非磁性材からなり、少なく
とも記録媒体摺動面を含む一端がカーボン膜で被覆され
た一組の平板材により強磁性金属膜をはさむ様にして形
成してなる一対の磁気コア半体を非磁性材を介して突き
合わせ、前記記録媒体摺動面上において、前記強磁性金
属股間で磁気キャップを形成してなることを特徴とする
磁気ヘッドとその製造方法および基板上に非磁性膜を介
して強磁性金属薄膜からなる上コアと下コアとを形成し
、これらの一端部が前記基板の側面とを記録媒体摺動面
を形成してなる磁気ヘッドにおいて、少なくとも前記上
コアと基板間にカーボン膜を介在させると共に、このカ
ーボン膜の一端が前記記録媒体摺動面の一部を形成して
なることを特徴とする磁気ヘッドを提供するものである
(Means for Solving the Problems) The present invention has been made to solve the above problems, and is made of a ferrite magnetic material or a non-magnetic material, and at least one end including the recording medium sliding surface is coated with a carbon film. A pair of magnetic core halves formed by sandwiching a ferromagnetic metal film between a pair of flat plate materials are butted together via a non-magnetic material, and the ferromagnetic metal crotch is placed on the recording medium sliding surface. A magnetic head and its manufacturing method are characterized in that an upper core and a lower core made of a ferromagnetic metal thin film are formed on a substrate with a non-magnetic film interposed therebetween, and one end of these is In a magnetic head in which a side surface of the substrate forms a recording medium sliding surface, a carbon film is interposed between at least the upper core and the substrate, and one end of the carbon film forms a part of the recording medium sliding surface. The present invention provides a magnetic head characterized by forming a magnetic head.

(実釉例) 実施例1 第1図は、本発明になる磁気ヘッド10を示す斜視図で
ある。同図において11.12は磁気コア半体である。
(Example of Actual Glaze) Example 1 FIG. 1 is a perspective view showing a magnetic head 10 according to the present invention. In the figure, reference numerals 11 and 12 indicate magnetic core halves.

再磁気コア半体11.12は記録媒体摺動面13を含む
一端部が非晶質カーボン膜(ガラス状カーボン)または
ダイヤモンド構造を有するカーボン膜または、非晶質構
造とダイヤモンド構造を併せ持つ混晶カーボン膜(以下
、これらを総称してカーボン膜と記す)Cにより均一に
おおわれた状態の例えばMnZn単結晶フェライト等の
フェライト磁性材等からなる一対の平板材11a、ll
b、及び12a、12bと、これら一対の平板材11a
、llb及び12a、12bに挾持された強磁性金属膜
14からなる。
The remagnetic core halves 11 and 12 are made of an amorphous carbon film (glassy carbon), a carbon film having a diamond structure, or a mixed crystal having both an amorphous structure and a diamond structure at one end including the recording medium sliding surface 13. A pair of flat plates 11a and 11 made of a ferrite magnetic material such as MnZn single crystal ferrite, etc., uniformly covered with a carbon film (hereinafter referred to as carbon film) C.
b, and 12a, 12b, and these pair of flat plates 11a
, llb, and a ferromagnetic metal film 14 sandwiched between 12a and 12b.

また、磁気コア半体11には巻線溝15が形成されてい
る。これら再磁気コア11.12は一般の磁気ヘッドと
同様、ギャップスペーサ−材gを介して突き合わされ、
記録媒体摺動面13上に強磁性金属膜14間で磁気キャ
ップ16を形成している。
Further, a winding groove 15 is formed in the magnetic core half 11. These remagnetic cores 11 and 12 are butted together via a gap spacer material g, similar to a general magnetic head.
A magnetic cap 16 is formed between the ferromagnetic metal films 14 on the recording medium sliding surface 13 .

この様に、磁気ヘッド10の記録媒体摺動面13は強磁
性金属膜14とカーボン膜Cのみから構成されているた
め非常に耐磨耗性に優れた磁気へラドが得られる。また
、磁気テープ等の記録媒体に与えるダメージも少なく記
録媒体の耐久性が増す。
In this way, since the recording medium sliding surface 13 of the magnetic head 10 is composed only of the ferromagnetic metal film 14 and the carbon film C, a magnetic helad with extremely excellent wear resistance can be obtained. Further, there is less damage to recording media such as magnetic tapes, and the durability of the recording media is increased.

上記の様な磁気ヘッド10の製造方法を工程(A)〜(
F)に示す。第2図(a)〜(h)は本発明になる磁気
ヘッド10の製造方法を説明するなめの斜視図である。
The method for manufacturing the magnetic head 10 as described above is performed in steps (A) to (
Shown in F). FIGS. 2(a) to 2(h) are diagonal perspective views illustrating a method of manufacturing the magnetic head 10 according to the present invention.

以下同図を用いて説明する。This will be explained below using the same figure.

工程(A)  まず同図fa)に示す様に例えはMnZ
n単結晶フェライト等のフェライト磁性材等からなるコ
アブロックより同一形状の平板材A。
Step (A) First, as shown in figure fa), for example, MnZ
n flat plate material A having the same shape from a core block made of a ferrite magnetic material such as single crystal ferrite;

Bを形成する。Form B.

工程(B)  この平板材A、Bに、後に記録媒体摺動
面となる部分13a、13bを含む上部に例えばCVD
法等の真空薄膜成形技術によりカーボン膜Cを形成する
。(同図(b)) 工程(C)  上記平板材Aにおいてカーボン膜Cが面
全体に形成されたのちに記録媒体摺動面となる面に交差
する面に、真空薄膜成形技術により強磁性金属1!14
例えば、センダスト等を形成する。(同図(C)) 工程<D)  強磁性金属v14の形成された平板材A
と平板材Bを前記強磁性金属Jl!14を挾持する様に
して、例えば、ガラス・ボンディング法等により接合す
る。(同図(d)) 工程(E)  次に記録媒体摺動面13から見て、上記
強磁性金属膜14と垂直な方向に切断線S−8に沿う線
で切断して一対の磁気コア半体11゜12を得る。次に
少なくとも一方のコア半体11の突合せ面に巻線溝15
の形成を行なう。(同図(e)、(f) ) 工程(F)  前記突き合わせ面の一部に真空薄膜成形
技術等によりS i O2などのギャップスペーサ−材
gを形成した後、一対の磁気コア半体11.12を突き
合わせ一体に接合する。これにより記録媒体摺動面13
上に磁気ギャップ16を有する第1図に示す磁気ヘッド
10が得られる。
Step (B) For example, CVD is applied to the upper portions of the flat plates A and B, including the portions 13a and 13b that will later become the recording medium sliding surfaces.
The carbon film C is formed by a vacuum thin film forming technique such as the method. ((b) in the same figure) Step (C) After the carbon film C is formed on the entire surface of the flat plate material A, a ferromagnetic metal is formed on the surface intersecting the surface that will become the recording medium sliding surface using vacuum thin film forming technology. 1!14
For example, sendust or the like is formed. ((C) in the same figure) Process <D) Flat plate material A with ferromagnetic metal v14 formed
and the flat plate material B is the ferromagnetic metal Jl! 14, and are bonded by, for example, a glass bonding method. ((d) in the same figure) Step (E) Next, when viewed from the recording medium sliding surface 13, a pair of magnetic cores are cut along the cutting line S-8 in a direction perpendicular to the ferromagnetic metal film 14. Obtain halves 11°12. Next, a winding groove 15 is formed on the abutting surface of at least one core half 11.
formation. ((e), (f) in the figure) Step (F) After forming a gap spacer material g such as SiO2 on a part of the abutting surfaces by vacuum thin film forming technology or the like, the pair of magnetic core halves 11 are formed. .12 butt and join together. As a result, the recording medium sliding surface 13
A magnetic head 10 shown in FIG. 1 having a magnetic gap 16 thereon is obtained.

(第2図(q)、(h) ) 上述の様に、本発明になる磁気ヘッド10の製造方法に
よれば、真空薄膜成形技術によりカーボン膜と形成して
いるため、バルクのカーボン基板と比較して強磁性金属
Jl!14との接合が容易であり、しかも製造工程が簡
便である。
(FIGS. 2 (q), (h)) As described above, according to the method of manufacturing the magnetic head 10 according to the present invention, since the carbon film is formed by vacuum thin film forming technology, it is possible to form the carbon film with the bulk carbon substrate. Compare ferromagnetic metal Jl! It is easy to join with 14, and the manufacturing process is simple.

実施例2 実施例1においては、一対の平板材11a。Example 2 In Example 1, a pair of flat plates 11a.

11bとしてフェライト磁性材からなる磁性材を用いた
が、他の実施例としてこの平板材11a。
Although a magnetic material made of ferrite magnetic material was used as the material 11b, another example is the flat plate material 11a.

11bに例えばセラミックスなどの非磁性材を用いた場
合にも適用することがきるし、又、前記間様の製造工程
で製造することもできる。
It can also be applied to a case where a non-magnetic material such as ceramics is used for the material 11b, and it can also be manufactured by the above-mentioned manufacturing process.

この場合、テープ等の記録媒体摺動面にカーホン膜を付
与することによりテープ等の磁気記録媒体をいためるこ
とがない。
In this case, by applying a carphone film to the sliding surface of a recording medium such as a tape, the magnetic recording medium such as a tape is not damaged.

実施例3 第3図は本発明になる磁気ヘッドの他の実施例20を示
す断面図である。同図において21はカーボン膜であり
基板22上に少なくともギャップディプスAに相当する
部分に形成されており、この先端部は基板22の側面と
共に記録媒体摺動面23の一部を形成している。カーボ
ンl!21と基板22にかけて、センダスト等の強磁性
金属膜からなる下コア24が形成されている。下コア2
4の上にはギャップスペーサ−材25.第1の絶縁膜2
6.導体コイル27.第2の絶縁wA28.上コア29
が順次形成され、これらの上に、少なくともギヤップデ
ィブス層に相当する部分に先端部が記録媒体摺動面23
の一部を形成する様にカーボン膜30が形成されている
。さらに、この上に保護膜31が形成されて磁気ヘッド
20が構成されている。
Embodiment 3 FIG. 3 is a sectional view showing another embodiment 20 of the magnetic head according to the present invention. In the figure, reference numeral 21 denotes a carbon film, which is formed on the substrate 22 at least in a portion corresponding to the gap depth A, and the tip of this film forms part of the recording medium sliding surface 23 together with the side surface of the substrate 22. . Carbon l! 21 and the substrate 22, a lower core 24 made of a ferromagnetic metal film such as Sendust is formed. lower core 2
On top of 4 is a gap spacer material 25. First insulating film 2
6. Conductor coil 27. Second insulation wA28. upper core 29
are sequentially formed, and on top of these, at least in a portion corresponding to the gap dibs layer, a recording medium sliding surface 23 is formed.
A carbon film 30 is formed so as to form a part of the carbon film 30 . Furthermore, a protective film 31 is formed on this to constitute the magnetic head 20.

この様な磁気ヘッド20においては、上部と下部のカー
ボン膜30と21で、」下コア29.下コア24及びギ
ャップスペーサ−材25を挾持又は包囲する様な構造に
なっており、実施例1と同様に磁気記録媒体が接触する
部分は、強磁性金属膜である上コア2つと下コア24と
カーボン膜2130のみであるので、非常に耐磨耗性に
優れている。
In such a magnetic head 20, the upper and lower carbon films 30 and 21 form a lower core 29. It has a structure that sandwiches or surrounds the lower core 24 and the gap spacer material 25, and as in the first embodiment, the part that the magnetic recording medium comes into contact with is the two upper cores and the lower core 24, which are made of ferromagnetic metal films. and carbon film 2130, it has very good wear resistance.

(発明の効果) 上述の様に本発明になる磁気ヘッドによればフェライト
磁性材または非磁性材からなり、少なくとも記録媒体摺
動面を含む一端かカーボン膜で被覆された一組の平板材
により強磁性金属膜をはさむ様にして形成してなる一対
の磁気コア半体を非磁性材を介して突き合わせ、前記記
録媒体摺動面上において、前記強磁性金属膜間で磁気ギ
ャップを形成してなることを特徴としたり、基板上に非
磁性膜を介して強磁性金属薄膜からなる上コアと下コア
とを形成し、これらの一端部が前記基板の側面とを記録
媒体摺動面を形成してなる磁気ヘッドにおいて、少なく
とも前記上コアと基板間にカーボン膜を介在させると共
に、このカーボン膜の一端が前記記録媒体摺動面の一部
を形成してなることを特徴としたので、非常に耐磨耗性
の良い磁気ヘッドが得られ、また記録媒体をいためるこ
ともない。また、加工に要する工程数は少なくて済みコ
スト的に有利な磁気ヘッドの製造方法が可能となると共
に真空薄膜成形技術により形成されたカーボン膜を用い
ているために他の物質との接合が容易になり強度に優れ
た信頼性の高い磁気ヘッドの製造方法を提供することが
出来る。
(Effects of the Invention) As described above, according to the magnetic head of the present invention, the magnetic head is made of a ferrite magnetic material or a non-magnetic material, and is made of a pair of flat plate members whose ends including at least the recording medium sliding surface are coated with a carbon film. A pair of magnetic core halves formed by sandwiching a ferromagnetic metal film are butted together via a non-magnetic material, and a magnetic gap is formed between the ferromagnetic metal films on the recording medium sliding surface. An upper core and a lower core made of a ferromagnetic metal thin film are formed on a substrate via a non-magnetic film, and one end of these cores forms a recording medium sliding surface with the side surface of the substrate. The magnetic head is characterized in that a carbon film is interposed between at least the upper core and the substrate, and one end of the carbon film forms a part of the recording medium sliding surface. A magnetic head with good wear resistance can be obtained, and the recording medium will not be damaged. In addition, the number of processing steps required is small, making it possible to manufacture a magnetic head that is cost-effective, and because it uses a carbon film formed by vacuum thin film forming technology, it is easy to bond with other materials. Therefore, it is possible to provide a method for manufacturing a magnetic head with excellent strength and high reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明になる磁気ヘッドを示す斜視図、第2図
(a)〜(b)は本発明になる磁気ヘッドの製造方法を
説明するための斜視図、第3図は本発明になる磁気ヘッ
ドの他の実施例を示す断面図。 10.20・・・本発明になる磁気ヘッド、11.12
・・・磁気コア半体、 C,21,30・・・カーボン膜、 13.23・・・記録媒体摺動面、 11a、llb、12a、12b、A、B−・・平板材
、14・・・強磁性金属膜、15・・・巻線溝、g、2
5・・・ギャップスペーサ−材、16・・・磁気ギャッ
プ、24・・・下コア、26・・・第1の絶縁膜、27
・・・導体コイル、28・・・第2の絶縁膜、29・・
・上コア、31・・・保護膜。 特許出願人 日本ビクター株式会社 代表者 垣木邦夫 手続補正書く方式) 平成元年4月】8日
FIG. 1 is a perspective view showing a magnetic head according to the present invention, FIGS. 2(a) to (b) are perspective views for explaining a method of manufacturing a magnetic head according to the present invention, and FIG. FIG. 3 is a cross-sectional view showing another embodiment of the magnetic head. 10.20...Magnetic head according to the present invention, 11.12
...Magnetic core half, C, 21, 30... Carbon film, 13.23... Recording medium sliding surface, 11a, llb, 12a, 12b, A, B-... Flat plate material, 14. ...Ferromagnetic metal film, 15... Winding groove, g, 2
5... Gap spacer material, 16... Magnetic gap, 24... Lower core, 26... First insulating film, 27
...Conductor coil, 28...Second insulating film, 29...
- Upper core, 31...protective film. Patent applicant: Japan Victor Co., Ltd. Representative: Kunio Kakiki (procedural amendment writing method) April 8th, 1989

Claims (3)

【特許請求の範囲】[Claims] (1)フェライト磁性材または非磁性材からなり、少な
くとも記録媒体摺動面を含む一端がカーボン膜で被覆さ
れた一組の平板材により強磁性金属膜をはさむ様にして
形成してなる一対の磁気コア半体を非磁性材を介して突
き合わせ、前記記録媒体摺動面上において、前記強磁性
金属膜間で磁気ギャップを形成してなることを特徴とす
る磁気ヘッド。
(1) A pair of flat plates made of a ferrite magnetic material or a non-magnetic material and having at least one end including the recording medium sliding surface covered with a carbon film, sandwiching a ferromagnetic metal film therebetween. A magnetic head characterized in that magnetic core halves are butted together with a nonmagnetic material interposed therebetween, and a magnetic gap is formed between the ferromagnetic metal films on the recording medium sliding surface.
(2)酸化物磁性材または非磁性材からなる一組の平板
材を用意し、これら平板材の記録媒体摺動面を含む一端
部を真空薄膜成形技術によりカーボン膜で被覆する工程
と、一方の前記平板材の記録媒体摺動面に対して垂直な
面に強磁性金属膜を真空薄膜成形技術により均一な厚さ
に成膜する工程と、前記強磁性金属膜の成膜された一方
の平板材と、他方の平板材とを前記強磁性金属膜を挾持
する様に接合する工程と、前記記録媒体摺動面及び前記
強磁性金属膜に対して垂直な方向に分断して一対の磁気
コア半体を形成し、少なくとも一方の磁気コア半体の突
合せ面巻線構を形成する工程と、前記一方の磁気コア半
体の突合せ面に真空薄膜成形技術により非磁性材からな
るギャップスペーサーを形成する工程と、前記ギャップ
スペーサー材を介して両磁気コア半体の突き合わせを行
なう工程を含むことを特徴とする特許請求の範囲第一項
に記載の磁気ヘッド製造方法。
(2) A step of preparing a set of flat plates made of an oxide magnetic material or a non-magnetic material, and coating one end of these flat plates, including the recording medium sliding surface, with a carbon film using vacuum thin film forming technology; forming a ferromagnetic metal film to a uniform thickness on a plane perpendicular to the recording medium sliding surface of the flat plate material by vacuum thin film forming technology; A step of joining one flat plate material to the other flat plate material so as to sandwich the ferromagnetic metal film, and a step of separating a pair of magnetic plates in a direction perpendicular to the recording medium sliding surface and the ferromagnetic metal film. A step of forming core halves and forming a winding structure on the abutting surfaces of at least one magnetic core half, and forming a gap spacer made of a non-magnetic material on the abutting surface of the one magnetic core half by vacuum thin film forming technology. 2. The method of manufacturing a magnetic head according to claim 1, comprising the steps of: forming the gap spacer material; and abutting the two magnetic core halves together via the gap spacer material.
(3)基板上に非磁性膜を介して強磁性金属薄膜からな
る上コアと下コアとを形成し、これらの一端部が前記基
板の側面と共に記録媒体摺動面を形成してなる磁気ヘッ
ドにおいて、少なくとも前記上コアと基板間にカーボン
膜を介在させると共に、このカーボン膜の一端が前記記
録媒体摺動面の一部を形成してなることを特徴とする磁
気ヘッド。
(3) A magnetic head in which an upper core and a lower core made of a ferromagnetic metal thin film are formed on a substrate with a nonmagnetic film interposed therebetween, and one end of these forms a recording medium sliding surface together with the side surface of the substrate. A magnetic head characterized in that a carbon film is interposed between at least the upper core and the substrate, and one end of the carbon film forms a part of the recording medium sliding surface.
JP2172489A 1989-01-31 1989-01-31 Magnetic head and production thereof Pending JPH02201713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2172489A JPH02201713A (en) 1989-01-31 1989-01-31 Magnetic head and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2172489A JPH02201713A (en) 1989-01-31 1989-01-31 Magnetic head and production thereof

Publications (1)

Publication Number Publication Date
JPH02201713A true JPH02201713A (en) 1990-08-09

Family

ID=12063031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2172489A Pending JPH02201713A (en) 1989-01-31 1989-01-31 Magnetic head and production thereof

Country Status (1)

Country Link
JP (1) JPH02201713A (en)

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