JPH0220322U - - Google Patents
Info
- Publication number
- JPH0220322U JPH0220322U JP1988097284U JP9728488U JPH0220322U JP H0220322 U JPH0220322 U JP H0220322U JP 1988097284 U JP1988097284 U JP 1988097284U JP 9728488 U JP9728488 U JP 9728488U JP H0220322 U JPH0220322 U JP H0220322U
- Authority
- JP
- Japan
- Prior art keywords
- setting section
- mask setting
- light source
- optical system
- wafer chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988097284U JPH0220322U (sr) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988097284U JPH0220322U (sr) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220322U true JPH0220322U (sr) | 1990-02-09 |
Family
ID=31322613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988097284U Pending JPH0220322U (sr) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220322U (sr) |
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1988
- 1988-07-25 JP JP1988097284U patent/JPH0220322U/ja active Pending