JPH0220332U - - Google Patents
Info
- Publication number
- JPH0220332U JPH0220332U JP9815088U JP9815088U JPH0220332U JP H0220332 U JPH0220332 U JP H0220332U JP 9815088 U JP9815088 U JP 9815088U JP 9815088 U JP9815088 U JP 9815088U JP H0220332 U JPH0220332 U JP H0220332U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- transport arm
- holder
- mount stage
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Die Bonding (AREA)
Description
第1図は本考案の実施例1を示す構成図、第2
図は本考案の搬送アーム先端部を示す正面図、第
3図は本考案の実施例2を示す正面図、第4図は
従来のペレツトマウンタを示す構成図である。
1……ペレツト、2……リング、3……搬送ア
ーム、4……ペレツト吸着位置、5……コレツト
、6……ペレツトマウントステージ、7……リー
ドフレーム、8……回転駆動源、9……駆動源、
10……XYテーブル、11……カメラ、12…
…画像処理装置。
Figure 1 is a configuration diagram showing the first embodiment of the present invention;
3 is a front view showing the tip of the conveying arm of the present invention, FIG. 3 is a front view showing Embodiment 2 of the present invention, and FIG. 4 is a configuration diagram showing a conventional pellet mounter. DESCRIPTION OF SYMBOLS 1... Pellet, 2... Ring, 3... Transfer arm, 4... Pellet adsorption position, 5... Collet, 6... Pellet mount stage, 7... Lead frame, 8... Rotation drive source, 9 ...drive source,
10...XY table, 11...camera, 12...
...Image processing device.
Claims (1)
ト相互間を引き離して該ペレツトを下向きに保持
するペレツト保持部と、該ペレツト保持部の下方
位置に設置したペレツトマウントステージと、水
平軸を中心としてその径方向に複数のペレツト吸
着用コレツトを放射状に配列した搬送アームと、
該搬送アームを水平軸のまわりに角回転させ、か
つペレツト保持部とペレツトマウントステージの
間に上下動させる搬送手段とを有することを特徴
とする半導体組立装置。 A pellet holder that holds the pellets downward by separating the individual pellets attached to the tape, a pellet mount stage installed below the pellet holder, and A transport arm with a plurality of pellet adsorption collects arranged radially in the radial direction,
1. A semiconductor assembly apparatus comprising a transport means for rotating the transport arm angularly about a horizontal axis and moving the transport arm up and down between a pellet holding section and a pellet mount stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815088U JPH0220332U (en) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815088U JPH0220332U (en) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220332U true JPH0220332U (en) | 1990-02-09 |
Family
ID=31324156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815088U Pending JPH0220332U (en) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220332U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006319281A (en) * | 2005-05-16 | 2006-11-24 | Sony Corp | Arm driving mechanism and mounting apparatus, and arm driving method and mounting method |
-
1988
- 1988-07-25 JP JP9815088U patent/JPH0220332U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006319281A (en) * | 2005-05-16 | 2006-11-24 | Sony Corp | Arm driving mechanism and mounting apparatus, and arm driving method and mounting method |
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