JPH02201722A - Thin-film magnetic head - Google Patents
Thin-film magnetic headInfo
- Publication number
- JPH02201722A JPH02201722A JP1964189A JP1964189A JPH02201722A JP H02201722 A JPH02201722 A JP H02201722A JP 1964189 A JP1964189 A JP 1964189A JP 1964189 A JP1964189 A JP 1964189A JP H02201722 A JPH02201722 A JP H02201722A
- Authority
- JP
- Japan
- Prior art keywords
- track
- thin film
- recording
- thickness
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の目的]
(産業上の利用分野)
この発明は、例えばコンピュータ用磁気ディスク装置等
に使用される薄膜磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a thin film magnetic head used, for example, in a magnetic disk drive for a computer.
(従来の技術)
一般に、薄膜磁気ヘッドは、第6図に示すようにMn−
znフェライトまたはN、−Z、フェライト等の下部コ
アを構成する磁性体1上に8102等のギャップ層2を
蒸着等により形成し、このギャップ層2上に絶縁層3、
コイルとなるCu等の導体層4及び絶縁層5が順に形成
された後、上部コアを構成するパーマロイまたはセンダ
スト等の磁性薄膜6が積層される。そして、この磁性薄
膜6上には、ガラス等で形成されるホルダ8が接着層7
を介して取付けられ、その記録媒体摺動面に磁性薄膜6
をギャップ層2に対応してトラック幅Twでトラック厚
さPで配置した記録トラックが形成される。(Prior Art) Generally, a thin film magnetic head is made of Mn-
A gap layer 2 such as 8102 is formed by vapor deposition on a magnetic material 1 constituting the lower core such as Zn ferrite or N, -Z, ferrite, etc., and an insulating layer 3,
After a conductive layer 4 made of Cu or the like and an insulating layer 5 which will become a coil are formed in this order, a magnetic thin film 6 made of Permalloy or Sendust or the like which constitutes the upper core is laminated. Then, on this magnetic thin film 6, a holder 8 made of glass or the like is placed on an adhesive layer 7.
A magnetic thin film 6 is attached to the recording medium sliding surface.
A recording track is formed by arranging these with a track width Tw and a track thickness P corresponding to the gap layer 2.
ところが、薄膜磁気ヘッドでは、その記録トラックのト
ラック厚さPが数μm程度と非常に小さいために、トラ
ック厚さPが高密度記録における最短記録波長λmin
と略同程度となると、いわゆる形状効果(コンタ−エフ
ェクト)の影響が使用周波数帯域の中の高域成分である
最短記録波長λ用inに出る波打ち現象が起こり、性能
が低下するという問題を有する。すなわち、薄膜磁気ヘ
ッドは、その磁性体1のポール長については、最短記録
波長λminに比較して十分厚いので問題ないが、その
磁性薄膜8のポール長である記録トラックのトラック厚
さPが数μmと小さいことで、問題となる。そこで、記
録信号の周波数をf1記録波長をλ、記録媒体との相対
速度をVとすると、これらの関係は
Vモfλ
となることにより、第7図に示すようにPがλminに
比して十分に大きいと、図中破線で示す周波数特性Fと
なるが、Pとλminが同じ程度となると、実線F1で
示す波打ち現象が起こる。この波打ち現象はfが略V/
2P、略2 v / 2 P 。However, in a thin film magnetic head, the track thickness P of the recording track is very small, about several μm, so the track thickness P is smaller than the shortest recording wavelength λmin in high-density recording.
When it becomes approximately the same as the value, there is a problem in that the so-called contour effect causes a waving phenomenon in which the shortest recording wavelength λ, which is a high-frequency component in the frequency band used, occurs, resulting in a decrease in performance. . That is, in the thin film magnetic head, there is no problem with the pole length of the magnetic body 1 because it is sufficiently thick compared to the shortest recording wavelength λmin, but the track thickness P of the recording track, which is the pole length of the magnetic thin film 8, is The small size of μm poses a problem. Therefore, if the frequency of the recording signal is f1, the recording wavelength is λ, and the relative speed with respect to the recording medium is V, then the relationship between them is Vfλ, and as shown in Figure 7, P is compared to λmin. If it is sufficiently large, the frequency characteristic F will be as shown by the broken line in the figure, but if P and λmin become approximately the same, a waving phenomenon will occur as shown by the solid line F1. This waving phenomenon occurs when f is approximately V/
2P, approximately 2v/2P.
略3v/2Pの順に起り、最初のv / 2 Pで出力
が大きく、次の2v/2Pで小さくなり、さらに次の3
v/2Pで大きくなる。これは、第8図に示すように記
録媒体摺動方向をy軸とすると、その導体層に電流が供
給されると、発生する磁界HのX軸方向成分が特性Aと
なる(但し、y軸と略直交するy軸がy−0,記録媒体
摺動面の表面)。It occurs approximately in the order of 3v/2P, the output is large at the first v/2P, becomes small at the next 2v/2P, and then the next 3v/2P.
It becomes larger at v/2P. This means that if the recording medium sliding direction is the y-axis as shown in FIG. The y-axis, which is approximately perpendicular to the axis, is y-0, the surface of the recording medium sliding surface).
この特性Aは、記録トラックのエツジ部でギャップ層2
と逆側方向の磁界が発生する。This characteristic A is based on the gap layer 2 at the edge of the recording track.
A magnetic field is generated in the opposite direction.
一方、記録媒体の残留磁化のX軸方向成分をIXとする
と、相反定理により再生磁束の大きさは、
f−〕Hx I X dx
に比例する。従って、IXの分布は、そのPがλ/2の
奇数倍の時に大きくなり、その偶数倍の時に小さくなる
波打ち現象が発生するものである。On the other hand, if the X-axis direction component of the residual magnetization of the recording medium is IX, the magnitude of the reproducing magnetic flux is proportional to f-]Hx I X dx according to the reciprocity theorem. Therefore, the distribution of IX becomes large when P is an odd multiple of λ/2, and becomes small when P is an even multiple of λ/2, resulting in a waving phenomenon.
(発明が解決しようとする課題)
以上述べたように、従来の薄膜磁気ヘッドでは、形状効
果の影響により波打ち現象が起り、性能が低下するとい
う問題を有していた。(Problems to be Solved by the Invention) As described above, conventional thin-film magnetic heads have a problem in that waving occurs due to shape effects and performance deteriorates.
この発明は上記の事情に鑑みてなされたもので、簡易な
構成で、かつ、形状効果による波打ち現象を確実に防止
し得るようにして、高性能化を図り得るようにした薄膜
磁気ヘッドを提供することを目的とする。The present invention has been made in view of the above circumstances, and provides a thin-film magnetic head that has a simple structure, reliably prevents the waving phenomenon caused by shape effects, and achieves high performance. The purpose is to
[発明の構成]
(課題を解決するための手段)
この発明は磁性体上にギャップ層、導体層、絶縁層及び
磁性薄膜層を順に積層し、記録摺動面に前記ギャップ層
に対応して前記磁性薄膜で形成したトラック幅及びトラ
ック厚さ寸法を有する記録トラックを設けてなる薄膜磁
気ヘッドにおいて、前記記録トラックのギャップ層側と
逆側の側部にトラック厚さ方向にトラック厚さの約1/
2を有し、かつ、トラック幅方向に全長がトラック幅の
約1/2の凹部を設けて構成したものである。[Structure of the Invention] (Means for Solving the Problems) The present invention comprises sequentially laminating a gap layer, a conductor layer, an insulating layer and a magnetic thin film layer on a magnetic material, and a recording sliding surface corresponding to the gap layer. In a thin film magnetic head comprising a recording track formed of the magnetic thin film and having a track width and a track thickness, approximately the track thickness is provided on the side opposite to the gap layer side of the recording track in the track thickness direction. 1/
2, and has a concave portion having a total length of about 1/2 of the track width in the track width direction.
(作用)
上記構成によれば、トラック厚さを有したトラック幅の
約1/2の記録トラックとトラック厚さの約1/2でト
ラック幅の約1/2の記録トラックを有したのと等価の
ヘッドが構成されることにより、これら記録トラックで
発生する周波数特性の波打ち現象が相互間で打消される
。従って、周波数特性における波打ち現象の発生の防止
が図り得る。(Function) According to the above configuration, there is a recording track having a track thickness of about 1/2 of the track width, and a recording track having a track thickness of about 1/2 and about 1/2 of the track width. By configuring equivalent heads, the waving phenomenon of frequency characteristics occurring in these recording tracks is canceled out. Therefore, it is possible to prevent the occurrence of a waving phenomenon in the frequency characteristics.
(実施例)
以下、この発明の実施例について、図面を参照して詳細
に説明する。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第1図はこの発明の一実施例に係るもので、同図(a)
が記録媒体摺動面を示す図、同図(b)は同(a)の断
面を示す図である。すなわち、図[1i 10はMn−
ZnフェライトまたはN、−Znフェライト等の下部コ
アを構成する磁性体で、この磁性体10上には、先ず5
102等のギャップ層11が蒸着等で形成される。そし
て、このギャップ層11上には、絶縁層12、コイルと
なるCu等の導体層13及び絶縁層14が順に形成され
た後、上部コアを構成するパーマロイまたはセンダスト
等の磁性薄膜15が積層される。この磁性薄膜15上に
は、ガラス等で形成されるホルダ=16が接着層17を
介して取付けられ、その記録媒体摺動面に磁性薄膜15
をギャップ層11に対応してトラック幅Twでトラック
厚さPで配置した記録トラックが形成される。この際、
磁性薄膜15で形成される記録トラックにはトラック厚
さ方向に約P/2で、トラック幅方向に約Tv/2の凹
部15aがフォトリソグラフィー等を用いた化学エツチ
ングや、プラズマ等を用いた物理的エツチングのエツチ
ング手法等により所定の間隔を有して形成される。そし
て、この凹部15aは、その記録媒体摺動面の奥行き方
向が、例えば薄膜の特性を損わないP/2程度の寸法で
形成される。FIG. 1 shows an embodiment of the present invention, and FIG.
is a diagram showing a recording medium sliding surface, and FIG. 10B is a cross-sectional view of FIG. That is, figure [1i 10 is Mn-
A magnetic material constituting the lower core such as Zn ferrite or N, -Zn ferrite.
A gap layer 11 such as 102 is formed by vapor deposition or the like. Then, on this gap layer 11, an insulating layer 12, a conductor layer 13 such as Cu that will become a coil, and an insulating layer 14 are formed in this order, and then a magnetic thin film 15 such as Permalloy or Sendust that forms the upper core is laminated. Ru. A holder 16 made of glass or the like is attached to the magnetic thin film 15 via an adhesive layer 17, and the magnetic thin film 15 is attached to the recording medium sliding surface.
A recording track is formed by arranging these with a track width Tw and a track thickness P corresponding to the gap layer 11. On this occasion,
A recess 15a of about P/2 in the track thickness direction and about Tv/2 in the track width direction is formed on the recording track formed by the magnetic thin film 15 by chemical etching using photolithography or the like or physical etching using plasma or the like. They are formed at predetermined intervals using a targeted etching method or the like. The recess 15a is formed with a dimension of, for example, about P/2 in the depth direction of the recording medium sliding surface, which does not impair the characteristics of the thin film.
上記構成において、記録トラックはトラック厚さPでト
ラック幅がTv/2のトラックとトラック厚さP/2で
、トラック幅かTw/2のトラックと等価となる。これ
により、第2図に示すように、トラック厚さPの部分で
は、周波数fがv / 2 P 、 2 v / 2
P 、 3 v / 2 P−・・の順に大、小のピー
クが繰返される。他方、トラック厚さP/2の部分では
、v / P 、 2 v / P 、 3 v /
P・・・の順に大、小のピークが繰返される。この結果
、記録トラックからの出力は第3図に示すように、従来
の周波数特性F1と比較すると、そのv / 2 Pで
前記従来のピークの約1/2程度のピクとなり、v /
Pで大小が打消されてピークがなくなり、3 v /
2 Pでピークが約1/2程度と軽減され、その2
v / Pで始めて小のピークとなる周波数特性F2
(図中−点鎖線で示す)となる。In the above configuration, the recording track is equivalent to a track having a track thickness P and a track width Tv/2 and a track having a track thickness P/2 and a track width Tw/2. As a result, as shown in FIG. 2, in the portion of track thickness P, the frequency f becomes v/2P, 2v/2
Large and small peaks are repeated in the order of P, 3v/2P-.... On the other hand, in the part with track thickness P/2, v/P, 2 v/P, 3 v/
Large and small peaks are repeated in the order of P.... As a result, as shown in FIG. 3, the output from the recording track has a peak of about 1/2 of the conventional peak at v/2P when compared with the conventional frequency characteristic F1, and the output from the recording track becomes v/2P.
The magnitude is canceled by P, the peak disappears, and 3 v/
2 P reduces the peak to about 1/2, and
Frequency characteristic F2 with a small peak starting at v/P
(Indicated by the dotted chain line in the figure).
この場合、2 v / Pにおけ小のピークは高次のピ
ークとなることで、そのピーク値が小さいことで、問題
となることはない。In this case, the small peak at 2 v/P becomes a high-order peak, and the small peak value causes no problem.
このように、上記薄膜磁気ヘッドは磁性薄膜15の記録
媒体摺動面におけるギャップ層12側と逆側の側部にト
ラック厚さ方向にトラック厚さPの約1/2を有し、か
つ、トラック幅方向にトラック幅Twの約1/2の凹部
15aを有した記録トラックを設け、トラック厚さPで
トラック幅Twの約1/2のトラックとトラック厚さP
の約1/2でトラック幅Tvの約1/2のトラックを有
したのと等価のヘッドを構成したことにより、これら記
録トラックで発生する周波数特性の波打ち現象が相互間
で打消され、波打ち現象の発生の防止か図り1!7る。In this manner, the thin film magnetic head has approximately 1/2 of the track thickness P in the track thickness direction on the side of the recording medium sliding surface of the magnetic thin film 15 opposite to the gap layer 12 side, and A recording track having a recess 15a of about 1/2 of the track width Tw in the track width direction is provided, and a track with a track thickness P of about 1/2 of the track width Tw and a track with a track thickness P
By configuring a head equivalent to having a track with approximately 1/2 of the track width Tv, the waving phenomenon of frequency characteristics that occurs in these recording tracks is canceled out between each other, and the waving phenomenon Attempts are being made to prevent the occurrence of
また、上記実施例では、記録トラックにトラック厚さ方
向に約P/2で、トラック幅方向に約Tw/2の凹部1
5aを設けた場合で説明したが、これに限ることなく、
例え第4図に示すように、トラック厚さ方向にP/2で
、トラック幅方向に複数の凹部20a、20bを設け、
これらの凹部20a、20bのトラック幅方向の全長が
約Tv/2となるように構成することも可能で、同様の
効果が期待される。Further, in the above embodiment, the recording track has a recess 1 of approximately P/2 in the track thickness direction and approximately Tw/2 in the track width direction.
Although the explanation has been given for the case where 5a is provided, it is not limited to this.
For example, as shown in FIG. 4, a plurality of recesses 20a and 20b are provided in the track width direction at P/2 in the track thickness direction,
It is also possible to configure the recesses 20a, 20b so that the total length in the track width direction is approximately Tv/2, and similar effects can be expected.
また、上記実施例では、下部コアをフェライトを用いた
磁性体10で形成したが、これに限ることなく、例えば
第5図に示すように、磁性薄膜30、絶縁層31及びホ
ルダー32で形成した下部コアを用いて構成することも
可能である。この場合、下部コアにおける波打ち現象を
防止するには、磁性体を構成する磁性薄膜30に記録ト
ラックと同様にトラック厚さ方向にP/2で、トラック
幅方向にTw/2の凹部30aをギャップ層11と逆側
に対向させて設けておけばよい。Further, in the above embodiment, the lower core is formed of the magnetic material 10 using ferrite, but is not limited to this. For example, as shown in FIG. It is also possible to configure using a lower core. In this case, in order to prevent the undulating phenomenon in the lower core, a recess 30a with a gap of P/2 in the track thickness direction and Tw/2 in the track width direction is formed in the magnetic thin film 30 constituting the magnetic body, similarly to the recording track. It may be provided facing the opposite side to the layer 11.
よって、この発明は上記実施例に限ることなく、その他
、この発明の要旨を逸脱しない範囲で種々の変形を実施
し得ることは勿論のことである。Therefore, it goes without saying that the present invention is not limited to the above embodiments, and that various modifications can be made without departing from the spirit of the invention.
[発明の効果]
以上詳述したように、この発明によれば、簡易な構成で
、かつ、形状効果による波打ち現象を確実に防止し得る
ようにして、高性能化を図り得るようにした薄膜磁気ヘ
ッドを提供することができる。[Effects of the Invention] As detailed above, the present invention provides a thin film that has a simple structure, reliably prevents the waving phenomenon caused by shape effects, and achieves high performance. A magnetic head can be provided.
第1図はこの発明の一実施例に係る薄膜磁気ヘッドを示
す図、第2図及び第3図は第1図の動作を説明するため
に示した図、第4図及び第5図はこの発明の他の実施例
を示す図、第6図乃至第8図は従来の薄膜磁気ヘッドの
問題点を説明するために示した図である。
10・・・磁性体、12・・・ギャップ層、12・・・
絶縁層、13・・・導体層、14・・・絶縁層、15・
・・磁性薄膜、15a・・・凹部、16・・・ホルダー
17・・・接着層、20・・・a、20b・・・凹部、
30・・・磁性薄膜、30a・・・凹部、31・・・接
着層、2・・・ホルダ
第
図
第
図FIG. 1 is a diagram showing a thin film magnetic head according to an embodiment of the present invention, FIGS. 2 and 3 are diagrams shown to explain the operation of FIG. 1, and FIGS. Figures 6 to 8 showing other embodiments of the invention are diagrams shown to explain problems with conventional thin film magnetic heads. 10... Magnetic material, 12... Gap layer, 12...
Insulating layer, 13... Conductor layer, 14... Insulating layer, 15.
...magnetic thin film, 15a...recess, 16...holder 17...adhesive layer, 20...a, 20b...recess,
30...Magnetic thin film, 30a...Concave portion, 31...Adhesive layer, 2...Holder (Figure)
Claims (1)
を順に積層し、記録摺動面に前記ギャップ層に対応して
前記磁性薄膜で形成したトラック幅及びトラック厚さを
有する記録トラックを設けてなる薄膜磁気ヘッドにおい
て、 前記記録トラックのギャップ層側と逆側の側部にトラッ
ク厚さ方向にトラック厚さの約1/2を有し、かつ、ト
ラック幅方向に全長がトラック幅の約1/2の凹部を設
けたことを特徴とする薄膜磁気ヘッド。[Claims] A gap layer, a conductor layer, an insulating layer, and a magnetic thin film layer are sequentially laminated on a magnetic material, and a track width and track thickness are formed on the recording sliding surface by the magnetic thin film corresponding to the gap layer. In a thin film magnetic head, a thin film magnetic head is provided with a recording track having a thickness of approximately 1/2 of the track thickness in the track thickness direction on a side opposite to the gap layer side of the recording track; A thin film magnetic head characterized in that a recessed portion having a total length of approximately 1/2 of the track width is provided in the magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964189A JPH02201722A (en) | 1989-01-31 | 1989-01-31 | Thin-film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1964189A JPH02201722A (en) | 1989-01-31 | 1989-01-31 | Thin-film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02201722A true JPH02201722A (en) | 1990-08-09 |
Family
ID=12004854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1964189A Pending JPH02201722A (en) | 1989-01-31 | 1989-01-31 | Thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02201722A (en) |
-
1989
- 1989-01-31 JP JP1964189A patent/JPH02201722A/en active Pending
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