JPH02201900A - Deflecting electromagnet for charged particle apparatus - Google Patents
Deflecting electromagnet for charged particle apparatusInfo
- Publication number
- JPH02201900A JPH02201900A JP1970089A JP1970089A JPH02201900A JP H02201900 A JPH02201900 A JP H02201900A JP 1970089 A JP1970089 A JP 1970089A JP 1970089 A JP1970089 A JP 1970089A JP H02201900 A JPH02201900 A JP H02201900A
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- main coil
- coil
- wound wire
- magnetic field
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Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は、荷電粒子装置用偏向電磁石に関し、特に、
主コイルが発生する磁界の磁界均一度向上手段を備えた
荷電粒子装置用偏向電磁石に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a bending electromagnet for a charged particle device, and in particular,
The present invention relates to a deflecting electromagnet for a charged particle device that is equipped with means for improving the magnetic field uniformity of a magnetic field generated by a main coil.
[従来の技術]
第3図は、例えば、日本化学技術情報センター1984
年9月発行の、ヨシ力ズ ミャハラ(Yoghikaz
u Miyahara) 、コーン タカタ(Koj
1Takata)およびテツヤ ナカニシ(Tetsu
ya Naka−nfshi)によるl5SPの技術報
告(TechnicalReport or l5SP
) No、21、「シンクロトロン放射のための超電導
レーストラック電子蓄積リングおよび共存インジェクタ
・マイクロトロン(Superco−nducting
Racetrack Electron Strag
e Ring andCoexis’tent Inj
ector Microtzon for 5ynch
rotr−on←−円→←Radiation) Jに
記載された従来の荷電粒子装置を示し、図において、(
1)は荷電粒子を蓄積する荷電粒子装置としての蓄積リ
ング、矢印(2)は荷電子粒子(例えば電子)を蓄積リ
ング(1)内に導くための入射部ビームラインである。[Prior art] Figure 3 shows, for example, the Japan Chemical Technology Information Center 1984
Yoghikaz Myahara, published in September.
u Miyahara), Corn Takata (Koj
1 Takata) and Tetsuya Nakanishi (Tetsu
Technical Report or l5SP by ya Naka-nfshi
) No. 21, “Superconducting Racetrack Electron Storage Ring and Coexisting Injector Microtron for Synchrotron Radiation”
Racetrack Electron Strag
e Ring and Coexis'tent Inj
ector Microzon for 5ynch
rotr-on←-circle→←Radiation) The conventional charged particle device described in J.
1) is a storage ring as a charged particle device that stores charged particles, and arrow (2) is an entrance beam line for guiding charged particles (for example, electrons) into the storage ring (1).
超電導の偏向電磁石(3)は荷電粒子を偏向して平衡軌
道(4)を形成するためのちのであり、後述する燗同コ
イルの組合わせからなっている。A superconducting bending electromagnet (3) is used to deflect charged particles to form a balanced orbit (4), and is made up of a combination of coils to be described later.
矢印(5)は荷電粒子を偏向電磁石(3)で偏向する際
に発生する放射光を取出すための放射光ビームラインで
ある。この放射光は、ジンクロト07放射光、またはS
OR(Synchrotron 0rbitalRa
diation)と呼ばれ、外部に取出されてすVグラ
フィ°などに利用される。一般に、放射光ビームライン
(5)は、装置の利用効率を高めるため、偏向電磁石(
3)に沿って多数設けられているが、ここでは各偏向電
磁石(3)にそれぞれ1本のみを示し、他は省略してい
る。The arrow (5) is a synchrotron radiation beam line for extracting the synchrotron radiation generated when charged particles are deflected by the deflection electromagnet (3). This synchrotron radiation is Zincroto 07 synchrotron radiation or S
OR(Synchrotron 0rbitalRa
It is taken out to the outside and used for V graphics, etc. Generally, the synchrotron radiation beam line (5) is equipped with a bending electromagnet (
3), but here only one is shown for each bending electromagnet (3), and the others are omitted.
四極電磁石(6)は蓄積リング(1)内の荷電粒子を集
束させる。大極電磁石(7)は偏向電磁石(3)の非線
形磁場またはグロマティシティを補正する。高膚波空洞
(8)は放射光の放出による荷電粒子のエネルギ損失を
補い所定のエネルギに加速する。キッカ(9)は荷電粒
子を入射ビームライン(2)から入射させる際に平衡軌
道(4)をずらせて入射を助けるためのものである。真
空ドーナツ(lO)は荷電粒子の通路となる。インフレ
クタ(11)は荷電粒子を入射部ビームライン(2)か
ら蓄積リング(1)内に入射させるためのものであり、
真空ポンプ(12)は真空ドーナツ(10)内を高真空
に保つ。これら各部分は平衡軌道(4)に沿って配設さ
れている。A quadrupole electromagnet (6) focuses the charged particles within the storage ring (1). The large pole electromagnet (7) corrects the nonlinear magnetic field or gromaticity of the bending electromagnet (3). The skin cavity (8) compensates for the energy loss of the charged particles due to the emission of synchrotron radiation and accelerates them to a predetermined energy. The kicker (9) is for assisting the incidence of charged particles by shifting the equilibrium trajectory (4) when the charged particles are incident from the incident beam line (2). The vacuum donut (lO) provides a path for charged particles. The inflector (11) is for making charged particles enter the storage ring (1) from the entrance beam line (2),
A vacuum pump (12) maintains a high vacuum inside the vacuum donut (10). Each of these parts is arranged along a balanced trajectory (4).
なお、真空ドーナツ(10)は機械的強度が高(、かつ
、ベーキングが容易なステンレス材で形成されていて、
その内部は真空ポンプ(12)により超高真空に保たれ
て、荷電粒子が気体分子に衝突してエネルギを失いその
寿命が短くなることを防止している。The vacuum donut (10) is made of a stainless steel material that has high mechanical strength and is easy to bake.
The inside of the chamber is maintained at an ultra-high vacuum by a vacuum pump (12) to prevent charged particles from colliding with gas molecules and losing energy and shortening their lifespan.
第4図〜第8図は上記の偏向電磁石(3)を示し、第4
図において、(13)および(14)は偏向電磁石(3
)を形成する1対の超電導の偏同主コイルであり、(1
3)は土庄コイル、(14)はT1コイルで、レースト
ラックコイルを偏向曲率で曲げたバナナ形になっている
。なお、上、T1コイル(13)、 (14)は高起磁
力を有しているので、鉄心を用いない空心構造となって
いる。矢印m、、m、は上、T1コイル(13)、 (
14)にそれぞれ流れる電流の方向、矢印Sは平衡軌道
(4)上の電子ビームの進行方向を示している。Figures 4 to 8 show the above bending electromagnet (3), and the fourth
In the figure, (13) and (14) are bending electromagnets (3
) is a pair of superconducting eccentric main coils forming (1
3) is a Tonosho coil, and (14) is a T1 coil, which is shaped like a banana by bending a racetrack coil with a deflection curvature. Incidentally, since the upper T1 coils (13) and (14) have a high magnetomotive force, they have an air-core structure without using an iron core. Arrow m,, m, is up, T1 coil (13), (
14), and the arrow S indicates the traveling direction of the electron beam on the equilibrium orbit (4).
また、第5図および第6図から明らかなように、平衡軌
道(4)は、極座標Rθ(z =Oンの平面上に半径ρ
。の半円と、この半円の前後につながる直線とで示され
る。ρ1.ρ、は、バナナ形状の上、T1コイル(13
)、 (14)のそれぞれ内側半径と外側半径である。Furthermore, as is clear from FIGS. 5 and 6, the equilibrium orbit (4) has a radius ρ on the plane of polar coordinates Rθ (z = O).
. It is represented by a semicircle and straight lines connected to the front and back of this semicircle. ρ1. ρ is the T1 coil (13
), (14) are the inner radius and outer radius, respectively.
また、斜線部(27)は上、T1コイルの端部である。Moreover, the shaded part (27) is the upper end of the T1 coil.
(28)は外側コイル巻線、(29)は内側コイル巻線
である。(28) is the outer coil winding, and (29) is the inner coil winding.
さらに、第7図は、主コイル(3)と、主コイル(3)
が発生する誤差磁界を補正する四極シムフィル(15)
および大極シムコイル(2o)を示し、(1B)、 (
17)は四極シムコイル(15)のうちの上側コイル巻
線、(rg)、 (19)は下側コイル巻線を示す。Furthermore, Fig. 7 shows the main coil (3) and the main coil (3).
Quadrupole shim fill (15) that corrects the error magnetic field generated by
and the large pole shim coil (2o), (1B), (
17) is the upper coil winding of the quadrupole shim coil (15), (rg), and (19) is the lower coil winding.
(21)〜(23)は大極シムコイル(20)のうちの
上側コイル巻線、(24)〜(26)は下側コイル巻線
である。(21) to (23) are upper coil windings of the large pole shim coil (20), and (24) to (26) are lower coil windings.
以上の構成により、入射部ビームライン(2)から蓄積
リング(1)内に入射された荷電粒子は、インフレクタ
(11)によりパルス的に偏向され、がっ、キッカ(9
)により軌道がずらされる。荷電−3粒子は、最初は平
衡軌道(4)から少しずれた軌道上を周回し、何周回か
後に平衡軌道(4)上を矢印A方向に周回し続けるよう
になる。この平衡軌道(4)は、偏向電磁石(3)およ
び四極電磁石(6)の配置により決定される。With the above configuration, the charged particles incident into the storage ring (1) from the entrance beam line (2) are deflected in a pulsed manner by the inflector (11), and the kicker (9)
), the trajectory is shifted. The charged-3 particle initially orbits on an orbit slightly deviated from the equilibrium orbit (4), and after several revolutions, it continues to orbit on the equilibrium orbit (4) in the direction of arrow A. This equilibrium trajectory (4) is determined by the arrangement of the bending electromagnet (3) and the quadrupole electromagnet (6).
ナオ、m+、m=方向の電流により上、T1コイル(1
3)、 (14)で発生する主磁場は−z(−y)方向
となり、平衡軌道(4)に流れる電流は、電子ビーム方
向Sとは逆方向となる。従って、上、T1コイル(13
)、 (14)間を通過する荷電粒子、すなわち電子ビ
ームは、フレミングの左手の法則により−Rの方向に電
磁力を受け、これにより半径ρ。の曲率で曲げられる。Due to current in Nao, m+, m= direction, upper T1 coil (1
The main magnetic field generated in 3) and (14) is in the -z (-y) direction, and the current flowing in the equilibrium orbit (4) is in the opposite direction to the electron beam direction S. Therefore, the upper T1 coil (13
), (14) A charged particle, i.e., an electron beam, passing between them receives an electromagnetic force in the direction of -R due to Fleming's left-hand rule, which causes the radius ρ to increase. can be bent with a curvature of
この平衡軌道(4)の半径ρ。は下記の0式で与えられ
る。The radius ρ of this equilibrium orbit (4). is given by the following equation 0.
ρ。= P/(e−By) ・・■
ただし、PニアM子の運動量
e:電子の電荷
By二上、下主フィル(13)、 (14)のy軸方向
における発生磁界
ここで、y軸は平衡軌道(4)に関するZ軸と平行な軸
であり、X軸は平衡軌道(4)に関する極座標の半径R
と同方向の軸である。ρ. = P/(e-By) ・・■ However, the momentum e of the P near M child is the magnetic field generated in the y-axis direction of the electron charge By upper and lower main fills (13) and (14). Here, the y-axis is an axis parallel to the Z axis regarding the equilibrium orbit (4), and the X axis is the radius R of polar coordinates regarding the equilibrium orbit (4).
The axis is in the same direction as .
一方、高周波空洞(8)は荷電粒子を加速し、大極電磁
石(7)は、偏向電磁石(3)の半径方向の磁場の不均
一を補正したり、クロマチイ・シティの補正を行う。On the other hand, the high frequency cavity (8) accelerates charged particles, and the large pole electromagnet (7) corrects the non-uniformity of the magnetic field in the radial direction of the bending electromagnet (3) and corrects chromaticity.
こうして平衡軌道(4)に沿って周回する荷電粒子は、
偏向電磁石(3)の電界により偏向を受けると、制動放
射による電磁波を放射光として、放射光ビームライン(
5)から平衡軌道(4)の接線方間に放射される。In this way, the charged particles orbiting along the equilibrium orbit (4) are
When deflected by the electric field of the bending electromagnet (3), the electromagnetic waves due to bremsstrahlung are converted into synchrotron radiation and are connected to the synchrotron radiation beam line (
5) is radiated tangentially to the equilibrium orbit (4).
ところで、電子ビームは平衡軌道(4)の周囲にベータ
トロン振動をしているので、一般に、電子ビームの進行
方向Sに直交する方向(主としてR方向、すなわちX軸
方向)に関し、中心軌道の周囲に数cm以上の範囲にわ
たって10−4〜10−3程度の均一な磁界分布(良磁
界領域)が必要となる。By the way, since the electron beam undergoes betatron oscillation around the equilibrium orbit (4), generally speaking, in the direction perpendicular to the traveling direction S of the electron beam (mainly the R direction, that is, the X-axis direction), the vibration around the central orbit is A uniform magnetic field distribution (good magnetic field region) of about 10 -4 to 10 -3 is required over a range of several cm or more.
超電導偏向主コイルでなる上、下止コイル(13)。Upper and lower stop coils (13) consisting of superconducting deflection main coils.
(14)の磁界分布が不均一の場合、電子ビームの平衡
軌道(4)は上、下コイル(13)、 (t4)の中心
からずれるが、このずれ量が所定値より大きく向に均一
な磁界は、各θの位置において必要である。If the magnetic field distribution in (14) is non-uniform, the equilibrium trajectory (4) of the electron beam will deviate from the center of the upper and lower coils (13) and (t4), but if this deviation is greater than a predetermined value and uniform in the direction A magnetic field is required at each θ position.
そこで、この均一な磁界分布を得るために、主コイル(
3)の作る磁界の1次成分、2次成分等の誤差磁界を補
正するためのシムコイルが使用される。第7図の四極シ
ムコイル(15)は、X(またはR)の増加とともに上
記1次成分に比例して増加するY軸方向の磁界を発生、
する。大極シムコイル(20)は、X(またはR)の増
加ととも上記2次成分に比例して増加するY軸方向の磁
界を発生する。主コイル(3)の発生する誤差磁界成分
である1次成分、2次成分を打ち消すように、各シムコ
イル(15)(2G)の出力磁界、即ちシムコイル電流
値を決めれば、均一な磁界分布を得ることが可能になる
。Therefore, in order to obtain this uniform magnetic field distribution, the main coil (
A shim coil is used to correct error magnetic fields such as the primary component and secondary component of the magnetic field generated in 3). The quadrupole shim coil (15) in FIG. 7 generates a magnetic field in the Y-axis direction that increases in proportion to the first-order component as X (or R) increases,
do. The large pole shim coil (20) generates a magnetic field in the Y-axis direction that increases in proportion to the second-order component as X (or R) increases. By determining the output magnetic field of each shim coil (15) (2G), that is, the shim coil current value, so as to cancel out the primary and secondary components, which are the error magnetic field components generated by the main coil (3), a uniform magnetic field distribution can be achieved. It becomes possible to obtain.
東8図は、主コイル(3)に大極シムコイル(20)を
組込んだ図である。ところで、ビームの進行方向をS方
向とし、第8図に示す主コイル(3)と大極シムコイル
(20)の平衡軌道(4)上での2次成分のθに関する
S方向分布をそれぞれ第9図(a)および(b)に示し
す。この図の例では、θ=0°において主コイル(3)
と大極シムコイル(20)の2次成分が同じになるよう
、大極シムコイル(20)の電流値を決めた。第9図(
a)に示すように、主コイル(3)の2次成分は、θ=
0゜からθ=01の範囲ではほぼ一定の値をもつが、θ
=θ1〜90°の範囲では主コイル端部((27)の作
る磁界が、第8図に示すθ・0°〜θ、の範囲の主コイ
ル(3)の作る磁界と異るため、1次成分は一定でなく
なる。第9図(a)に示す例ではθ=θ、〜90°の間
に大きな負の2次成分をもつ。East Figure 8 is a diagram in which the large shim coil (20) is incorporated into the main coil (3). By the way, assuming that the beam traveling direction is the S direction, the S direction distribution regarding θ of the second-order component on the balanced trajectory (4) of the main coil (3) and the large shim coil (20) shown in FIG. This is shown in Figures (a) and (b). In the example in this figure, at θ=0°, the main coil (3)
The current value of the large-pole shim coil (20) was determined so that the secondary components of the large-pole shim coil (20) were the same. Figure 9 (
As shown in a), the secondary component of the main coil (3) is θ=
It has a nearly constant value in the range from 0° to θ=01, but θ
Since the magnetic field created by the main coil end ((27) in the range of = θ1 to 90° is different from the magnetic field created by the main coil (3) in the range of θ・0° to θ shown in Figure 8, 1 The second-order component is no longer constant. In the example shown in FIG. 9(a), there is a large negative second-order component between θ=θ and 90°.
これは次のように考えることができる。第10図Ca”
)はθ=O’ y=oでのy方向磁界B)rのX方向
分布である。磁界分布は、外側コイル巻線(28)と内
側コイル巻線(29)の間隔等によって異なるが、外側
コイル巻線(28)と内側コイル巻線(29)が互いに
比較的離れている場合の例を示す。X=0からXが増加
するにつれ外側コ・イル巻線に近づき磁界は増加するが
、さらにXが増加し外側コイル巻線下(すなりちa−b
間)の位置XIに来ると、x、”wa間の巻線が反対方
向の磁界を作るため、磁界は減少する。さらに、Xがb
よりも太き、ツー
くなると磁界の値は負になる。以上より、第10図(a
)の例では、X=O付近の2次成分に正の値をもつ。一
方、第10図(b)はθ=90゜y=oのBy磁界分布
を示し、x=Q近傍でほぼ最大磁界であるが、Xが大き
くなると0とX間の巻線に流れる電流のうちy方何の電
流成分が反対方向の磁界を作るため、磁界は減少する。This can be thought of as follows. Figure 10 Ca”
) is the X-direction distribution of the y-direction magnetic field B) r at θ=O' y=o. The magnetic field distribution varies depending on the distance between the outer coil winding (28) and the inner coil winding (29), etc., but when the outer coil winding (28) and the inner coil winding (29) are relatively far from each other, Give an example. As X increases from X = 0, the magnetic field approaches the outer coil winding and increases;
At position XI between x and wa, the magnetic field decreases because the windings between x and wa create a magnetic field in the opposite direction.
If it becomes thicker than , the value of the magnetic field becomes negative. From the above, Figure 10 (a
), the second-order component near X=O has a positive value. On the other hand, Fig. 10(b) shows the By magnetic field distribution at θ = 90° y = o, and the magnetic field is almost at its maximum near x = Q, but as X increases, the current flowing in the winding between 0 and Since the current component in the y direction creates a magnetic field in the opposite direction, the magnetic field decreases.
さらに、0点を越えるとBy磁界は負になる。X=Oと
b点の距離に比べ、x=Oと6点の距離は短かく、第1
0図(b)に示すように、小さなXで負になる。つまり
、第10図(b)に示すように、X=0で大きな負の2
次成分を持つ。Furthermore, when the value exceeds the 0 point, the By magnetic field becomes negative. Compared to the distance between X=O and point b, the distance between x=O and point 6 is shorter, and the first
As shown in Figure 0 (b), it becomes negative with a small X. In other words, as shown in Figure 10(b), when X=0, a large negative 2
It has the following components.
また、第9図(b)は大極シムコイル(20)の2吹成
分を示し、θ=0°〜θ1の範囲では2次成分はほぼ一
定であるが、θ=01を越えると2次成分は減少し始め
、θ=90°付近ではシムコイルが存在しないため、2
次成分はほぼ零になる。In addition, Fig. 9(b) shows the two-stroke component of the large pole shim coil (20), and the second-order component is almost constant in the range of θ=0° to θ1, but when θ=0° is exceeded, the second-order component starts to decrease, and since there is no shim coil near θ = 90°, 2
The next component becomes almost zero.
ただし、シムコイルの巻線が主コイル同様反対方間の磁
界を作るため、第9図(b)に示すように、わずかの負
の成分をもつ。以上のことから、θ=0°における2次
成分を打ち消すように大極シムコイル(20)の電流値
を決定すると、主コイル端部であるθ=90°付近に大
きな負の誤差2次成分を生じることになる。However, since the winding of the shim coil creates a magnetic field between opposite directions like the main coil, it has a slight negative component as shown in FIG. 9(b). From the above, if the current value of the large pole shim coil (20) is determined so as to cancel the second-order component at θ=0°, a large negative error second-order component will be generated near the end of the main coil, θ=90°. will occur.
[発明が解決しようとする課題]
従来の荷電粒子装置用偏向電磁石は以上のように構成さ
れているので、主コイル端部に大きな誤差磁界成分が発
生するという問題点があった。[Problems to be Solved by the Invention] Since the conventional bending electromagnet for a charged particle device is configured as described above, there is a problem in that a large error magnetic field component is generated at the end of the main coil.
この発明は上記のような問題点を解消するためになされ
たもので、主コイル端部に均一な磁界分布を発生できる
荷電粒子装置用偏向電磁石を得ることを目的とする。This invention was made to solve the above-mentioned problems, and an object thereof is to obtain a deflecting electromagnet for a charged particle device that can generate a uniform magnetic field distribution at the end of a main coil.
[課題を解決するための手段]
この発明に係る荷電粒子装置用偏向電磁石は、主コイル
巻線端部、特に、平衡軌道直上近傍を広げ、ビーム進行
方同(S方向」に対し垂直に直線部が設けられている。[Means for Solving the Problems] The bending electromagnet for a charged particle device according to the present invention widens the main coil winding end, especially the vicinity directly above the equilibrium trajectory, and forms a straight line perpendicular to the beam traveling direction (S direction). A section has been established.
[作 用]
この発明においては、主コイル端部の直線部がX方向に
均一な磁界を作′る。[Function] In this invention, the straight portion at the end of the main coil creates a uniform magnetic field in the X direction.
[実施例]
以下、この発明の一実施例を図について説明する。第1
図において、(28)は外側主コイル巻線、(29)は
内側主コイル巻線、(30)は外側主コイル巻線外半径
R,よりも外側につき出た外側主コイル端部巻線、(3
1)は内側17441巻線内半径R3よ以上の構成によ
り、θ=90“付近にX方向に対し均一なy方向磁界を
発生するには、第2図に示すように、θ=90°、X軸
に平行で無限大な巻線であれば良い。つまりθ=90°
、X軸に平行になるべく長い直線部を設けることが有効
である。主コイル巻線端部になるべく長い直線部を設け
るには、第1図に示すように、内側主フィル端部巻線(
31)を内側主コイル巻線内半径R,よりも内側につき
出し、外側主コイル端部巻線(30)を外側主コイル外
半径R3よりも外側につま出せば良い。[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
In the figure, (28) is the outer main coil winding, (29) is the inner main coil winding, (30) is the outer main coil end winding that protrudes outward from the outer main coil winding outer radius R, (3
1) The inner radius of the 17441 winding is R3.With the above configuration, in order to generate a uniform y-direction magnetic field with respect to the X-direction near θ=90", as shown in FIG. It suffices if the winding is infinite and parallel to the X axis. In other words, θ = 90°
, it is effective to provide as long a straight line section as possible parallel to the X axis. In order to provide a straight section as long as possible at the end of the main coil winding, as shown in Figure 1, the inner main fill end winding (
31) to the inside of the inner main coil winding inner radius R, and the outer main coil end winding (30) to the outside of the outer main coil outer radius R3.
なお、上記実施例ではコイル巻線についてt旨定しなか
ったが、HiTc線材でフィル巻線を作れば、チッ素温
度で容易に強力な磁界を発生することができる。Although the coil winding was not specified in the above embodiment, if the fill winding is made of HiTc wire, a strong magnetic field can be easily generated at the nitrogen temperature.
[発明の効果]
以上のように、この発明によれば、主コイル端部を広げ
、端部に直線部を設けたので、主コイル端部の磁界均一
度が改善される効果がある。[Effects of the Invention] As described above, according to the present invention, since the main coil end is widened and a straight portion is provided at the end, the magnetic field uniformity at the main coil end is improved.
第1図はこの発明の一実施例の要部概略平面図、第2図
は第1図のもののX軸に平行な無限長巻線の縦断面図、
第3図〜第10図は従来の技術に関し、第3図は荷電粒
子装置の概略平面図、第4図〜第6図は主コイルのそれ
ぞれ斜視図、平面図および正面図、第7図は主コイルと
シムコイルの分解して示した斜視図、第8図は同じく組
立平面図、第9図、第10図は磁界分布特性線図である
。
(3)・・主コイル、(4)・・平衡軌道、(2g)、
(29)・・外側および内側主コイル巻線、(30)
、 (31) ・・外側および内側主コイル巻i端部
、(32)・・直線形状コイル巻線、R,・・外側主コ
イル巻線外半径、R,・・内側主コイル巻線内半径。
なお、各図中、同一符号は同一または相当部分を示す。FIG. 1 is a schematic plan view of a main part of an embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of an infinite length winding parallel to the X axis of FIG. 1,
3 to 10 relate to the conventional technology, FIG. 3 is a schematic plan view of a charged particle device, FIGS. 4 to 6 are perspective views, plan views, and front views of the main coil, respectively, and FIG. 7 is a schematic plan view of a charged particle device. FIG. 8 is an exploded perspective view of the main coil and shim coil, FIG. 8 is an assembled plan view, and FIGS. 9 and 10 are magnetic field distribution characteristic diagrams. (3) Main coil, (4) Balanced orbit, (2g),
(29)...Outer and inner main coil windings, (30)
, (31) ... i end of outer and inner main coil winding, (32) ... linear coil winding, R, ... outer radius of outer main coil winding, R, ... inner radius of inner main coil winding . In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
いに反対方向の電流が流れるようにループを形成し、か
つ、前記平衡軌道をはさんで配置された1対の主コイル
を備えた荷電粒子装置用偏向電磁石において、外側主コ
イル巻線外半径よりも外側に外側主コイル端部巻線をつ
きだすとともに、内側主コイル巻線内半径よりも内側に
内側主コイル端部巻線をつきだすことにより主コイル巻
線端部を広げ、さらに前記外側主コイル端部巻線と前記
内側主コイル端部巻線とを前記平衡軌道にほぼ垂直な直
線形状のコイル巻線で結んでなることを特徴とする荷電
粒子装置用偏向電磁石。A charged particle comprising a pair of main coils that form a loop so that currents in opposite directions flow inside and outside along a balanced trajectory around which the charged particle circulates, and that are placed across the balanced trajectory. In a bending electromagnet for equipment, the end winding of the outer main coil projects outward from the outer radius of the outer main coil winding, and the end winding of the inner main coil projects outward from the inner radius of the inner main coil winding. By this, the main coil winding end is widened, and the outer main coil end winding and the inner main coil end winding are connected by a linear coil winding substantially perpendicular to the balanced trajectory. Features of a bending electromagnet for charged particle devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1970089A JPH02201900A (en) | 1989-01-31 | 1989-01-31 | Deflecting electromagnet for charged particle apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1970089A JPH02201900A (en) | 1989-01-31 | 1989-01-31 | Deflecting electromagnet for charged particle apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02201900A true JPH02201900A (en) | 1990-08-10 |
Family
ID=12006544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1970089A Pending JPH02201900A (en) | 1989-01-31 | 1989-01-31 | Deflecting electromagnet for charged particle apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02201900A (en) |
-
1989
- 1989-01-31 JP JP1970089A patent/JPH02201900A/en active Pending
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